• Title/Summary/Keyword: gas-assisted

Search Result 298, Processing Time 0.047 seconds

Current, flow rate and pressure effects in a Gas-Jet-assisted Glow Discharge source (Gas-Jet-assisted Glow Discharge에서 전류, 가스 흐름 속도, 압력에 따른 영향 연구)

  • Lee, Gaeho;Kim, Dongsoo;Kim, Eunhee;Kang, Seongshik;Park, Minchun;Song, Haeran;Kim, Hasuck;Kim, Hyojin
    • Analytical Science and Technology
    • /
    • v.7 no.4
    • /
    • pp.483-492
    • /
    • 1994
  • Direct solid analysis of various kinds of metal samples has been conducted by glow discharge. In this laboratory, the gas-jet assisted glow discharge(GJGD) device has been developed and characterized. The effect of changes in applied current, cell pressure and flow rate on atomic emission signals obtained from a jet-assisted cathodic sputtering was investigate. The emission intensities of Cu, Zn, and Ar were measured. They were increased with the current. But the intensities were decreased by increasing the flow rate of argon due to the diffusion and transportation of particles into plasma. By increasing the pressure of the cell, the intensities were greatly decreased because of enhancement of redeposition onto the surface of the sample.

  • PDF

Preparation Method of Plan-View Transmission Electron Microscopy Specimen of the Cu Thin-Film Layer on Silicon Substrate Using the Focused Ion Beam with Gas-Assisted Etch

  • Kim, Ji-Soo;Nam, Sang-Yeol;Choi, Young-Hwan;Park, Ju-Cheol
    • Applied Microscopy
    • /
    • v.45 no.4
    • /
    • pp.195-198
    • /
    • 2015
  • Gas-assisted etching (GAE) with focused ion beam (FIB) was applied to prepare plan-view specimens of Cu thin-layer on a silicon substrate for transmission electron microscopy (TEM). GAE using $XeF_2$ gas selectively etched the silicon substrate without volume loss of the Cu thin-layer. The plan-view specimen of the Cu thin film prepared by FIB milling with GAE was observed by scanning electron microscopy and $C_S$-corrected high-resolution TEM to estimate the size and microstructure of the TEM specimen. The GAE with FIB technique overcame various artifacts of conventional FIB milling technique such as bending, shrinking and non-uniform thickness of the TEM specimens. The Cu thin film was uniform in thickness and relatively larger in size despite of the thickness of <200 nm.

A Case Study on Development of Automotive Interior Parts using Gas Assisted Injection Molding Process (가스사출성형을 이용한 자동차 내장부품 개발 사례에 관한 연구)

  • Kim H. S.;Lee D. K.
    • Transactions of Materials Processing
    • /
    • v.14 no.5 s.77
    • /
    • pp.452-459
    • /
    • 2005
  • Gas assisted injection molding (GAIM) is an innovative low-pressure injection molding technique that can provide numerous benefits such as reduced part warpage, excellent surface quality without sink marks, low injection pressure and greater design flexibility. However, adoptions of GAIM may cause unexpected defects since it requires many subtle design factors such as resin shot size, delay time and gas injection pressure, which wouldn't be considered in conventional injection molding process. Therefore, experiences applying GAIM should be collected and examined in order to establish design rules of the new technique. The purpose of this paper is to summarize developing cases of three automotive interior parts such as instrument panel, map pocket folding and center facia side panel so that possibilities and limitations of GAIM were examined. As a result, it is necessary to consider characteristics of GAIM at the initial stage of part design in order to obtain various advantages of the GAIM process without occurring severe defects, which would increase time and cost required to the part development.

A Study on Gas-Assisted Plastic Injection Mould of Flat TV Front Cover (Flat TV Front Cover Gas 사출 금형에 대한 연구)

  • 문영대
    • Proceedings of the Korean Society for Technology of Plasticity Conference
    • /
    • 2003.10a
    • /
    • pp.201-206
    • /
    • 2003
  • Plastic injection mould have two kinds of trouble, one is in mould another in injection parts. Most of defects of the former take the cause in a design like in structure and working, the later weld line, transforming, sink mark, burning, flow mark, scratching, shading, black hole and so on. Most of problems of the later is difficult for making a clear definitely the reason of defects because of complexible. The purpose of this paper is to improve the quality of plastic injection mould and parts with inquiring the counter plan and rouble of the part of Flat TV Front Cover by flow control method and gas- assisted injection moulding. For minimizing defects from injection moulding parts, this paper was investigated with using computer aided injection mold filling simulations. Based on these numerical results, I established guidelines mould design and injection processing condition. As a results I got the improve of quality, minimizing surface defects moulded parts and troubles in mould.

  • PDF

Fabrication of Micro Carbon Structures and Patterns with Laser-assisted Chemical Vapor Deposition (레이저 국소증착을 통한 미세 탄소구조물 및 패턴 제조)

  • 정성호;김진범;이선규;이종현
    • Proceedings of the Korean Society of Precision Engineering Conference
    • /
    • 2002.05a
    • /
    • pp.914-917
    • /
    • 2002
  • Fabrication of micro carbon structures and patterns using laser-assisted chemical vapor deposition is studied. Argon ion laser and ethylene were used to grow micro carbon rod through pyrolytic decomposition of the reaction gas. The influence of reaction gas pressure and incident laser power on the diameter and growth rate of the micro carbon rod was experimentally investigated. The diameter of micro carbon rods increases linearly with respect to the laser power but is almost independent of the reaction gas pressure. Growth rate of the rod changes little with gas pressure when the laser power remains below 1W. When the carbon rod was grown at near threshold laser power, a very smooth surface is obtained on the rod. By continuously moving the focusing lens in the direction of growth, a micro carbon rod with a diameter of 28 ${\mu}{\textrm}{m}$ and aspect ratio of 100 was fabricated.

