• 대한치과보철학회지
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• 제32권2호
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• pp.212-224
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• 1994

The purpose of this study was to evaluate and compare film thickness of five kinds of resin luting cements [Comspan, Panavia Ex, Maryland bridge adhesive, All-bond C & B cementation kit, and Super-bond C & B]. Zinc-phosphate cement and glass-ionomer cement were used as the control group. In order to measure the film thickness the methods used were in broad compliance with ADA Specification No. 8, a tapered-die system that simulates clinical conditions more closely, and the connected tapered-die system that simulates bridge conditions. The inorganic filler size of resin cements was also examined with scanning electron micrographs. The results were obtained as follows ; 1. The film thickness of resin cements was increased in the order of Comspan, Panavia Ex, Super-bond C & B, Maryland bridge adhesive, and All-bond C & B cementation kit. Maryland bridge adhesive and All-bond C & B cementation kit showed significantly higher film thickness than the control group(p<0.01). 2. For all resin cements, there was a significant difference of film thickness between the ADA method and the tapered-die system. Generally, the tapered-die system demonstrated lower film thickness than the ADA method(p<0.01). 3. There was no significant difference in film thickness between the tapered-die system and the tapered-die bridge system in all resin cements(p<0.01). 4. The scanning electron microscope showed that the cement with larger filler had a tendency to be higher in film thickness.

• 한국진공학회지
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• 제17권3호
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• pp.240-246
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• 2008

수십에서 수백 ${\mu}m$ 영역의 필름 두께 측정에 적용하기 위한 Ag-target 투과양극형 x-ray tube를 개발하고 특성을 조사하였다. 10kV 부근의 관전압에서 x-ray 에너지의 분포 및 선량특성을 조사하고 W-target tube와 비교하여 논의하였다. 또한 Ag-target tube와 W-target tube를 이용하여 Ny film과 PP film의 두께변화에 따른 x-ray의 투과 특성으로 조사하였고, 그 결과 개발된 x-ray tube는 필름두께 측정용으로 적용할 수 있을 만큼 충분히 좋은 특성을 나타내었다.

• Current Optics and Photonics
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• 제1권5호
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• pp.505-513
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• 2017

Measuring the thickness of thin films is strongly required in the display industry. In recent years, as the size of a pattern has become smaller, the substrate has become larger. Consequently, measuring the thickness of the thin film over a wide area with low spatial sampling size has become a key technique of manufacturing-yield management. Interferometry is a well-known metrology technique that offers low spatial sampling size and the ability to measure a wide area; however, there are some limitations in measuring the thickness of the thin film. This paper proposes a method to calculate the thickness of the thin film in the following two steps: first, pre-estimation of the thickness with the phase at the peak position of the interferogram at the bottom surface of the thin film, using white-light phase-shift interferometry; second, accurate correction of the measurement by fitting the interferogram with the theoretical pattern through the estimated thickness. Feasibility and accuracy of the method has been verified by comparing measured values of photoresist pattern samples, manufactured with the halftone display process, to those measured by AFM. As a result, an area of $880{\times}640$ pixels could be measured in 3 seconds, with a measurement error of less than 12%.

• Tribology and Lubricants
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• 제38권5호
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• pp.199-204
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• 2022

This paper presents a numerical investigation of the influence of water molecule thickness on frictional behavior at the nanoscale using molecular dynamics simulation. Three different models, comprising water thin films of various thicknesses, were built, and indentation and sliding simulations were performed using the models. Various normal loads were applied by indenting the Si tip on the water film for the sliding simulation to evaluate the interplay between the water thin film thickness and the normal load. The results of the simulations showed that the friction force generally increased with respect to the normal load and thickness of the water thin film. The friction coefficient varied with respect to the normal load and the water film thickness. The friction coefficient was the smallest under a moderate normal force and increased with decreasing or increasing normal loads. As the water film became thicker, the contact area between the tip and water film became larger. Under well-lubricated conditions, the friction force was proportional to the contact area regardless of the water film thickness. As the normal force increased above a critical condition, the water molecules beneath the Si tip spread out; thus, the film could not provide lubrication. Consequently, the substrate was permanently deformed by direct contact with the Si tip, while the friction force and friction coefficient significantly increased. The results suggest that a thin water film can effectively reduce friction under relatively low normal load and contact pressure conditions. In addition, the contact area between the contacting surfaces dominates the friction force.

