• 제목/요약/키워드: energy dispersive X-ray spectroscopy

검색결과 639건 처리시간 0.028초

LTCC 기판상에 증착한 PZT 박막의 특성 향상에 관한 연구 (Improvement of the Characteristics of PZT Thin Films deposited on LTCC Substrates)

  • 황현석;강현일
    • 한국인터넷방송통신학회논문지
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    • 제12권1호
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    • pp.245-248
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    • 2012
  • 본 논문에서는 실리콘 기반의 기술과 차별화하여 저온동시소성세라믹 (LTCC) 기판을 이용하여 대표적 압전물질인 PZT 박막의 최적의 증착조건을 연구하였다. LTCC 기술은 실리콘 기반의 기술에 비하여 낮은 생산 단가, 높은 수율, 3차원 구조물의 용이한 제작성 등으로 인하여 센서 및 액추에이터와 같은 10 um ~ 수백 um 정도의 중규모 디바이스를 제작하는데 있어서 중요한 역할을 담당하고 있다. LTCC 기판은 NEG사의 MLS 22C 상용 파우더를 이용하여 100 um 두께의 그린쉬트를 적층하고 동시소결하여 400 um 두께로 제작하였다. 제작한 기판위에 Pt/Ti 하부전극을 증착하고 RF 마그네트론 스퍼터링 방법을 이용하여 PZT 박막의 증착조건을 연구하였다. 증착조건으로는 RF 전력과 아르곤과 산소 가스비를 가변하여 실시하였으며, XRD와 EDS를 사용하여 박막의 결정성 및 성분을 분석하였다. 실험을 통하여 얻어진 최적의 증착조건은 RF 전력 125W, 아르곤과 산소비 15:5에서 가장 우수한 특성을 나타내는 것을 확인하였다.

DETORQUE FORCE OF TiN-COATED ABUTMENT SCREW WITH VARIOUS COATING THICKNESS AFTER REPEATED CLOSING AND OPENING

  • Kim, Han-Su;Kim, Hee-Jung;Chung, Chae-Heon
    • 대한치과보철학회지
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    • 제45권6호
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    • pp.769-779
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    • 2007
  • Statement of problem. When TiN coating is applied to the abutment screw, occurrence of greater preload and prevention of the screw loosening could be expected due to decrease of frictional resistance. However, the proper thickness of TiN coating on abutment screw has not been yet reported. Purpose. The purpose of this study is to find out the appropriate TiN coating thickness by evaluating the detorque force and the surface change of titanium abutment screw with various TiN coating thickness. Material and methods. 1. Material Thirty five non-coated abutment screws were prepared for TiN coating. TiN coatings were prepared by Arc ion plating method. Depending on the coating deposition time(CDT), experimental groups were divided into 6 groups(CDT 30min, 60min, 90min, 120min, 150min, 180min) and those of 1 group was not coated as a control group. Each group was made up of 5 abutment screws. 2. Methods FE-SEM(Field Emission Scanning Electron Microscoper) and EDX(Energy Dispersive X-ray Spectroscopy) were used to observe the surface of the abutment screw. Electric scales was used to measure the weight of the abutment screw after the repeated closing and opening of 10 trials. Detorque force was measured with digital torque gauge, at each trial. Results. 1. As the coating deposition time increased, the surface became more consistent and smooth. 2. As for the abutment screws that were TiN coated for more than 60 minutes, no surface change was found after the repeated closing and opening. 3. The TiN coated abutment screws showed less weight change than the non-coated abutment screws. 4. The TiN coated abutment screws showed higher mean detorque force than the noncoated abutment screws. 5. The abutment screw coated for 60 minutes showed the highest mean detorque force. Conclusion. The coating layer of proper thickness is demanded to obtain consistent and smooth coating surface, resistance to wear, and increased detorque force of the abutment screw. In conclusion, the coating deposition time of 60 minutes indicated improved mechanical property, when TiN coating was conducted on titanium abutment screw.

