• Korean Journal of Materials Research
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• v.15 no.4
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• pp.257-262
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• 2005

Nano-sized ZrVFe alloy powders were prepared by the ablation of powder compact in alcobol using a Nd-YAG pulsed Laser. The $Zr_{57}V_{35.}8Fe_{7.2}$ alloy commercially designated as ST707 has long been known as the ideal solution for various vacuum applications. The target for the ablation was sintered pellets of $Zr_{57}V_{35.}8Fe_{7.2}$ alloy powder. The alloy was prepared by arc melting and Hydride-DeHydride method. The ablated powders were mostly circular having fairly large size distribution smaller than 200 nm in all cases. The X-ray diffraction study revealed that the ablated alloy retained the crystal structure of the target alloy. Nevertheless, Fe and V contents in the ablated powder were lower than those in the target alloy. This was believed to result from the high vapour pressures of Fe and V compared to that of Zr. The size of the powders ablated at high energy fluence tends to decrease due at least partly to the breakdown of previously made ones.

• Journal of the Korean Vacuum Society
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• v.10 no.3
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• pp.312-320
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• 2001

A Non-Evaporable Getter(NEG) pump was fabricated using Zr-V-Fe alloy modules to obtain $10^{-9}$ Pa range pressures. Pumping performances and activation characteristics were investigated and the pumping speeds for hydrogen, deuterium and carbon monoxide gases of the NEG pump were measured. And hydrogen desorption characteristics were examined during activation at $450^{\circ}C$. Futhermore the vacuum performance was compared with those of other high vacuum pumps as turbo-molecular pump, sputter-ion pump, and cryo pump by analyzing the residual gases of the system.