• Current Optics and Photonics
• /
• v.1 no.5
• /
• pp.505-513
• /
• 2017

Measuring the thickness of thin films is strongly required in the display industry. In recent years, as the size of a pattern has become smaller, the substrate has become larger. Consequently, measuring the thickness of the thin film over a wide area with low spatial sampling size has become a key technique of manufacturing-yield management. Interferometry is a well-known metrology technique that offers low spatial sampling size and the ability to measure a wide area; however, there are some limitations in measuring the thickness of the thin film. This paper proposes a method to calculate the thickness of the thin film in the following two steps: first, pre-estimation of the thickness with the phase at the peak position of the interferogram at the bottom surface of the thin film, using white-light phase-shift interferometry; second, accurate correction of the measurement by fitting the interferogram with the theoretical pattern through the estimated thickness. Feasibility and accuracy of the method has been verified by comparing measured values of photoresist pattern samples, manufactured with the halftone display process, to those measured by AFM. As a result, an area of $880{\times}640$ pixels could be measured in 3 seconds, with a measurement error of less than 12%.

• Journal of the Semiconductor & Display Technology
• /
• v.21 no.2
• /
• pp.74-84
• /
• 2022

As the semiconductor industry develops, the difficulty of newly required process technology becomes difficult, and the importance of production yield and product reliability increases. As an effort to minimize yield loss in the manufacturing process, interests in the process defect process for facility diagnosis and defect identification are continuously increasing. This research observed the plasma condition changes in the multi oxide/nitride layer deposition (MOLD) process, which is one of the 3D-NAND manufacturing processes through optical emission spectroscopy (OES) and monitored the result of whether the change in plasma characteristics generated in repeated deposition of oxide film and nitride film could directly affect the film. Based on these results, it was confirmed that if a change over a certain period occurs, a change in the plasma characteristics was detected. The change may affect the quality of oxide film, such as the film thickness as well as the interfacial surface roughness when the oxide and nitride thin film deposited by plasma enhenced chemical vapor deposition (PECVD) method.

• Proceedings of the Korea Association of Crystal Growth Conference
• /
• 1997.06a
• /
• pp.121-124
• /
• 1997

Emergence of advanced materials has been realized by the great demands for sophisticated state devices in high technology industry. It is the ear of speedy evolution of science and technology, in particular, materials processing technology, which enables us to synthesize any materials with respect to its purity and its perfection of crystal structure and shape (form) that have, heretofore not been available. The availability of ultra pure, fine raw materials, single crystals and thick/thin film materials has been largely responsible for such startling progresses that have been made in the realization of unforeseen, functional devices for high technology industry. Of the functional devices such as passive as active devices, non-silicon devices are mostly passive. Piezoelectric, electro-optic, magneto-optic devices, etc. are some of the examples. In this paper, magneto-optic materials for Faraday device, which is little known, are reviewed including its processing toward practical applications.

• Journal of the Korean Society of Industry Convergence
• /
• v.17 no.1
• /
• pp.15-19
• /
• 2014

Recently, cyclone is used to collect fine particles in various industrial precesses, but many studies are undergoing because of cyclone's low collection efficiency. Thus, we have developed water-cyclone which minimizes disadvantages of existing conventional cyclone and designed 3 different stages depending on precessing materials. Stage 1 collects particles by using principles of conventional cyclone. Stage 2 processes acid gases by extending contact time with water film through vortex movement. Stage 3 processes uncollected substances in stage 1 and 2. Hence, we evaluate water-cyclone by experimental verification.

• Journal of the Korean Society of Industry Convergence
• /
• v.19 no.4
• /
• pp.198-205
• /
• 2016

For the study on the ion exchange of nickel hexacyanoferrate(NiHCNFe) electrode with the several cations, the film of hexacyanoferrate was prepared on the bare nickel surface by the electrochemical and chemical methods in the solution composed with 5mM K3Fe(CN)6 and 100mM KNO3. To compare the capability of the ion exchange of NiHCNFe film electrode, the repeated cyclic voltammograms were measured in the 0.5M cation nitrate solutions at $25^{\circ}C$ and pH7. It was found that the capacity of the electrochemically derivatized NiHCNFe reduced in the rate of 0.5~0.7%/cycle and was nearly exhausted at the 150th potential cycle. Better result was obtained from that the capacity loss of the chemically assembled NiHCNFe was less than 0.02%/cycle for 5,000cycles. Furthermore, the residual capacity was more than 30% at the 5,000th cycle.

• Journal of the Korean Society of Industry Convergence
• /
• v.6 no.3
• /
• pp.193-200
• /
• 2003

In the production of internal combustion engines, there has been a move towards the development of high performance engines with improved fuel efficiency, lighter weight and smaller sizes. These trends help to answer problems in engines related to thermal load and abnormal combustion. In order to investigate these problems, a thin film-type probe for instantaneously measuring temperatures has been suggested. A method for manufacturing such a probe was established in this study. The instantaneous surface temperature of a constant volume combustion chamber was measured by this probe and the heat flux was obtained through Fourier analysis. In order to thoroughly understand the characteristics of combustion, the authors measured the wall temperature of the combustion chamber and computed heat flux through a cylinder wall while varying the protrusion height of the probe. For achieving the above goals, a instantaneous temperature probe was developed, thereby making possible the analysis of the instantaneous temperature of wall surface and the detection of unsteady heat flux in the constant volume combustion chamber.

• Journal of the Korean Society of Industry Convergence
• /
• v.11 no.2
• /
• pp.65-70
• /
• 2008

This study presents gas turbine cooling blade by using experimental and numerical works. The review cover researches related to cooling channels using finite element method in rotating blade. Also, the film cooling device and the heat transfer of the external surface of the blade are included. In addition, several methods to be used for the design of the blade, numerical method and experimental techniques are introduced. This work will contribute to improving the manufacturing of engine and the efficiency of gas turbine engines.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.25 no.10
• /
• pp.23-27
• /
• 2011

In this paper, material handing cleanroom stocker system for thin film solar cell line of photovoltaic industry and liquid crystal display line of flat panel display industry was selected for the study. Optimum solution for stocker system's CPS(Contactless Power Supply) is approached by changing the motion pattern, optimizing design & production, and analyzing characteristics of the power system. As a result, acceleration time of X-Axis changed from 3 sec to 4 sec, changed the input characteristic of CPS within approximately 11[kW]. This result shows that extending acceleration time of the X-Axis in Stocker Crane's motion pattern can reduce the capacity of the CPS, thus saving the manufacturing cost.

• Journal of Korea Technical Association of The Pulp and Paper Industry
• /
• v.40 no.3
• /
• pp.9-14
• /
• 2008

Agar-agar extracted from red algae was used as a surface sizing material for paper after filtering, bleaching, and viscosity adjustment by oxidative depolymerization. Oxidized starches from corn and tapioca were compared to agar-based surface size in the respects of paper surface modification, strength improvement, and printability. Agar-based surface size showed high strength improvement and good printability as much as starch-based ones except film forming ability, which may be improved by adding additives, and demonstrated its great potential to be used as inexpensive and high quality surface size in future.

• Laser Solutions
• /
• v.10 no.2
• /
• pp.25-28
• /
• 2007

Rapidity and flexibility are very important in the electronic components industry. The laser process provides the industry with more rapidity and flexibility. For this reason, the laser process is considered as an acceptable method in terms of rapidity and flexibility. In this study, a wide range of experiments have been carried out on the gold wire-to-nickel thin film joining using the continuous wave fiber laser. In particular, changes in the shape of joint depending on the changes of a target point have been observed.