• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.100-101
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• 2012

The plasma damage free and room temperature processedthin film deposition technology is essential for realization of various next generation organic microelectronic devices such as flexible AMOLED display, flexible OLED lighting, and organic photovoltaic cells because characteristics of fragile organic materials in the plasma process and low glass transition temperatures (Tg) of polymer substrate. In case of directly deposition of metal oxide thin films (including transparent conductive oxide (TCO) and amorphous oxide semiconductor (AOS)) on the organic layers, plasma damages against to the organic materials is fatal. This damage is believed to be originated mainly from high energy energetic particles during the sputtering process such as negative oxygen ions, reflected neutrals by reflection of plasma background gas at the target surface, sputtered atoms, bulk plasma ions, and secondary electrons. To solve this problem, we developed the NBAS (Neutral Beam Assisted Sputtering) process as a plasma damage free and room temperature processed sputtering technology. As a result, electro-optical properties of NBAS processed ITO thin film showed resistivity of $4.0{\times}10^{-4}{\Omega}{\cdot}m$ and high transmittance (>90% at 550 nm) with nano- crystalline structure at room temperature process. Furthermore, in the experiment result of directly deposition of TCO top anode on the inverted structure OLED cell, it is verified that NBAS TCO deposition process does not damages to the underlying organic layers. In case of deposition of transparent conductive oxide (TCO) thin film on the plastic polymer substrate, the room temperature processed sputtering coating of high quality TCO thin film is required. During the sputtering process with higher density plasma, the energetic particles contribute self supplying of activation & crystallization energy without any additional heating and post-annealing and forminga high quality TCO thin film. However, negative oxygen ions which generated from sputteringtarget surface by electron attachment are accelerated to high energy by induced cathode self-bias. Thus the high energy negative oxygen ions can lead to critical physical bombardment damages to forming oxide thin film and this effect does not recover in room temperature process without post thermal annealing. To salve the inherent limitation of plasma sputtering, we have been developed the Magnetic Field Shielded Sputtering (MFSS) process as the high quality oxide thin film deposition process at room temperature. The MFSS process is effectively eliminate or suppress the negative oxygen ions bombardment damage by the plasma limiter which composed permanent magnet array. As a result, electro-optical properties of MFSS processed ITO thin film (resistivity $3.9{\times}10^{-4}{\Omega}{\cdot}cm$, transmittance 95% at 550 nm) have approachedthose of a high temperature DC magnetron sputtering (DMS) ITO thin film were. Also, AOS (a-IGZO) TFTs fabricated by MFSS process without higher temperature post annealing showed very comparable electrical performance with those by DMS process with $400^{\circ}C$ post annealing. They are important to note that the bombardment of a negative oxygen ion which is accelerated by dc self-bias during rf sputtering could degrade the electrical performance of ITO electrodes and a-IGZO TFTs. Finally, we found that reduction of damage from the high energy negative oxygen ions bombardment drives improvement of crystalline structure in the ITO thin film and suppression of the sub-gab states in a-IGZO semiconductor thin film. For realization of organic flexible electronic devices based on plastic substrates, gas barrier coatings are required to prevent the permeation of water and oxygen because organic materials are highly susceptible to water and oxygen. In particular, high efficiency flexible AMOLEDs needs an extremely low water vapor transition rate (WVTR) of $1{\times}10^{-6}gm^{-2}day^{-1}$. The key factor in high quality inorganic gas barrier formation for achieving the very low WVTR required (under ${\sim}10^{-6}gm^{-2}day^{-1}$) is the suppression of nano-sized defect sites and gas diffusion pathways among the grain boundaries. For formation of high quality single inorganic gas barrier layer, we developed high density nano-structured Al2O3 single gas barrier layer usinga NBAS process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nano- crystalline phase with various grain sizes in a single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the NBAS processed $Al_2O_3$ gas barrier film have improved order of magnitude compared with that of conventional $Al_2O_3$ layers made by the RF magnetron sputteringprocess under the same sputtering conditions; the WVTR of the NBAS processed $Al_2O_3$ gas barrier film was about $5{\times}10^{-6}g/m^2/day$ by just single layer.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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• pp.614-615
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• 2005