AI 이온 주입된 p-type 4H-SiC에 형성된 Ni/AI 오믹접촉의 전기 전도 특성 (Conduction Properties of NitAI Ohmic Contacts to AI-implanted p-type 4H-SiC)

  • 주성재;송재열;강인호;방욱;김상철;김남균;이용재
    • 한국전기전자재료학회논문지
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    • 제22권9호
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    • pp.717-723
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    • 2009
  • Ni/Al ('/' denotes deposition sequence) contacts were deposited on Al-implanted 4H-SiC for ohmic contact formation, and the conduction properties were characterized and compared with those of Ni-only contacts. The thicknesses of the Ni and Al thin film were 30 nm and 300 nm, respectively, and the films were sequentially deposited bye-beam evaporation without vacuum breaking. Rapid thermal anneal (RTA) temperature was varied as follows : $840^{\circ}C$, $890^{\circ}C$, and $940^{\circ}C$. The specific contact resistivity of the Ni contact was about $^{\sim}2\;{\pm}\;10^{-2}\;{\Omega}{\cdot}cm^2$, However, with the addition of Al overlayer, the specific contact resistivity decreased to about $^{\sim}2\;{\pm}\;10^{-4}\;{\Omega}{\cdot}cm^2$, almost irrespective of RTA temperature. X-ray diffraction (XRD) analysis of the Ni contact confirmed the existence of various Ni silicide phases, while the results of Ni/Al contact samples revealed that Al-contaning phases such as $Al_3Ni$, $Al_3Ni_2$, $Al_4Ni_3$, and $Ab_{3.21}Si_{0.47}$ were additionally formed as well as the Ni silicide phases. Energy dispersive spectroscopy (EDS) spectrum showed interfacial reaction zone mainly consisting of Al and Si at the contact interface, and it was also shown that considerable amounts of Si and C have diffused toward the surface. This indicates that contact resistance lowering of the Ni/Al contacts is related with the formation of the formation of interfacial reaction zone containing Al and Si. From these results, possible mechanisms of contact resistance lowering by the addition of Al were discussed.

백금 나노입자가 분산된 3차원 산화구리 나노구조체 기반의 글루코스 검출용 비효소적 전기화학 센서 개발 (Non-Enzymatic Glucose Sensor Based on a Copper Oxide Nanoflowers Electrode Decorated with Pt Nanoparticles)

  • 송민정
    • Korean Chemical Engineering Research
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    • 제56권5호
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    • pp.705-710
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    • 2018
  • 본 연구에서는 백금 나노입자가 분산된 산화구리 나노구조체 기반의 비효소적 글루코스 센서를 개발하였다. 3차원 구조의 산화구리 나노구조체는 hydrothermal method를 통해 Cu foil 위에 직접 합성되었으며, 합성된 나노구조체 표면위에 전기화학적 증착법으로 백금 나노입자들을 분산시켜 전극을 제작하였다. 준비된 전극 샘플의 표면 구조는 주사 전자 현미경(SEM)과 에너지분산형 분광기(EDS)을 이용하여 분석하였으며, 전기화학적 특성 및 센싱 성능은 알칼리 상태에서 시간대전류법 (CA)과 순환전압 전류법(CV)을 통하여 조사하였다. 개발된 비효소적 글루코스 센서는 산화구리 나노구조체와 백금 나노입자의 접목에 의한 시너지 효과 덕분에 높은 감도와 넓은 선형 구간, 빠른 감응 속도 등의 향상된 센싱 특성을 보였다.

