• 반도체디스플레이기술학회지
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• 제21권1호
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• pp.5-11
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• 2022

Despite the increasing importance of manufacturing and application R&D for ultrapure deionized water and electrolyzed ion water, various and systematic studies have not been conducted until now. In this study, the electrostatic discharge (ESD) behavior of electrolyzed ion water using a proton exchange membrane(PEM) was evaluated according to the type, flow rate, and bubble of electrolyzed ion water. In addition, by observing that Oxidation Reduction Potential (ORP) value returns to the unique value of electrolyzed ion water after electrostatic discharge, the possibility of two types of ions participating in electrostatic discharge ((H₂O)_n⁺ (assumed)) and ions for maintaining the characteristics of electrolyzed water could be inferred. In order to confirm the chemical structure and characteristics of the cations, in-depth research related to water molecular orbital energy or band gap should be followed.

• 한국식품조리과학회지
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• 제20권6호
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• pp.589-597
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• 2004

This study was conducted to investigate the effects of various kinds of electrolyzed and chlorinated waters on the sensory and microbiological qualities of fresh-cut lettuce and to determine the most suitable electrolyzed water for the vegetable dishes, without heat treatment, at institutional foodservices. The sensory evaluation resulted in higher scores on the 1st-day of storage for the EW-1 (diaphragm type 1) and EW-3 (non-diaphragm type) compared to that for EW-2 (diaphragm type 2), with regard to their appearance, discoloration, texture, taste and overall acceptability characteristics. However, over time, EW-3 ranked highest, with a score of 8.00 (very like), on the 4th-day of storage, which maintained the highest level up to the 7th-day of storage, at which time the score was 7.00 (fairly like). The CW (chlorinated Water) had a significantly lower score, due to the smell of chlorine, although there was no concern with relation to chlorine residue from the electrolyzed waters. Microbial examinations of the total plate count revealed that immersing lettuce into EW-3 brought about l/3,000 to 1/30,000 reductions in the microbial counts of the TW treatment or untreated samples for up to seven days of storage. The CW treatment gave a 1/10 reduction in the microbial counts compared with the TW (tap water) treatment. The coliform bacterial counts also showed similar trends to those of the total plate count values. With regards to the psychotropic bacterial count, EW-3 was able to result in as much as a 1/30,000 reduction in the initial counts. As vegetable dishes, such as salad, can not be heat-sterilized, the utilization of EW-3 for the preparation of vegetable dishes without heat treatment will be an excellent choice to improve the critical control point in production state as a new effective means for sanitizing management.

• 반도체디스플레이기술학회지
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• 제20권2호
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• pp.34-42
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• 2021

Recent cleaning technologies of mask in extremely ultraviolet semiconductor processes were reviewed, focused on newly developed issues such as particle size determination or hydrocarbon and tin contaminations. In detail, critical particle size was defined and proposed for mask cleaning where nanosized particles and its various shapes would result in surface atomic ratio increase vigorously. A new cleaning model also was proposed with amphoteric behavior of electrolytically ionized water which had already shown excellent particle removing efficiency. Having its non-equilibrium and amphoteric properties, electrolyzed ion water seemed to oxidize contaminant surface selectively in nano-scale and then to lift up oxidized ones from mask surface very effectively. This assumption should be further investigated in future in junction with hydrogen bonding and cluster of water molecules.

• 한국식품저장유통학회지
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• 제12권6호
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• pp.558-564
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• 2005

다양한 제조조건에 따른 전기분해수의 물리적 특성 및 미생물의 표면살균 효과, 이에 따른 저장성 등을 조사하였다. 그 결과 격막방식의 강산성 전기분해수는 최소한 저장 30일, 무격막 방식의 전해수는 최소 저장 15일까지는 초기 물리화학적 특성치와 거의 유사한 수준을 보였으며, 저장온도에 따른 차이는 거의 없는 것으로 나타났다. 시험관내에서 전해수의 미생물 사멸효과는 무격막 방식의 EW-3만이 Salmonella typhimurium이 1분 이내에 사멸되는 것을 제외하고는 Escherichia coli 등 4균주에서 초기 $10^7\~10^9$ CFU/mL에서 30초 후에 모두 사멸되었다. 또한, 신선 깻잎을 다앙한 전해수 및 수도수 등으로 세정처리하여 저장중 품질변화를 조사한 결과, 총균수 및 대장균군은 전해수 처리에 의해 $2\~3$ log scale정도 감균효과를 보여주었으며 특히, 강산성 전해수(EW-1)처리 시에는 저장 13일까지 Bacillus cereus균이 전혀 검출되지 않았다. 부패율은 무처리구의 경우 저장 6일째부터 나타나기 시작했으나 전해수로 세정 처리한 깻잎은 저장 10일째까지 나타나지 않았다. 저장중 색차(${\Delta}E$) 변화는 약알칼리성 전해수(EW-2)와 중성의 전해수(EW-3)로 처리한 시료는 저장 13일후 $1\~2$수준으로 무처리구에 비하여 매우 양호하게 나타났다. 클로로필 함량의 변화는 초기 $9.0\~10.3\;mg\%$에서 무처리구 13일째 $6.8mg\%$로 가장 크게 감소한 반면 EW-3 처리구에서 $8.35mg\%$로 가장 적게 감소하였으며, 전반적인 관능평가에 있어서는 EW-2와 EW-3 처리구에서 가장 높게 나타났다.

