• Journal of the Korean Society of Propulsion Engineers
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• v.20 no.3
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• pp.54-62
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• 2016

Micro plasma thruster (${\mu}PT$) was studied experimentally with a dual-stage micro-hollow cathode discharge (MHCD) plasma. Electrostatic-like acceleration exhibiting more directional and elongated exhaust plume was achieved by a dual layer MHCD at the total input power less than 10 W with argon flow rate of 40 sccm. V-I characteristic indicated that there was an optimal regime for dual-stage operation where the acceleration voltage across the second stage remained constant. Estimated exhaust plume length showed a similar trend to the analytic estimate of exhaust velocity which scales with an acceleration voltage. ${\mu}PT$ with multiple holes exhibited similar performance with single-hole thruster indicating that higher power loading is possible owing to decreased power through each hole. Boltzmann plot of atomic argon spectral lines showed average electron excitation temperature of about 2.6 eV (~30,170 K) in the exhaust plume.

• Proceedings of the Korean Vacuum Society Conference
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• 2007.02a
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• pp.88-88
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• 2007

• Proceedings of the KIPE Conference
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• 2008.06a
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• pp.544-546
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• 2008

An improved dual-path energy recovery circuit (ERC) using a current source and a voltage source for plasma display panel (PDP) is proposed. The proposed ERC uses the voltage source to charge a panel and the current source to discharge the panel. Thus, the proposed circuit can make the panel charge to $V_S$ and discharge to 0V, fully and it is possible to achieve zero voltage switching (ZVS) of all switches in H-bridge inverter and zero current switching (ZCS) of all switches in the ERC. Moreover, it has less conduction and switching loss in ERC devices by the dual energy recovery paths for charging and discharging the panel. Furthermore, it has features of canceling the gas discharge current, high performance and the low cost ERC components. The operation principle and features of the proposed ERC are presented in detail and verified with 42-inch SD PDP.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.4
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• pp.296-299
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• 2008

The effects of radio frequency (RF) source power for decoupled plasma nitridation (DPN) process on the electrical properties and Fowler-Nordheim (FN) stress immunity of the oxynitride gate dielectrics for deep nano-technology devices has been investigated. With increase of RF source power, the threshold voltage (Vth) of a NMOS transistor(TR) decreased and that of a PMOS transistor increased, indicating that the increase of nitrogen incorporation in the oxynitride layer due to higher RF source power induced more positive fixed charges. The improved off-current characteristics and wafer uniformity of PMOS Vth were observed with higher RF source power. FN stress immunity, however, has been degenerated with increasing RF source power, which was attributed to the increased trap sites in the oxynitride layer. With the experimental results, we could optimize the DPN process minimizing the power consumption of a device and satisfying the gate oxide reliability.

• Proceedings of the KIPE Conference
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• 2007.07a
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• pp.159-162
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• 2007

Comparative study on a low cost sustaining driver with single and dual path energy recovery circuits for plasma display panels (PDPs) is shown in this paper. The cost of PDPs has been still high and about half of the cost has been occupied by driving circuit. A simple sustaining driver is proposed to reduce the cost and size of driving circuit. The proposed driver has small number of devices and reactive components and there are two methods for charging and discharging PDPs such as single and dual path energy recovery circuits. A comparative research on two-types of energy recovery path is practiced to evaluate performance. As a result, the dual energy recovery path circuit has low power consumption, low surge current and high performance. To verify those results, experiment will be shown with 42-inch HD panel.

• International Journal of Advanced Culture Technology
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• v.4 no.2
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• pp.27-33
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• 2016

This paper proposes to increase the node energy efficiency, which rapidly drops during the transmission of L-TEEN (Layered Threshold sensitive Energy Efficient sensor Network protocol), using the method of DL-TEEN (Dual-hop Layered TEEN). By introducing dual-hop method in the data transmission, the proposed single-hop method for short-range transmission and multi-hop transmission method between the cluster heads for remote transmission was introduce. By introducing a partial multi-hop method in the data transmission, a single-hop method for short range transmission method between the cluster heads for remote transmission was introduces. In the proposed DL-TEEN, the energy consumption of cluster head for remote transmission reduces and increases the energy efficiency of sensor node by reducing the transmission distance and simplifying the transmission routine for short-range transmission. As compared the general L-TEEN, it was adapted to a wider sensor field.

