• Title/Summary/Keyword: gas mass spectrometer

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The progress in NF3 destruction efficiencies of electrically heated scrubbers (전기가열방식 스크러버의 NF3 제거 효율)

  • Moon, Dong Min;Lee, Jin Bok;Lee, Jee-Yon;Kim, Dong Hyun;Lee, Suk Hyun;Lee, Myung Gyu;Kim, Jin Seog
    • Analytical Science and Technology
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    • v.19 no.6
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    • pp.535-543
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    • 2006
  • Being used widely in semiconductor and display manufacturing, $NF_3$ is internationally considered as one of the regulated compounds in emission. Numerous companies have been continuously trying to reduce the emissions of $NF_3$ to comply with the global environmental regulation. This work is made to report the destruction and removal efficiency (DRE) of electrically heated scrubbers and the use rate in process chambers installed in three main LCD manufacturing companies in Korea. As the measurement techniques for $NF_3$ emission, mass flow controlled helium gas was continuously supplied into the equipment by which scrubber efficiency is being measured. The partial pressures of $NF_3$ and helium were accurately measured for each sample using a mass spectrometer, as it is emitted from inlet and outlet of the scrubber system. The results show that the DRE value for electrically heated scrubbers installed before 2004 is less than 52 %, while that for the new scrubbers modified based on measurement by scrubber manufacturer has been sigificentely improved upto more than 95 %. In additon, we have confirmed the efficiency depends on such variables as the inlet gas flow rate, water content, heater temperature, and preventative management period. The use rates of $NF_3$ in process chambers were also affected by the process type. The use rate of radio frequency source chambers, built in the $1^{st}$ and $2^{nd}$ generation process lines, was determined to be less than 75 %. In addition, that of remote plasma source chambers for the $3^{rd}$ generation was measured to be aboove 95 %. Therefore, the combined application of improved scrubber and the RPSC process chamber to the semiconductor and display process can reduce $NF_3$ emmision by 99.95 %. It is optimistic that the mission for the reduction of greenhouse gas emission can be realized in these LCD manufacturing companies in Korea.

Development of an Analytical Method for Chloropicrin Determination in Hulled Rice by GC-ECD and GC-MS (GC-ECD 및 GC-MS를 이용한 현미 중 chloropicrin의 잔류시험법 개발)

  • Do, Jung-Ah;Choi, Jeong-Heui;Park, Hyejin;Park, Yong-Chun;Yoon, Hae-Jung;Choi, Dongmi;Oh, Jae-Ho
    • Journal of Food Hygiene and Safety
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    • v.28 no.3
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    • pp.222-226
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    • 2013
  • A simple and sensitive analytical method was developed using gas chromatograph with electron capture detector (GC-ECD) and gas chromatograph-mass spectrometer (GC-MS) for determination and identification of chloropicrin. Because of small molecular weight and high volatile properties of chloropicrin, analytical method was developed utilizing headspace extraction and direct injection to the GC. The developed method was validated using hulled rice sample spiked with chloropicrin at different concentration levels, 0.1 and 0.5 mg/kg. Average recoveries of chloropicrin (using each concentration three replicates) ranged 77.7~79.3% with relative standard deviations less than 10% and calibration solutions concentration in the range $0.005{\sim}0.5{\mu}g/mL$, and limit of detection (LOD) and limit of quantification (LOQ) were 0.004 and 0.01 mg/kg, respectively. The result showed that developed analytical methods was successfully applied to detect a small amount of chloropicrin in hulled rice.

Calibration of δ13C values of CO2 gas with different concentrations in the analysis with Laser Absorption Spectrometry (레이저흡광분석기(Laser Absorption Spectrometry)를 이용한 CO2가스의 탄소안정동위원소비 보정식 산출)

  • Jeong, Taeyang;Woo, Nam C.;Shin, Woo-Jin;Bong, Yeon-Sik;Choi, Seunghyun;Kim, Youn-Tae
    • Economic and Environmental Geology
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    • v.50 no.6
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    • pp.537-544
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    • 2017
  • Stable carbon isotope ratio of carbon dioxide (${\delta}^{13}C_{CO2}$) is used as an important indicator in the researches for global climate change and carbon capture and sequestration technology. The ${\delta}^{13}C$ value has been usually analyzed with Isotope Ratio Mass Spectrometer (IRMS). Recently, the use of Laser Absorption Spectrometry (LAS) is increasing because of the cost efficiency and field applicability. The purpose of this study was to suggest practical procedures to prepare laboratory reference gases for ${\delta}^{13}C_{CO2}$ analysis using LAS. $CO_2$ gas was adjusted to have the concentrations within the analytical range. Then, the concentration of $CO_2$ was assessed in a lab approved by the Korea Laboratory Accreditation Scheme and the ${\delta}^{13}C_{CO2}$ value was measured by IRMS. When the instrument ran over 12 hours, the ${\delta}^{13}C$ values were drifted up to ${\pm}10$‰ if the concentration of $CO_2$ was shifted up to 1.0% of relative standard deviation. Therefore, periodical investigation of analytical suitability and correction should be conducted. Because ${\delta}^{13}C_{CO2}$ showed the dependency on $CO_2$ concentration, we suggested the equation for calibrating the concentration effect. After calibration, ${\delta}^{13}C_{CO2}$ was well matched with the result of IRMS within ${\pm}0.52$‰.

