• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1-5
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• 2005

The grinding process is replacing lapping and etching process because significant cost savings and performance improvemnets is possible. This paper presents the experimental results of wafer grinding. A three-variable two-level full factorial design was employed to reveal the main effects as well as the interaction effects of three process parameters such as wheel rotational speed, chuck table rotational speed and feed rate on TTV and STIR of wafers. The chuck table rotaional speed was a significant factor and the interaction effects was significant. The ground wafer shape was affected by surface shape of chuck table.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.9 no.2
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• pp.26-32
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• 2010

This paper reports some experimental result in grinding and polishing of silicon cathodes used in semiconductor manufacturing process. Cup shape diamond core wheels were used in experiments and the radial and tangential grinding forces were measured with surface roughness. In polishing experiments, flat type and donut type wool polishing tools were tested. The experimental results indicate that the grinding forces are proportional to the material removal rates and the surface roughness are inversely proportional to the spindle speed. The surface roughness of polished Si decreases with polishing time and higher spindle speed.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.5
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• pp.128-136
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• 1998

A mathematical model for investigating the form generation mechanism in the centerless infeed grinding process is described. For 3-D modeling of form generation, contact points are assumed to be on least squares contact lines at the grinding wheel, regulating wheel, and work-rest blade. Using force and deflection analysis, the validity of this assumption is shown. Based on the 2-D simulation model developed in the previous work and the least squares contact line assumption, a 3-D model is presented. To validate this model, simulation results were compared with the experimental works. The experiments and computer simulations were carried out using three types of cylindrical workpiece shapes with varying flat length. The experimental results agree well with the simulation. It can be seen that the effect of flat end propagated to the opposite end through workpiece reorientation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.125-130
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• 1994

Recently,manufacturing work been transformed to small acale production from with various items to act up to user's expectation from mass production with a little items required in the past. The FMS using NC type mother machinaries has been applied actively also in domestic manufacturing line to meet thus tendancy, but there are many machining troubles occured in work process not be settled yet. Nowdays high efficiency has been required no less than high precision in grinding work for the improvement of productivity. In this study, to represent more advanced FMS can be adapted to thus situation In-process type monitoring method using AE and Current sensors is suggested to investigatethe machining condition in grinding process. As results from this experimental study, is is recoqnized well that grinding conditions and dressing point of in time can be estimated effectively using monitoring method suggested. Furthermore, surface shape of grinding wheel on voluntary point of in time can be predicted indirectly through the observation and comparison of AE signal waveform obtained as performance of continuous dressing work.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.3
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• pp.394-400
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• 2012

Due to the increasing demand for carious methodologies, the quality improvement of products were introduced. A brush, the most frequently used type of grinding process, is one of the deburring. In order to produce consistent burr shape, various machining conditions have been combined and applied to disk grinding process. By tool dynamometer, acoustic emission sensor and acceleration sensor depend on changes in processing conditions(depth of engagement, cutting speed, workpiece position, workpiece orientation, cutting time) signals were obtained for brush deburring grinding system. Root mean square obtained by processing the signal processing conditions by analyzing the characteristics of deburring is to derive the optimum conditions.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.3
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• pp.414-418
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• 2010

Due to the increasing demand for carious methodologies to improve the quality of products were introduced. A Brush the most frequently used type of grinding process is one of the deburring. in order to produce consistent burr shape, various machining conditions have been combined and applied to disk grinding process. Between the workpiece and the grinding disc to earn depends on the angle of the slope has been observed. Drastic increase of tool wear has been also observed along the inclination angle variation. Various burr shapes have been captured and analyzed using image processing technique.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.11
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• pp.233-243
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• 1998

The demand of high speed machining is increasing due to the high speed cutting and grinding provides high efficiency of process, short process time, improved metal removal capacity and better surface finish. Active magnetic bearings allow much high surface speed than conventional ball bearings and therefore greatly suitable for high speed cutting or grinding. This paper describes a design process of an active magnetic bearing system for a high speed grinding spindle with power 5.5kW and maximum speed 60,000rpm. Magnetic actuators are designed by the magnetic circuit theory considering static load condition, and examined with FEM analysis. Dynamic characteristics are also considered, such as bandwidth, stiffness, natural frequency and static deflection. System characteristics are simulated with a rigid rotor model.

• Journal of Astronomy and Space Sciences
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• v.22 no.1
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• pp.13-20
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• 2005

Bound abrasive grinding is used for the initial fabrication phase of the precision aspheric mirrors for both space and ground based astronomical telescopes. We developed a new grinding optimization process that determines the input grinding variables for the target surface roughness, checks the grinding error magnitude in resulting surface roughnesses, and minimizes the required machining time. Using the machining data collected from the previous grinding runs and subsequently fed into the multivariable regression engine, the process has the evolving controllability that suggests the optimum set of grinding variables for each target surface roughness. The process model was then used for ten grinding experiments that resulted in the grinding accuracy of $=-0.906{\pm}3.38(\sigma)\;nm(Ra)$ for the target surface roughnesses of Zerodur substrate ranging from 96.1 nm (Ra) to 65.0 nm (Ra) The results imply that the quantitative process optimization technique developed in this study minimizes the machining time and offers the nanometric surface roughness controllability superior to the traditional, qualitative, craftsman based grinding process for the astronomical optical surfaces.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.9
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• pp.1531-1540
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• 1997

Mordern industrial society pursues unmanned system and automation of manufacturing process. Abreast with this tendensy, production of goods which requires advanced accuracy is increasing as well. According to this, the work sensing time of dressing by monitoring and diagnosing the condition of grinding, which is th representative way in accurate manufacturing, is an important work to prevent serious damages which affect grinding process or products by wearing grinding wheel. Computer vision system was composed, so that grinding wheel surface was acquired by CCD camera and the change of cutting edge ratio was measured. Then we used automatic thresholding technique from histogram as a way of dividing grinding cutting edge from grinding surface. As a result, we are trying to approach unmanned system and automation by deciding more accurate time of dressing and by visualizing behavior of grinding wheel by making use of computer vision.

• Bulletin of the Korean Space Science Society
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• 2003.10a
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• pp.26-26
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• 2003

During fabrication process for the large space optical surfaces, the traditional bound abrasive grinding with bronze bond cupped diamond wheel tools leaves the machine marks and the subsurface damage to be removed by subsequent loose abrasive lapping. We explored a new grinding technique for efficient quantitative control of precision CNC grinding for space optics materials such as Zerodur. The facility used is a NANOFORM-600 diamond turning machine with a custom grinding module and a range of resin bond diamond tools. The machining parameters such as grit number, tool rotation speed, work-piece rotation speed, depth of cut and feed rate were altered while grinding the work-piece surfaces of 20-100 mm in diameter. The input grinding variables and the resulting surface quality data were used to build grinding prediction models using empirical and multi-variable regression analysis methods. The effectiveness of the grinding prediction model was then examined by running a series of precision CNC grinding operation with a set of controlled input variables and predicted output surface quality indicators. The experiment details, the results and implications are presented.