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검색결과 394건 처리시간 0.025초

암모니아를 이용하여 분자선에피탁시 방법으로 AIN/Si 기판에 성장시킨 GaN의 구조적,광학적 특성 (Optical and Structural Properties of GaN Grown on AlN/Si via Molecular Beam Epitaxy Using Ammonia)

  • 김경현;홍성의;강석준;이상현;김창수;김도진;한기평;백문철
    • 한국재료학회지
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    • 제12권5호
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    • pp.387-390
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    • 2002
  • A new approach of using double buffer layers of AlN and GaN for growth of GaN films on Si has been undertaken via molecular beam epitaxy using ammonia. The first buffers layer of AlN was grown using $N_2$plasma and the second of GaN was grown using ammonia. The surface roughness of the grown films was investigated by atomic force microscope and was compared with the normally grown films on sapphire. Double crystal x-ray rocking curve and low temperature photoluminescence techniques were employed for structural and optical properties examination. Donor bound exciton peak at 3.481 eV with full width half maximum of 41 meV was observed at 13K.

저온공정을 이용한 AlN 박막의 우선배향성과 모폴로지에 관한 연구 (The Preferred Orientation and Morphology Characteristics of AlN Thin Films Prepared by RF Power Under Room Temperature Process)

  • 오수영;김응권;이태용;강현일;유현규;송준태
    • 한국전기전자재료학회논문지
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    • 제21권5호
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    • pp.458-462
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    • 2008
  • In this paper, we investigated the (002) preferred orientation and morphology characteristics of AlN thin film by using reactive rf sputtering. Additionally, AlN thin films grown in the range from 150 to 300 W were studied under room temperature without substrate heating and post annealing. Sputtered AlN thin films were well grown on Si substrates and the (002) main peak in XRD patterns showed the highest intensity at 300 W with $0.25^{\circ}$ degree of full width at half-maximum (FWHM). As increased RF power, the surface roughness was increased from 1.0 to 3.4 nm. In Fourier transformation infrared spectroscopy (FTIR), $A_1$ (TO) and $E_1$ (TO) mode closed to AlN thin film confirmed the changes with increasing the intensity rate. From these results, we could confirm a chance of the growth of AlN thin film by only low temperature.

진공증착된 Zn박막의 seed layer에 따른 구조와 특성 (Structures and properties of vacuum-evaporated Zn thin films with various seed layers)

  • 민복기;김인성;송재성;이병윤;박경엽;위상봉
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.328-331
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    • 2000
  • The effect of the constituent elements and their composition of the seed layer on the properties of the evaporated Zn thin films was investigated. It was carried out by the analysis of the preferred orientation and the grain size, and the corrosion characteristics. Seed layers were prepared by evaporation of Al and AlCu respectively, and here the Cu content as additives of the source materials of seed layers were designed 5 a/o to 20 a/o. The values of full width at half maximum (FWHM) of the (002) x-ray diffraction peaks of Zn decreased by increasing the amount of the additives on Al seed layer, as a results, the grain sizes also decreased. In order to characteristics of Zn thin films evaporated on the various seed layers, electrical resistivity changes with a function of time at the temperature of 40$^{\circ}C$ and the relative humidity of 80%, as a result, the relative resistivity changes were increased by decreasing the grain size and the FWHM values of (002) peaks of Zn.

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Hot Wall Epitaxy (HWE)법에 의한$AgGaSe_2$ 단결정 박막 성장과 광학적 특성 (Growth and Optical Properties for $AgGaSe_2$ Single Crystal Thin Films by Hot Wall Epitaxy)