• 한국식품과학회지
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• 제44권5호
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• pp.628-633
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• 2012

위생적인 배추 생산을 위해 전기분해수를 이용하여 미생물 저해효과와 잔류농약 제거효과에 대해 연구하였다. 대조구는 TW로 세척하였으며, 상업적으로 많이 사용되고 있는 NaOCl 용액으로 세척하여 비교하였다. 배추의 초기 총균수와 대장균군수는 각각 6.64, 3.56 log cfu/g 수준이었으며 침지 시간이 길어질수록 감소하는 경향을 나타내었다. 10분 경과 후, TW 처리구는 5.97 log cfu/g 수준이었으며 LAlEW와 SAcEW 처리구는 1.63-4.67 log cfu/g 수준으로 감소하였다. 특히 SAcEW-100처리구는 1.63 log cfu/g 수준으로 초기에 비해 5 log scale 이상 감소하여 가장 높은 효과를 나타내었다. 대장균군수는 초기에 3.56 log cfu/g 수준에서 10분 경과 후, TW와 NaOCl-50 처리구를 제외하고 검출되지 않았다. 잔류농약의 경우, 초기 chlorpyrifos, prothiofos 및 deltamethrin 함량은 각각 1.13, 1.91 및 0.67 ppm이었다. 세척 후, TW 처리는 32.28-38.46% 감소하였으며 NaOCl 처리구의 감소율은 36.93-50.13%으로 TW의 1.5배 수준 감소하였다. LAlEW-100 처리구와 SAcEW-100 처리구의 감소율은 63.79-78.30% 감소하여 TW와 NaOCl 처리구에 비해 효과적이었다. 비타민 C함량은 세척수에 따른 차이를 보이지 않았다. 결과적으로 전기분해수는 품질에 영향을 주지 않으면서 미생물 제어와 잔류농약 제거에 효과가 있는 것으로 나타났다.

• 한국식품영양과학회지
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• 제40권6호
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• pp.912-917
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• 2011

본 연구에서는 채소류의 표면에 인위적으로 균을 오염시킨 후 수도수, 마이크로버블수, 전기분해수 및 마이크로버블-전기분해수 세척에 의한 미생물 살균 효과를 알아보았다. 우선 수도수와 마이크로버블수 세척에 의한 살균 효과를 비교한 결과, 수도수와 마이크로 버블수 사이에 살균력 차이는 미세하게 마이크로버블수가 높게 나타났다. 유효 염소 농도별 전기분해수와 마이크로버블-전기분해수 세척에 의한 살균 효과를 비교한 결과, 유효염소 농도가 100 mg/L인 전기분해수는 5분간 세척 후 채소류의 종류에 따라 미생물이 잔존하였지만, 100 mg/L인 마이크로버블-전기분해수는 5분간 세척 후 모든 채소류에서 균이 검출되지 않았고, 200 mg/L인 마이크로버블-전기분해수에서는 1분간 세척 후에 모든 채소류에 미생물이 검출되지 않았다. 따라서 각 유효 염소 농도별 마이크로버블-전기분해수가 전기분해수에 비해 짧은 세척시간에 효과적인 살균이 된 것으로 나타났다. 종합적으로 마이크로버블-전기분해수 세척 기술이 미생물학적 위험은 감소시키면서 표면 살균 효과가 낮은 채소류와 같은 신선편의 식품에 적합한 살균 기술로 생각된다.

