• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.176-180
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• 2001

There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

• The Journal of the Korea institute of electronic communication sciences
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• v.18 no.1
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• pp.219-230
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• 2023

Marine waste is classified according to its location into coastal waste, floating waste, and submerged waste. As awareness of environmental issues increases, research on marine submerged waste in addition to visible trash is needed. In Korea, which is surrounded by the sea on three sides, this is a study on the distribution of marine sedimentary waste by type in the West Sea of Korea. Through the study, waste synthetic resin, scrap metal, waste tires, and others appeared in the order of large amounts. As a result showing the seriousness of waste synthetic resin among sediments deposited in the West Sea, it is expected to have a huge impact not only on the marine ecosystem but also on our lives in the near future. Through this study, it is judged that it will be helpful for future collection activities by recognizing marine submerged waste that was not known because it was invisible.

• Resources Recycling
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• v.16 no.2 s.76
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• pp.63-76
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• 2007

Typical examples as unrecycled materials in Korea were Zinc from the electric arc furnace dust (EAF Dust), and Moiybdenium and Vanadium from the desulfurizing spent catalyst of petrochemical industries. In the otherwise, though recovery of valuable metals from the waste electronic scrap such as printed circuit boards (PCBs) and platinum group metals (PGM) from the waste automobile catalyst have been interesting issues, it is difficult to collect the exact informations or statistics on their material flow system. In this article, The current domestic research trends for unrecycled or less recycled materials have been reviewed, and material flow and recycling technologies on the desulfurizing spent catalyst were surveyed.

• Journal of the Korea Concrete Institute
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• v.24 no.3
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• pp.267-273
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• 2012

This study is performed to evaluate the flexural performance of reinforced concrete columns with electric arc furnace oxidizing slag aggregates. Electric arc furnace slag is a by-product obtained from the process of refining scrap steel. The electric arc furnace slag can be used as a concrete aggregate, because it mainly consists of CaO and $SiO_2$, similar to natural rocks and minerals. Three rectangular columns with various types of aggregate were cast to test in flexure. All of the test specimens had a cross-section of $250{\times}250$mm and a height of 1,500 mm in test region. The specimens were designed to apply reversed cyclic antisymmetric moment and constant axial force. The experimental results showed that the specimens with electronic arc furnace oxidizing slag aggregates had superior flexural performance than the specimen with natural aggregates.

• Proceedings of the Korean Institute of Resources Recycling Conference
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• 2005.05a
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• pp.23-27
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• 2005

Electrogenerated chlorine leaching of used printed circuit board was Investigated in hydrochloric acid solution. The used printed circuit board contained about 45% of metal component, in which copper was about 84%. The leaching rate was greatly effected by current density and agitation. Utilization of electrogenerated chlorine was enhanced by increasing agitation and lowering current density. Leaching of copper was suppressed, while the minor metal elements, such as aluminum, lead, and tin, dominated the leaching at the initial stage.

• Resources Recycling
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• v.17 no.2
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• pp.3-15
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• 2008

Different toxic wastes are disposed of in our surroundings and these will ultimately threaten the existence of living organisms. Biohydrometallurgy, which includes the processes of bioleaching and bioremediation through the activities of microorganisms such as bacterial or fungal species, is a technology that has the potential to overcome many environmental problems at a reasonable economic cost. Bioleaching were carried out for dissolution of metals from different materials using most important metal mobilizing bacteria such as Thiobacillus ferrooxidans, Thiobacillus thiooxidans and Laptospirillum ferrooxidans. According to the reaction, bioleaching is parted as direct and indirect mechanism. In direct mechanism the bacteria oxidize the sulphides minerals by accepting electron and producing sulphuric acid in leaching media for their growth and metabolism. In other hand the indirect bioleaching is demonstrated as the oxidation of sulphides mineral by the oxidant like $Fe^{3+}$ produced by the iron oxidizing bacteria. Through this process, substantial amount of metal can be recovered from low-grade ores, concentrates, industrial wastes like sludge, tailings, fly ash, slag, electronic scrap, spent batteries and spent catalysts. This may be alternative technology to solve the high deposition of waste, which moves toward a healthy environment and green world.