• Journal of Surface Science and Engineering
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• v.41 no.3
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• pp.83-87
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• 2008

This study described the effects of RF power, DC bias voltage, chamber pressure and gas mixing ratio on the etch rates of TiN thin film and selectivity of TiN thin film to $SiO_2$ with $BCl_3$/Ar gas mixture. When the gas mixing ratio was $BCl_3$(20%)/Ar(80%) with other conditions were fixed, the maximum etch rate of TiN thin film was 170.6 nm/min. When the DC bias voltage increased from -50 V to -200 V, the etch rate of TiN thin film increased from 15 nm/min to 452 nm/min. As the RF power increased and chamber pressure decreased, the etch rate of TiN thin film showed an increasing tendency. When the gas mixing ratio was $BCl_3$(20%)/Ar(80%) under others conditions were fixed, the intensity of optical emission spectra from radical or ion such as Ar(750.4 nm), $Cl^+$(481.9 nm) and $Cl^{2+}$(460.8 nm) was highest. The TiN thin film was effectively removed by the chemically assisted physical etching in $BCl_3$/Ar ICP plasma.

• Journal of Korean Society on Water Environment
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• v.21 no.3
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• pp.248-255
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• 2005

Since the water quality of drinking water sources has been recognized as a big issue, the ministry of Environment in Korea is designing the total maximum daily load (TMDL) program for 4 major large rivers. The TMDL program can be successfully performed as controling the nonpoint pollutants from watershed area near the river. Of the various landuses in nonpoint pollution, parking lots and bridges are stormwater intensive landuses because of high imperviousness and high pollutant mass emissions from vehicular activities. Vehicle emissions from those areas include different pollutants such as heavy metals, oil and grease and particulates from sources such as fuels, brake pad and tire wear, etc. Especially the pollutant washed-off from the landuses are directly affecting to the river water quality. Therefore this research was conducted to understand the magnitude and nature of the stormwater emissions with the goal of quantifying stormwater pollutant concentrations and mass emission rates of pollutants from parking lot and bridges in Korea. In Kongju city areas, two monitoring sites were equipped with an automatic rainfall gages and an automatic flow meter for accumulating the useful data such as rainfall, water quality and runoff flow. This manuscripts will show the concentration changes during storm duration and EMCs to characterize the concentration profiles in different land uses. Also the first flush criteria will be suggested using dynamic EMCs. The definition of dynamic EMC is a new approach explaining the relationship of EMC and first flush effect.

• Korean Journal of Materials Research
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• v.18 no.2
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• pp.92-97
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• 2008

In spray pyrolysis, the effects of the preparation temperature, flow rate of the carrier gas and concentration of the spray solution on characteristics such as the morphology, size, and emission intensity of $Ca_8Mg(SiO_4)_4Cl_2:Eu^{2+}$ phosphor powders under long-wavelength ultraviolet light were investigated. The phosphor powders obtained post-treatment had a range of micron sizes with regular morphologies. However, the composition, crystal structure and photoluminescence intensity of the phosphor powders were affected by the preparation conditions of the precursor powders. The $Ca_8Mg(SiO_4)_4Cl_2:Eu^{2+}$ phosphor powders prepared at temperatures that were lower and higher than $700^{\circ}C$ had low photoluminescence intensities due to deficiencies related to the of Cl component. The phosphor powders with the deficient Cl component had impurity peaks of $Ca_2SiO_4$. The optimum flow rates of the carrier gas in the preparation of the $Ca_8Mg(SiO_4)_4Cl_2:Eu^{2+}$ phosphor powders with high photoluminescence intensities and regular morphologies were between 40 and 60 l/minute. Phosphor powders prepared from a spray solution above 0.5 M had regular morphologies and high photoluminescence intensities.

