• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1634-1636
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• 2004

반도체 웨이퍼의 면저항을 정밀 측정하는 대표적인 두가지 방법인 4탐침(four point probe)방법과 van der Pauw방법으로 반도체 웨이퍼의 면저항을 비교평가 하였다. 4탐침방법에 의한 측정 시스템을 사용하여 웨이퍼의 전체 면에 대하여 면저항을 측정하고, 같은 웨이퍼의 가장자리 네 지점에 탐침 전극을 구성한 후 van der Pauw 방법으로 면저항을 측정한 결과 4탐침 방법에 의한 측정결과를 기준으로 1 %이하의 일치도를 나타냈다.

• Journal of Applied Reliability
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• v.8 no.4
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• pp.155-166
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• 2008

PTH cracks are caused by the mismatch of coefficient of thermal expansion(CTE) between polymer and laminated materials, and are one of the main failure mechanisms of multi layer boards. In spite of its importance, it is usually hard to measure or detect them because of its small size and invisibility. To detect PTH cracks more effectively, this paper proposes a theoretical model that can estimate the resistance value from crack size of PTHs. Using four-point probe resistance measurement method, the resistance value of test coupons is measured. Through measured data, we verify the validity of the proposed theoretical model and set up criteria of failure.

• Nuclear Engineering and Technology
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• v.53 no.9
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• pp.2982-2989
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• 2021

One of the consequences of the 475 ℃ embrittlement of duplex stainless steels is the reduction of the resistance to localized corrosion. Therefore, the detection of this type of embrittlement before the material exhibits significant loss in toughness, and corrosion resistance is important to ensure the structural integrity of critical components under corrosion threats. In this research, conductivity measurements are performed using the alternating current potential drop (ACPD) technique with using a portable four-point probe as a nondestructive evaluation (NDE) method for detecting the embrittlement in a 2507 (UNS S32750) super duplex stainless steel (SDSS) aged at 475 ℃ from as-received condition to 300 h. The electric conductivity results were compared against two electrochemical tests namely double loop electrochemical potentiokinetic reactivation (DL-EPR) and critical pitting temperature (CPT). Mechanical tests and the microstructure characterized using scanning electron microscopy (SEM) imaging are conducted to track the progress of embrittlement. It is shown that the electric conductivity correlates with the changes in impact energy, microhardness, and CPT corrosion tests result demonstrating the feasibility of the four-point probe as a possible field-deployable method for evaluating the 475 ℃ embrittlement of 2507 SDSS.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.929-930
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• 2007

박막재료 및 반도체의 면저항 측정에는 주로 Four Point Probe(FPP) 원리를 이용한 측정기를 사용하고 있다. FPP에 의한 측정방식은 single 및 dual configuration method가 있으며, dual configuration은 single configuration에 비해 probe spacing 변화나 시료의 가장자리 효과 등에서 측정편차가 적은 장점이 있어서 dual configuration 기술을 사용하는 추세이다. 개발된 휴대용 면저항 측정기는 dual configuration원리를 적용하여 제작되었으며, 박막재료의 면저항을 누구나 쉽고 정확하게 측정할 수 있도록 설계되었다. 또한 시료의 크기가 핀 간격에 비해 5배 이상 크면 보정계수를 거의 무시할 수 있는 장점이 있어 작은 시료라도 정확한 면저항을 측정할 수 있다. 이측정기의 측정 불확도는 지시값의 1 % 이하이고, 측정범위는 (2$\sim$2000)$\Omega/sq$이다.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.60 no.12
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• pp.2276-2280
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• 2011

An indium-tin-oxide (ITO) is normally used as a substrate in organic photovoltaic cells. We examined the effects of an oxygen ($O_2$) plasma treatment on the electrical properties of an organic photovoltaic cell. Experiments with four-point probe method and atomic force microscope revealed the lowest surface resistance of 17.64 ${\Omega}$/sq and the lowest average surface roughness of 1.39 nm at the plasma treatment power of 250 W. A device structure of ITO/CuPc/$C_{60}$/BCP/$Cs_2CO_3$/Al was fabricated by thermal evaporation with and without the plasma treated ITO substrate. It was found that the power conversion efficiency of the cell with the plasma treated ITO is 65 % higher than the one without the plasma treated ITO.