650 ℃의 10%O2+10%CO2 가스 환경에서 2.25Cr-1Mo강의 산화특성에 미치는 KCl(s)과 K2SO4(s)의 영향 (Effect of KCl(s) and K2SO4(s) on Oxidation Characteristics of the 2.25Cr-1Mo Steel in 10%O2+10%CO2 Gas Environment at 650 ℃)

  • 정광후;김성종
    • Corrosion Science and Technology
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    • 제19권1호
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    • pp.43-50
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    • 2020
  • In this study, the effects of KCl(s) and K2SO4(s) on the oxidation characteristics of 2.25Cr-1Mo steel were investigated for 500 h in 10O2 + 10CO2 (vol%) gas environmen at 650 ℃. Oxidation kinetics were characterized by weight gain, oxide layer thickness, and fitted models for the experiment data were proposed. The fitted models presented considerable agreement with the experimental data. The oxide layer was analyzed using the scanning electron microscope, optical microscope, and energy dispersive X-ray spectroscopy. The oxidation kinetics of 2.25Cr-1Mo steel with KCl and K2SO4 coatings showed significantly different oxidation kinetics. KCl accelerated the oxidation rate very much and had linear oxidation behavior. In contrast, K2SO4 had no significant effect, which had parabolic kinetics. The oxide layer was commonly composed of Fe2O3, Fe3O4, and FeCr2O4 spinel. KCl strongly accelerated the oxidation rates of 2.25Cr-1Mo steel in the high-temperature oxidation environment. Conversely, K2SO4 had little effect on the oxidation rates.

Adsorption Characteristics of Cd, Cu, Pb and Zn from Aqueous Solutions onto Reed Biochar

  • Choi, Ik-Won;Kim, Jae-Hoon;Lee, Soo-Hyung;Lee, Jae-Kwan;Seo, Dong-Cheol;Cho, Ju-Sik
    • 한국토양비료학회지
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    • 제49권5호
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    • pp.489-494
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    • 2016
  • Carbon-based sorbents such as biochar and activated carbon have been proven to be cost-effective in removing pollutants containing heavy metals from wastewater. The aim of this study was using batch experiment to evaluate the adsorption characteristics of heavy metals in single-metal conditions onto reed biochar for treating wastewater containing heavy metals. The removal rates of heavy metals were in the order of Pb > $Cu{\fallingdotseq}Cd{\fallingdotseq}Zn$, showing the adsorption efficiency of Pb was higher than the other heavy metals. Freundlich and Langmuir adsorption isotherms were used to model the equilibrium adsorption data obtained from adsorption of Pb on reed biochar. For reed biochar, the Langmuir model provided a slightly better fit than the Freundlich model. Lead was observed on the biochar surface after adsorption by scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy (EDS). The main functional groups of reed biochar were aromatic carbons. Overall, the results suggested that reed biochar could be useful adsorbent for treating wastewater containing Pb.

지역난방수 공급관 에어벤트 부식 파손 분석 (Corrosion Failure Analysis of Air Vents Installed at Heat Transport Pipe in District Heating System)

  • 이형준;채호병;조정민;김우철;정준철;김희산;김정구;이수열
    • Corrosion Science and Technology
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    • 제19권4호
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    • pp.189-195
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    • 2020
  • Two air vents situated on a heat transport pipe in district heating system were exposed to the same environment for 10 years. However, one air vent was more corroded than the other. It also had a hole on the top of the front-end pipe. Comparative analysis was performed for these air vents to identify the cause of corrosion and establish countermeasures. Through experimental observation of the damaged part and analyses of powders sampled from air vents, it was found that corrosion was initiated at the top of the front-end pipe. It then spread to the bottom. Energy dispersive X-ray spectroscopy results showed that potassium and chlorine were measured from the corroded product in the damaged air vent derived from rainwater and insulation, respectively. The temperature of the damaged air vent was maintained at 75 ~ 120 ℃ by heating water. Rainwater-soaked insulation around the front-end pipe had been hydrolyzed. Therefore, the damaged air vent was exposed to an environment in which corrosion under insulation could be facilitated. In addition, ion chromatography and inductively coupled plasma measurements indicated that the matrix of the damaged front-end pipe contained a higher manganese content which might have promoted corrosion under insulation.

