• 제목/요약/키워드: field emission properties

검색결과 864건 처리시간 0.037초

탄소 나노튜브에 대한 비정질 질화막의 코팅 및 전계방출 특성 (Coating of amorphous nitrides on carbon nanotubes and field emission properties)

  • 노영록;김종필;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2009년도 제40회 하계학술대회
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    • pp.1244_1245
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    • 2009
  • Coating of amorphous nitride thin layers, such as boron nitride (BN) and carbon nitride (CN), has been performed on carbon nanotubes (CNTs) for the purpose of enhancing their electron-emission performances because those nitride films have relatively low work functions and commonly exhibit negative electron affinity behavior. The CNTs were directly grown on metal-tip (tungsten, approximately 500 nm in diameter at the summit part) substrates by inductively coupled plasma-chemical vapor deposition (ICP-CVD). Sharpening of the tungsten tips were carried out by electrochemical etching. Morphologies and microstructures of BN and CN films were analyzed by field-emission scanning electron microscopy (FE-SEM), energy dispersive x-ray (EDX) spectroscopy, and Raman spectroscopy. The electron-emission properties (such as maximum emission currents and turn-on fields) of the BN-coated and CN-coated CNT-emitters were characterized in terms of the thickness of BN and CN layers.

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혼합파우더 및 절연박막층을 이용한 PELD의 광학특성 (EL Devices for LCD Backlight Based on ZnS:Cu Phosphor)

  • 박수길;조성렬;전세호;엄재석;이주성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.391-394
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    • 1998
  • Electroluminescence is the light emission obtained by an electrical excitation energy passing through a phosphor under an applied high electrical field. EL are paid much attention on flat panel display as a backlight and indicator, which are divided into ACPRL(alternating-current powder electroluminescent) and ACTFEL(alternating-current powder electroluminescent). In this paper, Electric and emission properties on ACPEL are investigated based on ZnS:Cu phosphor. The basic structure on this is ITO glass/phosphor/insulator/ backelectrode, CR-M which has high efficiency on thermal properties and dielectric Properties was introduced and BaTiO$_3$ as a insulating layer in order to increase app1ied electric field on phosphor. Changing on Dielectric and emission Properties was caused by a different viscosity of binder which filled on space between phosphor particle. 60cd/$m^2$ under 60V, 2kHz sinusoidal was gotten from ACPELD prepared in this work.

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미세크기 팁 위에 성장된 탄소 나노튜브의 완충막 및 촉매 금속에 따른 안정성 비교 (Comparison of stabilities in carbon nanotubes grown on a submicron-sized tip in terms of various buffer and catalyst materials)

  • 김종필;김영광;박창균;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2008년도 제39회 하계학술대회
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    • pp.1224-1225
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    • 2008
  • The results of the experiment that was conducted on the electron emission property and the long-term stability of the emission current in various carbon nanotubes (CNTs)-based field emitters with a CNT/catalyst/buffer/W-tip configuration are presented herein. CNT-based field emitters were fabricated by varying the (TiN, Al/Ni/TiN) buffer layer and the (Ni, Co) catalyst material. This study aimed to elucidate how the buffer layers and catalyst materials affect the structural properties of CNTs and the long-term stability of CNT emitters. Raman spectroscopy, field emission SEM, and high-resolution TEM were used to analyze the crystalline structure, surface morphologies, and nanostructures of all the grown CNTs. X-ray photoelectron spectroscopy (XPS) was used to monitor the chemical bonds of all the buffer layers and catalysts. Electron emission measurement and a long-term (up to 40h) stability test were carried out using a compactly designed field emission measurement system.