• Proceedings of the KIEE Conference
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• 2011.07a
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• pp.2124-2125
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• 2011

금속의 비저항 측정방법은 4단자 방법, van der Pauw 방법, Four-Point Probe(FPP) 방법, eddy current 방법 등이 있다. 이들의 측정방법은 다르지만 동일한 시료에 대해 평가한 비저항은 측정 불확도 범위 내에서 일치하여야 한다. 이에 따라 균질한 비자성 금속(STS 316)을 선정한 후 비저항을 평가한 결과 4단자와 van der Pauw 방법에 의한 비저항(도전율)은 각각 75.86 ${\mu}{\Omega}{\cdot}cm$(2.273 %IACS)과 75.84 ${\mu}{\Omega}{\cdot}cm$(2.273 %IACS)로서 거의 동일한 결과를 나타냈으며, Four Point Probe(FPP) 방법은 75.91 ${\mu}{\Omega}{\cdot}cm$(2.271 %IACS), eddy current 방법은 76.63 ${\mu}{\Omega}{\cdot}cm$(2.25 %IACS)으로 나타났다.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.163.2-163
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• 2001

Confocal scanning microscopy (CSM) has been reported as an excellent method using the optical probe in scanning probe microscopy (SPM). Transmission or reflection confocal scanning microscopy (TCSM, RCSM) has been used in the three-dimensional reconstruction of specimen or the non-destructive measurement in vivo. The axial movement of the primary focal point having the information of specimen gives a good measurement performance with the great sensitivity. Application of the confocal theory and astigmatism to displacement measurement sensor uses the aperture as the pinhole or slit after collecting lens relating to confocal response in non-contact measurement; and astigmatic lens using four-segments detector as short-range sensor, long-range one combining the grating and rotary one hating the rotary directional grating. The aperture type can play an ...

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.498-499
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• 2007

금속 비저항의 측정방법은 4단자 방법을 비롯한 van der Pauw 방법, Four-Point Probe(FPP) 방법, eddy current 방법 등이 사용되고 있으며, 시료의 혈상과 크기에 따라서 그 측정방법은 각각 다르다. 본 연구에서는 그 중 4단자 방법에 의한 정밀측정방법과 측정불확도 평가에 관하여 고찰하였다. 4단자 방법은 시료가 바(bar)나 봉(rod) 형상이면 측정이 가능하며, 시료의 정밀가공과 측정기술을 통하여 측정 불확도를 줄일 수 있다.

• Journal of the Korean Vacuum Society
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• v.5 no.1
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• pp.54-61
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• 1996

Indium-tin oxide (ITO) films were deposited on the glass substrate by the reactive -ionized cluster beam deposition(ICBD) method. In the oxygen atmosphere, indium cluster formed through the nozzle is ionized by the electron bombardment and is accelerated to be deposited on the substrate. And tin is simultaneoulsy evaporated from the boron-nitride crucible. The chracteristics of films were examined by the X-ray photoelectron spectroscopy(XPS), glancing angle X-ray diffractrion(GXRD) and the electrical properties. were measured by 4-point-probe and Hall effect measurement system . From the XPS spectrum , it was found that indium and tin atoms combined with the oxygen to form oxide$(In_2O_3, SnO_2)$. In the case of films with high tin-concentration, the GXRD spectra show that the main $In_2O_3$ peak of (222) plane, but also sub peaks((440) peak etc.) and $SnO_2$ peaks were detected. From that results, itis concluded that the heavily dopped tin component (more than 14 at. %) disturbs to form $In_2O_3$(222) phase. Four-point-probe and Hall effect measurement show that, in the most desirable case, the transmittance of the films is more then 90% in visible range and its resistivity is $$\rho$=3.55 \times10^{-4}\Omega$cm and its mobility is $\mu$=42.8 $\textrm{cm}^2$/Vsec.

• Journal of the Korean Chemical Society
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• v.34 no.6
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• pp.555-560
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• 1990

High temperature superconducting films of $YBa_2Cu_3O_{7-x}$ were fabricated on the (100) single crystal faces of YSZ (yttria stabilized zirconia) and SrTi$O_3$ by aerosol spray using ultrasonic atomization. The superconducting phase was formed by a three-step process: (a) spraying of a stoichiometric solution of nitrates of yttrium, barium, and copper on heated substrates kept at 250$^{\circ}C$, (b) preheating of the sprayed films in air at 550$^{\circ}C$, and (e) sintering of the films in flowing oxygen at 950$^{\circ}C$, followed by furnace cooling. Resistances of the films were measured by the dc four-probe method and superconductivity was confirmed above the liquid nitrogen temperature.