• 한국전기전자재료학회논문지
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• 제22권9호
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• pp.717-723
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• 2009

Ni/Al ('/' denotes deposition sequence) contacts were deposited on Al-implanted 4H-SiC for ohmic contact formation, and the conduction properties were characterized and compared with those of Ni-only contacts. The thicknesses of the Ni and Al thin film were 30 nm and 300 nm, respectively, and the films were sequentially deposited bye-beam evaporation without vacuum breaking. Rapid thermal anneal (RTA) temperature was varied as follows : $840^{\circ}C$, $890^{\circ}C$, and $940^{\circ}C$. The specific contact resistivity of the Ni contact was about $^{\sim}2\;{\pm}\;10^{-2}\;{\Omega}{\cdot}cm^2$, However, with the addition of Al overlayer, the specific contact resistivity decreased to about $^{\sim}2\;{\pm}\;10^{-4}\;{\Omega}{\cdot}cm^2$, almost irrespective of RTA temperature. X-ray diffraction (XRD) analysis of the Ni contact confirmed the existence of various Ni silicide phases, while the results of Ni/Al contact samples revealed that Al-contaning phases such as $Al_3Ni$, $Al_3Ni_2$, $Al_4Ni_3$, and $Ab_{3.21}Si_{0.47}$ were additionally formed as well as the Ni silicide phases. Energy dispersive spectroscopy (EDS) spectrum showed interfacial reaction zone mainly consisting of Al and Si at the contact interface, and it was also shown that considerable amounts of Si and C have diffused toward the surface. This indicates that contact resistance lowering of the Ni/Al contacts is related with the formation of the formation of interfacial reaction zone containing Al and Si. From these results, possible mechanisms of contact resistance lowering by the addition of Al were discussed.

• Korean Chemical Engineering Research
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• 제56권5호
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• pp.705-710
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• 2018

본 연구에서는 백금 나노입자가 분산된 산화구리 나노구조체 기반의 비효소적 글루코스 센서를 개발하였다. 3차원 구조의 산화구리 나노구조체는 hydrothermal method를 통해 Cu foil 위에 직접 합성되었으며, 합성된 나노구조체 표면위에 전기화학적 증착법으로 백금 나노입자들을 분산시켜 전극을 제작하였다. 준비된 전극 샘플의 표면 구조는 주사 전자 현미경(SEM)과 에너지분산형 분광기(EDS)을 이용하여 분석하였으며, 전기화학적 특성 및 센싱 성능은 알칼리 상태에서 시간대전류법 (CA)과 순환전압 전류법(CV)을 통하여 조사하였다. 개발된 비효소적 글루코스 센서는 산화구리 나노구조체와 백금 나노입자의 접목에 의한 시너지 효과 덕분에 높은 감도와 넓은 선형 구간, 빠른 감응 속도 등의 향상된 센싱 특성을 보였다.

• 한국지하수토양환경학회지:지하수토양환경
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• 제23권6호
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• pp.104-113
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• 2018

A three-dimensional electrochemical process using nanosized zero-valent iron (NZVI)/activated carbon (AC) particle electrode and persulfate (PS) was developed for oxidizing pollutants. X-ray diffraction (XRD), scanning electron microscopy with energy dispersive spectroscopy (SEM-EDS), and Brunauer-Emmett-Teller (BET) surface area analysis were performed to characterize particle electrode. XRD and SEM-EDS analysis confirmed that NZVI was impregnated on the surface of AC. Compared with the conventional two-dimensional electrochemical process, the three-dimensional particle electrode process achieved three times higher efficiency in phenol removal. The system with current density of $5mA/cm^2$ exhibited the highest phenol removal efficiency among the systems employing 1, 5, and $10mA/cm^2$. The removal efficiency of phenol increased as the Fe contents in the particle electrode increased. The particle electrode achieved more than 70% of phenol removal until it was reused for three times. The sulfate radical played a predominant role in phenol removal according to the radical scavenging test.