Chemical Characteristics of PM1 using Aerosol Mass Spectrometer at Baengnyeong Island and Seoul Metropolitan Area (백령도 및 서울 대기오염집중측정소 에어로졸 질량 분석기 자료를 이용한 대기 중 에어로졸 화학적 특성 연구)

  • Park, Taehyun;Ban, Jihee;Kang, Seokwon;Ghim, Young Sung;Shin, Hye-Jung;Park, Jong Sung;Park, Seung Myung;Moon, Kwang Joo;Lim, Yong-Jae;Lee, Min-Do;Lee, Sang-Bo;Kim, Jeongsoo;Kim, Soon Tae;Bae, Chang Han;Lee, Yonghwan;Lee, Taehyoung
    • Journal of Korean Society for Atmospheric Environment
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    • v.34 no.3
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    • pp.430-446
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    • 2018
  • To improve understanding of the sources and chemical properties of particulate pollutants on the Korean Peninsula, An Aerodyne High Resolution Time of Flight Aerosol Mass Spectrometer (HR-ToF-AMS) measured non-refractory fine particle ($NR-PM_1$) from 2013 to 2015 at Baengnyeong Island and Seoul metropolitan area (SMA), Korea. The chemical composition of $NR-PM_1$ in Baengnyeong island was dominated by organics and sulfate in the range of 36~38% for 3 years, and the organics were the dominant species in the range of 44~55% of $NR-PM_1$ in Seoul metropolitan area. The sulfate was found to be more than 85% of the anthropogenic origin in the both areas of Baengnyeong and SMA. Ratio of gas to particle partition of sulfate and nitrate were observed in both areas as more than 0.6 and 0.8, respectively, representing potential for formation of additional particulate sulfate and nitrate. The high-resolution spectra of organic aerosol (OA) were separated by three factors which were Primary OA(POA), Semi-Volatility Oxygenated Organic Aerosol (SV-OOA), and Low-Volatility OOA(LV-OOA) using positive matrix factorization (PMF) analysis. The fraction of oxygenated OA (SOA, ${\fallingdotseq}OOA$=SV-OOA+LV-OOA) was bigger than the fraction of POA in $NR-PM_1$. The POA fraction of OA in Seoul is higher than it of Baengnyeong Island, because Seoul has a relatively large number of primary pollutants, such as gasoline or diesel vehicle, factories, energy facilities. Potential source contribution function (PSCF) analysis revealed that transport from eastern China, an industrial area with high emissions, was associated with high particulate sulfate and organic concentrations at the Baengnyeong and SMA sites. PSCF also presents that the ship emissions on the Yellow Sea was associated with high particulate sulfate concentrations at the measurement sites.

A comparative analysis of gas and liquid phase standard spiked solid sorbent tubes for the determination of volatile organic compounds in indoor air by TD-GC/MS (열탈착/저온농축-GC/MS에 의한 실내공기 중 휘발성 유기화합물 정량용 기체상 및 액체상 표준물질 첨가한 고체 흡착관의 비교 분석)

  • Lim, Hyun-Woo;Jung, Sung-Won;Kang, Chul-Ho;Park, Jin-Sook;Park, Byeong Moo;Choi, Yong-Wook
    • Analytical Science and Technology
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    • v.26 no.4
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    • pp.287-297
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    • 2013
  • The optimization of analytical method for the thermal desorption of seven VOCs (volatile organic compounds) by TD-GC/MS (thermal desorption-gas chromatograph-mass spectrometer) with solid phase sorbent tube, and comparative analysis for the determination of VOCs plotted by standard sorbent tubes prepared using both gas phase and liquid phase materials were investigated. The result of paired t-test showed that a liquid phase standard sorbent tube method was in agreement with a gas phase standard sorbent tube method for six species of VOCs including benzene, toluene, ethylbenzene, o-, m-, and p-xylene except for styrene at the significance level (${\alpha}=0.01$), while the 15.6% of difference in response factor between both of gas phase and liquid phase standard plotting for the determination of styrene showed that both methods were significantly different at the significance level. Therefore, the liquid phase standard plotting method was employed to reduce erroneous data for the determination of styrene including BTEX. Under the optimized analytical method by liquid phase standard sorbent tube, recovery was between $100{\pm}5%$ for 7 species of VOCs, reproducibility ranged from 0.3 to 7.7%, and method detection limit (MDL) ranged from $0.01{\mu}g/m^3$ for o-xylene to $0.27{\mu}g/m^3$ for toluene. The optimized standard method was applied to determine VOCs VOCs from indoor air of of dormitory, one bedroom apartment, and a new car.

