• 제목/요약/키워드: gas flow meter

검색결과 116건 처리시간 0.023초

반도체용 시간식 질량유량계의 특성에 관한 연구 (An experimental study of the time based mass flow controller for semiconductor industry)

  • 장영철
    • 반도체디스플레이기술학회지
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    • 제7권2호
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    • pp.55-58
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    • 2008
  • The objective of the research is to design, manufacture and test a Mass Flow Controller(MFC) capable of measuring compressible fluid flows based on a "bucket and stop-watch"method. The basic principle is the measurement of time, where the time taken to fill and empty a bucket of known volume is measured. This method of flow measurement is a new concept when compared to a commercilized current mass flow controller. For the flow meter to be able to compete with established designs it not only must be comparable in cost and robustness, it must be very accurate and reliable as well. This device should be able to handle fluid flows in the range of 0.1ml/min to 10ml/min within an accuracy of ${\pm}$1%. A possible application for a device such as this is in electronics industry where arsenic gas is used in the production of silicon chips.

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스마트 홈 가스안전관리 시스템 개발 및 현장시험 (Development and Field Test of a Smart-home Gas Safety Management System)

  • 박규태;김은정;김인찬;김희식
    • 한국가스학회지
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    • 제16권6호
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    • pp.128-135
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    • 2012
  • 본 논문에서는 가스안전에 적합한 무선 ZigBee통신모듈과 스마트 홈 가스안전기기 및 관리시스템 개발하여 가스안전관리의 효율을 향상시키는 시스템과 시나리오를 제안하였다. 제안한 시스템은 마이컴가스미터, 자동식소화기, 감지기 및 월패드로 구성된다. 마이컴미터는 가스압력, 가스유량, 지진을 모니터링한다. 자동식소화기는 가연성 가스의 누출상태, $100^{\circ}C$(차단)와 $139^{\circ}C$(화재)의 온도를 측정하며, 감지기는 연기와 일산화탄소(CO)를 검지한다. 제안한 시스템에서 가스사용중 이상상태발생시 마이컴가스미터는 경보와 함께 내부밸브를 차단시키고, 자동식소화기는 중간가스밸브를 차단하거나 소화약재를 분사시킨다. 감지기는 연기와 CO를 감지할 경우 각각 신호를 발생시켜 후속조치를 취하게 한다. 가스안전기기와 센서들은 자동적으로 조치를 취하고 그 정보를 월패드로 전달한다. 월패드는 실시간 상황정보를 서버에게 전달하고 사용자는 웹이나 모바일 앱을 통하여 서버에 접속하여 가스의 상황정보를 확인하거나 관리할 수 있다. 본 연구에서는 스마트기반 가스안전 및 위험관리의 시나리오를 고안하고 현장적용시험을 통하여 그 효율성을 증명하였다.

대기압이 가스유량측정에 미치는 영향에 관한 연구 (A Study on the Effect of the Atmospheric Pressure in the Gas Flow Measurement)

  • 정종태;하영철;이철구;허재영
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 2002년도 유체기계 연구개발 발표회 논문집
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    • pp.363-369
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    • 2002
  • Orifice meter is the most widely used flowmeter in custody transfer between KOGAS and city gas companies. Absolute pressure value is needed to calculate the gas flow of orifice metering system, but the gauge pressure transmitters are mainly used in the field. In case that the gauge pressure transmitters are used, the fixed value as standard atmospheric pressure(101.325kPa) is applied for the absolute pressure value. The real, local atmospheric pressures of each metering station are different from the standard condition as the altitude and weather conditions. In this study the flow calculation errors were quantitatively analyzed through examining the atmospheric pressures of 50 stations of KOGAS. The data for analysis are such like the time data of supplied gas amount, the altitude of each metering station, the time data of atmospheric pressures and altitudes of each weather observatory. The results showed that the local atmospheric pressures were different from the standard value and the gas flow calculation errors were distributed between $-0.024\%{\~}0.025\%$ based on the supplied gas amount in the year 1999 and 2000.