  • 홍광준;백승남
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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    • pp.124-127
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    • 2003
  • The stochiometric $AgGaSe_2$ polycrystalline mixture of evaporating materials for the $AgGaSe_2$ single crystal thin film was prepared from horizontal furnance. To obtain the single crystal thin films, $AgGaSe_2$ mixed crystal and semi-insulating GaAs(100) wafer were used as source material and substrate for the Hot Wall Epitaxy (HWE) system, respectively. The source and substrate temperature were fixed at $630^{\circ}C$ and $420^{\circ}C$, respectively. The thickness of grown single crystal thin films is $2.1{\mu}m$. The single crystal thin films were investigated by photoluminescence and double crystal X-ray diffraction(DCXD) measurement. From the photoluminescence measurement of $AgGaSe_2$ single crystal thin film, we observed free excition ($E_x$) observable only in high quality crystal and neutral bound excition ($D^{\circ}$,X) having very strong peak intensity. And, the full width at half maximum and binding energy of neutral donor bound excition were 8 meV and 14.1 meV, respectively. By Haynes rule, an activation energy of impurity was 141 meV.

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Si(111) 기판을 이용한 crack-free GaN 박막 성장과 PL특성 (A Study of Growth and Properties of GaN films on Si(111) by MOCVD)

  • 김덕규;김호걸;송민종;박춘배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.187-188
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    • 2005
  • The characteristics of GaN epitaxial layers grown on silicon (111) substrates by metalorganic vapor phase epitaxy have been investigated. The only control of AlN thickness was found to decrease the stress sufficiently for avoiding crack formation in an overgrown thick ($2.6{\mu}m$) GaN layer. X-ray diffraction and photoluminescence measurements are used to determine the effect of AlN thickness on the strain in the subsequent GaN layers. Strong band edge photoluminescence of GaN on Si(111) was observed with a full width at half maximum of the bound exciton line as low as 17meV at 13K.

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AlAs 에피층 위에 성장된 InAs 양자점의 Photoluminescence 특성연구 (Photoluminescence Characteristics of InAs Quantum Dots Grown on AlAs Epitaxial Layer)

  • 김기홍;심준형;배인호
    • 한국재료학회지
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    • 제19권7호
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    • pp.356-361
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    • 2009
  • The optical characterization of self-assembled InAs/AlAs Quantum Dots(QD) grown by MBE(Molecular Beam Epitaxy) was investigated by using Photoluminescence(PL) spectroscopy. The influence of thin AlAs barrier on QDs were carried out by utilizing a pumping beam that has lower energy than that of the AlAs barrier. This provides the evidence for the tunneling of carriers from the GaAs layer, which results in a strong QD intensity compared to the GaAs at the 16 K PL spectrum. The presence of two QDs signals were found to be associated with the ground-states transitions from QDs with a bimodal size distribution made by the excitation power-dependent PL. From the temperature-dependent PL, the rapid red shift of the peak emission that was related to the QD2 from the increasing temperature was attributed to the coherence between the QDs of bimodal size distribution. A red shift of the PL peak of QDs emission and the reduction of the FWHM(Full Width at Half Maximum) were observed when the annealing temperatures ranged from 500 $^{\circ}C$ to 750 $^{\circ}C$, which indicates that the interdiffusion between the dots and the capping layer was caused by an improvement in the uniformity size of the QDs.

가스 유입량이 기상이동법으로 금 나노박막위에 성장된 산화아연 입자에 미치는 영향 (Influence of gas flow on structural and optical properties of ZnO submicron particles grown on Au nano thin films by vapor phase transport)

  • 김소아람;남기웅;김민수;박형길;윤현식;임재영
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2012년도 춘계학술발표회 논문집
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    • pp.211-212
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    • 2012
  • ZnO submicron particles were grown on Au-catalyzed Si substrate by a vapor phase transport (VPT) growth process under different mixture gas ratio at growth temperature of $900^{\circ}C$. The structural and optical properties of the ZnO submicron particles were investigated by field-emission scanning electron microscopy (FE-SEM), X-ray diffraction (XRD), and photoluminescence (PL). The ZnO submicron particles could be clustered with the $O_2/Ar$ mixture gas ratio(%) higher than 10%, and it was mainly determined by the gas ambient. Particularly, when the $O_2/Ar$ mixture gas ratio was 30%, it was observed the ZnO submicron particles with diameters in the range of 125 to 500 nm and the narrowest full width at half maximum (FWHM) of XRD and PL spectra with $0.121^{\circ}$ and 92 meV, respectively. It was found that the structural and optical properties of the ZnO submicron particles were improved with increasing the $O_2/Ar$ mixture gas ratio through the XRD and PL spectra.

