• 제목/요약/키워드: getter alloy

검색결과 12건 처리시간 0.016초

Laser Ablation법에 의한 ZrVFe 합금 나노분말 제조 (Preparation of ZrVFe Nano Powders by Laser Ablation)

  • 길대섭;서용재;장희동;이재천;송창빈;김원백
    • 한국재료학회지
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    • 제15권4호
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    • pp.257-262
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    • 2005
  • Nano-sized ZrVFe alloy powders were prepared by the ablation of powder compact in alcobol using a Nd-YAG pulsed Laser. The $Zr_{57}V_{35.}8Fe_{7.2}$ alloy commercially designated as ST707 has long been known as the ideal solution for various vacuum applications. The target for the ablation was sintered pellets of $Zr_{57}V_{35.}8Fe_{7.2}$ alloy powder. The alloy was prepared by arc melting and Hydride-DeHydride method. The ablated powders were mostly circular having fairly large size distribution smaller than 200 nm in all cases. The X-ray diffraction study revealed that the ablated alloy retained the crystal structure of the target alloy. Nevertheless, Fe and V contents in the ablated powder were lower than those in the target alloy. This was believed to result from the high vapour pressures of Fe and V compared to that of Zr. The size of the powders ablated at high energy fluence tends to decrease due at least partly to the breakdown of previously made ones.

$10^{-9}$ Pa대 용기를 위한 NEG 펌프 제작 및 진공성능 조사 (Fabrication and Vacuum Performance Test of the NEG Pump for $10^{-9}$ Pa Chamber)

  • 박미영;인상렬
    • 한국진공학회지
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    • 제10권3호
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    • pp.312-320
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    • 2001
  • $10^{-9}$ Pa 대의 진공을 얻기 위한 주 배기 펌프로서 Zr-V-Fe 합금계의 비증발성 게터 펌프를 제작하고, 실온에서 수소, 중수소 및 일산화탄소에 대한 NEG 펌프의 배기 속도를 측정하였으며 $450^{\circ}C$로 활성화하면서 수소 방출 특성을 조사하였다. 그리고 터보 분자펌프, 스퍼터 이온펌프 및 크라이오 펌프 등 다른 초고진공 펌프들로 배기하면서 용기 내의 잔류기체를 분석함으로써 이들 펌프 및 NEG 펌프의 배기 성능을 비교하였다.

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