• 한국정밀공학회지
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• 제23권2호
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 학술회의 논문집 정보 및 제어부문 B
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• pp.735-739
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• 2003

This paper presents a direct seek control algorithm for swing-arm type dual stage servo system that consists of a coarse actuator and a fine actuator. The proposed scheme is to design a control system that attenuates the effect of dynamic coupling between the two actuators so that the seek operation can be performed in a single-shot with stability. In an optical drive system with dual stage servo mechanism, the effect of dynamic coupling between the two actuators needs to be handled during the coarse seek operation due to its inherent structure. In an extreme case, the two actuators can collide each other, which leads to critical degradation of the seek performance. To handle this problem, our proposed control scheme is to generate the drive signals such that the two actuators behave as if they are a single fixed body. To this end, a feedforward controller and two feedback controllers are designed that enable the current drive system perform wide range of track seek. Simulation results are provided to show the validity and feasibility of our proposed algorithm.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.923-928
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• 2004

AFM tip has been used for surface profiling with a fine resolution, but there is a barrier to improve its performance because of the low aspect ratio. Many researchers have solved this problem with attaching carbon nanotube (CNT) to Si-tip. In this paper, we proposed the aligner system that composed of dual type stage system, and these stages could attach a carbon nanotube to tungsten-tip in vacuum condition. We used tungsten tip instead of Si-tip because of its conductivity. The aligner system proposed in this paper has 10 degree-of-freedom that 3 in the first stage and 7 in the second stage. With picomotors and piezotube, the first stage has the resolution about several tens of nm and the second stage has a resolution about a nm. We experimented on characterization of Nano Aligner System and operated picomotors in SEM environment.

• Journal of Mechanical Science and Technology
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• 제20권11호
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• pp.1834-1847
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• 2006

A robust minimum-time control (RMTC) strategy is addressed and it is extended to the dual-stage servo design. Rather than conventional switching type sub-optimal controls, it is a reference following control approach where the predetermined minimum-time trajectory (MTT) is tracked by the perturbation compensator based feedback controller. First, the minimum-time trajectory for a mass-damper system is derived. Then, the perturbation compensator to achieve robust tracking performance in spite of model uncertainty and external disturbance is suggested. The RMTC is also applied to the dual-stage positioner which consists of coarse actuator and fine one. To best utilize the actuation redundancy of the dual-stage mechanism, a null-motion controller to actively regulate the relative motion between the two stages is formulated. The performance of RMTC is validated through simulation and experiment.

• 반도체디스플레이기술학회지
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• 제2권2호
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• 한국정밀공학회지
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• 제22권10호
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• pp.174-185
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• 2005

This paper presents the design, fabrication, and testing results of a dual stage actuator system for a fine positioning of magnetic heads in magnetic disk drives. A novel rotary microactuator which is electrostatically driven and utilized as a secondary actuator was designed. The stator and rotor electrodes in the microactuator was revised to have the optimal shapes and hence produces much higher rotational torque compared with the conventional comb-shape electrodes. The microactuators were successfully fabricated using SoG(silicon on glass) processing technology, which is known as being cost-effective. The fabricated microactuator has the structural thickness of $45{\mu}m$ with the gap width of approximately $3{\mu}m$. The dynamic characteristic of microactuator/slider assembly was investigated, and its natural frequency and DC gain were measured to be 3.4kHz and 32nm/V, respectively. The microactuator/slider assembly was integrated into a HDD model V10 of Samsung Electronics Co. and a dual servo algorithm was tested to explore the tracking performance of dual stage actuator system where the LDV signals instead of magnetic head signals were used. Experimental results indicate that this system achieves the tracking accuracy of 30nm. This value corresponds to a track density of 85,000 track per inch(TPI), which is about 3 times greater than that of current hard disk drives.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.357-360
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• 2002

Nowadays, the improvement and development of Multi-media, information and communication technology are rapidly processed. And many products, for example, digital camera, digital camcorder, and PDA, are used for them. They need large data storage capacity and small size, light storage system. Due to that, many studies and researches in data storage system have been carried out. Especially, micro drive system was presented by IBM.(1) However, its system is expensive and uneasy to be portable. In ODD technologies, 1 inch drive system is not yet or in processing status.(2) If to be possible and to be come up, it is cheap than HDD system and easy to transfer information. In this paper, a miniaturized actuator(about linch) is designed and tested for ODD system. Specially, it is adapted for NFR(Near-field Recoding) system using SIL(Solid Immersion Lens). It is the dual-servo actuator which consists of a coarse actuator and fine actuator. Its actuating force generation method is VCM(Voice Ceil Motor). The fine actuator has 4-wire suspensions and bobbin wrapped by coil and includes focusing motion as well as tracking motion. The coarse actuator has an actuating coil and V-grooved guide mechanism. Also, the characteristics of the designed actuator is estimated by sine-swept mode and LDV(Laser Doppler Vibro-meter).

• 연구논문집
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• 통권25호
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• pp.91-98
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• 1995

Recently, improving the energy efficiency of a pneumatic system and reducing the consumption of compressed air were a concern of scholars at domestic and abroad. The using fields of a pneumatic system are widely used in factory automation of manufacturing line, chemical factories with explosiveness danger and petroleum industries etc. In particular, pneumatic cylinder is applied to feeding work of workpiece. jig tools and press mechanism, reciprocation and rotary motion with rack and pinion. In this study, the experimental apparatus consisted to pneumatic cylinder, dual supply pressure regulator and solenoid valve. The dual supply pressure regulator connected to outlet port of solenoid valve. The supply pressure($4.5kg_f/cm^2$) of compressed air goes into the rodless chamber 1 to drive the piston rod forward which is named working stage. The supply pressure ($2kg_f/cm^2$) of compressed air goes into the rod chamber 2 to drive the piston rod backward which is named no-working stage. Accordingly, the research results of this study can be obtained to Energy-Saving Effects of the compressed air about 35%.

• 상하수도학회지
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• 제23권1호
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• pp.31-37
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• 2009

Low-pressure membrane processes have been extensively expanded their applications to drinking water production in a few decades. As a capacity of a membrane plant becomes greater in recent years, proper methods to increase water production as well as to treat residuals have drawn great attention. A possible treatment option for the better water production is to apply a dual membrane system. The second stage microfiltration was installed and operated for approximately six months. The residuals from the two stage microfiltration were investigated to learn their characteristics in settling and dewatering processes. The settlability of the membrane residuals were greatest at the SS concentration of approximately 15000mg/L. The proper dose of the polyelectrolytes for filterability were obtained in the range of 0.5~1%. In the dosage range, the water contents of the membrane residuals were greater but the SRF were lower than the residual from the conventional process.

• Journal of Mechanical Science and Technology
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• 제17권5호
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• pp.708-717
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• 2003

With the development of precision manufacturing technologies, the importance of precision positioning devices is increasing. Conventional actuators, dual stage or mechanically contacting type, have limitation in coping with performance demands. As a possible solution, magnetic suspension technology was studied. Such a contact-free system has advantages in terms of high accuracy, low production cost and easy adaptability to high precision manufacturing processes. This paper deals with magnetically suspended multi-degrees of freedom actuator which can realize large linear motion. In this paper, the operating principle is explained with the magnetic force analysis, and the equations of motion are derived. Experimental results of the implemented system are also given.