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질량 유량계 센서관에서의 열전달 현상에 대한 수치적 해석 및 실험적 연구 (Experimental and Numerical Analysis of Heat Transfer Phenomena in a Sensor Tube of a Mass Flow Controller)

  • 장석필;김성진;최도형
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2000년도 춘계학술대회논문집B
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    • pp.154-161
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    • 2000
  • As a mass flow controller is widely used in many manufacturing processes for controlling a mass flow rate of gas with accuracy of 1%, several investigators have tried to describe the heat transfer phenomena in a sensor tube of an MFC. They suggested a few analytic solutions and numerical models based on simple assumptions, which are physically unrealistic. In the present work, the heat transfer phenomena in the sensor tube of the MFC are studied by using both experimental and numerical methods. The numerical model is introduced to estimate the temperature profile in the sensor tube as well as in the gas stream. In the numerical model, the conjugate heat transfer problem comprising the tube wall and the gas stream is analyzed to fully understand the heat transfer interaction between the sensor tube and the fluid stream using a single domain approach. This numerical model is further verified by experimental investigation. In order to describe the transport of heat energy in both the flow region and the sensor tube, the Nusselt number at the interface between the tube wall and the gas stream as well as heatlines is presented from the numerical solution.

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횡단 유동장의 기액비 및 레이놀즈수 변화에 따른 외부혼합형 이상유체 제트의 액적크기 및 체적유속 특성 (Characteristics of SMD and Volume Flux of Two-phase Jet Injected into Cross-flow with Various Gas-liquid Ratio and Reynolds Number)

  • 김종현;이봉수;구자예
    • 한국자동차공학회논문집
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    • 제17권2호
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    • pp.75-81
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    • 2009
  • A study was performed to investigate the characteristics of two-phase jet injected into subsonic cross-flow using the external mixed gas blast two-phase nozzle. The shadowgraph method was adopted for the cross-flow jet visualization and PDPA system was used to measure droplet size, velocity, and volume flux. The atomization of two-phase jet is initially determined according to gas to liquid mass flow-rate ratio and the Reynolds number of cross-flows. The highest penetration trajectories of two-phase jet injected into cross-flow are governed by the momentum ratio at subsonic cross-flow. As GLR of two-phase jet injected into cross-flow increases, the droplet size decreases and the distribution area of volume flux increases. The distribution of volume flux that influenced by the counter vortex pair at the downstream of cross-flow is symmetric in shape of horseshoe.

열량형 질량유량계에 대한 압력과 비열 영향 (The Effects of Pressure and Specific Heat on the Performance of Thermal Mass Flowmeter)

  • 최용문;박경암;최해만;이기성
    • 유체기계공업학회:학술대회논문집
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    • 유체기계공업학회 1999년도 유체기계 연구개발 발표회 논문집
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    • pp.109-113
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    • 1999
  • Thermal mass flow meter (TMF) is used measuring the small mass flow rate of gases. Generally, flow rate measuring accuracy of TMF is $\pm2{\%}$ of full scale. TMF is manufactured for specified working pressure and specified working gas by customer. If it were applied for different working pressure and gases, flow rate measurement accuracy decreased dramatically. In this study, a TMF tested with three different gases and pressure range of 0.2 MPa to 1.0 MPa. Effect of specific heat cause to increase flow measurement error as much as ratio of specific heat compare with reference gas. Pressure change cause to increase flowrate measurement deviation about $-0.2{\%}$ as the working pressure decreased 0.1 MPa.

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흡기포트 선회비 변경에 따른 유동특성 및 엔진성능에 관한 연구 (A Study on the Flow Characteristics and Engine Performance with Swirl Ratio Variance of Intake Port)

  • 윤준규;차경옥
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2000년도 춘계학술대회논문집B
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    • pp.899-905
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    • 2000
  • The characteristics of air flow and engine performance with swirl ratio variance of intake port In a turbocharged DI diesel engine was studied in this paper. The intake port flow is important factor which have influence on the engine performance and exhaust emission because the properties in the injected fuel depend on the combustion characteristics. The swirl ratio for ports was modified by hand-working and measured by impulse swirl meter. For the effects on performance and emission, the brake torque and brake specific fuel consumption were measured by engine dynamometer and NOx, smoke were measured by gas analyzer and smoke meter. As a result of steady flow test, when the valve eccentricity ratio are closed to cylinder wall, the flow coefficient and swirl intensity are increased. And as the swirl ratio is increased, the mean flow coefficient is decreasing, whereas the gulf factor is increasing. Also, through engine test its can be expected to meet performance and emission by optimizing the main parameters; the swirl ratio of intake port, injection timing and compression ratio.

