• Journal of Institute of Control, Robotics and Systems
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• v.8 no.11
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• pp.970-975
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• 2002

We suggests an effective method to construct time-varying C-obstacles in the 3-dimensional configuration space (C-space) using free arc. The concept of free arc was defined mathematically and the procedure to find free arc in the case off-dimensional C-space was derived in [1]. We showed that time-varying C-obstacles can be constructed efficiently using this concept, and presented simulation results for two SCARA robot manipulators to verify the efficacy of the proposed approach. In this paper, extensions of this approach to the 3-dimensional C-space is introduced since nearly all industrial manipulators are reasonably treated ill the too or three dimensional C-space f3r collision avoidance problem The free arc concept is summarized briefly and the method to find lice arc in the 3-dimensional f-space is explained. To show that this approach enables us to solve a practical collision avoidance problem simulation results f3r two PUMA robot manipulators are presented.

• Journal of Institute of Control, Robotics and Systems
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• v.6 no.3
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• pp.317-328
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• 2000

This paper presents an effective approach to collision-free motion planning of a robot in the work-space including time-varying obstacles. The free arc is defined as a set composed of the configuration points of the robot satisfying collision-free motion constraint at each sampling time. We represent this free arc with respect to the new coordinate frame centered at the goal configuration and there for the collision-free path satisfying motion constraint is obtained by connecting the configuration points of the free arc at each sampling mined from the sequence of free arcs the optimality is determined by the performance index. Therefore the complicated collision-free motion planning problem of a robot is transformed to a simplified SUB_Optimal Collision Avoidance Problem(SOCAP). We analyze the completeness of the proposed approach and show that it is partly guaranteed using the backward motion. Computational complexity of our approach is analyzed theoretically and practical computation time is compared with that of the other method. Simulation results for two cally and practical computation time is compared with that of the other method. Simulation results for two SCARA robot manipulators are presented to verify the efficacy of the proposed method.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.565-565
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• 2013

Free burning arcs where the work piece acts as an anode are frequently used for a number of applications. Our investigation is exclusively concerned with a simplified unified model of arcs and anode under steady state conditions at atmospheric pressure. The model is used to make predictions of arc and anode temperatures and arc voltage for a 200 A arc in argon. The computed temperatures along the axis between the cathode tip and the anode surface compare well the measured data. This knowledge of free burning arcfeatures can play a role in developing the atmospheric plasma systems, however, further investigation should include the modelling of Cu evaporation from anode and non-LTE situation near electrodes for more realistic calculations.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.46-49
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• 2008

This paper deals with the free vibrations of elastica shaped arches with constant arc length. The elastica shaped arches are formed by the post-buckled column whose arc length is always constant. The equations governing free, in-plane vibration of general arch in open literature are modified for applying the free vibrations of elastica shaped arch and solved numerically to obtain frequencies and mode shapes for hinged-hinged end constraints. The effects of rotatory inertia, rise to span length ratio and slenderness ratio on natural frequencies are presented. The frequencies of elastica and parabolic shaped arches are compared. Also, typical mode shapes are presented in figures.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.255.2-255.2
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• 2014

Electrode erosion is indispensable for atmospheric plasma systems, as well as for switching devices, due to the high heat flux transferred from arc plasmas to contacts, but experimental and theoretical works have not identified the characteristic phenomena because of the complex physical processes. Our investigation is concerned with argon free-burning arcs with anode erosion at atmospheric pressure by computational fluid dynamics (CFD) analysis. We are also interested in the energy flux and temperature transferring to the anode with a simplified unified model of arcs and their electrodes. In order to determine two thermodynamic quantities such as temperature and pressure and flow characteristics we have modified Navier-Stokes equations to take into account radiation transport, electrical power input and the electromagnetic driving forces with the relevant Maxwell equations. From the simplified self-consistent solution the energy flux to the anode can be derived.

• Journal of Power System Engineering
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• v.21 no.2
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• pp.70-76
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• 2017

When Timoshenko arcs considering the shear deformation and rotatory inertia have elastic supports, the authors analyze in-plane free vibration of them by the transfer influence coefficient method. This method finds the natural frequencies of them using the transfer of influence coefficient after obtaining the transfer matrix of arc element from numerical integration of the differential equations governing the vibration of arc. In this study, two computer programs were made by the transfer influence coefficient method and the transfer matrix method for analyzing free vibration of Timoshenko arcs. From numerical results of four computational models, we confirmed that the transfer influence coefficient method is a reliable method when analyzing the free vibration of Timoshenko arcs. In particular, the transfer influence coefficient method is a effective method when analyzing the free vibration of arcs with rigid supports.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• Proceedings of the KIPE Conference
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• 2011.07a
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• pp.498-499
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• 2011

In this paper, the fundamental features of the arc stability DC arc furnace have been investigated, from the converter point of view. To compare of measurement arc data from DC arc furnace and the advanced arc simulations of magneto-hydrodynamics (MHD) and the well known Cassie-Mayr arc model have been extensively used. The MHD based arc simulation has been validated in the subcomponent level, for the free burning arc set up in the laboratory. The arc simulation predicted the arc voltage for different currents with the accuracy which satisfies engineering requirements. It has been shown that the arc current steepness at current zero determines the arc stability, and the associated peak arc resistance can be used as its quantitative measure. Based on the presented insight into the DC arc stability, a converter topology solution which realizes an optimal arc stability has been proposed. The main results presented in this paper provide a design guideline for the future DC arc furnace converter topology developments.

• Proceedings of the KIPE Conference
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• 2013.07a
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• pp.354-355
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• 2013

Fundamental features of the arc stability in DC arc furnace of 720V/100kA/72MW have been investigated. Cassie-Mayr arc model has been employed and applied for the target dc arc furnace. In order to characterize the parameters of Cassie-Mayr arc model and the behavior of unstable arc dynamics, the advanced arc simulations of magneto-hydrodynamics (MHD) has been performed. The MHD based arc simulation has been validated in the subcomponent level, for the free burning arc set up in the laboratory. From the results of MHD simulation, dc arc dynamic resistance is proposed to be an effective arc stability function reflecting the instability of dynamic arc behavior. The experimental result confirms the usefulness of proposed dynamic arc resistance as arc stability function. The proposed arc stability function can be regarded as an effective criterion for the overall power conversion system to maintain highly stable arcing operation leading to better productivity and reliability.

• Proceedings of the KWS Conference
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• 2002.05a
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• pp.121-122
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• 2002