The use of plastic substrates enables new applications, such as flexible display devices, and other flexible electronic devices, using low cost, roll-to-roll (R2R) fabrication technologies. One of the limitations of polymeric substrate in these applications is that oxygen and moisture rapidly diffuse through the material and subsequently degrade the electro-optical devices. GE Global Research (GEGR) has developed a plastic substrate technology comprised of a superior high-heat polycarbonate ($LEXAN^{(R)}$) substrate film and a unique transparent coating package that provides the ultrahigh barrier (UHB) to moisture and oxygen,chemical resistance to solvents used in device fabrications, and a high performance transparent conductor. This article describes the coating solutions for polycarbonate ($LEXAN^{(R)}$) films and its compatibility with OLED device fabrication processes.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2003년도 춘계학술대회 논문집
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• pp.185-191
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• 2003

A numerical study on the hydrodynamic properties of a floating flexible breakwater consisting of triple vertical porous membrane structures attached to a floating rigid pontoon restrained by moorings is carried out in the context of two-dimensional linear wave-flexible body interaction theory. The tensions in the triple membranes are achieved by hanging a clump weight from its lower ends. The clump weight is also restrained properly by moorings. The dynamic behavior of the breakwater was described through an appropriate Green function, and the fluid multi-domains are incorporated into the boundary integral equation. Numerical results are presented which illustrate the effects of the various wave and structural parameters on the efficiency of the breakwater as a barrier to wave action. It is found that the wave reflection and transmission properties of the structures depends strongly on the membrane length taking major fraction of water column, the magnitude of tensions on membrane achieving by the clump weight, proper mooring types and stiffness, the permeability on the membrane dissipating wave energy.

• 한국해안해양공학회:학술대회논문집
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• 한국해안해양공학회 1997년도 정기학술강연회 발표논문 초록집 Annual Meeting of Korean Society of Coastal and Ocean Engineers
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• pp.135-138
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• 1997

The interaction of oblique monochromatic incident waves with a horizontal flexible membrane is investigated in the context of two-dimensional linear hydro-elastic theory. First, analytic diffraction and radiation solutions for a submerged impermeable horizontal membrane are obtained. Second, the theoretical prediction was compared with a series of experiments conducted in a two-dimensional wave tank at Texas A&M University. The measured reflection and transmission coefficients reasonably follow the trend of predicted values. Using the developed computer program, the performance of surface-mounted or submerged horizontal membrane wave barriers is tested with various system parameters and wave characteristics. It is found that the properly designed horizontal flexible membrane can be an effective wave barrier and its efficiency can be further improved using a porous material.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.351-351
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• 2010

OLED(organic light emitting diode)는 액정디스플레이를 대체할 차세대 평판디스플레이로 많은 주목을 받고 있다. 현재 많이 사용되고 있는 OLED의 기판재료는 Glass기판이지만 차세대 Flexible한 display에서의 적용을 위해서는 가볍고 유연한 plastic을 기판 재료로 사용 할 것으로 보인다. 하지만 plastic이 기판재료로 된 OLED의 가장 큰 단점중의 하나가 수분과 산소에 민감하여 열화를 초래한다는 것이다. 이런 수분침투와 열화 과정으로 인해 OLED의 발광효과가 약해져 OLED의 수명과 직접적으로 연결된다. 하여 외부에서 OLED내부로 유입되는 산소, 수분으로 부터 발광재료와 전극의 산화를 방지하며 외부의 충격으로부터 소자를 보호하기 위한 봉지기술은 반드시 필요하다. 따라서 본 연구에서는, flexible한 OLED에 적용되는 금속 코팅한 막의 적층구조 및 기판의 노출온도에 따른 금속 코팅막의 수분침투 특성에 대해 MOCON의 weight gain test (WGT)를 통해 barrier layer에 대해 평가하고 이에 대한 mechanism을 확립하는데 그 목적이 있다. 금속을 코팅한 막은 OLED의 cathode와 anode 재료로 많이 사용되는 Al과 ITO를 sputter장비를 이용해 single layer와 double-layer의 두 가지 구조로 PET기판에 증착하였다. 증착한 Al막의 두께는 각각 50 nm, 100 nm, 200 nm, 400 nm 등 4가지로 하였다. double-layer의 경우에는 총 두께를 절반씩 기판의 양쪽에 증착하였다. 적층구조에 따른 수분침투 특성 평가 결과로 보면 같은 두께일 때 double-layer는 single layer에 비해서 모든 시편에서 수분의 투습율이 낮음으로써 더 좋은 수분침투의 barrier 특성을 나타내었다. 특히 100 nm이상인 경우 투습율은 예상한 값보다 50%이상 낮게 나타났다.

