• 제목/요약/키워드: field-emission scanning electron microscopy

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탄소 나노튜브 위에 붕소 및 탄소 질화 박막이 코팅된 이종접합 구조 미세팁의 전자방출 특성 (Electron Emission Properties of Hetero-Junction Structured Carbon Nanotube Microtips Coated With BN And CN Thin Films)

  • 노영록;김종필;박진석
    • 전기학회논문지
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    • 제59권4호
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    • pp.743-748
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    • 2010
  • Boron nitride (BN) and carbon nitride (CN) films, which have relatively low work functions and commonly exhibit negative electron affinity behaviors, were coated on carbon nanotubes (CNTs) by magnetron sputtering. The CNTs were directly grown on metal-tip (tungsten, approximately 500nm in diameter at the summit part) substrates by inductively coupled plasma-chemical vapor deposition (ICP-CVD). The variations in the morphology and microstructure of CNTs due to coating of the BN and CN films were analyzed by field-emission scanning electron microscopy (FE-SEM). The energy dispersive x-ray (EDX) spectroscopy and Raman spectroscopy were used to identify the existence of the coated layers (CN and BN) on CNTs. The electron-emission properties of the BN-coated and CN-coated CNT-emitters were characterized using a high-vacuum field emission measurement system, in terms of their maximum emission currents ($I_{max}$) at 1kV and turn-on voltage ($V_{on}$) for approaching $1{\mu}A$. The results showed that the $I_{max}$ current was significantly increased and the $V_{on}$ voltage were remarkably reduced by the coating of CN or BN films. The measured values of $I_{max}-V_{on}$ were as follows; $176{\mu}A$-500V for the 5nm CN-coated emitter and $289{\mu}A$-540V for the 2nm BN-coated emitter, respectively, while the $I_{max}-V_{on}$ of the as-grown (i.e., uncoated) emitter was $134{\mu}A$-620V. In addition, the CNT emitters coated with thin CN or BN films also showed much better long-term (up to 25h) stability behaviors in electron emission, as compared with the conventional CNT emitter.

Nanotube Shape Variation on the Ti-xNb Alloys with Alloying Elements and Applied Potentials

  • Byeon, In-Seop;Choe, Han-Cheol
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2015년도 춘계학술대회 논문집
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    • pp.112-112
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    • 2015
  • The purposed of this work was to determine nanotube shape variation on the Ti-xNb alloys with alloying elements and applied potentials. Samples were prepared by arc melting, followed by followed by homogenization for 12 hr at $1000^{\circ}C$ in argon atmosphere. This study was evaluated the phase and microstructure of Ti-xNb alloys using an X-ray diffraction (XRD) and optical microscopy (OM). The morphology of the samples was investigated with a field-emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectroscopy (EDS). The nanotube on the alloy surface was formed in 1 M $H_3PO_4$ with small additions of NaF 0.8 wt.%. All anodization treatments were carried out using a scanning potentiostat (Model 362, EG&G, USA) at constant voltage 30 V for 120 min, respectively. The morphology of the samples was investigated with a field-emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectroscopy (EDS). Surface characteristics of nanotbue formed on Ti-xNb alloys was investigated by potentiodynamic test and potentiostatic in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. It was observed that the changed ${\alpha}$ phase to ${\beta}$ phase with Nb content.

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PEALD 장치 제작 및 Co박막 증착 (Construction of a PEALD System and Fabrication of Cobalt Thin Films)

  • 이두형;노승정
    • 한국진공학회지
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    • 제16권2호
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    • pp.110-115
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    • 2007
  • Atomic layer deposition(ALD)에 유도결합 플라즈마 소스를 채용하여 plasma enhanced ALD(PEALD)장치를 제작하고 플라즈마 발생 실험을 수행하였다. ALD와 PEALD를 이용하여 기판온도 $230^{\circ}C$에서 p-type Si(100)기판 위에 Co박막을 증착하였다. 이때, $Co_{2}(CO)_{6}$을 Co전구체로, 암모니아를 반응가스로, 아르곤을 캐리어(carrier) 및 퍼지(purge)가스로 사용하였다. 증착된 Co박막의 구성성분과 박막의 두께를 auger electron spectroscopy(AES)와 field emission scanning electron microscopy(FESEM)을 이용하여 분석하였다. ALD와 PEALD를 이용하여 증착된 Co박막에서 모두 불순물이 발견되었는데, PEALD의 경우 ALD에 비해 불순물의 양이 약 반으로 감소되었다. 암모니아 플라즈마가 Co전구체에 포함된 탄소와의 반응을 매우 효과적으로 유도하는 것으로 확인되었다.

