• 제목/요약/키워드: electrolytic ionization

검색결과 5건 처리시간 0.019초

전해 이온화와 자외선광을 이용한 사파이어 화학기계적 연마의 재료제거 효율 향상에 관한 기초 연구 (Basic Study on the Improvement of Material Removal Efficiency of Sapphire CMP Using Electrolytic Ionization and Ultraviolet Light)

  • 박성현;이현섭
    • Tribology and Lubricants
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    • 제37권6호
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    • pp.208-212
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    • 2021
  • Chemical mechanical polishing (CMP) is a key technology used for the global planarization of thin films in semiconductor production and smoothing the surface of substrate materials. CMP is a type of hybrid process using a material removal mechanism that forms a chemically reacted layer on the surface of a material owing to chemical elements included in a slurry and mechanically removes the chemically reacted layer using abrasive particles. Sapphire is known as a material that requires considerable time to remove materials through CMP owing to its high hardness and chemical stability. This study introduces a technology using electrolytic ionization and ultraviolet (UV) light in sapphire CMP and compares it with the existing CMP method from the perspective of the material removal rate (MRR). The technology proposed in the study experimentally confirms that the MRR of sapphire CMP can be increased by approximately 29.9, which is judged as a result of the generation of hydroxyl radicals (·OH) in the slurry. In the future, studies from various perspectives, such as the material removal mechanism and surface chemical reaction analysis of CMP technology using electrolytic ionization and UV, are required, and a tribological approach is also required to understand the mechanical removal of chemically reacted layers.

수중에 잠긴 접지전극 주변에서의 이온화에 의한 전위저감 및 에너지방출 (Potential Reduction and Energy Dispersion Due to Ionization Around the Submerged Ground Rod)

  • 최종혁;안상덕;양순만;이복희
    • 조명전기설비학회논문지
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    • 제23권1호
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    • pp.92-99
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    • 2009
  • 심매설 접지봉의 경우 장마철에 빗물이나 지하수와 접촉하는 경우가 발생한다. 수중에 잠겨있는 접지극에 서지 전압이 인가되면 접지극 주변에서 이온화 현상이 발생하게 된다. 지중이나 수중에서의 이온화 현상은 접지 시스템의 에너지적인 특성에 의해 영향을 받는다. 이 논문의 목적은 축소된 전해 수조를 이용하여 임펄스 전압에 의한 접지시스템의 과도특성을 파악하는데 있다. 매틀랩 프로그램을 활용하여 이온화에 의한 전위저감과 방출된 에너지를 측정하여 정량적인 분석을 수행하였다. 접지극 끝단의 최대 전압은 물의 저항률과 Marx형 전압발생장치의 충전전압에 따라 다양하게 나타났다. 접지극 끝단의 전위는 절연파괴전압에 이르기 전 인가전압에서 대략 절반까지 감소하였다. 또한 절연파괴가 발생하기 전 인가된 에너지의 절반 이상의 에너지가 이온화에 의해 접지극을 통하여 방출되었다.

HVDC 냉각시스템의 전기전도현상 및 부식현상 기술 분석과 스위칭 소자의 방열판 최적 설계 검토 (The Analysis of Electrical Conduction and Corrosion Phenomena in HVDC Cooling System and the Optimized Design of the Heat Sink of the Semiconductor Devices)

  • 김찬기;박창환;김장목
    • 전력전자학회논문지
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    • 제22권6호
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    • pp.484-495
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    • 2017
  • In HVDC thyristor valves, more than 95% of heat loss occurs in snubber resistors and valve reactors. In order to dissipate the heat from the valves and to suppress the electrolytic current, water with a high heat capacity and a low conductivity of less than 0.2 uS/cm must be used as a refrigerant of the heat sink. The cooling parts must also be arranged to reduce the electrolytic current, whereas the pipe that supplies water to the thyristor heat sink must have the same electric potential as the valve. Corrosion is mainly caused by electrochemical reactions and the influence of water quality and leakage current. This paper identifies the refrigerants involved in the ionization, electrical conductivity, and corrosion in HVDC thyristor valves. A method for preventing corrosion is then introduced. The design of the heat sink with an excellent heat radiation is also analyzed in detail.

鑛泉水 理化學的 水質評價 技法 에 관한 연구 (A Study on a Classification Technique of Natural Mineral Waters by Its Constitution and Physico-Chemical Properties)

  • Nam, Sang-Ho
    • 한국환경보건학회지
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    • 제14권1호
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    • pp.33-38
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    • 1988
  • Natural mineral water is generally quite different from ordinary drinking water due to its original nature and various properties. The complexity of natural mineral water requires, therefore, not only to identify its nature and proper characteristics, but also to classify them by a reasonable scientific basis of comparison. The study was concentrated on a possible classification technique to natural mineral waters by their constitutions and physico-ehemical properties. The classification was carried out by the computation of such numerical parameters as ionic equivalent percentage, electrolytic conductance or mobility, ionic molecular weight, molecular concentration, equivalent conductivity and degree of ionization in consideration of the determinative criteria as follows -particular single element or molecule -major components of natural waters as bicarbonate, sulphate, chloride,caloride, calcium, magnesium, and sodium -moleculat concentration related to blood osmotic pressure -water temperature at emergence from spring -contents of free carbon dioxide (CO2) -pH value of water -total dissolved solids or salts (NaCl) The results obtained proved out to be clearly distinguhhable from ordinary drinking water as far as concern natural mineral water as an example on the subject -simple water -bicarbonate-predominating water -cold spring -carbonated-non gaseous water -weak alkaline water -non saline water Putting these various results together, the sample turned out to be a kind of natural mineral water that can be used as a drinking water if microbiologically safe.

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Rationale and Definition of The Criteria of The Efficiency of The Biological Activity of Optical Radiation on Animal Organism.

  • Chervinsky, Leonid S.
    • 식품보건융합연구
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    • 제4권3호
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    • pp.1-5
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    • 2018
  • In today's technological development of human society more and more influence on the lives of biological organisms different electromagnetic radiation. Therefore, the study and analysis of the mechanisms of their effects is an urgent task. The purpose of research - the study of the primary mechanisms of interaction of photons of optical radiation with the structures of biological objects, using the laws of quantum mechanics and biophysics. Photobiological basis of the mechanism of action of EMR optical range is the energy absorption of light quanta (photons) by atoms and molecules of biological structures (law Grotgus-Draper), which resulted in the formation of electronically excited states of these molecules with the transfer of photon energy (internal photoeffect). This is accompanied by electrolytic dissociation and ionization of biological molecules. The degree of manifestation of photobiological effects in the body depends on the intensity of the optical radiation, which is inversely proportional to the square of the distance from the source to the irradiated surface. Accordingly, in practice, determine not the intensity and irradiation dose at a certain distance from the source of exposure by the exposure time.