• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.481-482
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• 2006

Chemical-mechanical polishing, the dominant technology for LSI planarization, is trending to play an important function in micro-electro mechanical systems (MEMS). However, MEMS CMP process has a couple of different characteristics in comparison to LSI device CMP since the feature size of MEMS is bigger than that of LSI devices. Preliminary CMP tests are performed to understand material removal rate (MRR) with blanket wafer under a couple of polishing pressure and velocity. Based on the blanket CMP data, this paper focuses on the consumable approach to enhance MEMS CMP by the adjustment of slurry and pad. As a mechanical tool, newly developed microstructured (MS) pad is applied to compare with conventional pad (IC 1400-k Nitta-Haas), which is fabricated by micro melding method of polyurethane. To understand the CMP characteristics in real time, in-situ friction force monitoring system was used. Finally, the topography change of poly-si MEMS structures is compared according to the pattern density, size and shape as polishing time goes on.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 기술교육전문연구회
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• pp.75-81
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• 2003

This study evaporates ZnO layer thickness differently with RF sputtering method on Si Wafer(n-100). This study is performed to examine the characteristics of photon energy and dielectric loss according to the thickness of ZnO and increase the reliability and reproduction of ZnO thin film. It is confirmed that the variation of electric Permittivity by frequency is resulted from the formation of particles within thin film, the particle size and the polarization on grain boundary. Peak of electric Permittivity value of thin film has slower and less value in early low wavelength by the coulomb force involved in carrier combination according to the increase of frequency. Reversal of electric Permittivity values is induced by dipole polarization shown in the dielectric of thin film. Complex electric constant $({\varepsilon}_1{\varepsilon}_2)$ has larger peak values as it’s thickness is thinner and then it is larger according to the increase of frequency. Electric Permittivity by photon energy has large value in imaginary number and is reduced exponentially by the increase of carrier density according to that of photon energy.

• 한국응급구조학회지
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• 제12권3호
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• pp.129-135
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• 2008

Purpose : This study was to analyze the demand for emergency ambulance service and to characterize the factors associated with the demand. Method : The basis for the model was from the actual demand for public emergency ambulance and socioeconomic and geographic characteristics. Multiple regression analyses were done for the related characteristics of public ambulance service. Result : The model explained total demand with a high degree of accuracy : the coefficient of determination($R^2=0.96$). For the regression, the set of variables indicative of low socioeconomic status were all significant. It showed the inappropriate use of public ambulance system. Public ambulance demand increased in higher housing density, low income, male unemployment and female labor force. Conclusion : The demand for public ambulances appeared to be highly predictable, using a simple linear model employing socioeconomic variables, quality of service variables, and land use variables. Low-income families tended, to use the public ambulance system more often than higher income. Area having elderly people or children also made many calls. Estimated demand calls were stable and had a tendency to be similar incident types.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 제4회 영호남학술대회 논문집
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• pp.73-79
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• 2002

This study evaporates ZnO layer thickness' differently with RF sputtering method on Si Wafer(n-100). This study is performed to examine the characteristics of photon energy and dielectric loss according to the thickness of ZnO and increase the reliability and reproduction of ZnO thin film. It is confirmed that the variation of electric Permittivity by frequency is resulted from the formation of particles within thin film, the particle size and the polarization on grain boundary. Peak of electric Permittivity value of thin film has slower and less value in early low wavelength by the coulomb force involved in carrier combination according to the increase of frequency. Reversal of electric Permittivity values is induced by dipole polarization shown in the dielectric of thin film. Complex electric constant $({\varepsilon}_1,{\varepsilon}_2)$ has larger peak values as it's thickness is thinner and then it is larger according to the increase of frequency. Electric Permittivity by photon energy has large value in imaginary number and is reduced exponentially by the increase of carrier density according to that of photon energy.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.310-310
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• 2010

Electronic and photovoltaic characteristics of two sensitizers (TA-BTD-CA and TA-BTD-St-CA), composed of a different $\pi$-conjugation in the linker group, have been investigated by theoretical and experimental methods. The electronic structure, transition dipole moment and oscillator strengths of two sensitizers have been scrutinized by using density functional theory (DFT) and time-dependent DFT (TD-DFT) method. The LUMO level and the oscillator strength of TA-BTD-St-CA was higher than that of TA-BTD-CA, which may facilitate the electron injection process as well as increase the absorption coefficient. The relative efficiencies of the electron injection from the excited sensitizer to nanocrystalline TiO2 and SnO2 films have also been investigated by nanosecond transient absorption spectroscopy. The relative electron injection efficiency of TA-BTD-St-CA exhibited similar injection efficiency for two different semiconductors. However, in the case of TA-BTD-CA sensitizer, electron injection into SnO2 was approximately three times larger than that into TiO2. This enhancement of electron injection of TA-BTD-CA for the SnO2 is due to the increment of the driving force caused by positive shift of conduction band of semiconductor, which was also confirmed from the investigation for the photovoltaic characteristics according to the electrolyte additive, such as LiI additive.

