• Title/Summary/Keyword: emission amount

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Use of In-Situ Optical Emission Spectroscopy for Leak Fault Detection and Classification in Plasma Etching

  • Lee, Ho Jae;Seo, Dong-Sun;May, Gary S.;Hong, Sang Jeen
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.13 no.4
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    • pp.395-401
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    • 2013
  • In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

Atmospheric $Co_2$sequestration by urban greenspace (도시녹지에 의한 대기 $Co_2$의 흡수 -춘천시를 대상으로-)

  • 조현길;윤영활;이기의
    • Journal of the Korean Institute of Landscape Architecture
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    • v.23 no.3
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    • pp.80-93
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    • 1995
  • The purpose of this study was to assess functioni fo urban greenspace to reduce atmospheric CO\sub 2\ concentration. The study quantified carbon storage in urban greenspace and carbon emission by fossil fuel consumptio in Chuncheon. The amount of carbon storage in vegetation by land use type was 0.02kg/$m^2$ for commercial land, 4.36kg/$m^2$ for natural land, and 0.54kg/$m^2$ for the other urban lands. In 1994, total amount of carbon emission by fossil fuel consumption was about 257,358 metric tons, and the per capita carbon emission was 1.4 metric ton. Total amount of carbon storage in vegetation was 42,942 metric tons, approximately 17% of the carbon emission. This study excluded quantification of carbon storage in soils. The role of urban greenspace to sequester atomspheric carbon might be much greater, if a soil greenspace to sequester atmospheric carbon might be much greater, if a soil greenspace to sequester atmospheric carbon might be much greater, if a soil carbon storage is included quantification of carbon storage is included. However, increasing coverage of trees and managing them for healthy growth would not be sufficient for avoiding adverse impacts by future climate change. Additional measures should be followed such as an increase of energy use efficiency and development of substitute energy.

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Comparison of Greenhouse Gas Emission from Landfills by Different Scenarios (매립지의 온실가스 배출량 산정 시나리오에 따른 온실가스 배출량 비교)

  • Kim, Hyun-Sun;Choi, Eun-Hwa;Lee, Nam-Hoon;Lee, Seung-Hoon;Cheong, Jang-Pyo;Lee, Chae-Young;Yi, Seung-Muk
    • Journal of Korean Society for Atmospheric Environment
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    • v.23 no.3
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    • pp.344-352
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    • 2007
  • Quantifying the methane emission from landfills is important to evaluate measures for reduction of greenhouse gas emissions. To estimate methane emission for the entire landfills from 1990 through 2004 in Korea, Tier 1 and 2 methodologies were used. In addition, five different scenarios were adopted to identify the effect of important variables on methane emission. The trends of methane emission using Tier 1 were similar to the disposed waste amount. Methane emission using Tier 2 increased as the degradation of waste was gradually proceeded. This result indicates that disposed waste amount and methane generation rate are the important variables for the estimation of methane emission by Tier 1 and 2, respectively. As for the different scenarios, methane emission was highest with scenario I that the entire landfills in Korea were regarded as one landfill. Methane emissions by scenario III and IV considering different $DOC_F$ values with the waste type and different MCF values with the height of waste layer, respectively, were underestimated compared to scenario II. This result indicates that the method of scenario I employed to most previous studies may lead to the overestimation of methane emission. Therefore, more careful consideration of the variables should be needed to develop the methodologies of greenhouse gas emission in landfills along with the characteristics of disposed waste in Korea.

Study on Emission Characteristics in a Hydrogen-fueled Engine (수소기관에서의 배기가스에 관한 연구)

  • Cho, U.L.;Ghoi, G.H.;Bae, S.C.
    • Transactions of the Korean hydrogen and new energy society
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    • v.13 no.1
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    • pp.83-89
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    • 2002
  • The goal of this research is to understand the NOx emission in direct injected diesel engine with premixed hydrogen fuel. Hydrogen fuel was supplied into the test engine through the intake pipe. Amount of hydrogen-supplemented fuel was 70 % basis on heating value of the total input fuel. The effects of intake air temperature and exhaust gas recirculation(EGR) on NOx emission were studied. The intake air temperatures were varied from $23^{\circ}C$ to $0^{\circ}C$ by using liquid nitrogen. Also, the exhaust gas was recirculated to the intake manifold and the amount of exhaust gas was controlled by the valve. The major conclusions of this work include: ( i ) nitrogen concentrations in the intake pipe were increased by 30% and cylinder gas temperature was decreased by 24% as the intake air temperature were changed from $23^{\circ}C$ to $0^{\circ}C$; ( ii ) NOx emission per unit heating value of supplied fuel was decreased by 45% with same decrease of intake air temperature; and (iii) NOx emission was decreased by 77% with 30% of EGR ratio. Therefore, it may be concluded that EGR is effective method to lower NOx emission in hydrogen fueled engine.

