• 제목/요약/키워드: drain resistance

검색결과 238건 처리시간 0.029초

나노급 CMOSFET을 위한 Pd 적층구조를 갖는 열안정 높은 Ni-silicide (Thermal Stable Ni-silicide Utilizing Pd Stacked Layer for nano-scale CMOSFETs)

  • 유지원;장잉잉;박기영;이세광;종준;정순연;임경연;이가원;왕진석;이희덕
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.10-10
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    • 2008
  • Silicide is inevitable for CMOSFETs to reduce RC delay by reducing the sheet resistance of gate and source/drain regions. Ni-silicide is a promising material which can be used for the 65nm CMOS technologies. Ni-silicide was proposed in order to make up for the weak points of Co-silicide and Ti-silicide, such as the high consumption of silicon and the line width limitation. Low resistivity NiSi can be formed at low temperature ($\sim500^{\circ}C$) with only one-step heat treat. Ni silicide also has less dependence of sheet resistance on line width and less consumption of silicon because of low resistivity NiSi phase. However, the low thermal stability of the Ni-silicide is a major problem for the post process implementation, such as metalization or ILD(inter layer dielectric) process, that is, it is crucial to prevent both the agglomeration of mono-silicide and its transformation into $NiSi_2$. To solve the thermal immune problem of Ni-silicide, various studies, such as capping layer and inter layer, have been worked. In this paper, the Ni-silicide utilizing Pd stacked layer (Pd/Ni/TiN) was studied for highly thermal immune nano-scale CMOSFETs technology. The proposed structure was compared with NiITiN structure and showed much better thermal stability than Ni/TiN.

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국내에 도입된 Sedum album L.의 생육 특성 및 저토심 옥상 녹화 시스템에 관한 연구 (Studies on Growth Characteristics and Shallow Green-Roof Systems of Sedum album L. Introduced in Korea)

  • 김인혜;허무룡;허근영
    • 한국조경학회지
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    • 제33권5호통권112호
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    • pp.69-82
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    • 2005
  • These studies were carried out (1) to investigate the growth characteristics of Sedum album L. in the field, (2) to propose a suitable shallow peen roof system for this plant, and (3) to evaluate plant growth in the proposed system over the long term. The growth characteristics, such as morphological properties, growth habit, shade tolerance, and flowering, were surveyed. In experimental shallow green-roof systems, the effects of drainage type, substrate type, and soil depth on plant growth were investigated. Then drought tolerance was investigated. After planting Sedum album L. in the proposed system survival rate, cover, and resistance to insects, heal and cold were evaluated for about 2 years. The results of these studies are summarized below. 1. In the field, the aboveground part of Sedum album L. did not die back during the winter. Plant height was 4$\sim$7 cm. Roots were distributed to a depth of 5$\sim$7 cm. Sedum album L. is a compact ground-cover plant that spreads vigorously. Shading condition of less than $30\%$ of full sunlight didn't cause any trouble, but shading conditions above $87\%$ made the shape of the shoots and leaves abnormal. The plant bloomed from June to August and had a rather large compound umbel of white, star-shaped flowers. 2. Two systems, a drainage-blend-10 cm soil depth and a reservoir$\cdot$drainage-blend-15 cm soil depth, performed best in terms of cover, fresh weight, and dry weight. The first has an advantage for green roofs because it is lighter than the latter. 3. In drainage-blend-10 m soil depth and modified reservoir · drainage-blend-10 cm soil depth system no plants died for about 4 months after stopping the irrigation. The visual quality of the latter system was above 5 for 4 months and that of the former was under 5 after 2 months. In the field, however, the drought tolerance of Sedum album L. grown in the former would be enough to withstand the dry season. Considering the urban ecosystem and the importance of healthy growth the modified reservoir $\cdot$ drainage-blend-10 cm soil depth system was finally recommended. This system was composed of a 4 cm thick drainage layer and drain outlets placed at a height of 2.5 cm. 4. In the proposed system, the survival rate was $100\%$, and there was no injury induced by insects and heat. The leaf density decreased a little in winter. Cover increased throughout the year. Sedum album L. was planted with a cover of 72$cm^{2}$ on 3 April 2003; on 16 June 2003 and 15 June 2004, cover was $132.66\pm$5.87 $cm^{2}$(1.8 times) and $886.98\pm$63.51 $cm^{2}$(12.3 times), respectively.