Monitoring of Polycyclic Aromatic Hydrocarbons in Sediments and Organisms from Korean Coast

  • Moon Hyo-Bang;Choi Hee-Gu;Kim Sang-Soo;Jeong Seung-Ryul;Lee Pil-Yong;Ok Gon
    • Fisheries and Aquatic Sciences
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    • v.4 no.4
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    • pp.219-228
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    • 2001
  • Surface sediments (0- 5 cm), mussels (Mytilus coruscus and M. edulis) and oysters (Crassostrea gigas) were sampled at 20 stations in Korean coast during a period of February to July 2000. Samples were analyzed for polycyclic aromatic hydrocarbons (PAHs) content using gas chromatography coupled to mass spectrometer detector (GC/MSD). The sediment $\sum PAH$ concentration varied from 7 to 1,214 ng/g dry weight and the level of carcinogenic PAHs of six species ranged from 1 to 563 ng/g dry weight in surface sediments. In organisms, the levels of $\sum PAH$ were in the range of 63-876 ng/g dry weight and the concentrations of carcinogenic PAHs of six species were in the range of 4-582 ng/g dry weight. The highest PAH concentrations in sediments and organisms were in samples from Station 5 in Pohang coast and Station 8 in Jinhae coast, respectively. $\sum PAH$ concentrations in sediments and organisms collected from Korean coast were slightly low or comparable to those in other countries. The contribution of ring aromatic groups to sum of 16 PAHs in sediments and organisms showed a similar pattern for most stations. In sediments, the predominant contributions were four and five ring aromatics like fluoranthene, pyrene, benzo[a]anthracene, chrysene, benzo[b]fluoranthene, benzo[k]fluoranthene and benzo[a]pyrene. In the organisms, four ring aromatics like fluoranthene, pyrene, benzo[a]anthracene and chrysene were predominant PAH species. Several molecular indices such as phenanthrene/anthracene, fluoranthene/pyrene and LMW/HMW ratio were used to identify the origin of PAH contamination in sediments. The results indicate that PAHs of Korean coast were mainly of pyro1ytic contaminants with slight petrogenic input. A high correlation within individual PAH compound in marine sediments was observed, while correlation in organisms showed a highly significant relationship for heavier molecular weight PAHs.

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Study on simultaneous determination of aromatic material causing allergic in children's products by GC-MSD (GC-MSD를 이용한 어린이 제품 중 알러지 유발 방향성 물질의 동시분석법 연구)

  • Ko, Kyeong Mok;Rhu, Chan Joo;Ko, Byeong Rae;Lee, Seok Ki
    • Analytical Science and Technology
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    • v.33 no.3
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    • pp.134-142
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    • 2020
  • Twenty-one allergy-induced aromatic material in children's products were analyzed using gas chromatography mass spectrometer(GC-MSD). The analytes were extracted using an automatic Soxhlet extractor, centrifuged for 10 minutes in a fast freezing centrifuge, and the supernatant was filtered with a syringe filter and then transferred into a 2 mL vial and injected in a split mode. In the established condition, the calibration curve showed linearity with a determination coefficient of 0.9981 or more. Sensitivity was 0.3145 ~ 1.6757, which showed a fairly wide range of sensitivity for each substance. The detection limit of the device was 0.0016 ~ 0.0423 ㎍/mL and the maximum detection limit was less than 0.05 ㎍/mL. The method detection limit ranged from 0.0030 ~ 0.0589 ㎍/mL. In addition, the limit of quantification ranged from 0.0096 to 0.1876 ㎍/mL, with precision ranging from 0.41 to 10.49 % and accuracy ranging from 83 to 116 %. The analytical method developed in this study was applied to commercial products.