Interrelations between Greenhouse Gas (GHG) Emission and Total Floor Area of Buildings -With the Case Study of Public Facilities in Ontario, Canada-

  • Son, Juntae;Chang, Seongju
    • Architectural research
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    • v.19 no.4
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    • pp.95-99
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    • 2017
  • Recently, it is becoming increasingly difficult to ignore carbon emission implication of building operations due to the significant rate of energy usage in buildings. In the building sector, our normal expectation implies that large building floor area induces more greenhouse gas (GHG) emission. In this research, the correlation between building total floor areas and GHG emission was explored by simple linear regression and analyzing the yielded residuals for confirming this seemingly obvious conjecture. By looking at the generated regression lines drawn based on the data sets representing public facilities in Ontario, Canada, we were able to confirm that carbon emission rate shows a proportional increase or decrease depending on the total floor area of buildings as has been implied as a conjecture. Some buildings were found to emit significantly large and small amount of GHG, and we addressed potential reasons why those buildings show the deviation from the confirmed proportional interrelation between a building's total floor area and the amount of GHG emission.

Comparison between Congestion Levels and Amount of $CO_2$ Emissions on Arterials (단속류 간선도로에서 지정체와 $CO_2$ 배출량 비교)

  • Gang, Jin-Gu;O, Heung-Un
    • Journal of Korean Society of Transportation
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    • v.29 no.6
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    • pp.17-23
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    • 2011
  • It has been presumed that the amount of vehicle's $CO_2$ emission would highly related to vehicle's cruising speeds on highways. In this study, it was tested if vehicle's $CO_2$ emissions would relate to the types of highways and the level of congestion. The results showed that the amount of $CO_2$ emission changes depending on (1) the vehicles' cruising speeds (b) congestion levels, and (c) the types of intersections. It was found that the vehicle acceleration and deceleration methods increases the amount of $CO_2$ emission up to 12%. It was also found that it changed up to 30% and 40% depending on the level of congestion and the types of intersections, respectively. The findings imply that the amount of $CO_2$ emission from vehicles should be improved when vehicles' cruising speeds are well managed through congestion management.

A Study on the Estimation of BVOCs Emission in Jeju Island (2): Emission Characteristic and Situation (제주지역 BVOCs의 배출량 산정에 관한 연구(2): 배출량 특성 및 실태)

  • Lee, Ki-Ho;Kim, Hyeong-Cheol;Hu, Chul-Goo
    • Journal of Environmental Science International
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    • v.24 no.2
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    • pp.207-219
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    • 2015
  • The purpose of this study is to show the geographical distribution and the temporal variation of the emission amount of biogenic volatile organic compounds(BVOCs) emanated from forests at Jeju Island. The total emission amount of BVOCs calculated by using the CORINAIR Methodology is $3612ton\;yr^{-1}$ at Jeju Island. More than half of BVOCs emissions is come from coniferous forest, and 45 per cent from broad leaved forest. The others is attributed to grassland. Of total emission of BVOCs, isoprene accounts for 28 per cent, monoterpene for 32 per cent, and other VOCs for about 40 percent, respectively. It can be shown that $3000{\sim}10000kg\;yr^{-1}$ of BVOCs is emitted at the zone with dense forest from an altitude of 500 m to the top of Mt. Halla, and less than $1500kg\;yr^{-1}$ at the zone an altitude of below 500 meters. The monoterpene emission is more than $1500kg\;yr^{-1}$ due to the existence of a colony of Abies koreana at the place with more than 1500 meters and a community of Pinus thunbergii and Cryptomeria japonica at the elevation of 500~700 m. In the case of isoprene emission, there is $1500{\sim}3000kg\;yr^{-1}$ at the zone of an elevation from 700 m to 1500 m due to dense broad leaved forest and very little of its emission at an elevation of more than 1500 meters because there is hardly broad leaved trees grown. In this study, emission of BVOCs according to the altitude above sea level is estimated under the situation of lack of the data for broad leaved tree. More detailed data and information for the distribution of broad leaved trees are needed in order to calculate more realistic BVOC emission.

