Degradation of electrical characteristics in SOI nano-wire Bio-FET devices
($O_2$ plasma 표면 처리 공정에 의한 SOI nano-wire Bio-FET 소자의 전기적 특성 열화)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2008.06a
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- pp.356-357
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- 2008