• Journal of Environmental Science International
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• v.28 no.2
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• pp.169-182
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• 2019

Temporal and spatial variations in surface ozone concentrations in Busan were investigated by using observation data from urban air quality sites during 2001-2016. The annual ozone concentrations showed a significant increasing trend of $+0.40ppb\;yr^{-1}$ in this period, with a more rapid increase of $+0.81ppb\;yr-1$ since 2010. For the monthly analysis, the increase in ozone concentration was the greatest in August ($+0.68ppb\;yr-1$). These ozone trends were due mainly to rising temperature ($+0.05^{\circ}C\;yr^{-1}$) and weak decreasing precipitation ($-6.42mm\;yr^{-1}$). However, the extreme weather events (heat wave, localized heavy rain, etc.) lead to an increase in short-term variability of ozone since 2010. The relatively low ozone concentrations in the downtown area were caused by high NOx emissions from mobile sources. The increases in ozone concentrations were observed at most of the air quality monitoring sites due to the reductions in anthropogenic emissions of NOx during 2001-2015. However, in the southern coastal area, lower rates of increase in ozone concentrations were observed by $-0.10{\sim}0.25ppb\;yr^{-1}$ due to the significant NOx emitted by ships in the Busan port and Busan new port.

• Journal of Radiation Protection and Research
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• v.46 no.2
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• pp.58-65
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• 2021

Background: The evaluation of skyshine distribution, release of airborne radioactive nuclides, and soil activation and groundwater migration were required for radiological assessment of the impact on the environment surrounding In-Flight (IF)-system facility of the RAON (Rare isotope Accelerator complex for ON-line experiment) accelerator complex. Materials and Methods: Monte Carlo simulation by MCNPX code was used for evaluation of skyshine and activation analysis for air and soil. The concentration model was applied in the estimation of the groundwater migration of radionuclides in soil. Results and Discussion: The skyshine dose rates at 1 km from the facility were evaluated as 1.62 × 10^-3 μSv·hr^-1. The annual releases of ³H and ¹⁴C were calculated as 9.62 × 10^-5 mg and 1.19 × 10^-1 mg, respectively. The concentrations of ³H and ²²Na in drinking water were estimated as 1.22 × 10^-1 Bq·cm^-3 and 8.25 × 10^-3 Bq·cm^-3, respectively. Conclusion: Radiological assessment of environmental impact on the IF-facility of RAON was performed through evaluation of skyshine dose distribution, evaluation of annual emission of long-lived radionuclides in the air and estimation of soil activation and groundwater migration of radionuclides. As a result, much lower exposure than the limit value for the public, 1 mSv·yr^-1, is expected during operation of the IF-facility.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.161-166
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• 2021

Errors in the semiconductor process are generated by a change in the state of the equipment, and errors usually arise when the state of the equipment changes or when parts that make up the equipment have flaws. In this investigation, we anticipated that aging of the mass flow controller in the plasma enhanced chemical vapor deposition SiO2 thin film deposition method caused a minute flow rate shift. In seven cases, fourier transformation infrared film quality analysis of the deposited thin film was used to characterize normal and pathological processes. The plasma condition was monitored using optical emission spectrometry data as the flow rate changed during the procedure. Preprocessing was used to apply the collected OES data to the artificial immune system algorithm, which was then used to process diagnosis. Through comparisons between datasets, the learning algorithm compared classification accuracy and improved the method. It has been confirmed that data characterized as a normal process and abnormal processes with differing flow rates may be discriminated by themselves using the artificial immune system data mining method.

• Journal of Microbiology and Biotechnology
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• v.33 no.7
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• pp.886-894
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• 2023