ICP-CVD 방법으로 성장된 탄소 나노튜브의 구조적 특성 및 전계방출 특성: 기판전압 인가 효과 (Structural and Field-emissive Properties of Carbon Nanotubes Produced by ICP-CVD: Effects of Substrate-Biasing)

  • 박창균;김종필;윤성준;박진석
    • 전기학회논문지
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    • 제56권1호
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    • pp.132-138
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    • 2007
  • Carbon nanotubes (CNTs) arc grown on Ni catalysts employing an inductively-coupled plasma chemical vapor deposition (ICP-CVD) method. The structural and field-emissive properties of the CNTs grown are characterized in terms of the substrate-bias applied. Characterization using the various techniques, such as field-omission scanning electron microscopy (FESEM), high-resolution transmission electron microscopy (HRTEM), Auger spectroscopy (AES), and Raman spectroscopy, shows that the structural properties of the CNTs, including their physical dimensions and crystal qualities, as well as the nature of vertical growth, are strongly dependent upon the application of substrate bias during CNT growth. It is for the first time observed that the provailing growth mechanism of CNTs, which is either due to tip-driven growth or based-on-catalyst growth, may be influenced by substrate biasing. It is also seen that negatively substrate-biasing would promote the vertical-alignment of the CNTs grown, compared to positively substrate-biasing. However, the CNTs grown under the positively-biased condition display a higher electron-emission capability than those grown under the negatively-biased condition or without any bias applied.

Molybdenum and Cobalt Silicide Field Emitter Arrays

  • Lee, Jong-Duk;Shim, Byung-Chang;Park, Byung-Gook;Kwon, Sang-Jik
    • Journal of Information Display
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    • 제1권1호
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    • pp.63-69
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    • 2000
  • In order to improve both the level and the stability of electron emission, Mo and Co silicides were formed from Mo mono-layer and Ti/Co bi-layers on single crystal silicon field emitter arrays (FEAs), respectively. Using the slope of Fowler-Nordheim curve and tip radius measured from scanning electron microscopy (SEM), the effective work function of Mo and Co silicide FEAs were calculated to be 3.13 eV and 2.56 eV, respectively. Compared with silicon field emitters, Mo and Co silicide exhibited 10 and 34 times higher maximum emission current, 10 V and 46 V higher device failure voltage, and 6.1 and 4.8 times lower current fluctuation, respectively. Moreover, the emission currents of the silicide FEAs depending on vacuum level were almost the same in the range of $10^{-9}{\sim}10^{-6}$ torr. This result shows that silicide is robust in terms of anode current degradation due to the absorption of air molecules.

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Preparation and Characteristics of Conducting Polymer-Coated MWCNTs as Electromagnetic Interference Shielding Materials

  • Kim, Yeon-Yi;Yun, Ju-Mi;Lee, Young-Seak;Kim, Hyung-Il
    • Carbon letters
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    • 제12권1호
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    • pp.48-52
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    • 2011
  • The conducting polymer-coated multi-walled carbon nanotubes (MWCNTs) were prepared by template polymerization of aniline and pyrrole on the surface of MWCNTs in order to develop the novel electromagnetic interference (EMI) shielding materials. The conducting polymer phases formed on the surface of MWCNTs were confirmed by field emission-scanning electron microscopy and field emission-transmission electron microscopy. Both permittivity and permeability were significantly improved for the conducting polymer-coated MWCNTs due to the intrinsic electrical properties of MWCNTs and the conducting properties of coated polymers. The electromagnetic waves were effectively absorbed based on the permittivity nature of conducting polymer and MWCNTs preventing the secondary interference from reflecting the electromagnetic waves. The highly improved EMI shielding efficiency was also obtained for the conducting polymer-coated MWCNTs showing the synergistic effects by combining MWCNTs and the conducting polymers.

Helium Ion Microscopy of Uncoated Pine Leaves

  • Kim, Ki-Woo
    • Applied Microscopy
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    • 제42권3호
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    • pp.147-150
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    • 2012
  • A recently introduced helium ion microscopy (HIM) was employed to observe uncoated pine leaf specimens. Adult leaves were collected from the seedlings of Pinus densiflora and P. rigida, air-dried at room temperature, and observed by HIM without metal coating. Ovoid or round stomata and distinct Florin rings could be discerned. The epicuticular waxes were present in the epistomatal chambers and Florin rings of stomata on the leaf surface. The epicuticular waxes were mostly straight, cylindrical, and ca. 1 ${\mu}m$ in length. The epistomatal chambers of P. rigida were filled with the epicuticular waxes, whereas those of P. densiflora were not filled with the epicuticular waxes. Based on their micromorphology, the epicuticular wax structures of the pine species were identified as tubules. These results suggest that the HIM could be used for the investigation of the plant stomata and epicuticular waxes of uncoated plant leaves. Due to the smaller ion probe and interaction volume, the HIM has advantages over conventional field emission scanning electron microscopy in terms of image resolution and charge neutralization.

