• Smart Structures and Systems
• /
• v.6 no.3
• /
• pp.225-238
• /
• 2010

We report on the development of a new technology for the fabrication of Micro-Electro-Mechanical-System (MEMS) strain sensors to realize a novel type of crackmeter for health monitoring of ageing civil infrastructures. The fabrication of micromachined silicon MEMS sensors based on a Silicon On Insulator (SOI) technology, designed according to a Double Ended Tuning Fork (DETF) geometry is presented, using a novel process which includes a gap narrowing procedure suitable to fabricate sensors with low motional resistance. In order to employ these sensors for crack monitoring, techniques suited for bonding the MEMS sensors on a steel surface ensuring good strain transfer from steel to silicon and a packaging technique for the bonded sensors are proposed, conceived for realizing a low-power crackmeter for ageing infrastructure monitoring. Moreover, the design of a possible crackmeter geometry suited for detection of crack contraction and expansion with a resolution of $10{\mu}m$ and very low power consumption requirements (potentially suitable for wireless operation) is presented. In these sensors, the small crackmeter range for the first field use is related to long-term observation on existing cracks in underground tunnel test sections.

• Smart Structures and Systems
• /
• v.8 no.5
• /
• pp.471-486
• /
• 2011

Various types of strain sensors have been developed and widely used in the field for monitoring the mechanical deformation of structures. However, conventional strain sensors are not suited for measuring large strains associated with impact damage and local crack propagation. In addition, strain sensors are resistive-type transducers, which mean that the sensors require an external electrical or power source. In this study, a gold nanoparticle (GNP)-based polymer composite is proposed for large strain sensing. Fabrication of the composites relies on a novel and simple in situ GNP reduction technique that is performed directly within the elastomeric poly(dimethyl siloxane) (PDMS) matrix. First, the reducing and stabilizing capacities of PDMS constituents and mixtures are evaluated via visual observation, ultraviolet-visible (UV-Vis) spectroscopy, and transmission electron microscopy. The large strain sensing capacity of the GNP-PDMS thin film is then validated by correlating changes in thin film optical properties (e.g., maximum UV-Vis light absorption) with applied tensile strains. Also, the composite's strain sensing performance (e.g., sensitivity and sensing range) is also characterized with respect to gold chloride concentrations within the PDMS mixture.

• Journal of the Korean Ceramic Society
• /
• v.29 no.9
• /
• pp.695-704
• /
• 1992

In (Pb, La)(Zr, Ti)O3 ceramic system, the functionally gradient material (FGM) was developed, and its processing and properties were investigated. The FGMs were successfully prepared through doctor blade method with acrylic binder system as well as mold stacking press method. The ultrasonic treatment was very effective for particle dispersion in slurry, and it lead to form clack-free green films. The strain-voltage characteristics of the FGM system was significantly improved which fabricated between a high piezoelectric-low dielectric and a low piezoelectric-high dielectric composition layer.

• Journal of Welding and Joining
• /
• v.22 no.2
• /
• pp.33-37
• /
• 2004

Since the preflex beam is fabricated by welding, the pre-compressive stresses that should occur over the concrete pier are diminished by the welding residual stresses. For this reason distribution of welding residual stresses must be analyzed accurately and welding residual stresses should be relieved during the fabrication. In this study strain history, displacement of beam and re-distributed welding residual stresses by different loading conditions are measured and compared to choose more appropriate preflex condition.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.695-698
• /
• 2002

Induction heating process is one of the most efficient heating process in terms of temperature control accuracy and heating time saving. In the past study, fabrication process of cellular 6061 alloys by powder metallurgical route and induction heating process was studied. To supplement the framing conditions that studied in past study, effect of induction heating capacity and holding time at foaming temperature were investigated. Under the achieved framing conditions, teamed 6061 alloys were fabricated for variation of foaming temperature, and porosities(%)-foaming temperature curves were obtained by try-error experimental method. Uniaxial compression tests were performed to investigate the relationship between porosities(%) and stress-strain curves of framed 6061 alloy. Also, energy absorption capacity and efficiency were calculated from stress-strain curves to investigated. Moreover, dependence of plateau stress on strain rate was investigated in case of cellular 6061 alloy with low porosities(%)

