Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2005.11a
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- Pages.68-69
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- 2005
CMP of BTO Thin Films using $TiO_2$ and $BaTiO_3$ Mixed Abrasive slurry
$BaTiO_3$ 및 $TiO_2$ 연마제 첨가를 통한 BTO박막의 CMP
- Seo, Yong-Jin (Daebul Univ) ;
- Ko, Pil-Ju (ChoSun Univ) ;
- Kim, Nam-Hoon (Research Institute of ERT, ChoSun Univ) ;
- Lee, Woo-Sun (ChoSun Univ)
- Published : 2005.11.10
Abstract
BTO (