Ag Paste bump 구조를 갖는 인쇄회로기판의 Ag migration 발생 안전성 평가 (Investigation of Ag Migration from Ag Paste Bump in Printed Circuit Board)

  • 송철호;김영훈;이상민;목지수;양용석
    • 한국재료학회지
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    • 제20권1호
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    • pp.19-24
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    • 2010
  • The current study examined Ag migration from the Ag paste bump in the SABiT technology-applied PCB. A series of experiments were performed to measure the existence/non-existence of Ag in the insulating prepreg region. The average grain size of Ag paste was 30 nm according to X-ray diffraction (XRD) measurement. Conventional XRD showed limitations in finding a small amount of Ag in the prepreg region. The surface morphology and cross section view in the Cu line-Ag paste bump-Cu line structure were observed using a field emission scanning electron microscope (FE-SEM). The amount of Ag as a function of distance from the edge of Ag paste bump was obtained by FE-SEM with energy dispersive spectroscopy (EDS). We used an electron probe micro analyzer (EPMA) to improve the detecting resolution of Ag content and achieved the Ag distribution function as a function of the distance from the edge of the Ag paste bump. The same method with EPMA was applied for Cu filled via instead of Ag paste bump. We compared the distribution function of Ag and Cu, obtained from EPMA, and concluded that there was no considerable Ag migration effect for the SABiT technology-applied printed circuit board (PCB).

폴리머 코팅된 NiTi합금 교정선의 표면특성 (Surface Characteristics of Polymer Coated NiTi Alloy Wire for Orthodontics)

  • 조주영;김원기;최환석;이호종;최한철
    • 한국표면공학회지
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    • 제43권3호
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    • pp.132-141
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    • 2010
  • NiTi alloy has been used for orthodontic wire due to good mechanical properties, such as elastic strength and frictional resistance, combined with a high resistance to corrosion. Recently, these wire were coated by polymer and ceramic materials for aesthetics. The purpose of this study was to investigate surface characteristics of polymer coated NiTi alloy wire for orthodontics using various instruments. Wires (round type and rectangular type) were used, respectively, for experiment. Polymer coating was carried out for wire. Specimen was investigated with field emission scanning electron microscopy(FE-SEM), energy dispersive x-ray spectroscopy(EDS) and atomic force microscopy(AFM). The phase transformation of non-coated NiTi wire from martensite to austenite occurred at the range of $14{\sim}15^{\circ}C$, in the case of coated wire, it occurred at the range of $16{\sim}18^{\circ}C$. Polymer coating on NiTi wire surface decreased the surface defects such as scratch which was formed at severe machined surface. From the AFM results, the average surface roughness of non-coated and coated NiTi wire was 13.1 nm, and 224.5 nm, respectively. From convetional surface roughness test, the average surface roughness of non-coated and coated NiTi wire was $0.046{\mu}m$, and $0.718{\mu}m$, respectively.

CNT 성장시 Ni 및 Co 촉매의 조성비에 따른 CNT-W 팁의 전계방출 특성 분석 (Field emission properties of CNT-W tips as a function of the composition ratio of Ni and Co catalysts in CNT growth)

  • 김원;윤성준;김영광;김종필;박창균;박진석
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2007년도 제38회 하계학술대회
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    • pp.1269-1270
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    • 2007
  • Carbon nanotubes (CNTs) are directly grown on W-tips at $700^{\circ}C$ using an ICP-CVD method. Sharpening of W-tip is done by electrochemical etch and their diameters are limited to range from $3{\mu}m$ to $5{\mu}m$. Catalysts for CNTs growth are formed by RF and DC co-sputtering systems using Ni and Co. The composition ratio of Ni and Co has been evaluated by energy dispersive x-ray spectroscopy (EDS). The micro-images of CNTs are monitored by field emission scanning electron microscope (FESEM). It is observed from Raman study that the intensity of the D-peak is increased by increasing the amount of Co catalyst. Furthermore, the measurement of field emission properties of CNTs show that the CNT grown on a single Co catalyst possess the greatest performance such as $V_{th}$=1,115V and $I_{max}=164{\mu}A$.

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