• 대한기계학회논문집A
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• 제26권5호
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• pp.976-985
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• 2002

The purpose of this paper is that the roughness(Rrms = 31$\AA$, Rp-v = 270$\AA$) of ITO thin film deposited by sputtering method for OELD is improved to Rrms $\leq$ 10$\AA$, Rp-v $\leq$ 80$\AA$ by chemical mechanical polishing(CMP). First, ITO thin films are polished with a variety of consumables (Pads, Slurries) to choose proper some for the roughness improvement and the CMP mechanism of ITO thin films is demonstrated on the ground of the experiment results. Henceforth, the CMP characteristics (Removal rate, Non-uniformity) of chosen consumables are evaluated according to processing conditions (Polishing pressures, Table velocities) and suitable conditions for ITO film CMP are selected. Finally, the electrical and optical properties (Sheet resistance, Transmittance) of ITO thin films are investigated to verify whether or not ITO thin film are still suitable for OELD after polished.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.714-717
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• 2007

In this study, a novel actuator was developed by employing the newly-synthesized ionic networking membrane (INM) of poly (styrene-alt-maleic anhydride) (PSMAn)-incorporated poly (vinylidene fluoride) (PVDF). Based on the same original membrane, various samples of INM actuator were prepared through different reduction times with the electroless-plating technique. The as-prepared INM actuators were tested in terms of surface resistance, platinum morphology, resonance frequency, tip displacement, current and blocked force, and their performance was compared to that of the widely-used traditional Nafion actuator. Scanning electron microscope (SEM) and transmission electron microscopy (TEM) revealed that much smaller and more uniform platinum particles were formed on the surfaces of the INM actuators as well as within their polymer matrix. Although excellent harmonic response was observed for the newly-developed INM actuators, this was found to be sensitive to the applied reduction times during the fabrication. The mechanical displacement of the INM actuator fabricated after optimum reduction times was much larger than that of its Nafion counterpart of comparable thickness under the stimulus of constant and alternating current voltage.

• 동력기계공학회지
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• 제21권3호
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• pp.51-59
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• 2017

In the early design stage of underwater vehicles, it is important to estimate the vehicle's underwater motion performance. The key design elements for the motion are propellers, battery power, and underwater resistance of the vehicle. Small thrusters with motor and propeller are usually used for the UUV(unmanned underwater vehicles). In this study, a multiphysics thruster model combining electro-mechanical and hydrodynamics characteristics was proposed to estimate the thruster performance. To show the applicability of the mathematical model, an sample thruster was used for the derive the unknown parameters of thruster. Hydrodynamic parameters were calculated for a 3D geometry model of the propeller by ANSYS/CFX program. Finally, Matlab/simulink program was used for the numerical simulation to predict the thruster performance from the given voltage/current input to the motor. Also, proved validity of simulation model by experiment test. Test were done by 2 mode(middle/high speed, reverse). The thruster performance curves obtained from this simulation were confirmed to be similar with experiment results.

• 한국재료학회지
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• 제11권11호
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• pp.941-946
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• 2001

Conductive microspheres with a density of 0.2 g/cc were fabricated by electroless silver plating for application to the light-weighted microwave absorbers. The silver plating was conducted with the variation of plating conditions (sensitizing condition, $AgNO_3$, concentration, amount of reducing agent). Specimens have very low electro-resistivity. Under an optimum processing condition, conductive microspheres with uniform silver plating layer can be produced. Rubber-sphere composites were fabricated and their microwave absorbing properties were measured by HP8722D Network Analyzer. It was found that the lower the electrical resistance of microsphere, the better the microwave absorbing properties. Feasibility of microwave absorbers using this microspheres can be demonstrated with the result of microwave reflection loss of -15 dB and thickness of 1.44 mm.

• 대한기계학회논문집B
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• 제33권10호
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• pp.803-810
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• 2009

Micromirrors have a wide range of applications such as optical switches, laser scanners, and digital projection displays. Due to their low performances and high costs, however, practical applications of micromirrors are quite limited. At present micromirrors demand not only a better design but also a simple fabrication process. In this study a twisting-type micromirror that can be driven by two thermal bimorph actuators bending in opposite directions is designed from electro-thermo-mechanical theories and fabricated through a simple MEMS process. Each actuator consists of $SiO_2$ and gold thin-film layers. Simplified analytical model has been built to optimize the performance of micromirror. Due to unexpected resistance increase of metal film and alignment mismatch during fabrication process, experimental rotation angles of micromirrors are about $11^{\circ}$ at applied voltages less than 0.6V. From numerical simulation and analytical studies, however, the next design can provide rotation angles over $20^{\circ}$ at the same applied voltage.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2004년도 춘계학술대회 논문집
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• pp.27-30
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• 2004

Clad wire , which has the advantages of the high strength of a steel core and the electro-conductivity, corrosion resistance of a copper layer, is widely being used the telecommunications, electric-electronic and military technology industries, among others. It is important to obtain uniform coated rate when producing clad wires. Clad wire drawing process can be influenced on damage and coated rate of core and sleeve by process variables as semi-die angle and reduction in area. Therefore, in this study, the finite-element results established in previous study is used to analyze the effect of the various forming parameters, which included the semi-die angle, reduction in area etc. The coated rate will be predicted with observation copper coated rate variation according to total reduction in area and the optimal pass schedule will be set up through proper reduction in area and semi-die angle variation.