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실리사이드를 이용한 새로운 고내구성 실리콘 전계방출소자의 제작 (Fabrication of New Silicided Si Field Emitter Array with Long Term Stability)

  • 장지근;윤진모;정진철;김민영
    • 한국재료학회지
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    • 제10권2호
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    • pp.124-127
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    • 2000
  • Si FEA로부터 tip의 표면을 Ti 금속으로 silicidation한 새로운 3극형 Ti-silicided Si FEA를 제작하고 이의 전계 방출특성을 조사하였다. 제작된 소자에서 단위 pixel(pixel area : $1000{\mu\textrm{m}}{\times}1000{$\mu\textrm{m}}$, tip array : $200{\mu\textrm{m}}{\times}200{$\mu\textrm{m}}$)을 통해 측정된 전계 방출 특성은 $10^8Torr$의 고진공 상태에서 turn-on 전압이 약 70V로, 아노드 방출전류의 크기와 current degradation이 $V_A=500V,\;V_G=150V$ 바이어스 아래에서 각각 2nA/tip와 0.3%/min로 나타났다. 3극형 Ti-silicided Si FEA의 낮은 turn-on 전압과 높은 전류안정성은 Si tip 표면에 형성된 실리사이드 박막의 열화학적 안정성과 낮은 일함수에 기인하는 것으로 판단된다.

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Co-실리사이드를 이용한 새로운 고내구성 실리콘 전계방출소자의 제작 (Fabrication of New Co-Silicided Si Field Emitter Array with Long Term Stability)

  • 장지근;김민영;정진철
    • 한국재료학회지
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    • 제10권4호
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    • pp.301-304
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    • 2000
  • Si FEA로 부터 tip의 표면을 Co 금속으로 silicidation한 새로운 3극형 Co-silicided Si FEA를 제작하고 이의 전계 방출특성을 조사하였다. $10^{-8}Torr$의 고진공상태에서 제작된 소자의 단위 pixel(pixel 면적 : $250{\mu\textrm{m}}{\times}250{\mu\textrm{m}}$, tip 어레이 : $45{\times}45$)를 통해 측정된 turn-on 전압은 약 35V로, 아노드 전류는 $V_A=500V,\;V_G=55V$ 바이어스 아래에서 약 $1.2{\mu\textrm{A}}(0.6nA/tip)$로 나타났다. 제작된 소자는 초기 과도상태를 제외하면 장시간의 동작을 통해 전계방출 전류의 감소없이 매우 안정된 전기적 특성을 나타내었다. Co-silicided Si FFA 의 낮은 turn-on 전압과 높은 전류안전성은 Si tip 표면에 형성된 실리사이드 박막의 열화학적 안전성과 낮은 일함수에 기인하는 것으로 판단된다.

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DLC-coated Si-tip FEA 제조에 있어서 Al 희생층을 이용한 게이트 누설 전류의 감소 (Decrease of Gate Leakage Current by Employing AI Sacrificial Layer in the DLC-coated Si-tip FEA Fabrication)

  • 주병권;이상조;김훈;이윤희;오명환
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제48권8호
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    • pp.577-579
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    • 1999
  • DLC film remaining on device surface could be removed by eliminating AI sacrificial layer as a final step of lift-off process in the fabrication of DLC-coated Si-tip FEA. The field emission properties(I-V curves, hysteresis, and current fluctuation etc.) of the processed device were analyzed and the process was employed to 1.76 inch-sized FEA panel fabrication in order to evaluate its FED applicability.

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Field Emission Characteristics a-C:F:N Film Deposited by Inductively Coupled Plasma Chemical Vapor Deposition

  • Jae, Chung-Suk;Jung, Han-Eun;Jang Jin
    • 한국진공학회지
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    • 제7권s1호
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    • pp.134-139
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    • 1998
  • Amorphous fluorocarbon (a-C:F) is of interest for low dielectric interlayer material, but in this work we applied this material to FED field emitter. N-doped a-C:F films were deposited by inductively coupled plasma chemical vapor deposition (ICPCVD). The Raman spectra were measured to study the film structure and inter-band optical absorption coefficients were measured using Perkin-Elmer UV-VIS-IR spectrophotometer and optical band gap was obtained using Tauc's plot. XPS spectrum and AFM image were investigated to study bond structure and surface morphology. Current-electric field(I-E) characteristic of the film was measured for the characterization of electron emission properties. The optimum doping concentration was found to be [N2]/[CF4]=9% in the gas phase. The turn-on field and the emission current density at $[N_2]/[CF_4]$=9% were found to be 7.34V/$\mu\textrm{m}$ and 16 $\mu\textrm{A}/\textrm{cm}^2$ at 12.8V/$\mu\textrm{m}$, respectively.