• The Journal of Advanced Prosthodontics
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• 제14권5호
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• pp.315-323
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• 2022

PURPOSE. The purpose of this study was to investigate the effect of barium silicate filler contents on mechanical properties of resin nanoceramics (RNCs) for additive manufacturing (AM). MATERIALS AND METHODS. Additively manufactured RNC specimens were divided into 4 groups depending on the content of ceramic fillers and polymers: 0% barium silicate and 100% polymer (B0/P10, control group); 50% barium silicate and 50% polymer (B5/P5); 60% barium silicate and 40% polymer (B6/P4); 67% barium silicate and 33% polymer (B6.7/P3.3). The compressive strength (n = 15) and fracture toughness (n = 12) of the specimens were measured, and scanning electron microscopy (SEM) with energy dispersive X-ray spectroscopy (EDS) analyses were performed. Independent sample Kruskal-Wallis tests were performed on the compressive strength and fracture toughness test results, and the significance of each group was analyzed at the 95% confidence interval through post-tests using the Bonferroni's method. RESULTS. B6/P4 and B6.7/P3.3 exhibited much higher yield strength than B0/P10 and B5/P5 (P < .05). Compared to the control group (B0/P10), the other three groups exhibited higher ultimate strength (P < .05). The fracture toughness of B6/P4 and B6.7/P3.3 were similar (P > .05). The content of barium silicate and fracture toughness showed a positive correlation coefficient (R = 0.582). SEM and EDS analyses revealed the presence of an oval-shaped ceramic aggregate in B6/P4 specimens, whereas the ceramic filler and polymer substrate were homogeneously mixed in B6.7/P3.3. CONCLUSION. Increasing the ceramic filler content improves the mechanical properties, but it can be accompanied by a decrease in the flowability and the homogeneity of the slurry.

• 인간식물환경학회지
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• 제24권6호
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• pp.585-593
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• 2021

Background and objective: Illegal open-air incineration, which is criticized as a leading source of air pollutants among agricultural activities, currently requires constant effort and attention. Countries around the world have been undertaking studies on the emission of heavy metal substances in fine dust discharged during the incineration process. A precise analytical method is required to examine the harmful effects of particulate pollutants on the human body. Methods: In order to simulate open-air incineration, the infrastructure needed for incineration tests complying with the United States Environmental Protection Agency (EPA) Method 5G was built, and a large-area analysis was conducted on particulate pollutants through automated scanning electron microscopy (SEM)-energy-dispersive X-ray spectroscopy (EDS). For the test specimen, high-density polyethylene (HDPE) waste collected by the DangJin Office located in Choongcheongnam-do was used. To increase the identifiability of the analyzed particles, the incineration experiment was conducted in an incinerator three times after dividing the film waste into 200 g specimens. Results: Among the metal particulate matters detected in the HDPE waste incineration test, transition metals included C (20.8-37.1 wt%) and O (33.7-37.9 wt%). As for other chemical matters, the analysis showed that metal particulate matters such as metalloids, alkali metals, alkaline earth metals, and transition metals reacted to C and C-O. Si, a representative metalloid, was detected at 14.8-20.8 wt%, showing the highest weight ratio except for C and O. Conclusion: In this study, the detection of metal chemicals in incinerated particulate matters was effectively confirmed through SEM-EDS. The results of this study verified that HDPE waste adsorbs metal chemicals originating from soil due to its own properties and deterioration, and that when incinerated, it emits particulate matters containing transition metals and other metals that contribute to the excessive production and reduction of reactive oxygen species.