• 전자공학회논문지A
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• 제30A권10호
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• pp.33-40
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• 1993

A reflection type 16x8 S-SEED array from LP(Low Pressure)-MODVD-grown GaAs/AlGaAs extremely shallow quantum well(ESQW) structures, with 4% Al fraction, has been fabricated. Its intrinsic region consists of 50 pairs of alternating 100.angs. GaAs and 100.angs. $Al_{0.04}$Ga$_{0.96}$As layers. A multilayer reflector stack of $Al_{0.04}$/Ga$_{0.96}$ As(599$\AA$)/AlAs(723$\AA$) was incorporated for the reflection plane below the p-i-n structures. The device processing after the MOCVD growth includes the mesa etching, isolation etching, insulator deposition, p & n metallization, and AR(Anti-Reflection) coating. For switching characteristics of the S-SEED in the form of p-i-n ESQW diode, the maximum optical negative resistance was observed at 856nm. Reflectance measurements showed a change from 15.6% to 43.3% for +0.9V to -6V bias. The maximum contrast ration of the S-SEED array was 2.0 and all the 128 devices showed optical bistability with contrast ratios over 2.4 at 5V reverse bias.

• 한국인터넷방송통신학회논문지
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• 제13권6호
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• pp.109-114
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• 2013

낮은 저항이나 좋은 전기투과도 지점으로 알려진 생물학적 활성점(biological active points, BAP)인 BAP검출을 위한 새로운 방법으로 적응주파수추적필터와 과도이벤트검출을 기반으로 하는 생체임피던스측정시스템을 사용하는 방식에 대해 제안하였다. 이 생체임피던스장치에 다중주파수 전류주입과 전압측정 모두 표면전극을 사용하였다. 또한 마이크로컨트롤러를 통하여 적응주파수추적필터를 사용한 다중주파수요소에 의해 변조된 신호의 연속적인 복조를 처리하였다. 또한 위상공간방식의 과도이벤트검출방식이 제안된 BAP등가모델에 각주파수에 대해 적용되었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 C
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• pp.1600-1602
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• 2001

A pulsed power supply of 2.4MJ capacitor bank has been developed to make investigation into electric gun technology. It is made up of eight paralleled 300kJ modules, and can supply various shape of high current pulse by changing charging voltage, inductance, capacitance, and firing time of each module. The 300kJ module has been designed and fabricated for the maximum operating voltage of 22kV, peak current of 150kA, and pulse duration of 1msec. The experiments of the modules were done, and the equivalent circuit of the module was determined. The characteristics of the module were analyzed more deeply through the circuit simulation. The experiments of the paralleled modules with inductance of 20 $\mu$H and load resistance of 100 m$\Omega$ were performed, where the modules were discharged simultaneously and/or sequentially. The results of the experiments were analyzed. The 2.4MJ capacitor bank is currently used as the pulsed power supply for the ETCG (Electro Thermal Chemical Gun) research.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.163-163
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• 2008

반도체 소자가 고집적화 되고 고속화를 필요로 하게 됨에 따라, 기존에 사용되었던 알루미늄이나 텅스텐보다 낮은 전기저항, 높은 electro-migration resistance으로 미세한 금속배선 처리가 가능한 Cu가 주목받게 되었다. 하지만 과잉 디싱 현상과 에로젼을 유도하여 메탈라인 브리징과 단락을 초래할 있고 Cu의 단락인 islands를 남김으로서 표면 결함을 제거하는데 효과적이지 못다는 단점을 가지고 있었다. 특히 평탄화 공정시 높은 압력으로 인하여 Cu막의 하부인 ILD막의 다공성의 low-k 물질의 손상을 초래 할 수 있는 문제점을 해결하기 위하여 기존의 CMP에 전기화학을 결합시킴으로서 낮은 하력에서의 Cu 평탄화를 달성 할 수 있는 기존의 CMP 기술에 전기화학을 접목한 새로운 개념의 ECMP (electrochemical-mechanical polishing) 기술이 생겨나게 되었다. 따라서 본 논문에서는 최적화된 ECMP 공정을 위하여 I-V곡선과 CV법을 이용하여 active. passive. trans-passive 영역의 전기화학적 특징을 알아보았고. Cu막의 표면 형상을 알아보기 위해 Scanning Electron Microscopy (SEM) 측정과 Energy Dispersive Spectroscopy (EDS) 분석을 통해 금속 화학적 조성을 조사하였다.