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InGaAsP/InP이종접합구조의 격자부정합이 Photoluinescence효율에 미치는 영향 (Effects of Lattice Mismatch on Photoluminescence Efficiency of InGaAsP/InP Heterostructures)

  • 이종원
    • 한국재료학회지
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    • 제4권5호
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    • pp.516-523
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    • 1994
  • 이논문에서는 metal organic chemical vapor deposition(MOCVD)에 의해서 성장된 InGaAsP/InP이종접합구조의 격자부정합이 Photoluminescence(PL)효율에 미치는 영향을 연구하였다. 격자부정합은 (400)과 {511} x-ray reflection을 통해 측정하였고, 부정합 전위의 유무는 x-ray to-pography와 PL imaging을 통해 확인했다. PL강도 측정결과, 상대적으로 높은 PL강도는 탄성적으로 스트레인을 받은 시료에, 낮은 PL강도는 전위로 인해 비탄성적으로 변형된 시료에서 얻어졌다. 성장온도에서 격자정합된 시료의 PL효율이 실온에서 가장 높은 것을 알 수 있었다. PL강도와 X-ray반치폭과 관계에서, 시료의 광전자 특성이 구조적 특성과 밀접하게 연관됨을 알 수 있었다.

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Theoretical Investigation of the Generation of Broad Spectrum Second Harmonics in Pna21-Ba3Mg3(BO3)3F3 Crystals

  • Kim, Ilhwan;Lee, Donghwa;Lee, Kwang Jo
    • Current Optics and Photonics
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    • 제5권4호
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    • pp.458-465
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    • 2021
  • Borate nonlinear optical crystals have been used as frequency conversion devices in many fields due to their unique transparency and nonlinearity from ultraviolet to visible spectral range. In this study, we theoretically and numerically investigate the properties of broadband second harmonic generation (SHG) in the recently reported Pna21-Ba3Mg3(BO3)3F3 (BMBF) crystal. The technique is based on the simultaneous achievement of birefringence phase matching and group velocity matching between interacting waves. We discussed all factors required for broadband SHG in the BMBF in terms of two types of phase matching and group velocity matching conditions, the beam propagation direction and the corresponding effective nonlinearity and spatial walk-off, and the spectral responses. The results show that bandwidths calculated in the broadband SHG scheme are 220.90 nm (for Type I) and 165.85 nm (for Type II) in full-width-half-maximum (FWHM). The central wavelength in each case is 2047.76 nm for Type I and 1828.66 nm for Type II at room temperature. The results were compared with the non-broadband scheme at the telecom C-band.

선형 초점 적외선 가열에 의해 이축 집합조직화된 Ni 기판의 제조 (Fabrication of biaxially textured Ni substrate by line-focused infrared heating)

  • 정준기;김원정;정규동;배원태;김철진
    • 한국초전도ㆍ저온공학회논문지
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    • 제8권1호
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    • pp.19-22
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    • 2006
  • Desirable substrates for $YBa_2Cu_3O_{7-\delta}$ coated conductor are highly cube textured Ni or Ni-alloy tapes, which can be produced by cold rolling and recrystallization annealing. We have fabricated hi-axially textured pure Ni tapes for the application of coated conductors. The sintered Ni rod was cold-rolled into the thin tapes of $50{\mu}m$ thickness and the tapes were heat-treated for texture development with line-focused infrared heater. The temperature was maintained at $800\sim1050^{\circ}C$, using 1kW double ended linear halogen lamp in $96%Ar-4%H_2$ atmosphere The biaxially tortured Ni tapes were successfully formed by line-focused infrared heat treatment The texture of the annealed Ni tapes was analysed using the GADDS (general area detector diffraction system). The full width at half maximum values of phi and omega scan for the Ni tapes were less than $10^{\circ}$ and the grain size was $20-50{\mu}m$.