• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2383-2385
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• 2005

In this paper we discuss the design and fabrication of two millimeter wave filters, in bandpass and bandstop topologies for wireless communications applications. The filters are made using a high Q MMIC transmission line, which consists of a 100 micrometers tall, surface micromachined, air filled inverted microstrip structure on a quartz substrate, made by using a JSR THB-151N negative photoresist sacrificial layer mold and electroplating technology. The filter topologies include a new, very compact, four pole, cross-coupled filter, that presents a single transmission zero at the lower side of the passband, which provides a very sharp out of passband rejection at this region.

• Design & Manufacturing
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• 제11권1호
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• pp.1-6
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• 2017

In these days, due to generalization of using smart mobile phone and wearable device such as smart watch, demand of Cover-glass and touch screen panel for protecting display increases. With increasing the demand of Cover-glass, slimming technique is promising for weight lightening, zero bezel. Cover-glass produced by this technique is required to decreasing thickness with increase strength. In the Cover-glass manufacturing process, mechanical processing and chemical processing has improve in the strength. Generally, Diamond electrodeposition wheel is used in mechanical process. Reinforced glass with the characteristics of the brittle and high hardness was manufactured by using a diamond electrodeposition wheel. At this time, Because of surface of the tool present non-uniform distribution of diamond particle, it has generate Loading of wheel and it has been decrease life of grinding tool, efficiency of grinding, quality and shape accuracy of workpiece. Thus Research is needed to controling particle distribution of diamond electrodeposition wheel uniformly. And it is necessary to study micro hole machining such as proximity senser hole, speaker hole positioned Cover-glass. Reinforced glass with the characteristics of the brittle and high hardness is difficult to machining. Processing of reinforced glass have generated wear of tool, micro cracks. Also, it is decreasing shape accuracy. In this paper, We conducted a study on how to control particle distribution uniformly about the diamond tool manufactured using elecetodeposition processing. It analyzed the factors that affect the arrangement of the particles in the electrodeposition process by design of experiment. And There is produced the grinding tool, which derives an optimum deposition conditions, for processing Cover-glass edge and the machinability was evaluated.

• 대한기계학회논문집A
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• 제29권10호
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• pp.1298-1306
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• 2005

In this paper, Part II, we realized the Serpentine Laminating Micromirer (SLM) which was proposed in the accompanying paper, Part I, by means of the injection molding process in mass production. In the SLM, the higher level of chaotic mixing can be achieved by combining two general chaotic mixing mechanisms of splitting/recombination and chaotic advection by the successive arrangement of 'F'-shape mixing units in two layers. Mold inserts for the injection molding process of the SLM were fabricated by SU-8 photolithography and nickel electroplating. The SLM was realized by injection molding of COC (cyclic olefin copolymer) with the fabricated mold inserts and thermal bonding of two injection molded COC substrates. To compare the mixing performance, a T-type micromixer was also fabricated. Mixing performances of micromixers were experimentally characterized in terms of an average mixing color intensity of a pH indicator, phenolphthalein. Experimental results show that the SLM has much better mixing performance than the I-type micromixer and chaotic mixing was successfully achieved from the SLM over the wide range of Reynolds number (Re). The chaotic micromixer, SLM proposed in this study, could be easily integrated in Micro-Total-Analysis- System , Lab-on-a-Chip and so on.

• 센서학회지
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• 제22권5호
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• pp.333-337
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• 2013

This study proposes a simply fabricated micro stator for higher output power than previously reported micro stators. The stator has been fabricated by inserting enamel coil in silicon mold formed by micro etching process. The most merits of the proposed micro stator are the simple fabrication process and high output power. Previously reported micro stators have high resistance because the micro coil is fabricated by relatively thin-film-based deposition process such as sputtering and electroplating. In addition, the previously reported micro coil has many electrical contact points for forming the coil structure. These characteristics of the micro stator can lead to low performance in output power. However, the proposed micro stator adopts commercially available enamel coil without any contact point. Therefore, the enamel coil of the proposed micro stator has low junction resistance due to the good electrical quality compared with the deposited or electroplated metal coil. Power generation tests were performed and the fabricated stator can produce 5.4 mW in 4000 RPM, $1{\Omega}$ and 0.3 mm gap. The proposed micro stator can produce larger output power than the previously reported stator spite of low RPM and the larger gap between the permanent magnet and the stator.