• Korean Chemical Engineering Research
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• 제61권1호
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• pp.52-57
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• 2023

본 연구는 고성능 유연 전극 소재 개발을 위한 기초 연구로, 유연 전극 소재의 성능을 향상시키기 위해 금속 산화물 CuO nanoparticles (CuO NPs)를 도입하여 탄소나노튜브 섬유(carbon nanotube fiber; CNT fiber) 표면 위에 전기화학적 증착시켜 CNT fiber/CuO NPs 전극을 합성하고, 이를 전기화학적 비효소 글루코스 센서에 적용하였다. 이 전극의 표면 및 elemental composition 분석은 주사전자 현미경(SEM)과 에너지분산형 분광분석법(EDS)을 이용하였으며, 전극의 전기화학적 특성 및 글루코스에 대한 센싱 성능은 순환전압 전류법(CV)과 전기화학 임피던스법(EIS), 시간대전류법(CA)을 통해 조사되었다. CNT fiber/CuO NPs 전극은 CNT fiber의 우수한 특성과 함께 CuO NPs 도입에 따른 약 2.6배의 유효 전극면적(active surface area) 증가 효과와 11배 정도의 향상된 전자전달(electron transfer) 특성 및 우수한 전기적 촉매 활성(electrocatalytic activity) 덕분에 CNT fiber 유연 기반 전극의 글루코스 검출에 대한 성능이 개선되었다. 따라서, 본 연구를 기반으로 다양한 나노구조체를 활용한 고성능 유연 전극 소재 개발이 기대된다.

• 한국입자에어로졸학회지
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• 제19권2호
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• pp.31-42
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• 2023

The charge and magnetic characteristics of LM (Low-metallic) and NAO (Non-asbestos-organic) brake wear particles were analyzed. The ratio of charged particles from total particles is about 86% of the LM pad and about 92% of the NAO pad. Number of charge per particle from the NAO pad is also higher than that of the LM pad. The ratio of magnetic particles from total particles increases with the particle size. The ratio of magnetic particles from the LM pad is about 15% for the particles with the size of 1 ㎛, and about 74% for ones with 5 ㎛. The ratio from the NAO pad is about 5% for the particles with the size from 0.5 ㎛ to 2 ㎛, and about 80% for the particles with 5 ㎛. Through the analysis of the components of the two pads with SEM-EDS (Scanning Electron Microscopy - Energy Dispersive X-ray Spectroscopy), it was found that the LM pad was occupied with more iron fraction than the NAO pad and that PM_2.5-10 was occupied with more iron fraction than PM_2.5. The particles smaller than 10 ㎛ (i.e. PM₁₀) from the LM pad contained about 83% of charged particles, about 43% of magnetic particles, and about 93% of charged or magnetic particles. PM₁₀ from the NAO pad contained about 88% of charged particles, about 15% of magnetic particles, and about 89% of charged or magnetic particles.

• 마이크로전자및패키징학회지
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• 제11권3호
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• pp.23-30
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• 2004

무연솔더 $Sn0.7wt{\%}Cu,\;Sn3.8wt{\%}Ag0.7wt{\%}Cu$ 솔더와 Pt층의 시효처리에 따른 계면반응에 대한 연구를 수행하였다. $250^{\circ}C$에서 30 초간 리플로한 $Sn3.8wt{\%}Ag0.7wt{\%}Cu/Pt$시편과, $260^{\circ}C$에서 30초간 리플로한 $Sn0.7wt{\%}Cu/Pt$ 시편을 이용하여 125, 150, $170^{\circ}C$에서 25-121 시간동안시효처리 하였다. 시효처리 온도와 시간에 따른 계면 금속간화합물의 두께 및 형상변화를 주사전자현미경 (scanning electron microscopy, SEM), energy dispersive x-ray spectroscopy (EDS) 및 x-ray diffractometry (XRD)를 이용하여 분석하였다. 분석 결과 계면에서 $PtSn_4,\;PtSn_2$가 발견되었고, 이런 금속간화합물 성장은 확산에 의해 지배됨을 발견하였다. 시효처리 온도와 시간에 따른 금속간화합물의 두께 변화를 이용하여 각 솔더에서의 계면 금속간화합물의 생성 활성화 에너지를 구해본 결과 $Sn3.8wt{\%}Ag0.7wt{\%}Cu/Pt$는 145.3 kJ/mol, $Sn0.7wt{\%}Cu/Pt$는 165.1 kJ/mol의 값을 가지고 있었다.

