• 반도체디스플레이기술학회지
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• 제7권3호
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• pp.29-34
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• 2008

This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.

• Molecules and Cells
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• 제41권11호
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• pp.964-970
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• 2018

Atherosclerosis preferentially involves in prone area of low and disturbed blood flow while steady and high levels of laminar blood flow are relatively protected from atherosclerosis. Disturbed flow induces endoplasmic reticulum (ER) stress and the unfolded protein response (UPR). ER stress is caused under stress that disturbs the processing and folding of proteins resulting in the accumulation of misfolded proteins in the ER and activation of the UPR. Prolonged or severe UPR leads to activate apoptotic signaling. Recent studies have indicated that disturbed flow significantly up-regulated $p-ATF6{\alpha}$, $p-IRE1{\alpha}$, and its target spliced XBP-1. However, the role of laminar flow in ER stress-mediated endothelial apoptosis has not been reported yet. The present study thus investigated the role of laminar flow in ER stress-dependent endothelial cell death. The results demonstrated that laminar flow protects ER stress-induced cleavage forms of PARP-1 and caspase-3. Also, laminar flow inhibits ER stress-induced $p-eIF2{\alpha}$, ATF4, CHOP, spliced XBP-1, ATF6 and JNK pathway; these effects are abrogated by pharmacological inhibition of PI3K with wortmannin. Finally, nitric oxide affects thapsigargin-induced cell death in response to laminar flow but not UPR. Taken together, these findings indicate that laminar flow inhibits UPR and ER stress-induced endothelial cell death via PI3K/Akt pathway.

• 한국농업기계학회:학술대회논문집
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• 한국농업기계학회 1996년도 International Conference on Agricultural Machinery Engineering Proceedings
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• pp.500-510
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• 1996

A Direct injection -mixing total -flow -control sprayer was developed and evaluated . The system provided precise application rates and minimized operator exposure to chemicals as well as providing a possibility for recycling container so f unused chemicals that can causes environmental contamination. Chemicals were metered and injected proportionally to the diluent flow rate to provide constant concentrations. The main diluent flow was varied in response to changes in travel speed. Experimental variables of the sprayer were the control interval, the sensitivity of flow regulating valve, the tolerance of control object and the sensitivity of the injection pump system. The optimal performance of the flow control system was with an average response time of 8.5 sec at an absolute steady state of error of 0.067 L/min (0.8% of flow rate). The average response time of the injection rate was -0.53 sec and the coefficient of variation (CV) of concentration was 3.2%.

• 대한설비공학회지:설비저널
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• 제16권2호
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• pp.185-193
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• 1987

The heat transfer characteristics from a solid sphere in a fluctuating air flow is simulated numerically in the range of the Reynolds numbers, $1\;{\leqslant}\;Re\;{\leqslant}\;40.$ Such a situation may be encountered in forced convection from a heated spherical particle in a sound field or oscillat-ing flow. The amplitude and phase delay in the heat transfer response to the flow oscillation are computed for a small amplitude flow. The instantaneous response of heat transfer is simulated for the large amplitude oscillation and compared with the quasi-steady response. The effect of the oscillation on the time - mean value in the local and overall heat transfer rate is discussed along with the change in the flow .field.

• 한국습지학회지
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• 제20권1호
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• pp.35-42
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• 2018

본 연구에서는 도심구간 하천의 수생식물을 대상으로 흐름에 대한 대응양상 판단 및 식재영역 결정을 목표로 하였다. 수생식물로서 달뿌리풀, 갈대, 물억새, 개여뀌 및 고마리를 선정하고 흐름의 유속과 수심 및 식생의 성장도에 대하여 대응 분석하여 상기 수생식물의 식재영역을 결정하였다. 수생식물의 대응은 일반적으로 흐름에 대하여 안정, 회복, 훼손 및 유실로 구분되었다. 현지 조사 결과 수생식물의 회복과 훼손 정도는 식생의 휘어짐 각도를 기준으로 대략 $30^{\circ}{\sim}50^{\circ}$의 범위에서 구분되었다. 식생은 달뿌리풀, 갈대, 물억새, 개여뀌 순으로 흐름에 대한 대응력이 컸다. 달뿌리풀은 뿌리의 강한 고착력으로 수심이 0.9 m에서 유속 1.5 m/s까지 대응력이 강했다. 갈대는 수심 1.0 m와 유속 0.9 m/s 범위 내에서 흐름에 대응 가능하였다. 물억새는 대체적으로 수심 1.0 m와 유속 0.6 m/s 이하가 식재 가능 영역으로 제한된 식재 범위를 나타내었다. 개여뀌나 고마리는 흐름에 대한 대응력이 보다 약하며, 수심이 1.0 m를 넘는 경우 유속이 조금만 커져도 생존이 어려웠다. 상기 결과를 이용하여 수생식물 각 수종별 식재영역을 제시하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집E
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• pp.595-600
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• 2001

