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검색결과 392건 처리시간 0.026초

CMP 가공된 사파이어웨이퍼의 웨이퍼내 표면전위에 관한 연구 (A Study on the Zeta-potential of CMP processed Sapphire Wafers)

  • 황성원;신귀수;김근주
    • 한국정밀공학회지
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    • 제22권2호
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    • pp.46-52
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    • 2005
  • The sapphire wafer was polished by the implementation of the surface machining technology based on nano-tribology, The removal process has been performed by grinding, lapping and chemical-mechanical polishing. For the chemical mechanical polishing process, the chemical reaction between the slurry and sapphire wafer was investigated in terms of the change of Zeta-potential between two materials. The Zeta-potential was -4.98 mV without the slurry in deionized water and was -37.05 mV for the slurry solution. By including the slurry into the deionized water the Zeta-potential -29.73 mV, indicating that the surface atoms of sapphire become more repulsive to be easy to separate. The average roughness of the polished surface of sapphire wafer was ranged to 1∼4$\AA$.

X선 회절을 이용한 배관용접부의 피로수명 평가 (Assessment of Fatigue Life for Pipeline Welds Using X-ray Diffraction Method)

  • 이상국;유근봉;김의현;최현선
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2005년도 추계학술발표대회 개요집
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    • pp.73-75
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    • 2005
  • The objective of this study is to estimate the feasibility of X-ray diffraction method application for fatigue life assessment of the high-temperature pipeline steel such as main steam pipe, reheater pipe and header etc. in power plant. In this study, X-ray diffraction tests using various types of specimen simulated low cycle fatigue damage were performed in order to analyze fatigue properties when fatigue damage conditions become various stages such as 1/4, 1/2 and 3/4 of fatigue life, respectively. As a result of X-ray diffraction tests for specimens simulated fatigue damages, we conformed that the variation of the full width at half maximum intensity decreased in proportion to the increase of fatigue life ratio.

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적층 양자점을 포함한 초발광 다이오드의 광대역 출력 파장 특성 연구

  • 박문호;임주영;박성준;송진동;최원준
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.156-156
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    • 2011
  • InAs와 InGaAs 양자점(Quantum Dot: QD)을 이용한 광대역 초발광 다이오드(Superluminescent Diode: SLD) 시료가 분자선증착법(Molecular Beam Epitaxy)을 이용하여 성장되었다. 광대역 파장대 출력을 얻기 위해 각기 다른 종류의 양자점과 다른 크기의 양자점을 적층하였다. 시료는 광발광(Photoluminescence: PL) 측정과 전계발광(Electroluminescence: EL) 측정을 통해 분석 되었으며, PL 측정결과 1222 nm와 1321 nm 파장에서 최대치(peak)를 나타냈으며 EL 측정결과 900mA 전류 주입시 131 nm의 반치폭(Full Width at Half Maximum: FWHM)을 얻었다.

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휘발성 유기화합물 탐지용 다공성 실리콘 Microcavity 센서 (Porous Silicon Microcavity Sensors for the Detection of Volatile Organic Compounds)

  • 박철영
    • 통합자연과학논문집
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    • 제2권3호
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    • pp.211-214
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    • 2009
  • A new porous silicon (PSi) microcavity sensor for the detection of volatile organic compounds (VOCs) was developed. PSi microcavity sensor exhibiting unique reflectivity was successfully obtained by an electrochemical etching of silicon wafer. When PSi was fabricated into a structure consisting of two high reflectivity muktilayer mirrors separated by an active layer, a microcavity was formed. This PSi microcavity is very sensitive structures. Reflection spectrum of PSi microcavity indicated that the full-width at half-maximum (FWHM) was of 10 nm and much narrower than that of fluorescent organic molecules or quantum dot. The detection of volatile organic compounds (VOCs) using PSi microcavity was achieved. When the vapor of VOCs condensed in the nanopores, the refractive indices of entire particle increased. When PSi microcavity was exposed to acetone, ether, and toluene, PSi microcavity in reflectivity was red shifted by 28 nm, 33 nm, and 20 nm for 2 sec, respectively.

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Characteristics of ZnO Thin Films Grown on p-type Si and Sapphire Substrate by Pulsed Laser Deposition

  • Lee, K. C.;Lee, Cheon
    • KIEE International Transactions on Electrophysics and Applications
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    • 제3C권6호
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    • pp.241-245
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    • 2003
  • ZnO thin films on (l00) p-type Si and sapphire substrates have been deposited by a pulsed laser deposition technique using an Nd:YAG laser with a wavelength of 266 nm. The influence of the deposition parameters such as oxygen pressure, substrate temperature and laser energy density on the properties of the grown films was studied. The experiments were performed for substrate temperatures in the range of 200∼50$0^{\circ}C$ and oxygen pressure in the range of 100∼700 sccm. All of the films grown in this experiment show strong c-axis orientation with (002) textured ZnO peak. With increasing substrate temperature, the FWHM (full width at half maximum) and surface roughness were decreased. In the case of using sapphire substrate, the intensity of PL spectra increased with increasing ambient oxygen flow rate. We investigated the structural and morphological properties of ZnO thin films using X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomic force microscopy (AFM).

