1 |
Tsuchiya, T., Tabata, O., Sakata, J. and Taga, Y., 1997, 'Specimen Size Effect on Tensile Strength of Surface Micro-Machined Polycrystalline Silicon Thin-Films,' in:Proceedings of the IEEE MEMS '97, pp. 529-534
|
2 |
Bromley, E. I., Randall, J.N., Flanders, D.C. and Mountain, R.W., 1983, 'A Techniqu for the Determination of Stress in Thin-Films,' J. Vac. Sci. Technol. B 1 (4), pp. 1364-1366
DOI
|
3 |
Tabata, O., Kawashata, K., Sugiyama, S. and Igarashi, I., 1989, 'Mechanical Property Measurement of Thin-Films Using Load-Deflection of Composite Rectangular Membrane,' in:Proceedings of the IEEE Micro-Electro Mechanical Systems Workshop, pp. 152-156
|
4 |
Jones, R. V., 1951, 'Parallel and Rectilinear Spring Movements,' Journal of Scientific Instrumentationk, 28, pp. 38-41
DOI
ScienceOn
|
5 |
Mohamed Gad-El-Hak, 2001, The MEMS handbook, CRC press
|
6 |
Johansson, S., Schweitz, J. A., Tenez, L. and Tiren, J., 1988, 'Fracture Testing of Silicon Micro-Elements in Situ in a Scanning Electron Microscope,' J. Appl. Phys. 62 (10), pp. 4799-4803
DOI
|
7 |
Komai, K., Minoshima, K., Tawara, H., Inoue, S. and Sunako, K., 1994, 'Development of Mechanical Testing Machine for Micro-Elements and Fracture Strength Evaluaion of Single-Crystalline Sislicon Micro-Elements,' Trans. Jpn. Sco., Mech. Eng. A 60- 569, pp. 52-58
|
8 |
Sharpe Jr., W.N., Yuan, B., Vaidyanathan, R. and Edwards, R. L., 1997, 'Measurement of Young's Modulus, Poisson's Ratio, and Tensile Strength of Polysilicon,' in:Proceedings of the IEEE MEMS '97, pp. 424-429
|
9 |
Cunningham, S.J., Suwito, W. and Read, D.T., 1995, 'Tensile Testing of Epitaxial Silicon Films,' Technical Digests of Transducers '95, pp. 96-99
|