• The Transactions of the Korean Institute of Electrical Engineers
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• v.45 no.1
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• pp.113-122
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• 1996

As integrity of semiconductor device is increased, accurate and efficient modeling and recipe generation of semiconductor fabrication procsses are necessary. Among the major semiconductor manufacturing processes, dry etc- hing process using gas plasma and accelerated ion is widely used. The process involves a variety of the chemical and physical effects of gas and accelerated ions. Despite the increased popularity, the complex internal characteristics made efficient modeling difficult. Because of difficulty to determine the control input for the desired output, the recipe generation depends largely on experiences of the experts with several trial and error presently. In this paper, the optimal control of the etching is carried out in the following two phases. First, the optimal neural network models for etching process are developed with genetic algorithm utilizing the input and output data obtained by experiments. In the second phase, search for optimal control inputs in performed by means of using the optimal neural network developed together with genetic algorithm. The results of study indicate that the predictive capabilities of the neural network models are superior to that of the statistical models which have been widely utilized in the semiconductor factory lines. Search for optimal control inputs using genetic algorithm is proved to be efficient by experiments. (author). refs., figs., tabs.

• Journal of Welding and Joining
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• v.24 no.5
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• pp.67-73
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• 2006

Laser welding is suitable for welding to the aluminum alloy sheet. In order to apply the aluminum laser welding to production line, parameters should be optimized. In this study, the optimal welding condition was searched through the genetic algorithm in laser welding of AA5182 sheet with AA5356 filler wire. Second-order polynomial regression model to estimate the tensile strength model was developed using the laser power, welding speed and wire feed rate. Fitness function for showing the performance index was defined using the tensile strength, wire feed rate and welding speed which represent the weldability, product cost and productivity, respectively. The genetic algorithm searched the optimal welding condition that the wire feed rate was 2.7 m/min, the laser power was 4 kW and the welding speed was 7.95 m/min. At this welding condition, fitness function value was 137.1 and the estimated tensile strength was 282.2 $N/mm^2$.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.53 no.4
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• pp.265-276
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• 2004

Genetic Algorithm(GA), that is shown stable performance to find an optimal solution, has been used as a method of solving large-scaled optimization problems with complex constraints in various applications. Since it takes so much time to execute a long computation process for iterative evolution and adaptation. In this paper, a hardware-based adaptive GA was proposed to reduce the serious computation time of the evolutionary process and to improve the accuracy of convergence to optimal solution. The proposed GA, based on steady-state model among continuos generation model, performs an adaptive mutation process with consideration of the evolution flow and the population diversity. The drawback of the GA, premature convergence, was solved by the proposed adaptation. The Performance improvement of convergence accuracy for some kinds of problem and condition reached to 5-100% with equivalent convergence speed to high-speed algorithm. The proposed adaptive GAP(Genetic Algorithm Processor) was implemented on FPGA device Xilinx XCV2000E of EHW board for face recognition.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 1997.11a
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• pp.267-270
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• 1997

In this paper, we proposed an optimazation method using Genetic Algorithm for nonlinear system modeling. Fuzzy Neural Network(FNNs) was used as basic model of nonlinear system. FNNs was fused of Fuzzy Inference which has linguistic property and Neural Network which has learning ability and high tolerence level. This paper, We used FNNs which was proposed by Yamakawa. The FNNs was composed Simple Inference and Error Back Propagation Algorithm. To obtain optimal model, parameter of membership function, learning rate and momentum coefficient of FNNs are tuned using genetic algorithm. And we used simplex algorithm additionaly to overcome limit of genetic algorithm. For the purpose of evaluation of proposed method, we applied proposed method to traffic choice process and waste water treatment process, and then obtained more precise model than other previous optimization methods and objective model.

• IE interfaces
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• v.20 no.1
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• pp.33-40
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• 2007

In this paper, we consider a scheduling problem of shipyard sub-assembly process. We introduce a skid conveyor system in a shipbuilding company. We develop a mathematical model and a genetic algorithm for shipyard sub-assembly process. The objective of the scheduling is to minimize the makespan which is the final completion time of all jobs. Numerical experiments show that the genetic algorithm performs efficiently.

• Journal of Korean Society of Steel Construction
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• v.13 no.5
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• pp.577-586
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• 2001

The objective of this study is the development of sizing and system shape discrete optime design algorithm which is based on the genetic algorithms (GAs). The algorithm can perform both size and shape optimum designs of space trusses. The developed algorithm was implemented in a computer program. The algorithm is known to be very efficient for the discrete optimization The genetic process selects the next design points based on the survivability of the current design points The evolutionary process evaluates the survivability of the design points selected from the genetic process in the genetic process of the simple genetic algorithms there are three basic operators : reproduction cross-over and mutation operators. The efficiency and validity of the developed discrete optimum design algorithm was verified by applying the algorithm to optimum design examples.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.3
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• pp.241-245
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• 2001

In this paper, we present parameter optimization technique for GaAs/AlGaAs multiple quantum well avalanche photodiodes used for image capture mechanism in high-definition system. Even under flawless environment in semiconductor manufacturing process, random variation in process parameters can bring the fluctuation to device performance. The precise modeling for this variation is thus required for accurate prediction of device performance. The precise modeling for this variation is thus required for accurate prediction of device performance. This paper will first use experimental design and neural networks to model the nonlinear relationship between device process parameters and device performance parameters. The derived model was then put into genetic algorithms to acquire optimized device process parameters. From the optimized technique, we can predict device performance before high-volume manufacturign, and also increase production efficiency.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.11
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• pp.82-91
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• 1996

In this study, we put our object to carry out adaptive modeling of cutting process in turning system, and to find out the optimal cutting conditions to maximize material removal rate under some constraints. We used a back-propagation neural network to model the cutting process adaptively and a genetic algorithm to find out optimal cutting conditions. The experimental results show that a back-propagation neural network could model the cutting process effciently, and optimized cutting conditions for maximizing the material removal rate were obtained through the adaptive process model and genetic algorithms. Therefore, the proposed approach can be applied to the real machining system.

• Journal of Institute of Control, Robotics and Systems
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• v.5 no.7
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• pp.876-882
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• 1999

It is difficult to determine the feeding rate of coagulant in the water treatment process, due to nonlinearity, multivariables and slow response characteristics, etc. To deal with this difficulty, the genetic-fuzzy system was used in determining the feeding rate of the coagulant. The genetic algorithms are excellently robust in complex optimization problems. Since it uses randomized operators and searches for the best chromosome without auxiliary informations from a population consists of codings of parameter set. To apply this algorithms, we made the lookup table and membership function from the actual operation data of the water treatment process. We determined optimum dosages of coagulant(LAS) by the fuzzy operation, and compared it with the feeding rate of the actual operation data.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.03a
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• pp.469-475
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• 2008

The design of a scramjet inlet is a process to search global optimization results among those factors influencing the geometry of scramjet in their ranges for some requirements. An optimization algorithm of hybrid genetic algorithm based on genetic algorithm and simplex algorithm was established for this purpose. With the sample provided by a uniform method, the compressive angles which also are wedge angles of the inlet were chosen as the inlet design variables, and the drag coefficient, total pressure recovery coefficient, pressure rising ratio and the combination of these three variables are designed specifically as different optimization objects. The contrasts of these four optimization results show that the hybrid genetic algorithm developed in this paper can capably implement the optimization process effectively for the inlet design and demonstrate some good adaptability.