• Electrical & Electronic Materials
• /
• v.10 no.10
• /
• pp.1022-1028
• /
• 1997

In this paper we present the construction details and output characteristics of a diaphragm-type pressure sensor with Cu-Ni(53:47) thin-film strain gauges. In order to improve the sensitivity and the temperature compensation two circumferential gauges are placed near the center of the diaphragm and two radial gauges are located near the edge. For all the gauges the relative change in resistance ΔR/R with pressure is of the order 10$^{-3}$ for the maximum pressure. The output is found to be linear over the entire pressure range(0-30kfg/cm$^2$)and the output sensitivity obtained is 1.6mV/V. The maximum nonlinearity observed in output characteristics is 0.35%FS for 5V excitation and the hysteresis is less than 0.1%FS.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.25 no.5
• /
• pp.356-361
• /
• 2005

A temperature-compensating double fiber Bragg grating(FBG) sensor having two different FBGs in one fiber line was proposed for real time measurement of mechanical normal strain in structures. Measurement of mechanical strains of the aluminum beam surface by the double FBG sensor was performed under various thermal conditions, and the results were compared with those of electrical resistance strain gage. The FBG sensor fabricated in this study was able to measure accurately the mechanical strains without containing any thermal strain component.

• Journal of Sensor Science and Technology
• /
• v.25 no.4
• /
• pp.247-251
• /
• 2016

Au/PDMS membranes are widely used to fabricate strain sensors which can detect input signals. An interfacial adhesion between metal films and polydimethylsiloxane (PDMS) substrates is one of the important factors determining the performance of strain sensors, in terms of robustness, reliability, and sensitivity. Here, we fabricate Au/PDMS membranes with (3-mercaptopropyl) trimethoxysilane (MPTMS) treatment. PDMS membranes were fabricated by spin-coating and the thickness was controlled by varying the spin rates. Au electrodes were deposited on the PDMS membrane by metal sputtering and the thickness was controlled by varying sputtering time. Owing to the MPTMS treatment, the interfacial adhesion between the Au electrode and the PDMS membrane was strengthened and the membrane was highly transparent. The Au electrode, fabricated with a sputtering time of 50 s, had the highest gauge factor at a maximum strain of ~0.7%, and the Au electrode fabricated with a sputtering time of 60 s had the maximum strain range among sputtering times of 50, 60, and 120 s. Our technique of using Au/PDMS with MPTMS treatment could be applied to the fabrication of strain sensors.

• Journal of Sensor Science and Technology
• /
• v.22 no.5
• /
• pp.315-320
• /
• 2013

In this paper, the properties of strain sensors made of spin-capable multi-walled carbon nanotubes (MWCNTs) were characterized and their sensing mechanisms analyzed. The key contribution of this paper is a new fabrication technique that introduces a simpler transfer method compared to spin-coating or dispersion CNT. Resistance of the MWCNT sheet strain sensor increased linearly with higher strain. To investigate the effect of CNT concentration on sensitivity, two strain sensors with different layer numbers of MWCNT sheets (one and three layers) were fabricated. According to the results, the sensor with a three-layer sheet showed higher sensitivity than that with one layer. In addition, experiments were conducted to examine the effects of environmental factors, temperature, and gas on sensor sensitivity. An increase in temperature resulted in a reduction in sensor sensitivity. It was also observed that ambient gas influenced the properties of the MWCNT sheet due to charge transfer. Experimental results showed that there was a linear change in resistance in response to strain, and the resistance of the sensor fully recovered to its unstressed state and exhibited stable electromechanical properties.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.11b
• /
• pp.97-100
• /
• 2001

This paper presents the characteristics of Ta-N thin-film strain gauges as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4~16%)$N_2$). These films were annealed for 1 hour in $2{\times}10^{-6}$ Torr vaccum furnace range $500\sim1000^{\circ}C$. The optimized conditions of Ta-N thin-film strain gauges were annealing condition($900^{\circ}C$, 1 hr.) in 8% $N_2$ gas flow ratio deposition atmosphere. Under optimum conditions, the Ta-N thin-films for strain gauges is obtained a high resistivity, $\rho=768.93$ ${\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR=-84 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=4.12.