Spark Plasma Sintering of Fe-Ni-Cu-Mo-C Low Alloy Steel Powder

  • Nguyen, Hong-Hai;Nguyen, Minh-Thuyet;Kim, Won Joo;Kim, Ho Yoon;Park, Sung Gye;Kim, Jin-Chun
    • 한국분말재료학회지
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    • 제23권3호
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    • pp.207-212
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    • 2016
  • In this study, Fe-Cu-Ni-Mo-C low alloy steel powder is consolidated by spark plasma sintering (SPS) process. The internal structure and the surface fracture behavior are studied using field-emission scanning electron microscopy and optical microscopy techniques. The bulk samples are polished and etched in order to observe the internal structure. The sample sintered at $900^{\circ}C$ with holding time of 10 minutes achieves nearly full density of 98.9% while the density of the as-received conventionally sintered product is 90.3%. The fracture microstructures indicate that the sample prepared at $900^{\circ}C$ by the SPS process is hard to break out because of the presence of both grain boundaries and internal particle fractures. Moreover, the lamellar pearlite structure is also observed in this sample. The samples sintered at 1000 and $1100^{\circ}C$ exhibit a large number of tiny particles and pores due to the melting of Cu and aggregation of the alloy elements during the SPS process. The highest hardness value of 296.52 HV is observed for the sample sintered at $900^{\circ}C$ with holding time of 10 minutes.

브러쉬 코팅 공정을 이용한 용액 기반 BiAlO 박막의 제작과 액정 소자에의 응용 (Fabrication of the Solution-Derived BiAlO Thin Film by Using Brush Coating Process for Liquid Crystal Device)

  • 이주환;김대현
    • 한국전기전자재료학회논문지
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    • 제34권5호
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    • pp.321-326
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    • 2021
  • We fabricated BiAlO thin film by a solution process with a brush coating to be used as liquid crystal (LC) alignment layer. Solution-processed BiAlO was coated on the glass substrate by brush process. Prepared thin films were annealed at different temperatures of 80℃, 180℃, and 280℃. To verify whether the BiAlO film was formed properly, X-ray photoelectron spectroscopy analysis was performed on Bi and Al. Using a crystal rotation method by polarized optical microscopy, LC alignment state was evaluated. At the annealing temperature of 280℃, the uniform homogenous LC alignment was achieved. To reveal the mechanism of LC alignment by brush coating, field emission scanning electron microscope was used. Through this analysis, spin-coated and brush coated film surface were compared. It was revealed that physical anisotropy was induced by brush coating at a high annealing temperature. Particles were aligned in one direction along which brush coating was made, resulting in a physical anisotropy that affects a uniform LC alignment. Therefore, it was confirmed that brush coating combined with BiAlO thin film annealed at high temperature has a significant potential for LC alignment.

Analysis of PVDF Coating Properties with Addition of Hydrophobically Modified Fumed Silica

  • Lee, Nam Kyu;Kim, Young Hoon;Im, Tae Gyu;Lee, Dong Uk;Shon, MinYoung;Moon, Myung Jun
    • Corrosion Science and Technology
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    • 제18권6호
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    • pp.232-242
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    • 2019
  • In this study, hydrophobically modified fumed silica was added to the PVDF coating to improve corrosion protection performance. Two types of silane modifiers, trimethylchlorosilane (TMCS) and hexamethyldisilazane (HMDZ), were used for hydrophobic modification of the fumed silica. The composition of modified fumed silica was analyzed by Fourier transform infrared, X-ray photoelectron spectroscopy, and elemental analysis. The dispersion of modified fumed silica in the PVDF coating was observed by the transmission electron microscopy, and the hydrophobicity of PVDF coating was analyzed by the water contact angle. Surface properties were examined by the field emission scanning electron microscopy and scanning probe microscopy. Potentiodynamic polarization was conducted to confirm corrosion protection performance of PVDF coating in terms of hydrophobically-modified fumed silica contents. As a result, the average surface roughness and the water contact angle of the PVDF coating increased with modifier contents. The results of the potentiodynamic polarization test showed an increase of the Ecorr values with increase of the hydrophobicity of PVDF coating. Thus, it clearly indicates that the corrosion protection performance of PVDF coating improved with the addition of the hydrophobic-modified fumed silica that prevents the penetration of moisture into the PVDF coating.