During the rhizoremediation of diesel-contaminated soil, methane (CH₄), a representative greenhouse gas, is emitted as a result of anaerobic metabolism of diesel. The application of methantrophs is one of solutions for the mitigation CH₄ emissions during the rhizoremediation of diesel-contaminated soil. In this study, CH₄-oxidizing rhizobacteria, Methylocystis sp. JHTF4 and Methyloversatilis sp. JHM8, were isolated from rhizosphere soils of tall fescue and maize, respectively. The maximum CH₄ oxidation rates for the strains JHTF4 and JHM8 were 65.8 and 33.8 mmol·g-DCW^-1·h^-1, respectively. The isolates JHTF4 and JHM8 couldn't degrade diesel. The inoculation of the isolate JHTF4 or JHM8 significantly enhanced diesel removal during rhizoremediation of diesel-contaminated soil planted with maize for 63 days. Diesel removal in the tall fescue-planting soil was enhanced by inoculating the isolates until 50 days, while there was no significant difference in removal efficiency regardless of inoculation at day 63. In both the maize and tall fescue planting soils, the CH₄ oxidation potentials of the inoculated soils were significantly higher than the potentials of the non-inoculated soils. In addition, the gene copy numbers of pmoA, responsible for CH₄ oxidation, in the inoculated soils were significantly higher than those in the non-inoculated soils. The gene copy numbers ratio of pmoA to 16S rDNA (the ratio of methanotrophs to total bacteria) in soil increased during rhizoremediation. These results indicate that the inoculation of Methylocystis sp. JHTF4 and Methyloversatilis sp. JHM8, is a promising strategy to minimize CH₄ emissions during the rhizoremediation of diesel-contaminated soil using maize or tall fescue.

• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.130-135
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• 2023

Plasma-resistant ceramic (PRC) is a material used to prevent internal damage in plasma processing equipment for semiconductors and displays. The challenge is to suppress particles falling off from damaged surfaces and increase retention time in order to improve productivity and introduce the latest miniaturization process. Here, we confirmed the effect of suppressing plasma deterioration and reducing the etch rate through surface treatment of existing PRC with an initial illumination level of 200 nm. In particular, quartz glass showed a decrease in etch rate of up to 10%. Furthermore, it is believed that micro-scale secondary particles formed on the microstructure of each material grow as crystals during the fluoridation process. This is a factor that can act as a killer defect when dropped, and is an essential consideration when analyzing plasma resistance. The plasma etching suppression effect of the initial illumination is thought to be due to partial over etching at the dihedral angle of the material due to the sputtering of re-emission of Ar+-based cations. This means that plasma damage due to densification can also be interpreted in existing PRC studies. The research results are significant in that they present surface treatment conditions that can be directly applied to existing PRC for mass production and a new perspective to analyze plasma resistance in addition to simple etching rates.

• Resources Recycling
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• v.33 no.2
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• pp.3-15
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• 2024

Environmental awareness is rising worldwide. however, cement manufacturing facilities use recycled resources to improve raw material and fuel substitution rates, contributing to environmental issues such as waste disposal. The emission of sulfur oxides (SOx), an air pollutant, has been regulated by limestone as raw material in cement manufacturing. However, the impact of increasing use of recycled resources on future facility processes and environmental changes is unclear. Therefore, the cement manufacturing facilities require desulfurization-related technologies and research. In this study, we investigated the applicability of desulfurization technology to cement manufacturing facilities and demonstrated various approaches to applying this technology using byproducts generated in cement manufacturing.

• Journal of Environmental Health Sciences
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• v.50 no.2
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• pp.138-145
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• 2024

Background: Appropriateness issues have emerged regarding the non-application of hazardous substance safety standards for items classified as 'other textile products'. Objectives: Testing for formaldehyde (HCHO) and risk assessment were conducted on 'other textiles products' to provide reference data for promoting product safety policies. Methods: Testing was conducted on five items (102 products) classified as 'other textile products' according to relevant standards (textile products safety standards), and the risk of each product was assessed using the evaluation methodologies of the European Centre for Ecotoxicology and Toxicology of Chemicals (ECETOC) and European Chemical Agency (ECHA). Results: Out of the 102 products tested, HCHO was detected above the quantification limit in five. Based on these results, the screening risk assessment indicated that three products exceeded the criteria. Upon reassessing the emission and transfer rates of products exceeding the criteria, it was confirmed that there were no instances of exceeding the criteria. Conclusions: Risk assessment results can be used as supporting data for non-application of hazardous substance standards. However, it is deemed necessary to transition towards a management approach based on risks in order to addressing emerging trends such as convergence/new products.