Physicochemical Characteristics of Particulate Matter Emissions of Different Vehicles' Fuel Types (자동차 연료유형에 따른 배출 입자상 물질의 화학적 특성)

  • Son, Jihwan;Kim, Jounghwa;Park, Gyutae;Kim, Sunmoon;Hong, Heekyoung;Moon, Sunhee;Park, Taehyun;Kang, Seokwon;Sung, Kijae;Chung, Taekho;Kim, Ingu;Kim, KyungHoon;Yu, Dong-Gil;Choi, Kwangho;Kim, Jeong Soo;Lee, Taehyoung
    • Journal of Korean Society for Atmospheric Environment
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    • v.32 no.6
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    • pp.593-602
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    • 2016
  • The physicochemical characteristics of particulate matter emissions from various vehicle's fuel types were studied at the facility of Transport Pollution Research Center(TPRC), National Institute of Environmental Research (NIER), Korea. Three different types of fuels such as gasoline, liquefied petroleum gas (LPG) and diesel were tested on the NIER driving mode and the constant speed modes(30, 70, and 110 km/h). Chemical composition of submicron particles from vehicle emissions was measured by the High Resolution Time of Flight Aerosol Mass Spectrometer (HR-ToF-AMS) during running cycles. Organics were dominant chemical species of particulate matter emissions for all three different vehicles' fuel types. Moreover, regardless of fuel types, emission rate of organics and inorganics decreased as the average speed of vehicle increased. The portion of fully oxidized fragment families of $C_xH_yO_z$ accounted for over 98% of organic aerosol(OA) in LPG and diesel vehicles, while the relatively high fraction of $C_xH_y$ in OA was observed in gasoline vehicle.

Electronic Spectroscopy of Protonated Tyr-Ala Dipeptide Ions (Tyr-Ala 펩타이드 이온의 전자전이 분광 연구)

  • Choi, Chang-Min;Kwon, Jang-Sook;Kim, Hwan-Jin;Yoon, Tae-Oh;Yang, Min-O;Kim, Nam-Joon
    • Journal of the Korean Chemical Society
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    • v.51 no.4
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    • pp.318-323
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    • 2007
  • Electronic photofragmentation spectrum of protonated tyrosine-alanine dipeptide ions(YAH+) was obtained in the wavenumber region of 34500~36700 cm-1 using a quadrupole ion trap time-of-flight mass spectrometer (QIT-TOFMS). YAH+ ions were produced by electrospray ionization, stored in the ion trap and then irradiated by ultraviolet laser pulses which induced photofragmentation of the ions. The electronic photofragmentation spectrum was obtained by monitoring the photodissociation yields of YAH+ ions as a function of the laser wavelength. The spectrum exhibited two broad peaks which were assigned as S1 and S2 by theoretical calculations using a time-dependent density functional method. The broad widths of the peaks in the spectrum were explained by the overlaps of the peaks originated from various conformers of YAH+ ions which were present in the gas phase at room temperature and also by the contributions of the hot bands.

Changes in Volatile Compounds of Schizandra chinensis Fruits According to Drying and Extracting Methods (건조 및 추출방법에 따른 오미자 휘발성 성분의 변화)

  • Kim, Kwan-Su;Song, Ji-Sook;Bang, Jin- Ki
    • Korean Journal of Medicinal Crop Science
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    • v.8 no.1
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    • pp.49-57
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    • 2000
  • To understand the effects of drying conditions on changes of volatile compounds in fruits of Schizandra chinensis, we analyzed SDE (steam distillation and extraction) extract and Headspace vapor of fresh and dried samples using GC/MS (Gas chromatograph/Mass spectrometer). Contents of essential oils from samples with different drying conditions were 0.58% in fresh ones, 0.60% in freeze dried ones, and 0.30% in hot-air dried ones. In SDE extract, major volatile compounds in fresh samples were terpinen-4-ol(9.01%), ${\gamma}-terpinene(7.02%),\;{\beta}-myrcene(7.55%)$, unidentified sesquiterpenes(28.48%), showing almost the same composition as that in freeze-dried ones, but those in hot-air dried samples at $60^{\circ}C$ were ${\gamma}-terpinene(5.40%),\;{\alpha}-elemene(8.28%)$, unidentified sesquiterpenes(50.38%), indicating the chemical changes during drying procedure. In Headspace vapor, major compounds in fresh samples were ${\beta}-myrcene(22.05%),\;{\gamma}-terpinene(9.47%),\;{\alpha}-pinene(8.91%)$, sabinene(8.48%), which were different from those in SDE extract. In chemical compositions of volatile compounds in dried samples, ${\beta}-myrcene,\;{\alpha}-terpinene$ decreased in the order of freeze-drying > hot-air drying at $60^{\circ}C$ > hot-air drying at $60^{\circ}C$, and ${\alpha}-ylangene,\;{\alpha}-pinene$, camphene increased in the reverse order of the former. We observed the changes of the contents and compositions of essential oils compounds during drying procedure, especially a decrease in monoterpenes and alcohols and an increase in sesquiterpenes with relatively weak volatility.

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