• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.9 s.180
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• pp.2371-2380
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• 2000

In this paper, we developed the proximity exposure system with the vertical structure of glass and mask stage to minimize the mask's warp caused by the pull of gravity. This system, which canirradiate the ultra violet through 1440 H 850 $\textrm{mm}^2$ and 1330X 1015 $\textrm{mm}^2$ exposure area, has the followingcharacteristics. The glass stage can be inclined by 80 degrees at vertical structure to load substrate withsafety on it. When the glass stage is the vertical state, the gap control, alignment control and exposureof ultra violet are executed. So, it enhances the pattern uniformity by minimizing the mask's warp. Theglass stage can also control the gap between the mask and the substrate by the coarse and fine motioncontrol. The mask stage can adjust the posture of photomask to the position of substrate by imageprecessing method. The galss stage for the gap control and the mask stage for the alignment aredesigned independently for each function.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.9
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• pp.84-91
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• 2003

This paper concerns on one-DOF non-rotating active magnetic bearing (AMB) system subject to base motion. In such a system, it is desirable to retain the axis within the predetermined air-gap while the base motion forces the axis to deviate from the desired air-gap. Motivated from this, an optimal acceleration feedforward control is proposed to reduce the base motion response without deteriorating other feedback control performances. Experimental results demonstrate that the proposed optimal feedforward control reduces the standard deviation of the air-gap to 29％ that by feedback control alone.

• Journal of Power Electronics
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• v.12 no.2
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• pp.305-316
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• 2012

The paper presents an accurate loss model based controller of an induction motor to calculate the optimal air gap flux. The model includes copper losses, iron losses, harmonic losses, friction and windage losses, and stray losses. These losses are represented as a function of the air gap flux. By using the calculated optimal air gap flux compared with rated flux for speed sensorless indirect vector controlled induction motor, an improvement in motor efficiency is achieved. The motor speed performance is improved using a fuzzy logic speed controller instead of a PI controller. The fuzzy logic speed controller was simulated using the fuzzy control interface block of MATLAB/SIMULINK program. The control algorithm is experimentally tested within a PC under RTAI-Linux. The simulation and experimental results show the improvement in motor efficiency and speed performance.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.5 s.110
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• pp.479-484
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• 2006

This paper presents an active control of the aperture type near-field storage head. In order to achieve a fast and accurate control, a dual servo control algorithm is applied. Based on the big difference in time constants of two actuators, they are used independently. With the combination fine and coarse actuator, the disk is rotated up to 10 rpm speed until the gap is controlled within 100 nm. From the experimental results, the feasibility and the performance of active dual servo gap control is proved.

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.327-327
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• 2000

Derivation of a slab dimension from the desired tolerance degrades the product quality, resulting in significant yield loss by trimming. This necessitates the dimensional control system to be operated in tighter dimensional accuracy. This paper presents an integral approach to a dimensional control system design taking into account the interaction between the edging process and the gap rolling process. To investigate the effects of each process controller, a simple PID controller is adopted as a preliminary study. The control performance is analyzed in detail in terms of the system response accuracy for various operating conditions.

• Proceedings of the KSME Conference
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• 2001.06e
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• pp.253-258
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• 2001

Control of drag force on a circular cylinder using a detached splitter plate is numerically studied for laminar flow. A splitter plate with the same length as the cylinder diameter(d) is placed horizontally in the wake region. Its position is described by the gap ratio(G/d), where G represents the gap between the cylinder base point and the leading edge of the plate. The drag varies with the gap ratio; it has the minimum value at a certain gap ratio for each Reynolds number. The drag sharply increases past the optimum gap ratio; this seems to be related to the sudden change in the bubble size in the wake region. This trend is consistent with the experimental observation currently available in case of turbulent flow. It is also found that the net drag coefficient significantly depends on the variation of base suction coefficient.

• Journal of KSNVE
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• v.6 no.3
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• pp.357-362
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• 1996

The magnetic levitation system has great advantages, such as little friction, no lubrication, no noise and so on. But the magnetic levitation system need a stabilizing controller because it is a unstable, system in natural and it need a sensor for displacement measurement to control the system. In this paper, we proposed a sensorless method to measure the gap between the magnetic pole and the levitated object with application the inductance characteristic which vary according to gap. We made a driving circuit which supply simultaneously the control input PWM(Pulse Width Modulation) signal and the carrier PWM signal to estimate the gap. Because the inductance is a function of gap, and the current of the carrier signal is a function of the inductance, we could estimate the gap from the measurement of the current of the carrier signal. Finally, we investigated the validity of the proposed method through the experimental results.

• 제어로봇시스템학회:학술대회논문집
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• 1995.10a
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• pp.154-157
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• 1995

A magnetic levitation control system is nonlinear and very unstable. Thus there should be a stabilizing compensation network and a feedback path. Due to the levitation control a noncontact photoresistor sensor is generally used. One photocell provides a certain amount of variation in length by the ball shadow casted on the cell surface. Furthermore at the boundary of the cell, the linearity of sensitivity deteriorates severely. To overcome the constraints of the length and linearity, an efficient sensor array is deviced and applied in the feedback path of a large-gap magnetic levitation control system. A number of CdS photocells and a summing circuit of the sensor output signals are used for a sensor array. The levitation length of a ball and the transient performances are main objectives of the large-gap suspension system using the sensor array.

• 제어로봇시스템학회:학술대회논문집
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• 1993.10a
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• pp.1141-1146
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• 1993

The problem of tension control in metal-strip processing line is discussed. A new mathematical dynamic model which relates tension change, motor-speed change and roll-gap change is developed. Through the computer simulation of this model, parameter sensitivity, the tension transfer phenominon, and static and dynamic characteristics of strip tension were studied. Guidelines are developed to help one selecting locations of the master-speed drive in multi-drive speed control for tension adjustment and reducing the effect of interaction between tension and roll gap control.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.67 no.1
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• pp.87-95
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• 2018

The high-precision magnetic levitation transport system is a transport device applying the principle of magnetic levitation. So it is preferable for manufactory process of semiconductor and display industries. In this system, the gap sensors are arranged discontinuously and turned on or off when the tray moves in the running direction. Therefore, precise gap data is important for precise control of the carrier. However, a slight error occurs in the process of installing the gap sensor. So, in this paper, we introduce the high-precision magnetic levitation transport system for OLED evaporation process. Also, we propose a strategy for stable flight control and an offset algorithm for tracking installation errors transport system. The performances of the proposed algorithm are validated through simulation.