• 폴리머
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• 제37권3호
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• pp.373-378
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• 2013

폴리카보네이트(PC) 필름을 유연기판으로 사용하기 위해서는 $SiO_x$ 증착에 의한 베리어 특성 개선이 필요하며 이때 베리어 층과 PC 계면 접착력이 매우 중요하다. 본 연구에서는 언더 코팅, UV/$O_3$ 및 저온 플라즈마와 같은 다양한 표면 처리 방법에 의하여 PC 필름 표면을 개질하여 표면의 물리적 화학적 변화가 증착된 베리어 층 계면 접착력에 미치는 영향을 살펴보았다. 표면 처리 전의 PC 필름은 표면 거칠기 및 표면 에너지가 매우 낮아 $SiO_x$ 베리어 층과의 접착력이 현저히 떨어짐을 알 수 있었다. PC 필름을 저온 플라즈마로 표면 처리한 결과, 표면의 거칠기 증가와 극성 관능기 생성에 의하여 극성 표면 에너지가 향상되는 반면 UV/$O_3$ 처리의 경우, 표면 거칠기 변화 없이 표면에 생성된 극성 관능기에 의해 극성 표면 에너지가 증가됨을 알 수 있었다. 이러한 표면의 변화는 베리어층과 PC 기판의 계면 접착력 증가에 기여함을 알 수 있었다. 표면 처리 방법으로 언더 코팅을 사용하는 경우 표면에 에너지를 가하지 않아도 코팅제의 아크릴산과 $SiO_x$의 접착력 향상에 의하여 PC 필름과의 계면 접착력이 증가되며 유무기 하이브리드 다층 구조에 의한 베리어 특성 개선이 함께 일어남을 알 수 있었다.

• 한국도로학회논문집
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• 제9권3호
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• pp.39-50
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• 2007

원형 혹은 H형 단면의 표지판지주에 소형차가 충돌할 때 차량 및 지주의 거동을 확인하기 위하여 Barrier VII 프로그램을 이용한 시뮬레이션을 실시하였다. 이 프로그램은 연성 베리어에 충돌하는 차량의 운동과 베리어의 변위를 해석하는 프로그램이나, 지주를 수평 빔 요소로 하고 각 노드에 강성을 조절한 기둥 요소로 연결함으로써 소형지주에 대한 충돌해석이 가능함을 보였다. 0.9ton 소형차가 기초와 강결된 파이프형태의 소형 지주에 30km/h, 60km/h, 70km/h 110km/h의 속도로 충돌하는 경우, 0.9ton 소형차와 1.35ton 중형차가 기초에 강결된 H형 단면 지주에 110km/h의 속도로 충돌하는 경우, 그리고 0.9ton 소형차가 분리되는(slip base) 형태로 기초에 연결된 파이프형태의 소형 지주에 110km/h의 속도로 충돌하는 경우 등 총 7가지 경우에 대한 시뮬레이션을 실시하여 지주의 변형과 충돌차량의 거동을 분석하였다. 시뮬레이션을 통하여 고속충돌 시 기초에 강결 된 원형지주의 경우 과다한 휨 변형으로 표지판과 차량 전면부와의 충돌위험성이 있고 H형 지주와 같이 비교적 큰 표지판용 지주는 소형차 충돌 시 지주의 변형은 거의 없고 차량에 가해지는 충격력, 지주가 과다하게 차체 안으로 침투할 위험성이 크다는 사실과 breakaway 장치로 단부처리를 하는 경우 위험이 줄어들 수 있음을 확인하였다.

