• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.10
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• pp.911-920
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• 2016

For the pitch and yaw axis attitude control of launch vehicle, thrust vector control which changes the direction of thrust during the engine combustion is commonly used. Hydraulic actuation system has been used generally as a drive system for the thrust vector control of launch vehicles with the advantage of power-to-weight ratio. Nowadays, due to the developments of highly efficient electric motor and motor control techniques, it has done a lot of research to adopt electro-mechanical actuator for thrust vector control of small-sized launch vehicles. This paper describes system design and test results of the prototype of direct drive electro-mechanical actuation system which is being developed for the thrust vector control of $3^{rd}$ stage engine of KSVL-II.

• Journal of Institute of Convergence Technology
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• v.1 no.2
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• pp.6-15
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• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.161-164
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• 2001

In this paper, we investigated the dielectric and piezoelectric properties of Pb(Sb, Nb)O$_3$-Pb(Zr, Ti)O$_3$ ceramic(PSN) for piezoelectric transformer and actuator etc. Effect of MnO$_2$ addition on the PSN ceramic was investigated. Anisotropic properties of electromechanical coupling factor and piezoelectric properties proved to be varied with amount of MnO$_2$ impurity and sintering temperature. The electromechanical coupling factor k$_{p}$ of 0.38 and the mechanical quality factor Q$_{m}$ of 1944 were obtained from the specimen with 0.4 wt% MnO$_2$ sintered at 115$0^{\circ}C$ addition. Experimental results indicated that the PSN ceramic with MnO$_2$ impurity can be effectively used for piezoelectric transformer and actuator.tor.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.152-158
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• 2001

In this paper, we have developed an electro discharge machine for micro drilling driven by a voice coil actuator. Because the voltage signal of the electro-discharging circuit shows a lot of peaks and valleys, the active type low-pass filtering technique is adopted to get the average of the signal. Since the motion of the voice coil is precisely controlled by the error value between the object voltage value and the measured one, it is possible to prevent the mechanical contact between the rotating electrode and the workpiece and to maintain the appropriate machining conditions during the process. The electro-chemical machining technology was also adopted to make small diameter electrodes. Pure water is used as a dielectric. The machining procedure is performed to verify the feasibility of the developed system. It takes about 10 seconds to drill the ${\phi}m$100${\mu}m$ hole to the 100${\mu}m$ thickness stainless steel plate. The machining time depends on the values of the resister and the capacitor. There may exist the optimal values of time constant and the tendency is displayed In the appendix.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1286-1289
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• 2004

A new thermal bimorph actuator for large out-of-plane displacement is designed, fabricated and tested. The deflecting beam is composed of polyimide, heater, and polyvinyl difluorides with tetrafluoroethylene(PVDF-TrFE). The large difference of coefficient of thermal expansion(CTE) of two polymer layers (polyimide and PVDF-TrFE) can generate a large deflection with relatively small temperature rising. Compared to the most conventional micro actuators based on MEMS(micro-electro mechanical system) technology, a large displacement, over 1 mm at 20 mW, could be achieved. The proposed actuator can find applications where a large vertical displacement is needed while keeping compact overall device size, such as a micro zooming lens.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.3
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• pp.302-306
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• 2012

Bacterial cellulose based actuator with large displacement was developed for biomimetic robots. Bacterial cellulose has 3D nanostructure with high porosity which was composed of the nanofibers. Freeze dried bacterial cellulose was dipped into ionic liquid solution such as 1-butyl-3-methylimidazolium(BMIMCl) to enhance the actuation performance due to increase the ionexchange capacity and ionic conductivity. And Poly(3,4-ethylenedioxythiophene)-poly (styrnenesulfonate)(PEDOT:PSS) was used for the electrodes of both side of bacterial cellulose actuator by dipping and drying method. The FT-IR and XRD were conducted to examine the electrochemical changes of developed bacterial cellulose actuator. The biomimetic caudal fin was designed using bacterial cellulose actuator and PDMS to verify the possibility for biomimetic robot. The step and harmonic response were conducted to evaluate the performance of developed biomimetic actuator.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.6 s.261
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• pp.644-650
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• 2007

