• Title/Summary/Keyword: electron gun

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Laser micromachining of micron-size aperture for electron beam microcolumn application using the piezo-switched Nd:YAG laser (Piezo Q-Switched Nd:YAG 레이저에 의한 초미니 전자빔 장치용 Micron-Size Aperture의 레이저 미세가공)

  • 안승준;김대욱;김호섭;최성수
    • Journal of the Korean Vacuum Society
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    • v.8 no.4A
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    • pp.456-460
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    • 1999
  • Experimental studies of laser micromachining on Mo diaphragm using piezo Q-switched Nd:YAZ laser have been performed. Application of miniaturized micorcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope (SEM) application have recently extensively examined. The conventional microcolumn fabrication technique would give a limitation on the minimization of aberration, In this paper, we obtained 20~30 $\mu \textrm m$aperture of laser micromachining on Mo diaphragm using piezo Q-swithed Nd:YAG laser. The geometrical figures, such as the diameter and the preciseness of the drilled aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot in addition to the materials-dependent parameters.

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The Effects of the Electron Reflecting Layer Screen-printed with the Lead Tungsten Oxides on the Shadow Mask in CRT

  • Kim, Sang-Mun
    • Journal of the Korean Ceramic Society
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    • v.40 no.2
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    • pp.113-117
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    • 2003
  • To reduce the doming of the shadow mask due to thermal expansion and to prevent the color discrepancy, the electron reflecting layer with lead tungsten oxides on the electron gun side of shadow mask was formed by screen printing method and doming property was evaluated in CRT. First, the lead tungsten oxides were prepared by calcining the mixture of lead oxide and tungsten oxide above 600$^{\circ}C$. Second, the paste which has the anti-doming composition including the lead tungsten oxides was coated by screen-printing method. As a result, the doming of the shadow mask was reduced about from 30 to 45%.

PRELIMINARY RESULTS OF THE BEAM CONTROL AND DETECTION OF THE KIRAMS ELECTRON MICROBEAM SYSTEM

  • SUN G.M.;KIM E.H.;SONG K.B.;JEONG J.W.;CHOI H.D.
    • Nuclear Engineering and Technology
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    • v.37 no.2
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    • pp.185-190
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    • 2005
  • The Korea Institute of Radiological and Medical Sciences (KIRAMS) electron microbeam system has been built with its prototype components. The system is composed of an electron gun, a beam transport chamber, and a cell image acquisition and positioning stage. Each component has been upgraded through repetitive performance tests for various parametric arrangements. This paper presents the preliminary results of the performance test on the beam control and detection parts of the system.

Laser Micromachining of Submicron Aperture for Electronbeam Microcolumn Application using Piezo Q-Switched Nd:YAG Laser

  • S.J. Ahn;Kim, D.W.;Park, S.S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.78-78
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    • 1999
  • Experimental studies of laser micromachining on Mo metal using piezo Q-switched Nd:YAG laser have been performed. Miniaturized microcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope application have recently extensively examined. For these purpose, the electro-static electron lens and deflector system called microcolumn has to be assembled. The conventional microcolumn fabrication technique would gave a limitation on the minimization of aberration. The current technique of a 1 $\mu$m misalignment would lead to ~1.3 nm coma. In order to reduce aberration, assembling the microcolumn component followed by laser drilling should be very beneficial. In this report, we will address the preliminary report of laser micromachining on Mo substrate using piezo Q-switched Nd:YAG laser. The geometrical figures, such as the diameter and the depth of the frilled aperture are dependent upon the total energy of the laser pulse train, laser pulsewidth, and the diameter of laser beam in addition to the materials-dependent parameters.

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A Study on the Influence of Pure Iron Purity of Electric Lens on the Electron Beam Control (전자빔 가공기의 전자렌즈 순철순도가 빔 제어에 미치는 영향)

  • Lee Chan-Hong;Ro Seung-Kook
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.149-153
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    • 2005
  • The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. The polepieces of these lenses are usually made with high purity iron which is hard to fabricate and very expensive. In this paper, the possibility of using polepiece of object lens composed with pure iron and low carbon steel was examined to reduce cost. The magnetic field at object lens was calculated with finite element method, and practical focusing qualities of SEM pictures were observed comparing for the object lens polepieces with pure iron and two type of composed with low carbon steel.

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Ultrastructure of the Eye in the Atypus coreanus Kim, 1985 (한국땅거미(Atypus coreanus Kim, 1985)의 시각기 미세구조)

  • Kwon, Jung-Kyun;Ko, Myung-Kyoo;Chung, Ho-Sam;Kim, Joo-Pil
    • Applied Microscopy
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    • v.28 no.4
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    • pp.477-490
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    • 1998
  • Most spiders have four pairs of simple eyes. A few families of the spider have their developed eyes to an extent visual cues make up a significant of information to response from the external stimuli. Most spiders respond to the external stimuli around them. Specially, they are very sensitive to vibrations from the air, the ground, their webs, or even the surface of water. The present study was undertaken to examine the evolutionary development and function of eye with the observation of visual ultrastructure of Atypus coreanus Kim, 1985 using the electron microscopy. They have weak mobility, limited territory and low developed eyes. Atypus coreanus was collected from Mt. Ungil, Namyangju-gun, Kyonggi province. The fine structure of these eyes was examined by electron microscopy, and prepard by teasing method for scanning electron microscopic observation. As a result, the eyes of Atypus coreanus was composed of cornea, lens, vitreous body, retina, and rhabdome.

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