• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.244-247
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• 2002

The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1439-1443
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• 2007

In this paper, vibration reduction techniques of a voice coil motor (VCM) actuator are presented for AFM imaging system. The damping coefficient of the actuator driven by VCM with a flexure hinge is quite low and it cause the about 30dB peak amplitude response at the resonance frequency. To decrease this peak response, we design and apply elliptical band-stop filters to xy and z axis VCM actuator. Frequency response of each actuator with filter is measured to verify the effect of the filters. As a sensor, capacitive sensor is used. Vibration reduction rate of the xy actuator with the filter is also measured while real AFM scanning condition. As another method, closed loop control with the capacitive sensor is applied to the xy axis actuator to add an electrical damping effect and vibration reduction rate measured. These vibration reduction rates with each method are compared. In the case of z axis actuator, the frequency response of force (gap) control loop is measured. For comparison, the frequency response using a conventional PID controller is also obtained. Finally, the AFM image of a standard grid sample is measured with the designed controller to analyze the effect in the AFM imaging.

• Structural Engineering and Mechanics
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• 제66권4호
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• pp.531-542
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• 2018

In this paper an analytical model in a closed form able to reproduce the monotonic flexural response of external RC beam-column joints with smooth rebars is presented. The column is subjected to a constant vertical load and the beam to a monotonically increasing lateral force applied at the tip. The model is based on the flexural behavior of the beam and the column determined adopting a concentrated plasticity hinge model including slippage of the main reinforcing bars of the beam. A simplified bilinear moment-axial force domain is assumed to derive the ultimate moment associated with the design axial force. For the joint, a simple truss model is adopted to predict shear strength and panel distortion. Experimental data recently given in the literature referring to the load-deflection response of external RC joints with smooth rebars are utilized to validate the model, showing good agreement. Finally, the proposed model can be considered a useful instrument for preliminary static verification of existing external RC beam-column joints with smooth rebars for both strength and ductility verification.

• 한국공작기계학회논문집
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• 제15권4호
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• pp.44-48
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• 2006

Recently, demand the ultra precision product which is increasing rapidly is used extensively frontier industry field such as semi-conductor, computer, aerospace, precision machine. Ultra precision processing is the portion that is very needed to NT in the field of mechanical engineering. The latest date, together with radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts those are connected with these industrial fields. Specially, require motion accuracy of high resolution of nm order in stroke of hundreds millimeters according as diameter of processing object great and processing accuracy rises. In this case ,the response speed absolute delay because inertial mass of moving part is very large. Therefore, real time motion error compensation becomes very hardly. In this paper, we used ultra precision cutting unit(UPCU) to cope such problem. a UPCU is designed and tested to obtain sub-micrometer from accuracy in diamond turning of flat surfaces. The thermal growth spindle error is compensated for real time using a UPCU driven by piezoelectric actuator along with a laser encoder displacement sensor.

• 대한기계학회논문집A
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• 제31권1호
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• pp.62-69
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• 2007

Micromanipulator is a device that manipulates an object with high precision. Generally, a parallel-type robot has inherently higher precision than a serial-type robot. In most cases, the use of flexure hinge mechanisms is the most appropriate approach to micromanipulators. The micromanipulator is basically required that have high natural frequency and sufficient workspace. However, previous designs are hard to satisfy the required workspace and natural frequency, simultaneously, because the previous micromanipulators are coupled designs. Therefore, this paper suggests a new design parameter as displacement amplifier and new design procedure based on semi-coupled design in axiomatic design. As a consequence the spatial 3-DOF micromanipulator which is chosen as an exemplary device has natural frequency of 500Hz and workspace of $-0.5^{\circ}{\sim}0.5^{\circ}$. To investigate the effectiveness of the displacement amplifier, simulation and experiment are performed.