Mechanical property evaluation of micrometer-sized structures is necessary to help design reliable microelectromechanical systems(MEMS) devices. Most material properties are known to exhibit dependence on specimen size and such properties of microscale structures are not well characterized. This paper describes techniques developed for tensile testing of thin film used in MEMS. Epi-polycrystalline silicon is currently the most widely used material, and its tensile strength has been measured as 1.52GPa. We have developed a tensile testing machine for testing microscale specimen using electro-magnetic actuator. The field magnet and the moving coil taken from an audio-speaker were utilized as the components of the actuator. Structure of specimen was designed and manufactured for easy handling and alignment. In addition to the static tensile tests, it is described that new techniques and procedures can be adopted for high cycle fatigue test of a thin film.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.11
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• pp.1067-1073
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• 2007

This paper presents development of an special metal hydride(SMH) actuator system using a peltier module. The newly developed simple SMH actuator, consisting of the plated hydrogen-absorbing alloy as a power source, Peltier elements as a heat source and a cylinder with metal bellows as a functioning part, has been developed. The SMH actuator is characterized by its small size, low weight, noiseless operation and a compliance similar to that of human body. A new SMH actuator that uses reversible reactions between the heat energy and mechanical energy of a hydrogen absorbing alloy. It is well known that hydrogen-absorbing alloys can reversibly absorb and desorb a large amount of hydrogen, more than about 1000 times of their own volume. To improve the thermal conductivity of the hydrogen-absorbing alloy, an electro-less copper plating has been carried out. For this purpose, the effects of the electro-less copper plating and the dynamic characteristics of the SMH actuator have been studied. The hydrogen equilibrium pressure increases and hydrogen is desorbed by heating the hydrogen-absorbing alloys, whereas by cooling the alloys, the hydrogen equilibrium pressure decreases and hydrogen is absorbed. The SMH actuator has the characteristic of being light and easy to use. Therefore, it is suitable for medical and rehabilitation applications.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.551-555
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• 2005

This paper presents the temperature-pressure characteristics of SMH actuator using a peltier module. The simple SMH actuator, consisting of the plated hydrogen-absorbing alloy as a power source, Peltier elements as a heat source and a cylinder with metal bellows a functioning part has been developed. The SMH actuator is characterized by its small size, low weight, noiseless operation and a compliance similar to that of the human body. A new special metal hydride(SMH) actuator that uses the reversible reaction between the heat energy and mechanical energy of a hydrogen absorbing ally. It is well known that hydrogen-absorbing alloys can reversibly absorb and desorb a large amount of hydrogen, more than about 1000 times as their own volume. To improve the thermal conductivity of the hydrogen-absorbing alloy, an electro-less copper plating has been carried out. The effects of the electro-less copper plating and the dynamic characteristics of the SMH actuator have been studied. The hydrogen equilibrium pressure increases and hydrogen is desorbed by heating the hydrogen-absorbing alloys, whereas by cooling the alloys, the hydrogen equilibrium pressure decreases and hydrogen is absorbed. Therefor, the SMH actuator has the characteristic of being light and easy to use and so is suitable for use in medical and rehabilitation applications.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.686-689
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• 2005

A numerical simulation method is developed to analyze the dynamic response of a cantilever switch, which is driven by electrostatic force and a basic component of electro-mechanical coupled system. First, point-charges model on conductor is proposed as a lumped parameter of electrical part. Then, this model is easily incorporated into a multi-body dynamics analysis algorithm, the generalized recursive dynamics formula previously developed by our research group. The resulting motion of a coupled overall system is formulated as a differential algebraic equation form including electrical and mechanical variables together. The equation is simultaneously solved in every time step. To implement this approach into the useful dynamics analysis tool, we used multibody dynamics software (RecurDyn) based on the generalized recursive formula using relative coordinate. The developed numerical simulation tool is evaluated by applying to many different driving condition and switch configuration. The final analysis model will be added to RecurDyn as a basic module for dynamics analysis of electro-mechanical coupled system.