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http://dx.doi.org/10.5012/bkcs.2009.30.3.653

Fabrication of 3-Dimensional LiMn2O4 Thin Film  

Park, Bo-Gun (Department of Advanced Materials Engineering, Kyonggi University)
Ryu, Jea Hyeok (Department of Advanced Materials Engineering, Kyonggi University)
Choi, Won Youl (Department of Metal and Metallurgical Engineering, Kangnung National University)
Park, Yong-Joon (Department of Advanced Materials Engineering, Kyonggi University)
Publication Information
Abstract
3-Dimensionally ordered macroporous $LiMn_2O_4$ thin film was prepared by a sol-gel and dip coating method on Pt/Ti/$SiO_2$/Si substrate. An opal structure consisting of mono dispersed polystyrene beads (300 nm) was used as a template. After solution containing Mn and Li precursors was coated on the template-deposited substrate, the template and organic materials in the precursors was removed by calcination at 400 ${^{\circ}C}$. And then the 3-dimensional $LiMn_2O_4$ thin film with spinel structure was fabricated by heat treatment at 700 ${^{\circ}C}$. The structural and electrochemical property was investigated by XRD, SEM and charge-discharge cycler.
Keywords
3-D microbattery; Sol-gel; Template; $LiMn_2O_4$; Thin film;
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