• 제목/요약/키워드: film structure

검색결과 3,916건 처리시간 0.03초

Fabrication of Novel Thin Film Diode with Multi-step Anodic Oxidation and Post Heat-treatment

  • Hong, Sung-Jei;Lee, Chan-Jae;Moon, Dae-Gyu;Kim, Won-Keun;Han, Jeong-In
    • Transactions on Electrical and Electronic Materials
    • /
    • 제3권4호
    • /
    • pp.27-31
    • /
    • 2002
  • Thin film diode with reliable interfacial structure was fabricated by using multi-step anodic oxidation. The thickness of the oxide layer was preciously controlled with anodic voltage. Also, interfacial structure between oxide layer and top electrode was improved by applying post heat-treatment. The thin film diode showed symmetric and stable I-V characteristics after the post heat-treatment.

소형 직접 메탄올 연료전지를 위한 나노 합금 전극 (Nanostructured Alloy Electrode for use in Small-Sized Direct Methanol Fuel Cells)

  • 박경원;최종호;박인수;남우현;성영은
    • 한국전기화학회:학술대회논문집
    • /
    • 한국전기화학회 2003년도 연료전지심포지움 2003논문집
    • /
    • pp.83-88
    • /
    • 2003
  • PtRu alloy and $PtRu-WO_3$ nanocomposite thin-film electrodes for methanol electrooxidation were fabricated by means of a sputtering method. The structural and electrochemical properties of well-defined PtRu alloy thin-film electrodes were characterized using X-ray diffraction, Rutherford backscattering spectroscopy. X-ray photoelectron spectroscopy, and electrochemical measurements. The alloy thin-film electrodes were classified as follows: Pt-based and Ru-based alloy structure. Based on structural and electrochemical understanding of the PtRu alloy thin-film electrodes, the well-controlled physical and (electro)chemical properties of $PtRu-WO_3$, showed superior specific current to that of a nanosized PtRu alloy catalyst, The homogeneous dispersion of alloy catalyst and well-formed nanophase structure would lead to an excellent catalytic electrode reaction for high-performance fuel cells. In addition, the enhanced catalytic activity in nanocomposite electrode was found to be closely related to proton transfer in tungsten oxide using in-situ electrochemical transmittance measurement.

  • PDF

Bonding and Etchback Silicon-on-Diamond Technology

  • Jin, Zengsun;Gu, Changzhi;Meng, Qiang;Lu, Xiangyi;Zou, Guangtian;Lu, Jianxial;Yao, Da;Su, Xiudi;Xu, Zhongde
    • The Korean Journal of Ceramics
    • /
    • 제3권1호
    • /
    • pp.18-20
    • /
    • 1997
  • The fabrication process of silicon-diamond(SOD) structure wafer were studied. Microwave plasma chemical vapor deposition (MWPCVD) and annealing technology were used to synthesize diamond film with high resistivity and thermal conductivity. Bonding and etchback silicon-on-diamond (BESOD) were utilized to form supporting substrate and single silicon thin layer of SOD wafer. At last, a SOD structure wafer with 0.3~1$\mu\textrm{m}$ silicon film and 2$\mu\textrm{m}$ diamond film was prepared. The characteristics of radiation for a CMOS integrated circuit (IC) fabricated by SOD wafer were studied.

  • PDF

PVDF 필름을 이용한 구조물의 동적 변형률 측정 (Measurements of Dynamic Strain of Structures Using PVDF Films)

  • 김수민;신성우;이재용;김남식
    • 한국안전학회지
    • /
    • 제26권6호
    • /
    • pp.64-70
    • /
    • 2011
  • In this study, the applicability of PVDF films for measurements of dynamic strain in a structure was investigated. A relationship between the strain and the voltage response of a PVDF film was analytically derived. Free vibration test on a steel cantilever beam was performed and vibration response of the beam was measured both by a convential foil strain gauge and a PVDF film. Strain-voltage relationship obtained from the experiment was compared with the analytic relationship. Good agreement between the analytic and experimental relationships was observed. It was found that a tailored PVDF film can measure the dynamic strain of a structure as accurate as a conventional foil strain gauge.

Fabrication of 3-Dimensional LiMn2O4 Thin Film

  • Park, Bo-Gun;Ryu, Jea Hyeok;Choi, Won Youl;Park, Yong-Joon
    • Bulletin of the Korean Chemical Society
    • /
    • 제30권3호
    • /
    • pp.653-656
    • /
    • 2009
  • 3-Dimensionally ordered macroporous $LiMn_2O_4$ thin film was prepared by a sol-gel and dip coating method on Pt/Ti/$SiO_2$/Si substrate. An opal structure consisting of mono dispersed polystyrene beads (300 nm) was used as a template. After solution containing Mn and Li precursors was coated on the template-deposited substrate, the template and organic materials in the precursors was removed by calcination at 400 ${^{\circ}C}$. And then the 3-dimensional $LiMn_2O_4$ thin film with spinel structure was fabricated by heat treatment at 700 ${^{\circ}C}$. The structural and electrochemical property was investigated by XRD, SEM and charge-discharge cycler.