• 한국식품저장유통학회지
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• 제13권3호
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• pp.316-321
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• 2006

전해 방식에 따라 제조된 전기분해수로 세정처리한 딸기의 살균효과 및 저장중 품질변화를 살펴본 결과, 전기분해수에 의한 딸기의 미생물학적 살균효과는 침지수량은 중량 대비 10배수, 침지시간은 20분 처리시 초기균수에 대하여 2 log cycle 정도 감소하며 저장중 균증식 속도도 다소 느리게 나타났다. 폐기율은 $5^{\circ}C$ 저장시 EW-2 처리구에서 저장 5일째까지 10%수준을 보여 무처리 및 염소수 처리에 비해 낮은 폐기율을 보여주었고, 조직감도 $5^{\circ}C$ 저장 전기분해수 처리구에서는 저장 3일까지는 조직감 변화가 거의 없다가 그 이후 오히려 증가하는 경향을 나타내었다. 딸기의 표면색도 변화는 저장기간이 경과할 수록 무처리구와 CW 처리구는 전반적으로 L값이 증가하는 경향을 보인 반면에 전기분해수 처리구는 감소하는 경향을 보여 주었고, 저장기간별 색차(${\Delta}E$)값은 저장 3일까지는 무처리구가 가장 적은 변화를 나타내었다. 전기분해수 처리에 의한 초기 잔류염소량은 $0.04{\sim}0.06ppm$수준이며 저장 1-3일 경과 후에는 모든 처리구에서 $0.02{\sim}0.03ppm$ 수준으로 잔류염소량이 거의 동일하게 나타났다. 저장중 관능적 특성은 전기분해수 처리구(EW-1 및 EW-2)가 무처리 및 CW 처리구에 비해 높게 나타났다.

• 청정기술
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• 제7권3호
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• pp.215-223
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• 2001

A present semiconductor cleaning technology is based upon RCA cleaning technology which consumes vast amounts of chemicals and ultra pure water(UPW) and is the high temperature process. Therefore, this technology gives rise to the many environmental issues, and some alternatives such as electrolyzed water(EW) are being studied. In this work, intentionally contaminated Si wafers were cleaned using the electrolyzed water. The electrolyzed water was generated by an electrolysis system which consists of three anode, cathode, and middle chambers. Oxidative water and reductive water were obtained in anode and cathode chambers, respectively. In case of NH4Cl electrolyte, the oxidation-reduction potential and pH for anode water(AW) and cathode water(CW) were measured to be +1050mV and 4.8, and -750mV and 10.0, respectively. AW and CW were deteriorated after electrolyzed, but maintained their characteristics for more than 40 minutes sufficiently enough for cleaning. Their deterioration was correlated with CO2 concentration changes dissolved from air. Contact angles of UPW, AW, and CW on DHF treated Si wafer surfaces were measured to be $65.9^{\circ}$, $66.5^{\circ}$ and $56.8^{\circ}$, respectively, which characterizes clearly the eletrolyzed water. To analyze the amount of metallic impurities on Si wafer surface, ICP-MS was introduced. It was known that AW was effective for Cu removal, while CW was more effective for Fe removal. To analyze the number of particles on Si wafer surfaces, Tencor 6220 were introduced. The particle distributions after various particle removal processes maintained the same pattern. In this work, RCA consumed about $9{\ell}$ chemicals, while EW did only $400m{\ell}$ HCl electrolyte or $600m{\ell}$ NH4Cl electrolyte. It was hence concluded that EW cleaning technology would be very effective for promoting environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.

• 반도체디스플레이기술학회지
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• 제21권4호
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• pp.6-13
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• 2022

The electrostatic phenomenon seriously issued in extreme ultraviolet semiconductor cleaning was studied in junction with molecular dynamic aspect. It was understood that two lone pairs of electrons in water molecule were subtly different each other in molecular orbital symmetry, existed as two states of large energy difference, and became basis for water clustering through hydron bonds. It was deduced that when hydrogen bond formed by lone pair of higher energy state was broken, two types of [H₂O]⁺ and [H₂O]^- ions would be instantaneously generated, or that lone pair of higher energy state experiencing reactions such as friction with Teflon surface could cause electrostatic generation. It was specifically observed that, in case of electrolyzed cathode water, negative electrostatic charges by electrons were overlapped with negative oxidation reduction potentials without mutual reaction. Therefore, it seemed that negative electrostatic development could be minimized in cathode water by mutual repulsion of electrons and [OH]^- ions, which would be providing excellences on extreme ultraviolet cleaning and electrostatic control as well.

• 한국어업기술학회:학술대회논문집
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• 한국어업기술학회 2002년도 추계 수산관련학회 공동학술대회발표요지집
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• pp.108-109
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• 2002

Electrolyzed chlorous solutions, or electrolyzed oxidizing water [EW(+)] has attracted much recent attention as a low cost, but high-performance, new technology of potential use by food industry. the term EW(+) is used to describe an aqueous disinfectant produced by the electrolysis of a chlorine containing solution under a low-voltage direct current (Suzuki et al., 2002). (omitted)