The Study on the Etching Characteristics of (Ba, Sr)TiO$_3$ Film by Inductively Coupled Plasma
(유도결합 플라즈마에 의한(Ba, Sr)TiO$_3$ 박막의 식각 특성 연구)
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- Journal of the Korean Institute of Telematics and Electronics D
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- v.36D no.4
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- pp.56-62
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- 1999