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Effect of Liquid Surface Treatments on Field Emission Properties of Carbon Nanotube Cathodes

  • Lee, Ji-Eon;An, Young-Je;Shin, Heon-Cheol;Chung, Won-Sub;Cho, Young-Rae
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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    • pp.486-489
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    • 2007
  • Carbon nanotube (CNT) cathodes having a trench structure similar to the structure of the gated triodetype cathode were successfully fabricated by a screenprinting method with multi-walled carbon nanotubes. We observed that a liquid method not only readily removes the organic residues on the CNT films, but also satisfactorily protrudes the CNTs out of the electrode surface. The CNT cathodes prepared by the liquid method showed a turned-on field of $1.4\;V/{\mu}m$. The emission current density of them was about $3.1\;mA/cm^2$ at the electric field of $3\; V/{\mu}m$. The liquid method appears to be a promising surface treatment of CNT cathode for gated triode-type FEDs applications.

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유리화 비정형 탄소의 전계방출 거동 (Characterization of field emission behavior from vitreous carbon)

  • 안상혁;이광렬;은광용
    • 한국진공학회지
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    • 제9권2호
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    • pp.122-129
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    • 2000
  • Mo이 코팅된 유리기판 상에 전기영동법으로 도포된 유리화 비정형 탄소분말의 전계방출 특성을 조사하였다. 탄소의 $sp^2$결합만으로 이루어진 유리화 비정형 탄소는 전계방출을 얻기 위한 초기화 공정 없이도 규칙적인 전계방출 거동을 보이고 있었다. 전자의 방출이 시작되는 임계전장의 크기는 3에서 4 MV/m 구간의 값을 가지고 있었으며, Fowler-Nordheim plot로부터 평가된 effective work function은 약 0.06 eV였다. 전류전압거동의 반복측정에 의해 관찰된 바와 같이 전계방출의 안정성 면에서 유리화 비정형 탄소는 Si tip보다 우수하였으며, 도포된 전체면적에서 전면발광의 가능성을 확인할 수 있었다. 이러한 결과는 탄소계 물질에서 관찰되는 전계방출이 탄소의 $sp^3$결합과 밀접하게 관련되어 있지 않으며, 전자가음극물질의 표면으로 이동하는데 필요한 전기전도성, 혹은 기판과 음극물질 계면에서의 전자이동 등이 전계방출의 거동을 결정하는 중요한 요인임을 보여주고 있다.

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Field Emission Characteristics of Nitrogen-Doped and Micro-Patterned Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition

  • Shin, Ik-Ho;Lee, Taek-Dong
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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    • pp.133-134
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    • 2000
  • Effect of nitrogen doping on field emission characteristics of patterned Diamond-like Carbon (DLC) films was studied. The patterned DLC films were fabricated by the method reported previously[1]. Nitrogen doping in DLC film was carried out by introducing $N_2$ gas into the vacuum chamber during deposition. Higher emission current density of $0.3{\sim}0.4$ $mA/cm^2$ was observed for the films with 6 at % N than the undoped films but the emission current density decreased with further increase of N contents. Some changes in CN bonding characteristics with increasing N contents were observed. The CN bonding characteristics which seem to affect the electron emission properties of these films were studied by Raman spectroscopy, x-ray photoemission spectroscopy (XPS) and Fourier transform infrared spectroscopy (FT-IR). The electrical resistivity and the optical band gap measurements showed consistence with the above analyses.

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