MOCVD법으로 제조된 알루미나 박막의 특성 (Characteristics of Alumina Film Prepared by MOCVD)

  • 최두진;임공진;정형진;송한상;김창은
    • 한국세라믹학회지
    • /
    • 제27권6호
    • /
    • pp.790-798
    • /
    • 1990
  • Al2O3 film was chemically deposited by pyrolytic decom,positio of the Al-tri-isopropoxide/N2 system at 350$^{\circ}C$, 30 and 1.86torr. FTIR analysis showed a deposited film was a hydrated alumina and transformed to an anhydrous one after heat treatment(1hr, >800$^{\circ}C$ or 4hr, >500$^{\circ}C$) in N2 atmosphere. This transformation influenced on the CV-hysteresis of Si-Al2O3 structure. Also, a pH sensitivity of EIS(Electrolyte-Insulator-Semiconductor)structure using Si-Al2O3/SiO2 film was 50mV/pH in the range of pH 3 to 7.

  • PDF

Electrical Properties of Metal-Ferroelectric-Semiconductor Structures Based on Ferroelectric P(VDF-TrFE) Copolymer Film

  • Lee, Gwang-Geun;Park, Hyeong-Jin;Han, Hui-Seong;Park, Byung-Eun
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
    • /
    • pp.85-86
    • /
    • 2007
  • A poly(vinylidene fluoride-trifluoroethyene) (P(VDF-TrFE)) copolymer thin film having ${\beta}$ phase was prepared by sol-gel method. The electrical properties of the film were studied to evaluate the possibility for appling to a ferroelectric random access memory. In order to characterize its electrical properties, we produced a MFS (metal-ferroelectric-semiconductor) structure by evaporation of Au electrodes. The C-V (capacitance-voltage) measurement revealed that the Au/P(VDF-TrFE)/Si structure with a 4 wt% film had a memory window width of about 0.5V for a bias voltage sweep of 1V.

  • PDF

Crystal structure of the epitaxial $BaTiO_{3}$ thin film on the MgO (100) substrate prepared by the coating-pyrolysis process

  • Kim, S.;Kwon, O.Y.;Choi, S.W.;Manabe, T.;Yamaguchi, I.;Kumagai, T.;Mizuta, S.
    • 한국결정성장학회지
    • /
    • 제10권6호
    • /
    • pp.378-380
    • /
    • 2000
  • The epitaxial $BaTiO_{3}$ thin film was prepared on the MgO substrate by the coating-pyrolysis process using a mixed solution of Ba-naphthenate and Ti-naphthenate. The crystal structure of the epitaxial $BaTiO_{3}$ thin film was characterized by XRD ${\theta}/2{\theta}$ scan and asymmetric {303} rocking curve scan. The epitaxial $BaTiO_{3}$ thin film had the cubic phase with the lattice parameter of a = c = 0.4018 nm.

  • PDF

DMAB첨가량에 따른 연성회로기판을 위한 무전해 Ni 도금박막에 관한 연구 (DMAB Effects in Electroless Ni Plating for Flexible Printed Circuit Board)

  • 김형철;나사균;이연승
    • 한국재료학회지
    • /
    • 제24권11호
    • /
    • pp.632-638
    • /
    • 2014
  • We investigated the effects of DMAB (Borane dimethylamine complex, C2H10BN) in electroless Ni-B film with addition of DMAB as reducing agent for electroless Ni plating. The electroless Ni-B films were formed by electroless plating of near neutral pH (pH 6.5 and pH 7) at $50^{\circ}C$. The electroless plated Ni-B films were coated on screen printed Ag pattern/PET (polyethylene terephthalate). According to the increase of DMAB (from 0 to 1 mole), the deposition rate and the grain size of electroless Ni-B film increased and the boron (B) content also increased. In crystallinity of electroless Ni-B films, an amorphization reaction was enhanced in the formation of Ni-B film with an increasing content of DMAB; the Ni-B film with < 1 B at.% had a weak fcc structure with a nano crystalline size, and the Ni-B films with > 5 B at.% had an amorphous structure. In addition, the Ni-B film was selectively grown on the printed Ag paste layer without damage to the PET surface. From this result, we concluded that formation of electroless Ni-B film is possible by a neutral process (~green process) at a low temperature of $50^{\circ}C$.

DC-DC Converter용 자성박막 인덕터 설계에 관한 연구 (A Study on Design of Magnetic Thin Film Inductors for DC-DC Converter Applications)

  • 윤의중;김좌연;박노경;김상기;김종대
    • 한국전기전자재료학회논문지
    • /
    • 제14권1호
    • /
    • pp.74-83
    • /
    • 2001
  • In this study, the optimum structure of a magnetic thin film inductor was designed for application of DC-DC converters. The Ni$\sub$81/Fe$\sub$19/ (at%) alloy was selected as a high-frequency($\geq$MHz) magnetic thin film magnetron sputtering system. As-deposited NiFe thin films show similar magnetic properties compared to bulk NiFe alloys, indicating that they have a good film quality. The optimum design of dolenoid-type magnetic thin film inductors was performed utilizing a Maxwell computer simulator (Ansoftt HFSS V7.0 for PC) and parameters obtained from the magnetic properties of magnetic core materials selected. The high-frequency characteristics of the inductance(L) and quality factor(Q) obtained for the designed inductors through simulation agreed well with those obtained by theoretical calculations, confirming that the simulated result is realistic. The optimum structure of high-performance (Q$\geq$60, L = 1${\mu}$H, efficiency $\geq$90%), high-frequency ($\geq$5MHz), and solenoid-type magnetic thin film inductors was designed successfully.

  • PDF