• 한국정밀공학회지
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• 제34권1호
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• 한국기계가공학회지
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• 제12권1호
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• pp.97-103
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• 2013

A new precision positioning mechanism for stage was been developed by Displacement Magnification Device(DMD) in this paper. The DMD was composed of the beam and multilayer piezoelectric actuators. The theoretical and experimental analysis of DMD to enlarge displacement more then 50times were discussed. And the 2-axis stage by using displacement amplification apparatus was added in the new DMD, and it was able to do it through finite element analysis and experiment. As the results, the magnification of DMD can be obtained about $100{mu}m$ displacement to the 10V input voltage($1.5{mu}m$). And the about 50nm of linearity error in the $30{mu}m$ measurement range and 20times of the amplification in displacement can be measured. In addition, the experimental results are confirmed the possibility of millimeter displacement characteristics and correspond to finite element analysis results.

• 한국지진공학회:학술대회논문집
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• 한국지진공학회 1997년도 춘계 학술발표회 논문집 Proceedings of EESK Conference-Fall 1997
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• pp.182-190
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• 1997

A new method to prevent reinforced concrete columns from brittle failure. The method is called transversely reinforcing method in which only the critical regions are confined in steel tube. The steel tubes can change the failure mode of the latter columns from the shear to the flexure. The steel tubes also increase the compressive strength, shear strength and deformation capacity of the infilled concrete. The following conclusions are reached on bases of the study on the seismic performance of the high-strength RC rectangualr short columns confined in steel tube with shear span tho depth ratio of 2.0 The brittle shear failure of high-strength reinforced concrete short columns with large amount of longitudinal bars, which cannot prevented by using the maximum amount of welded hoops, can be prevented by using the steel tube which confines all the maximum amount of welded hoops, can be prevented by using the steel tube which confines all the concrete inclusive of cover concrete. High-strength RC short columns confined in rectangular steel tube provided excellent enhancement of seismic performance but, found that plastic buckling of the steel tube in the hinge regions tended to occur when the columns were subjected to large cyclic lateral displacements. In order to prevent the plastic buckling when the columns lies on large on cyclic lateral displacements, the steel ribs were used for columns. Tests have established that the columns provide excellent enhancement of seismic performance of inadequately confined columns.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.762-769
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• 2003

본 연구에서는 적층형 압전소자를 이용하여 초소형 및 슬림형 광디스크 드라이브용 광픽업 구동기를 개발하였다. 최근에 휴대용 정보기기의 급격한 발달로 인해 다양한 형태의 초소형 정보저장기기가 사용되고 있으며 착탈식 형태의 초소형 광디스크를 사용하는 ODD가 개발 중에 있다. 적층 형태의 압전소자와 유연 힌지 형태의 변위 확대기구를 사용하여 구동기의 출력 힘과 허용 변위를 증가시키도록 설계하였다. 압전형 구동기의 동특성을 고려한 모델링과 이론적 해석을 통해 목표 변위와 성능을 만족하도록 설계 변수를 최적화하였고 이를 ANSYS를 이용한 해석과 비교하였다. 상용화된 적층형 압전소자를 이용한 prototype 올 제작하여 실험을 수행하였으며 이론적인 예상 값과 잘 일치함을 보였다. 이와 같은 이론적 해석과 실험 결과를 토대로 높이가 2.5mm이며 15V 에서 $\pm$400$\mu\textrm{m}$의 변위를 갖는 슬림형 및 초소형 ODD에 적합한 압전형 구동기를 설계하였다.

• 한국공작기계학회논문집
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• 제18권1호
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• pp.36-41
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• 2009

This paper presents the development of a micro punching system with modified cymbal mechanism. To realize the micro punching, we introduced the hybrid system with a macro moving part and micro punching part. The macro moving part consists of a ball screw, a linear guide and the micro step motor and micro punching part includes the PZT actuators and displacement amplification device with modified cymbal mechanism. The PZT actuator is capable of producing very large force, but they provide only limited displacements which are several micro meters. Thus the displacement amplification device is necessary to make those actuators more efficient and useful. For this purpose, a cymbal mechanism in series is proposed. The finite element method was used to design the cymbal mechanism and to analyze the mode shape of the one. The displacement and mode shape error between the FEM results and experiments are within 10%. A considerable design effort has been focused on optimizing the flexure hinge to increase the output displacement and punching force.