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열회수장치에 의한 열교환 성능 분석(농업시설) (Analysis of Heat Exchanging Performance of Heat Recovering Device Attached to Exhaust Gas Duct)

  • 서원명;강종국;윤용철;김정섭
    • 한국농공학회:학술대회논문집
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    • 한국농공학회 2000년도 학술발표회 발표논문집
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    • pp.333-339
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    • 2000
  • This study was performed to investigate the performance of heat recovery device attached to exhaust gas funnel connected to combustion chamber of greenhouse heating system. The experiment heat recovery system is mainly consisted of LPG combustion chamber and two heat recovery units; unit-A is attached directly to the exhaust gas funnel, and unit-B is connected with unit-A. Heat recovery performance was evaluated by estimating total energy amount by using enthalpy difference between two measurement points together with mass flow rate of gas and/or air passing through each heat recovery unit depending on 5 different flow rates controlled by voltage meter. The results of this experimental study, such as heat exchange behavior of supply air pipes and exhaust air passages crossing the pipes, pressure drop between inlet and outlet, heat recovery performance of exchange unit, etc., will be used as fundamental data for designing optimum heat recovery device to be used for fuel saving purpose by reducing heat loss amounts mostly wasted outside of greenhouse through funnels.

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기체 촉진수송을 위한 polyvinylpyrrolidone/AgBF4/Al(NO3)3 전해질 분리막 제조 (Preparation of Polyvinylpyrrolidone/AgBF4/Al(NO3)3 Electrolyte Membranes for Facilitated Gas Transport)

  • 윤기완;강상욱
    • 멤브레인
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    • 제26권1호
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    • pp.38-42
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    • 2016
  • 올레핀/파라핀 혼합 기체의 분리를 위한 올레핀 촉진 수송 분리막의 제조를 위해 amide 작용기를 가지며 glassy한 특성을 보이는 polyvinylpyrrolidone (PVP) 고분자를 분리막의 matrix로서 사용하였다. 분리막의 기체 투과 실험은 propylene과 propane 50 : 50의 부피비로 혼합된 기체를 사용하였고, bubble meter와 gas chromatography를 사용해 투과도와 선택도를 측정하였다. 또한 SEM image와 FT-IR을 통해 막의 특성을 조사하였다. 100시간의 장시간 성능 측정 결과 선택도는 약 15, 투과도는 약 1.3 GPU 이상을 각각 유지하였다. 기존의 poly(2-ethyl-2-oxazoline) $(POZ)/AgBF_4/Al(NO_3)_3$ 분리막과 비교함으로써, 고분자 matrix로서의 PVP 특성을 확인하였다.

u-home 가스안전관리시스템 개발 및 성능시험 (Development and Performance Test of Gas Safety Management System based on the Ubiquitous Home)

  • 박규태;유근준;김영규;김영대;지차환;권종원;김희식
    • 전자공학회논문지SC
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    • 제48권3호
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    • pp.13-20
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    • 2011
  • 본 논문에서는 무선 ZigBee 통신모듈과 지능형 가스안전기기를 이용하여 u-홈 가스안전관리시스템을 개발하여 가스안전관리의 효율을 향상시킬 수 있는 시스템을 제안하고자 한다. 제안한 시스템은 마이컴가스미터, 자동식소화기, 감지기 및 월패드로 구성된다. 마이컴미터는 가스압력, 가스유량, 지진을 모니터링하고, 자동식소화기는 가연성 가스의 누출상태와 $100^{\circ}C$$130^{\circ}C$의 온도를 측정한다. 그리고 감지기는 연기와 일산화탄소(CO)를 검지한다. 제안한 시스템은 가스사용중 이상상태발생시 마이컴가스미터는 경보와 함께 내부밸브를 차단시키고, 자동식소화기는 중간가스밸브를 차단하거나 소화약재를 분사시킨다. 감지기는 연기와 CO를 감지할 경우 각각 신호를 발생시킨다. 가스안전기기와 센서들은 지능적 조치를 취하고 그 정보를 월패드로 전달한다. 월패드는 상황정보를 실시간으로 서버에게 전달하고 사용자는 웹기반으로 서버에 접속하여 가스의 상황정보를 확인하거나 관리할 수 있다. 본 논문은 가스안전 및 위험관리의 시나리오를 고안하고 실험을 통하여 그 효용성을 증명하였다.