Effects of Regional SO2 Emission Change due to the Western Development in China on the Deposition of sulfur in East Asia: Analysis Using the RAINS-Asia Model (중국의 서부 대개발에 따른 중국의 아황산가스 배출량과 주 배출 지역의 변화가 동아시아 황 침적량에 미치는 영향: RAINS-Asia 모델을 통한 분석)

  • Yeo M.J;Kim Y.P
    • Journal of Korean Society for Atmospheric Environment
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    • v.21 no.1
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    • pp.73-81
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    • 2005
  • It is widely accepted that, at present, the SO$_2$ emissions in China are not increasing thanks to the rigorous Chinese government policies. However, with the development of western China, it is possible that the SO$_2$ emission amounts might increase in regional scale. In this study, changes of sulfur deposition pattern and unprotected ecosystem in east Asia due to the sulfur emission pattern changes in China are studied by using the RAINS-Asia model. Five scenarios have been postulated to understand the effects on east Asia, especially, on Korea and Japan. It is found that the increase of SO$_2$ emission in western China might increase the total emission in whole China. And the amount of sulfur deposition from western China on east Asia would be higher than those from eastern China. The deposition amount of sulfur species on Asia is 3.2 Mt when SO$_2$ are emitted from western China only while 2.6 Mt from eastern China only. Generally, Korea and Japan are influenced more by emissions from eastern China than western China. However, if the SO$_2$ emissions from western China increase by 100% while those decrease by 10% in eastern China compared to the base case, the deposition amount of sulfur species on Korea and Japan would be higher than the base case. The fraction of unprotected ecosystem in Korea and Japan for the base case are 50 and 5%. However, if the emissions from western China increase by 100% while those decrease by 10% in eastern China, the fraction of unprotected ecosystem in Korea and Japan would be 52 and 6%.

Effects of Port Fuel Injection Characteristics upon HC Emission in SI Engines (연료 분사 특성이 가솔린 엔진 HC 배출특성에 미치는 영향)

  • Woo, Young-Min;Bae, Choong-Sik;Lee, Yong-Pyo
    • Proceedings of the KSME Conference
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    • 2001.06d
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    • pp.796-801
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    • 2001
  • During cold operation period, fuel injection system directly contributes the unburned hydrocarbon formation in spark ignition engines. The relationship between injection parameters and HC emission behavior was investigated through a series of experiments. Spray behavior of port fuel injectors was characterized through a quantitative evaluation of mass concentration of liquid fuel by a patternator and PDA. 6-hole injector was found to produce finer spray than single hole one. Using a purpose-built test rig, the wall wetting fuel was measured, which was mostly affected by wall temperature. Varying coolant temperature($20{\sim}80^{\circ}C$), HC emissions were measured in a production engine. With respect to the different types of injectors, HC emission was also measured. In the 6-hole injector application, the engine produced less HC emission in low coolant temperature region. Though it produces much more amount of wetting fuel, it has the advantages of finer atomization quality. In high coolant temperature region, there was little effect between different types of injectors. The control schemes to reduce HC emissions during cold start could be suggested from the findings that the amount of fuel supply and HC emission could be reduced by utilizing fine spray and high intake wall temperature.

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An Experimental Study on the Performance and Emission Characteristics with Hydrogen Enrichment at Part Load Conditions Using a LPG Engine (LPG기관의 부분부하 조건에서 수소 혼합에 따른 성능 및 배출가스 특성에 관한 실험적 연구)

  • Kim, Ingu;Kim, Kijong;Lee, Seangwock;Cho, Yongseok
    • Transactions of the Korean hydrogen and new energy society
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    • v.24 no.3
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    • pp.242-248
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    • 2013
  • The purpose of this study is to obtain low-emission and high-efficiency by hydrogen enriched LPG fuel in LPG engine and is to clarify the effects of hydrogen enrichment in LPG fuelled engine on exhaust emission and performance. An experimental study was carried out to obtain fundamental data for performance and emission characteristics of hydrogen enrichment in LPG engine. The research was held by changing the hydrogen ratio to 0, 5, 10, 20% in 1500rpm, bmep 2 and 4bar. The result turned out that the combustion duration was shortened due to fast flame propagation of hydrogen. And the amount of Carbon dioxide and Hydrocarbon decreased. However, the amount of NOX increased, which is thought to be the result of high adiabatic flame temperature of hydrogen. It has been confirmed that this phenomenon has changed by the Hydrogen mixing ratio.