• 한국포장학회지
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• 제24권1호
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• pp.13-16
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• 2018

Powdered infant formula is susceptible to oxidation in the presence of oxygen. Even though the product is usually packaged in nitrogen atmosphere, the oxygen ingress through the package layer may occur in case of flexible pouches and affects the oxidation of the product. $O_2$ barrier of the package is thus important variable to protect the product from oxidative deterioration. $O_2$ barrier property was investigated for aluminum-laminated small pillow packs of $3.5{\times}17.5cm$. Storage temperature and combination of primary and secondary packages were evaluated as variables affecting the barrier for conditions of empty pouch flushed with nitrogen. Apparent oxygen transmission rate of the primary package exposed to air was $2.32{\times}10^{-3}mL\;(STP)\;atm^{-1}\;d^{-1}$ at $30^{\circ}C$ and its temperature dependence could be explained by activation energy of $28.5kJ\;mol^{-1}$ in Arrhenius relationship. The additional secondary package of nylon/PE film containing 20 primary packages was ineffective in modulating package $O_2$ transmission and was only marginally helpful when combined with oxygen scavenger. The same was true in suppressing the product oxidation when the primary package was filled with 14 g of the formula.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.95-95
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• 2014

An OLED(Organic Light-Emitting Diode) device based on the emissive electroluminescent layer a film of organic materials. OLED is used for many electronic devices such as TV, mobile phones, handheld games consoles. ULVAC's mass production systems are indispensable to the manufacturing of OLED device. ULVAC is a manufacturer and worldwide supplier of equipment and vacuum systems for the OLED, LCD, Semiconductor, Electronics, Optical device and related high technology industries. The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and TCO (Transparent Conductive Oxide) films. ULVAC has delivered a large number of these systems not only Organic Evaporating systems but also LTPS CVD systems. The most important technology of thin-film encapsulation (TFE) is preventing moisture($H_2O$) and oxygen permeation into flexible OLED devices. As a polymer substrate does not offer the same barrier performance as glass substrate, the TFE should be developed on both the bottom and top side of the device layers for sufficient lifetimes. This report provides a review of promising thin-film barrier technologies as well as the WVTR(Water Vapor Transmission Rate) properties. Multilayer thin-film deposition technology of organic and inorganic layer is very effective method for increasing barrier performance of OLED device. Gases and water in the organic evaporating system is having a strong influence as impurities to OLED device. CRYO pump is one of the very useful vacuum components to reduce above impurities. There for CRYO pump is faster than conventional TMP exhaust velocity of gases and water. So, we suggest new method to make a good vacuum condition which is CRYO Trap addition on OLED evaporator. Alignment accuracy is one of the key technologies to perform high resolution OLED device. In order to reduce vibration characteristic of CRYO pump, ULVAC has developed low vibration CRYO pumps to achieve high resolution alignment performance between Metal mask and substrate. This report also includes ULVAC's approach for these issues.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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• pp.609-613
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• 2005

Advanced mobile communication devices require a bright, high information content display in a small, light-weight, low power consumption package. In this paper we will outline our progress towards developing such a low power consumption active-matrix flexible OLED ($FOLED^{TM}$) display. Our work in this area is focused on three critical enabling technologies. The first is the development of a high efficiency long-lived phosphorescent OLED ($PHOLED{TM}$) device technology, which has now proven itself to be capable of meeting the low power consumption performance requirements for mobile display applications. Secondly, is the development of flexible active matrix backplanes, and for this our team are employing poly-Si TFTs formed on metal foil substrates as this approach represents an attractive alternative to fabricating poly-Si TFTs on plastic for the realization of first generation flexible active matrix OLED displays. Unlike most plastics, metal foil substrates can withstand a large thermal load and do not require a moisture and oxygen permeation barrier. Thirdly, the key to reliable operation is to ensure that the organic materials are fully encapsulated in a package designed for repetitive flexing. We also present progress in operational lifetime of encapsulated T-PHOLED pixels on planarized metal foil and discuss PHOLED encapsulation strategy.