• Tribology and Lubricants
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• 제25권6호
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• pp.367-373
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• 2009

Many research of elastohydrodynamic lubrication (EHL) has been performed under the condition of steady state loading. However, mechanical elements undergo severe high loads that are in the fluctuating modes of frequency and amplitude. Conventional numerical method for the circular contact of EHL study has the difficulty in making the film thickness and pressure of EHL converged in high loads of steady state as well as fluctuating loading conditions. In this work, multigrid multilevel method are used for the stable convergence of film pressure and thickness under the conditions of high as well as varying loads, and very stable solutions of film behaviors with elastic deformation are obtained. Several results of dynamic loading condition are shown and compared with those of steady state condition in the aspects of circular EHL film thickness and pressure.

• Journal of Mechanical Science and Technology
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• 제15권7호
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• pp.859-865
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• 2001

This paper reports on the theoretical analysis of mixed lubrication for the piston ring. The analytical model is presented by using the average flow and asperity contact model. The cyclic variations of the nominal minimum oil film thickness are obtained by numerical iterative method. The total friction is calculated by using the hydrodynamic and asperity contact theory. The effect of the roughness height, pattern, and engine speed on the nominal minimum film thickness, friction force, ad frictional power losses are investigated. As the roughness height increases, the nominal oil film thickness and total friction force increase. Also, the effect of the surface roughness on the boundary friction is dominant at low engine speed and high asperity height. The longitudinal roughness pattern shows lower mean oil film pressure and thinner oil film thickness compared to the case of the isotropic and transverse roughness patterns.

• 반도체디스플레이기술학회지
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• 제19권1호
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• pp.17-22
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• 2020

Recently, the decrease in thin film thickness has been actively studied by changing several physical elements such as the increase in revolution velocity of lower substrate equipped with AC or DC motor. In this paper, we propose a novel spin coater control system that changes AC or DC motor and common use software with limitation of velocity and position control into step motor and LABVIEW software based on GUI to control revolution velocity and position more precisely. By determining six input values of rotation velocity 1, 5, 10, 25, 50, 100 PPS, we fabricated six samples using coating target, TA(tantalum) on silicon substrate and measured their thin film thickness by SEM. Hence, this research can be applied to inferring thin film thickness of tantalum regarding any value of revolution velocity without additional experiments and for linear reference model via property analysis of thin film thickness using other thin-film materials.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.320-320
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• 2013

Film thickness monitoring with plasma impedance monitoring (PIM) is demonstrated for small area $SiO_2$ RF plasma etching processes in this work. The chamber conditions were monitored by the impedance signal variation from the I-V monitoring system. Moreover, modified principal component analysis (mPCA) was applied to estimate the $SiO_2$ film thickness. For verification, the PIM was compared with optical emission spectroscopy (OES) signals which are widely used in the semiconductor industry. The results indicated that film thickness can be estimated by 1st principal component (PC) and 2nd PC. Film thickness monitoring of small area $SiO_2$ etching was successfully demonstrated with RF plasma harmonic impedance monitoring and mPCA. We believe that this technique can be potentially applied to plasma etching processes as a sensitive process monitoring tool.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1999년도 제29회 춘계학술대회
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• pp.147-155
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• 1999

The film thickness and shape of elastohydrodynamic lubrication is measured by optical interferometer, which is the most precise method for EHL film measurement. However the interpretation of the image pattern from optical viscometer is not easy for two-dimensional shape. A newly developed method of image processing makes it possible to evaluate the film thickness and shape in every point of contact region with two dimensional aspects. In this study, we captured film shape of EHL film from the monochromatic incident light with the Image processing method, which uses phase shift method, and obtained the image analysis method for gray level image in order to qualitatively evaluate film shapes.

• 에너지공학
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• 제7권2호
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• pp.180-186
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• 1998

본 연구에서는 벤토나이트 혼합액의 유동특성 등을 파악하기 위형 전단속도에 따른 점도의 변화를 측정하였으며, 박막형성에 관한 특성을 파악하기 위하여 혼합비 및 점도에 따른 박막두께를 측정하였다. 또한 건조 후 박막이 박막의 두께에 따른 오염표면에서 분리되는 특성을 조사하였으며 벤토나이트의 흡착성능에 영향을 미치는 비표면적을 측정하기 위하여 BET 방법을 이용하였다. 점도는 혼합비의 증가에 따라 감소하였으며 건조박막의 두께는 혼합비가 증가할수록 두꺼워진다. 건조박막의 분리특성은 혼합비가 5에서 10% 이내로 박막이 40에서 150$\mu\textrm{m}$가 적당하다.