Characteristics of Sŏlc Filters in X(2) Nonlinear Photonic Crystal

  • Kee, Chul-Sik;Lee, Jong-Min;Lee, Yeung-Lak
    • Journal of the Optical Society of Korea
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    • 제11권3호
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    • pp.130-132
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    • 2007
  • The characteristics of $S\breve{o}lc$ filters in $X^{(2)}$ nonlinear photonic crystals, periodically poled lithium niobate ($LiNbO_3$), were investigated by the Jones matrix method. The transmittance increases and the full width half maximum of the filter becomes narrow as the duty ratio increases. However, the filtering wavelength does not change. The transmittance at the filtering wavelength is over 95% when the duty ratio is larger than 0.35.

PLD 기술로 제작된 ZnO 박막의 특성 (Characterization of ZnO Thin Films prepared by Pulsed Laser Deposition Technique)

  • 노임준;신백균;이능헌;김용혁;지승한;이상희;한상옥
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2006년도 제37회 하계학술대회 논문집 C
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    • pp.1404-1405
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    • 2006
  • Transparent ZnO thin films were deposited on quartz substrates by a KrF pulsed laser deposition (PLD) technique with different process conditions such as substrate temperature ($T_s$) and oxygen ambient pressure ($pO_2$). Surface morphology, crystal structure, and electrical properties of the ZnO films were investigated in order to characterize their thin film properties. The pulsed laser deposited ZnO films showed highly c-oriented crystalline structures depending on the process conditions: the highest FWHM (Full Width Half Maximum) value of (002) peak was observed for the ZnO film prepared at $T_{s}=550^{\circ}C$, $pO_2$=5mTorr and laser fluence of $2J/cm^2$.

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In-situ SiN Mask를 이용하여 성장한 GaN 박막의 물성적, 광학적 특성 연구 (A Study of Physical and Optical Properties of GaN grown using In-situ SiN Mask by MOCVD)

  • 김덕규;정종엽;박춘배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.121-124
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    • 2004
  • We have grown GaN layers with in-situ SiN mask by metal organic chemical vapor deposition(MOCVD) and study the physical properties of the GaN layer. We have also investigate the effect of the SiN mask on its optical property. By inserting a SiN mask, (102) the full width at half maximum(FWHM) decreased from 480 arcsec to 409 arcsec. The PL intensity of GaN with SiN mask improved 2 times to that without SiN mask. We have thus shown that the SiN mask improved significantly the physical and optical properties of the GgN layer.

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DC sputter로 증착한 ZnO 박막의 결정성 향상에 관한 연구 (The study of ZnO crystalline improvement of FBAR)

  • 이규일;김응권;이태용;황현석;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.322-323
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    • 2005
  • We deposited Zinc oxide (ZnO) thin films on Ru buffer layer in order to protect the amorphous layer between ZnO and Al interface. In X-ray diffraction (XRD) pattern, it was observed that increase of (002)-orientation by the variation of annealing treatment temperature. Also, surface roughness and specific resistance were increased by annealing treatment but full width at half maximum (FWHM) was decreased. In film bulk acoustic resonators (FBARs) fabricated from these results, we finally confirmed that the resonant frequency of 0.89 GHz without its shift was measured.

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Investigation of the Changes of Fabry-Perot Fringe Patterns in Porous Silicon During Etching Process

  • Jang, Seunghyun
    • 통합자연과학논문집
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    • 제5권1호
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    • pp.13-17
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    • 2012
  • Changes of Fabry-Perot fringe patterns in porous silicon during etching process has been investigated. Four porous silicon samples were prepared with four different etch currents: (a) 10 $mA/cm^2$, (b) 30 $mA/cm^2$, (c) 50 $mA/cm^2$, (d) 100 $mA/cm^2$, respectively. Optical characterization of Fabry-Perot fringe pattern on porous silicon was achieved by Ocean optics 2000 spectrometer. The change of Fabry-Perot fringes was monitored and measured during the etching process. Fabry-Perot fringes pattern start to form after couple of minutes. As the etching time increased, more reflection peaks were observed. Its full width at half maximum (FWHM) decreased rapidly when the etching time increased.