• 한국결정성장학회지
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• 제13권2호
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• pp.68-72
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• 2003

본 논문에서는 3차원 마이크로구조물을 위한 새로운 UV-LIGA 공정을 개발하였다. 일반적으로 photoresist는 얇은 두께로 코팅이 되지만, SU-8은 수십 $\mu\textrm{m}$ 이상의 두께를 가질 수 있으며, 높은 형상비를 갖는다. SU-8과 같은 Thick photoresist는 기존의 baking 공정과 같이 급격한 cool down을 할 경우 stress에 의한 crack이 발생한다. 이와 같은 경우 도금을 위한 마이크로구조물이 구현이 되지 않는다. SU-8의 코팅, bake에서의 시간 조절, 그리고 PEB의 시간 조절 및 cool down조절을 통하여 stress에 의한 crack이 발생하지 않도록 3차원 마이크로구조물을 제작 할 수 있도록 하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2017년도 춘계학술대회 논문집
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• pp.123.1-123.1
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• 2017

Hybrid solar cells have intensively studied in recent years due to their advantages such as cost effectiveness and possibility of applications in flexible and transparent devices. It is critical to fabricate individual layer composed of organic and inorganic materials in the hybrid solar cell at low cost. Therefore, it is required to manufacture cheaply and enhance the photon-to-electricity conversion efficiency of each layer in the flexible solar cell industry. In this research, we fabricated pure Cu metal mesh electrode prepared by using electroplating and/or electroless plating on the Ni mold which was manufacture through photolithography, electroforming, and polishing process. Copper mesh was formed on the surface of nickel metal working master when pulsed electrolytic copper deposition were performed at various plating parameters such as plating time, current density, and so on. After electrodeposition at 2ASD for 5~30seconds, the line/pitch/thickness of copper mesh sheet was $1.8{\sim}2.0/298/0.5{\mu}m$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.416-417
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• 2007

MmSH injection molding method to fabricate light guiding plate with nano-sized pattern was developed. A stamper was fabricated through photolithography, dry etching, and electroplating processes. While the stamper with nano-sized pattern in mold was kept at $180^{\circ}C$ during injection process, that was cooled down to $90^{\circ}C$ quickly after the injection process. The nano-sized pattern on light guiding plate processed by MmSH injection molding method was well transferred from stamper compared to that processed by conventional injection molding process.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 The Korea-Japan Plastics Processing Joint Seminar
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• pp.7-13
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• 2003

Microlens arrays were fabricated using a novel fabrication technology based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep X-rays and subsequent thermal treatment. X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens. A new physical modeling and analyses for micro lens formation were presented according to experimental procedure. A simple analysis based on the new model is found to be capable of predicting the shapes of micro lens which depend on the thermal treatment. For the replication of micro lens arrays having various diameters with different foci on the same surface, the hot embossing and the microinjection molding processes has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of micro lenses. Fabricated microlenses showed good surface roughness with the order of 1nm.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 춘계학술대회논문집
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• pp.465-469
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• 2003

Microlens arrays were fabricated using a novel fabrication technology based on the exposure of a PMMA (Polymethylmethacrylate) sheet to deep X-rays and subsequent thermal treatment. X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens. A new physical modeling and analyses for microlens formation were presented according to experimental procedure. A simple analysis based on the new model is found to be capable of predicting the shapes of microlens which depend on the thermal treatment. For the replication of microlens arrays having various diameters with different foci on the same surface, the hot embossing and the microinjection molding processes has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of microlenses. Fabricated microlenses showed good surface roughness with the order of 1 nm.