Thermal mass flow meter(TMF) and thermal mass flow controller(MFC) were used to measure and to control the mass flow rate of gases. TMF and MFC were designed for specified working pressure and gas. For the case of different working pressure and gases, the flow rate measurement accuracy decreased dramatically. In this study, a TMF and MFC was tested with three different gases and pressure range from 0.2 MPa up to 1.0 MPa. Effect of specific heat causes to increase flow measurement error as much as ratio of specific heat compared with reference gas. Changing of pressure causes to increase flow rate measurement error about -0.2% as the working pressure decreased 0.1 MPa. Response time of MFC was below 3.12 s for the case of increasing of flow rate. But the response time was increased up to 6.92 s for the case of decreasing of flow rate. When the solenoid valve was fully closed, a initial delay time of output of MFC was increased up to 1.36 s.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.1028-1033
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• 2004

The heat and flow characteristics in a single-phase parallel-flow heat exchanger was examined numerically to obtain its optimal shape. A response surface method was introduced to predict its performance approximately with respect to design parameters over design domain. Design parameters are inflow and outflow angle of the working fluid and horizontal and vertical location of inlet and outlet. The evaluation of the relative priority of the design parameters was performed to choose three important parameters in order to use a response surface method. A JF factor was used as an evaluation characteristic value to consider the heat transfer and the pressure drop simultaneously. The JF factor of the optimum model, compared to that of the base model, was increased by about 5.3%.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 1999년도 유체기계 연구개발 발표회 논문집
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• pp.118-122
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• 1999

Thermal mass flow meter was developed using principle of convective heat transfer. The advantage of thermal mass flow meter is measuring mass flow directly, therefore, it is not required to use densitometer or temperature/pressure and DP gages. The final accuracy of this thermal mass flow meter is $\pm1.0{\%}$ or better, reproducibility is $\pm0.2{\%}$, and the response time is 600 ms. The thermal mass flow meter was developed from a single point to multi-points (maximum is 9 points), and the number of points is determined according to desired accuracy and size of piping/duct. Since this thermal mass flow meter adopted microprocessor based design, it is intrinsically accurate, self-error detectable, and has self-diagnosis function. The applications of this thermal mass flow meter are for measurement and control of HVAC air flow, other gas flow, and liquid flow.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.308-313
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• 2003

Thermal mass flow meters (TMFMs) are most widely used for measuring mass flow rates in the semiconductor industry. A TMFM should have a short response time in order to measure the time-varying flow rate rapidly and accurately. Therefore it is important to study transient heat transfer phenomena in the sensor tube of a TMFM that is the most critical part in the TMFM. In the present work, a simple numerical model for transient heat transfer phenomena of the sensor tube of a TMFM is presented. Numerical solutions for the tube and fluid temperatures in a transient state are obtained using the proposed model and compared with experimental results to validate the proposed model. Based on numerical solutions, heat transfer mechanism in a transient state in the sensor tube is explained. Finally, a correlation for predicting the response time of a sensor tube is presented. The correlation is verified by experimental results.

• 설비공학논문집
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• 제15권6호
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• pp.480-488
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• 2003

The purpose of this research Is to derive the principal design parameters governing the dynamic characteristics of the high response flow control servo valve. For this purpose, a numerical modeling of the servo valve system and a parameter sensitivity analysis to a frequency response characteristics was peformed. As a result of these analysis, a basis for improvement of a dynamic characteristics of servo valve was arranged.