• Design & Manufacturing
• /
• v.16 no.3
• /
• pp.22-27
• /
• 2022

The demand for new processing technology that can improve productivity is increasing in industries that require large-scale and various products. In response to this demand, a robot machining system with flexibility is required. Because of the low rigidity of the robot, the robot machining system has a large error during machining and is vulnerable to vibration generated during machining. Vibration generated during machining deteriorates machining quality and reduces the durability of the machine. To solve this problem, a stage for fixing the spindle during machining is required. In order to compensate for the robot's low rigidity, a system combining a piezoelectric actuator for generating a large force and a guide mechanism to actuate with a desired direction is required. Since the rigidity of flexible hinges varies depending on the structure, it is important to optimal design the flexible hinge and high-rigidity system. The purpose of this research is to make analytic model and optimize a flexible hinge and to design a high rigidity stage. In this research, to design a flexible hinge stage, a concept design of system for high rigidity and flexure hinge modeling is carried out. Based on analytic modeling, the optimal design for the purpose of high rigidity is finished and the optimal design results is used to check the error between the modeling and actual simulation results.

• Journal of the Korean Society for Precision Engineering
• /
• v.20 no.2
• /
• pp.168-175
• /
• 2003

In this research, a bridge-type flexure hinge mechanism is developed and optimized to amplify the displacement of a multilayer piezostack. Developed hinge mechanism has three-dimensional structure to reduce link size, so it have high amplification ratio with respect to small size. A flexure hinge is assumed to be 6 degree-of-freedom spring elements and matrix methods are used to model a hinge mechanism. To verify derived matrix model, a displacement and frequency experiments are performed. The analysis result shows that the displacemental error between matrix model and experiments is below 10 percents and the deformation of hinge in parasitic direction should be considered In hinge modeling. Using developed matrix model, an optimal design is performed to maximize the performance of hinge mechanism.

• Journal of the Korean Society of Propulsion Engineers
• /
• v.10 no.3
• /
• pp.73-81
• /
• 2006

In order to evaluate the thrust of a propulsion system, generally the captive thrust stand is used Based on the applied propulsion system, the various captive ways between thrust stand and the propulsion system are considered. In this paper, the effect of motor deformation generated during firing in horizontal thrust stand on the measured thrust is theoretically derived from classical beam theory. New flexure performance index is defined and estimated on the basis of the thrust measurement error. Its result is good agreement with numerical result of ABAQUS. This study showed that measurement reliability and safety of test can be highly upgraded, in case of two flexure-type captive thrust stand.

• Journal of the Korea Institute of Military Science and Technology
• /
• v.26 no.3
• /
• pp.205-213
• /
• 2023

An optimal design of a simple beam-shaped flexure hinge mount supporting an optical mirror is presented. An optical mirror assembly is an opto-mechanically coupled system as the optical and mechanical behaviors interact. This side-supporting mount is flexible in the radial direction and rigid for the remaining degrees of freedom to support the mirror without transferring thermal load. Through thermo-elastic, optical and eigenvalue analysis, opto-mechanical performance was predicted to establish the objective functions for optimization. The key design parameters for this flexure are the thickness and length. To find the optimal values of design parameters, response surface analysis was performed using the design of experiment based on nested FCD. Optimal design candidates were derived from the response surface analysis, and the optimal design shape was confirmed through Opto-mechanical performance validation analysis.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.21 no.11
• /
• pp.554-560
• /
• 2020

In the manufacturing process of flat panel displays, a high-precision planar motion stage is used to position a specimen. Stages of this type typically use frictionless linear motors and air bearings, and laser interferometers. Real-time dynamic correction of the yaw motion error is very important because the inevitable yaw motion error of the stage means a change in the specimen orientation. Gantry control is generally used to compensate for yaw motion errors. Flexure units that allow rotational motion are applied to the stage to apply this method to a stage using an air-bearing guide. This paper proposes a method to improve the constant speed motion performance of a H-type XY stage equipped with air bearing and flexure units. When applying the gantry control to the stage, including the flexure units, the cause of the mutual ripple generated from the linear motors is analyzed, and adaptive learning control is proposed to compensate for the mutual ripple. A simulation was performed to verify the proposed method. The speed ripple was reduced to approximately the 22 % level. The ripple reduction was verified by simulating the stage state where yaw motion error occurs.

• Journal of the Korean Society for Precision Engineering
• /
• v.32 no.3
• /
• pp.263-268
• /
• 2015

This paper describes lost motion analysis for a novel 6-DOF ultra-precision positioning stage. In the case of flexure hinge based precision positioning stage, lost motion is generated when the displacement of actuator is not delivered completely to the end-effector because of the elasticity of flexure hinge. Consequently, it is need to compute amount of lost motion to compensate the motion or to decide appropriate control method for precision positioning. Lost motion analysis for the vertical actuation unit is presented. The analysis results are presented in two ways: analytic and numerical analyses. It is found that they closely coincide with each other by 1% error. In finite element analysis result, the amount of lost motion is turned out to be about 3%. Although, the amount is not so large, it is necessary procedure to check the lost motion to establish the control method.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1438-1441
• /
• 2005

To establish of standard technique of nano-length measurement in 2D plane, new AFM system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of XY scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch and yaw motion. In this paper, an AFM system with minimum offset of XY sensing is designed. And XY scanning stage is designed to minimize rotation angle because Abbe errors occur through the multiply of offset and rotation angle. To minimize the rotation angle optimal design has performed by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. This paper describes the design scheme of full AFM system, especially about XY stage. Full range of fabricated XY scanner is $100um\times{100um}$. And tilting, pitch and yaw motion are measured by autocollimator to evaluate the performance of XY stage. Using this AFM system, 3um pitch specimen was measured. As a result, the uncertainty of total system has been evaluated.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1997.10a
• /
• pp.539-542
• /
• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• Journal of Institute of Control, Robotics and Systems
• /
• v.7 no.4
• /
• pp.369-373
• /
• 2001

This paper is concerned with a transfer alignment of SDINS under ship motions. To reduce alignment errors induced by the ship body flexure, an error compensation method is suggested based on velocity and DCM partial matching, and by interpreting the simulation results and comparing with the conventional velocity and quaternion partial matching, it is shown that the proposed method is effective enough to improve the azimuth alignment performance.

• Journal of Institute of Control, Robotics and Systems
• /
• v.7 no.11
• /
• pp.953-957
• /
• 2001

This paper is concerned with a transfer alignment method for the SDINS under ship motions. Major error sources of transfer alignment are data transfer time-delay, lever-arm velocity and ship body flexure. Specifically, to reduce alignment errors induced by measurement time-delay effects, the error compensation method through delay state augmentation is suggested. A linearized error model for the velocity and attitude matching transfer alignment system is first derived by linearizing the nonliner measurement equation with respect to its time delay and augmenting the delay state into the conventional linear state equations. And then it is shown via observability analysis and computer simulations that the delay state can be estimated and compensated during ship motions resulting in considerably less alignment errors.