• International Journal of Naval Architecture and Ocean Engineering
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• 제6권1호
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• pp.14-26
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• 2014

This paper provides the prediction of ultimate longitudinal strengths of the hull girders of a very large crude carrier considering probabilistic damage extent due to collision and grounding accidents based on IMO Guidelines (2003). The probabilistic density functions of damage extent are expressed as a function of non-dimensional damage variables. The accumulated probabilistic levels of 10%, 30%, 50%, and 70% are taken into account for the estimation of damage extent. The ultimate strengths have been calculated using the in-house software called Ultimate Moment Analysis of Damaged Ships which is based on the progressive collapse method, with a new convergence criterion of force vector equilibrium. Damage indices are provided for several probable heeling angles from $0^{\circ}$ (sagging) to $180^{\circ}$ (hogging) due to collision- and grounding-induced structural failures and consequent flooding of compartments. This paper proves from the residual strength analyses that the second moment of area of a damage section can be a reliable index for the estimation of the residual ultimate strength. A simple polynomial formula is also proposed based on minimum residual ultimate strengths.

• Nuclear Engineering and Technology
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• 제55권3호
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• pp.927-938
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• 2023

The blanket plays an important role in fusion reactor and stands extremely high thermal and electromagnetic loads during operation situation and plasma disruption event, brings the need for precise thermal and electromagnetic analysis. Since the thermal field and EM field interact with each other nonlinearly, we develop a method of electromagnetic-thermal two-way coupling by using finite element software COMSOL. The coupling analyses of blanket under steady state and MD event are implemented and the results are analyzed. For steady state, the influences of coupling effects are relatively small but still recommended to be considered for a high precision analysis. The influence of thermal field on EM field can't be ignored under MD events. The variation of force density could cause a significant change in stress in certain parts of blanket. The influence of Joule heat during MD event is negligible, yet the potential temperature rise caused by induced current after MD event still needs to be researched.

• 한국건축시공학회:학술대회논문집
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• 한국건축시공학회 2022년도 가을 학술논문 발표대회
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• pp.73-74
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• 2022

The corrosion inhibitive effect of a new hydrazone-based heterocyclic compound for steel in simulated concrete pore solution with 3.5 wt.% sodium chloride was investigated by experimental and computational techniques. Electrochemical studies, up to 30 days of immersion, and surface analysis (X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), and scanning electron microscope (SEM)) were performed to assess the corrosion protection abilities of investigated compound for steel rebar. Results showed that adding the organic compound to the chloride contaminated concrete pore solution decreased the corrosion rate of the steel rebar thanks to the effective adsorption of inhibitor molecules. After 30 days of immersion of steel rebar in inhibited chloride contaminated synthetic concrete pore solution, the inhibition efficiency exceeded 80% at low concentration of 1 mmol/L. Computational studies by Density Functional based Tight Binding (DFTB) method revealed the formation of covalent bonds between the hydrazone molecule and the iron surface.

• 한국초전도ㆍ저온공학회논문지
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• 제25권4호
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• pp.24-27
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• 2023

Until now, many research activities have been conducted to commercialize high-temperature superconducting (HTS) wires for electric applications. Most of all researchers have focused on enhancing the piece length, critical current density, mechanical strength, and throughput of HTS wires. Recently, HTS magnet for generating high magnetic field shows degraded performance due to the deformation of HTS wire by high electro-magnetic force. The deformation can be derived from widthwise thickness non-uniformity of HTS wire mainly caused by wet processes such as electro-polishing of metal substrate and electro-plating of copper. Gradient sputtering process is designed to improve the thickness uniformity of HTS wire along the width direction. Copper stabilizing layer is deposited on HTS wire covered with specially designed mask. In order to evaluate the thickness uniformity of HTS wire after gradient sputtering process, the thickness distribution across the width is measured by using the optical microscope. The results show that the gradient deposition process is an effective method for improving the thickness uniformity of HTS wire.

• Advances in nano research
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• 제16권5호
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• pp.445-458
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• 2024

The objective of this paper is to present free vibration and static stability analyses of rotating composite beams reinforced with carbon nanotubes (CNTs) under uniform thermal loads. Beam structural equations and CNT-reinforced composite (CNTRC) beam formulations are derived based on Timoshenko beam theory (TBT). The temperature-dependent properties of the beam material, such as the elastic modulus, shear modulus, and material density, are assumed to vary over the thickness according to the rule of mixture. The beam material is modeled as a mixture of single-walled carbon nanotubes (SWCNTs) in an isotropic matrix. The SWCNTs are aligned and distributed in the isotropic matrix with different patterns of reinforcement, namely the UD (uniform), FG-O, FG-V, FG- Λ and FG-X distributions, where FG-V and FG- Λ are asymmetric patterns. Numerical examples are presented to illustrate the effects of several essential parameters, including the rotational speed, hub radius, effective material properties, slenderness ratio, boundary conditions, thermal force, and moments due to temperature variation. To the best of the authors' knowledge, this study represents the first attempt at the finite element modeling of rotating CNTRC Timoshenko beams under a thermal environment. The results are presented in tables and figures for both symmetric and asymmetric distribution patterns, and can be used as benchmarks for further validation.