  • PDF

Characteristics on Boundary Layer and Formation Mechanism of c-BN Thin Films During Electron Assisted Hot Filament CVD Process (EAHFCVD법에 의한 c-BN 박막형성기구와 계면층의 특성에 관하여)

  • Choi, Yong;Choe, Jean-I.
    • The Transactions of The Korean Institute of Electrical Engineers
    • /
    • v.61 no.1
    • /
    • pp.89-93
    • /
    • 2012
  • c-BN films were deposited on SKH-51 steels by electron assisted hot filament CVD method and microstructure development was studied processing parameters such as bias voltage, temperature, etching and phase transformation at boundary layer between BN compound and steel to develop a high performance wear resistance tools. A negative bias voltage higher than 200V at substrate temperature of $800^{\circ}C$ and gas pressure of 20 torr in B2H6-NH3-H2 gas system was one of optimum conditions to produce c-BN films on the SKH-51 steels. Thin layer of hexagonal boron nitride phase was observed at the interface between c-BN layer and substrate.

Synthesis of Boron-Nitride Film by Plasma Assisted Chemical Vapor Deposition Using $BCl3-NH3-Ar$ Mixed Gas ($BCl3-NH3-Ar$계의 플라즈마화학증착공정을 이용한 질화붕소막의 합성)

  • 박범수;백영준;은광용
    • Journal of the Korean Ceramic Society
    • /
    • v.34 no.3
    • /
    • pp.249-256
    • /
    • 1997
  • The effect of process parameter of plasma assisted chemical vapor deposition (PACVD) on the variation of the ratio between cubic boron nitride (c-BN) and hexagonal boron nitride (h-BN) in the film was in-vestigated. The plasma was generated by electric power with the frequency between 100 and 500 KHz. BCl3 and NH3 were used as a boron and nitrogen source respectively and Ar and hydrogen were added as a car-rier gas. Films were composed of h-BN and c-BN and its ratio varied with the magnitude of process parameters, voltage of the electric power, substrate bias voltage, reaction pressure, gas composition, sub-strate temperature. TEM observation showed that h-BN phase was amorphous while crystalline c-BN par-ticle was imbedded in h-BN matrix in the case of c-BN and h-BN mixed film.

  • PDF

TENSILE BOND STRENGTH OF ALUNMINA CORE TREATED BY ION ASSISTED REACTION (이온보조반응법으로 처리한 알루미나 코아의 인장결합강도에 관한 연구)

  • Kim, Hyeong-Seob;Woo, Yi-Hyung;Kwon, Kung-Rock;Choi, Boo-Byung;Choi, Won-Kook
    • The Journal of Korean Academy of Prosthodontics
    • /
    • v.38 no.5
    • /
    • pp.704-723
    • /
    • 2000
  • This study was undertaken to evaluate the tensile bond strength of In-Ceram alumina core treat-ed by ion assisted reaction(IAR). Ion assisted reaction is a prospective surface modification technique without damage by a keV low energy ion beam irradiation in reactive gas environments or reactive ion itself. 120 In-Ceram specimens were fabricated according to manufacturer's directions and divided into six groups by surface treatment methods of In-Ceram alumina core. SD group(control group): sandblasting SL group: sandblasting + silane treatment SC group: sandblasting + Siloc treatment IAR I group: sandblasting + Ion assisted reaction with argon ion and oxygen gas IAR II group: sandblasting + Ion assisted reaction with oxygen ion and oxygen gas IAR III group: sandblasting + Ion assisted reaction with oxygen ion only For measuring of tensile bond strength, pairs of specimens within a group were bonded with Panavia 21 resin cement using special device secured that the film thickness was $80{\mu}m$. The results of tensile strength were statistically analyzed with the SPSS release version 8.0 programs. Physical change like surface roughness of In-Ceram alumina core treated by ion assistad reaction was evaluated by Contact Angle Measurement, Scanning Electron Microscopy, Atomic Force Microscopy; chemical surface change was evaluated by X-ray Photoelectron Spectroscopy. The results as follows: 1. In tensile bond strength, there were no statistically significant differences with SC group, IAR groups and SL group except control group(P<0.05). 2. Contact angle measurement showed that wettability of In-Ceram alumina core was enhanced after IAR treatment. 3. SEM and AFM showed that surface roughness of In-Ceram alumina core was not changed after IAR treatment. 4. XPS showed that IAR treatment of In-Ceram alumina core was enabled to create a new functional layer. A keV IAR treatment of In-Ceram alumina core could enhanced tensile bond strength with resin cement. In the future, this ion assisted reaction may be used effectively in various dental materials as well as in In-Ceram to promote the bond strength to natural tooth structure.

  • PDF