• 환경생물
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• 제40권4호
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• pp.413-422
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• 2022

돌맛조개(Barnea manilensis)는 조간대 하부의 석회암이나 이암 등 무른 암석을 천공하는 이매패류로, 입구는 좁고 안쪽은 넓은 구멍을 만들어 일생을 암석 안에서 서식한다. 본 연구에서는 실체현미경과 FE-SEM (Field Emission Scanning Electron Microscope)을 이용하여 돌맛조개의 형태와 패각의 미세구조를 관찰하였으며, EDS (Energy Dispersive X-ray Spectroscopy) 분석을 통하여 부위별 원소함량을 측정하였다. 또한 3D모델링 및 구조동역학해석을 이용하여 돌맛조개의 천공 행동에 대한 시뮬레이션을 진행하였다. 미세구조 관찰 결과 패각은 상하 비대칭형이고 천공에 직접적으로 관여하는 앞쪽의 패각에는 두드러지게 융기되어 있는 쟁기 모양의 돌기가 일정한 방향성을 가지고 분포되어 있으며, 패각의 두께는 앞쪽이 뒤쪽보다 두꺼운 것으로 나타났다. EDS 결과 패각의 대부분을 차지하는 CaCO₃ 이외에도 Al, Si, Mn, Fe, Mg 등의 금속 원소가 앞쪽 패각 돌기 외곽에만 첨가된 것으로 보아 이는 패각의 강도를 높여 천공에 유리하게 작용될 것이라 추측된다. 시뮬레이션 결과 패각의 앞쪽과 패각 돌기 중 앞부분에 두드러지게 융기된 돌기가 모든 각도에서 하중을 받는 것을 확인할 수 있었다. 이는 실제로 암석을 천공하며 하중을 받는 부위는 앞쪽 패각 돌기임을 시사한다. 돌맛조개의 비정형 패각을 이용한 천공 기작은 추후 효율적인 천공 메커니즘을 고안하기 위한 기초 데이터로 활용될 것이라 기대된다.

• 한국재료학회지
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• 제2권6호
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• pp.408-416
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• 1992

Single-Si 기판과 poly-Si 기판에 각각 Ti을 sputter한 후 RTA 처리하여 안정한 TiS$i_2$를 형성하였다. 그 위에 Si이 1% 첨가된 Al-1% Si을 600nm sputter한 후 후속 열처리로서 400-60$0^{\circ}C$ 에서 30분간 $N_2$분위기로 furnace어닐링을 실시하였다. 이렇게 준비된 각 시편에 대하여 면저항 측정, Auger분석, SEM 사진으로 Al-1% Si/TiS$i_2$이중층 구조에서 Ti-silicide의 열적 안정성을 살펴 보았고, EDS 분석과 X-ray 회절 peak 분석을 통하여 Al-1% Si 층과 TiS$i_2$층의 반응으로 생긴 석출물의 성분과 상을 조사하였다. 이로 부터 다음과 같은 결과를 얻었다 Single-Si 기관에서 형성한 TiS$i_2$층은 Al-1% Si 층과 55$0^{\circ}C$에서 완전히 반응하여 석출물을 형성하였고, poly-Si 기판에서 형성한 TiS$i_2$층은 Al-1% Si 층과 50$0^{\circ}C$에서 완전히 반응하여 석출물을 형성하였는데 전반적으로 기판이 poly-Si인 경우가 반응이 더 잘 일어났고, 석출물의 크기도 비교적 컸다. 이는 poly-Si에 존재하는 grain boundary로 인해 poly-Si에서 형성된 Ti-silicide 층이single-Si 기관에서 형성된 Ti-silicide 층보다 불안정하기 때문으로 생각된다. EDS 분석에 의하여 석출물은 Ti, Al, 그리고 Si로 이루어진 3상 화합물이라고 추정되었고, X-ray회절 분석에 의해 석출물은 Ti, Al, 그리고 Si간의 3상 화합물인 T$i_7$A$l_5$S$i_12$로 확인되었다.