• International journal of advanced smart convergence
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• v.5 no.2
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• pp.24-37
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• 2016

This paper proposes to increase the efficiency of energy in nodes, which rapidly drops during the transmission of the Low Energy Adaptive Clustering Hierarchy (LEACH), through the use of dual-hop layered application in the sensor field. Along with introducing the dual-hop method in the data transmission, the proposed single-hop method for short-range transmission and multi-hop transmission method between the cluster heads for remote transmission were also introduced. Additionally, by introducing a partial multi-hop method in the data transmission, a single-hop method for short range transmission method between the cluster heads for remote transmission was used. In the proposed DL-LEACH, the energy consumption of the cluster head for remote transmission reduced, as well as increased the energy efficiency of the sensor node by reducing the transmission distance and simplifying the transmission route for short-range transmission. As compared the general LEACH, it was adapted to a wider sensor field.

• Proceedings of the KIPE Conference
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• 2008.06a
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• pp.446-448
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• 2008

A new plasma display panel sustaining driver using single side sustaining technique with the dual resonant method is proposed. Since this circuit enables to reduce switches in energy recovery circuit with keeping voltage stress like that of prior circuit, it can be low cost circuit comparing with a conventional driver. To integrate sustain function into one side with single power source in the driver, a charge pump method is adopted to make negative sustaining voltage and achieve dual resonant energy recovery on sustaining modes.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.307-307
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• 2013

초고집적 회로에 적용되는 반도체 소자의critical dimension (CD)이 수 nano 사이즈로 줄어들고 있기 때문에, 다양한 물질의 식각을 할 때, 건식식각의 중요성이 더 강조되고 있다. 특히 $SiO_2$와 같은 유전체 물질을 식각할 때, plasma process induced damages (P2IDs)가 관찰되어 왔고, 이러한 P2IDs를 줄이기 위해, pulsed-time modulation plasma가 광범위하게 연구되어 왔다. Pulsed plasma는 정기적으로 radio frequency (RF) power on과 off를 반복하여 rf power가 off된 동안, 평균전자 온도를 낮춤으로써, 웨이퍼로 입사되는 전하 축적을 효과적으로 줄일 수 있다. 또한 fluorocarbon plasmas를 사용하여 $SiO_2$를 식각하기 위해 Dual-Frequency Capacitive coupled plasma (DF-CCP)도 널리 연구되어 왔는데, 이것은 기존의 방법과는 다르게 plasma 밀도와 ion bombardment energy를 독립적으로 조절 가능하다는 장점이 있어서 미세 패턴을 식각할 때 효과적이다. 본 연구에서는 Source power에는 60 MHz pulsed radio frequency (RF)를, bias power에는 2 MHz continuous wave (CW) rf power가 사용된 system에서 Ar/$C_4$ F8/$O_2$ 가스 조합으로, amorphous carbon layer (ACL)가 hard mask로 사용된 $SiO_2$를 식각했다. 그리고 source pulse의 duty ratio와 pulse frequency의 효과에 따른 $SiO_2$의 식각특성을 연구하였다. 그 결과, duty ratio의 감소에 따라 $SiO_2$, ACL의 etch rate이 감소했지만, $SiO_2$/ACL의 etch selectivity는 증가하였다. 반면에 pulse frequency의 변화에 따른 두 물질의 etch selectivity는 크게 변화가 없었다. 그 이유는 pulse 조건인 duty ratio의 감소가 전자 온도 및 전자 에너지를 낮춰 $C_2F8$가스의 분해를 감소시켰으며, 이로 인해 식각된 $SiO_2$의 surface와 sidewall에 fluorocarbon polymer의 형성이 증가하였기 때문이다. 또한 duty ratio의 감소에 따라 etch selectivity뿐만 아니라 etch profile까지 향상되는 것을 확인할 수 있었다.

• 한국정보디스플레이학회:학술대회논문집
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• 2003.07a
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• pp.730-733
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• 2003

Dual coding technique is one of the popular techniques to reduce the dynamic false contours on PDP. Subfield pattern is a key factor affecting the performance of dual coding technique. In this paper, an optimum subfield selection method based on genetic algorithm is proposed. Two types of string structures are defined to account for all the possible configurations of the dual coding subfield patterns. Genetic operators are proposed for optimization of dual coding subfield pattern. Quantitative measures to describe degrees of dynamic false contours and checkerboard patterns are defined. Experimental results indicate that dual coding subfield pattern that is determined by proposed method reduces dynamic false contours and checkerboard patterns.