• Proceedings of the KIEE Conference
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• 1992.07b
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• pp.850-853
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• 1992

A cryogenic electron cyclotron resonance plasma etching system has been built to study wafer-temperature in the silicon etching characteristics. The wafer temperature was controlled from -150 to +30 $^{\circ}C$ during etching using the liquid nitrogen cooled helium gas. Although silicon was etched isotropically in $SF_6$ plasma at room temperatures, we found that it is possible to suppress the etch undercut in Si by reducing a substrate temperature without side wall passivation. In addition, the selectivity of silicon to photoresist was improved considerably at a low wafer temperature. Etch rates, anisotropy and selectivity to photo resist are measured as a function of the wafer temperature in the region of -125 $\sim$ 25$^{\circ}C$ and rf bias power of 20W $\sim$ 80W.

• Journal of international Conference on Electrical Machines and Systems
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• v.1 no.1
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• pp.17-22
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• 2012

This paper presents analyzed results of a permanent magnet motor by using complex E&S modeling. The calculated results are compared with ones from the conventional E&S modeling for verification. Combinations of the numbers of slots and poles are investigated to reduce total iron loss. The results demonstrate that the complex E&S modeling is very useful in design under consideration of rotational magnetic field and magnetic anisotropy.

• Proceedings of the KIEE Conference
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• 1988.11a
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• pp.175-178
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• 1988

A film is fabricated by depositing several sliced organic ultra thin films on a slide glass. Both UV-absorbance and the capacitance of a multi - layered organic ultra thin film with (N-docosyl pyridinium)-TCNQ(1:2) complex have a desired value on the condition of well alignment in depositing several layers. Forethermore the conductivity of this film measured by the direction of either horizontal or vertical axis. respectively, is results in a quite different value.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.143-146
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• 1999

In this study, Ultra-thin films of (N-ducosyl quinolinium)-TCNQ(1:2) complex were prepared on the hydrophilic substrate by Langmuir-Blodgett(LB) technique. By measure of UV-vis spectra and capacitance, deposition status was confirmed together with the thickness of natural oxidized aluminum film inside a device and dielectric constant of (N-docosyl quinolinium)-TCNQ(1:2) complex. The electrical properties of (N-docosyl 7uin7linium)-TCNQ(1:2) complex were investigated at room temperature. The conductivity of this film measured by the direction uf either vertical or horizontal axis is results in a quite different value.

• Journal of the Korean Magnetics Society
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• v.11 no.6
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• pp.239-244
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• 2001

Recently, RF inductor having researched by many workers, we fabricated and investigated properties of RF inductors. In order to improve the Q-factor (Quality), we try to apply the patterned Fe$_{78.81}$Ta$_{8.47}$N$_{12.71}$ soft magnetic thin film of 5000 which shows magnetic anisotropy of 30 Oe. Thus, patterned magnetic film was artificially increased magnetic anisotropy lead to increasing of ferro-magnetic resonance frequency up to GHz band. Coil as part of inductor was fabricated by lift off process. The dimension of RF inductor was designed 47un, rectangular shape, and measured properties. In the case of Ti/Ag air core type inductor shows Q of 9, inductance of 8.4 nH at 2 GHz. Magnetic film employed inductor shows inductance of 9 nH and FMR resonance frequency was 700 MHz.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.436-436
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• 2011

Recently, spintronic devices with submicron structures are widely investigated to take advantage of their unique micromagnetic properties. In this work, we study the temperature dependence of exchange bias in bilayer anti-dot arrays made by depositing Co (40 nm)/Ni (5 nm) ferromagnetic bilayer on Si substrate to form anti-dot arrays with a diameter $1{\mu}m$. The anti-dot patterning was done only for the upper Co layer, while the Ni underlayer was kept unperforated. The temperature dependences of magnetoresistance (MR) and exchange bias were studied along magnetic easy and hard axes. The in-plane MR measurements were performed using a physical-property measurement system (PPMS ; Quantum Design Inc.) at various temperatures. The standard in-line four-point probe configuration was used for the electrical contacts. As temperature was varied, the MR data were obtained in which in-plane field (H=3 kOe) was applied in the directions along the hard and the easy axes with respect to the lattice plane. The temperature dependences of magnetic anisotropy and exchange bias were also studied along the magnetic easy and hard axes. As temperature decreases, the single peak splits into two peaks. While no exchange bias was observed along the magnetic easy axis, the exchange bias field steadily increased with decreasing temperature along the magnetic hard axis. These results were interpreted in connection with the magnetic anisotropy and the effect of the anti-dots in pinning domain wall motion along the respective direction.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.2020-2021
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• 2004

Distributed optical feedback by gain coupling in V-groove quantum-wire lasers is investigated using InGaAs/AlGaAs active materials grown by metalorganic chemical vapor deposition (MOCVD). In order to avoid grating overgrowth during the fabrication of DFB structures, a newly developed constant MOCVD growth method is employed. Gain anisotropy in emission spectra near Bragg wavelength, resulting from optical feedback along the DFB direction, is clearly observed at room temperature.

• Proceedings of the KIEE Conference
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• 1989.11a
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• pp.497-501
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• 1989

The mechanisms of the meltback etching and regrowth processes are studied experimentally. The method to reduce the anisotropy and elliminate the gallium islands in the processes are developed. It is possible to fabricate the GaAs optical devices by the use of the process.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.234-234
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• 2015

Metallic microwires are a promising material for use as a filler in various conductive composite structures. Because of their high anisotropy in shape, a low percolation threshold could be achieved, which is beneficial to a low-cost fabrication and better electrical conductivity even under an extremely low solid content. Here we developed a facile method to fabricate the Cu (core)-Ni (shell) microwires.

• Proceedings of the Korean Magnestics Society Conference
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• 2002.12a
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• pp.220-221
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• 2002

There has been a demand for higher frequency operation of magnetic devices. Consideration of the materials that could be applicable to such high frequency applications is the first step when designing magnetic thin films for high-frequency use. Materials suitable for high frequency application should have a larger $M_{S}$ and an appropriate anisotropy field ( $H_{K}$), which increase a resonance frequency, and also a larger $\rho$, which reduces eddy current loss. (omitted)ted)