초박막의 $N_2O$ 어닐링한 터널링 산화막을 갖는 Flash Memory Cell의 SILC 특성 및 성능 (Performance and SILC Characteristics of Flash Memory Cell With Ultra thin $N_2O$ Annealed Tunneling Oxide)

  • 손종형;정정화
    • 전자공학회논문지D
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    • 제36D권10호
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    • pp.1-8
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    • 1999
  • 본 논문은 두께가 각각 다른 습식 산호막의 정전류 스트레스에 따른 SILC를 측정하여 SILC의 전도 mechanism 및 발생원인을 조사하였다. $N_2O$ 어닐링한 산화막의 SILC 특성도 조사하였다. 또한, 60A 두께의 $N_2O$ 어닐링한 터널링 산호막을 갖는 ,flash memory cell을 $0.25{\mu}m$ 설계규칙에 따라 제작하여 그 특성을 측정하였다. 그 결과, SILC의 발생 원인은 전기적 스트레스 인가에 따른 산호막내에 생성된 트랩 때문이며, SILC의 전도 mechanism은 전기장 세기가 8MV/cm 이하일 때 산호막 트랩을 경유한 modified F-N 터널링이 8MV/cm 이상일 때 전형적인 F-N터널링이 주도적임을 알 수 있었다. 60A의 $N_2O$ 어닐링한 산화막은 SILC에 대한 내성 측면에서 큰 개선 효과가 있음을 알 수 있었다. 또한 이 막을 flash memory cell의 터널링 산호막으로 이용할 경우, $10^6$회의 endurance와 10년 이상의 드레인 disturb가 보장되고 8V-프로그래밍이 가능한 특성을 얻을 수 있었다.

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${N_2}O$ 플라즈마에 의한 AlGaN/GaN HEMT의 누설전류 감소 (Reduction of gate leakage current for AlGaN/GaN HEMT by ${N_2}O$ plasma)

  • 양전욱
    • 전기전자학회논문지
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    • 제11권4호
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    • pp.152-157
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    • 2007
  • 본 연구에서는 AlGaN/GaN HEMT (High electron mobility transistor)를 제작하고 20 mTorr의 챔버 압력과 15 sccm의 ${N_2}O$ 유량, 40 W의 RF 전력의 조건으로 원거리에서 형성된 플라즈마로 소스와 드레인 영역을 10초${\sim}$120초 동안 처리하여 HEMT의 전기적 특성을 관찰하였다. 상온에서 ${N_2}O$ 플라즈마에 처리한 경우 HEMT의 특성이 변화하지 않았으나 $200^{\circ}C$의 온도에서 10초 동안 처리한 경우 게이트 길이가 1um, 소스와 드레인 사이의 거리가 4um인 HEMT의 게이트 누설전류가 246 nA로부터 1.2 pA로 크게 감소하였다. 또한 25 um 떨어진 200um 폭의 두 활성층 사이 누설전류가 3 uA로부터 7 nA로 감소하였으며 720 ${\Omega}/{\box}$의 활성층의 면저항을 608 ${\Omega}/{\box}$로 감소시켜 도전율의 증가를 나타내기도 하였다. ${N_2}O$ 플라즈마의 처리에 의한 전기적 특성 개선은 10초 이내의 짧은 시간 동안 이루어지며 더 이상의 처리는 누설전류 특성 개선에 도움이 되지 않았다. 또한 ${N_2}O$ 플라즈마 처리로 개선된 특성은 $SiO_2$의 증착과 식각 후에도 개선된 특성이 유지되었다. ${N_2}O$ 플라즈마의 처리는 트랜지스터의 트랜스컨덕턴스와 드레인 전류의 증가, 드레인 전류의 차단특성의 개선에도 기여하여 고품위의 AlGaN/GaN HEMT 제작에 효과적으로 이용될 수 있음이 확인되었다.

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Salvage of Infected Breast Implants

  • Song, Joon Ho;Kim, Young Seok;Jung, Bok Ki;Lee, Dong Won;Song, Seung Yong;Roh, Tai Suk;Lew, Dae Hyun
    • Archives of Plastic Surgery
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    • 제44권6호
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    • pp.516-522
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    • 2017
  • Background Implant-based breast reconstruction is being performed more frequently, and implants are associated with an increased risk of infection. We reviewed the clinical features of cases of implant infection and investigated the risk factors for breast device salvage failure. Methods We retrospectively analyzed 771 patients who underwent implant-based breast reconstruction between January 2010 and December 2016. Age, body mass index, chemotherapy history, radiation exposure, and smoking history were assessed as potential risk factors for postoperative infection. We also evaluated the presence and onset of infection symptoms, wound culture pathogens, and other complications, including seroma, hematoma, and mastectomy skin necrosis. Additionally, we examined the mastectomy type, the use of acellular dermal matrix, the presence of an underlying disease such as hypertension or diabetes, and axillary node dissection. Results The total infection rate was 4.99% (58 of 1,163 cases) and the total salvage rate was 58.6% (34 of 58). The postoperative duration to closed suction drain removal was significantly different between the cellulitis and implant removal groups. Staphylococcus aureus infection was most frequently found, with methicillin resistance in 37.5% of the cases of explantation. Explantation after infection was performed more often in patients who had undergone 2-stage expander/implant reconstruction than in those who had undergone direct-to-implant reconstruction. Conclusions Preventing infection is essential in implant-based breast reconstruction. The high salvage rate argues against early implant removal. However, when infection is due to methicillin-resistant S. aureus and the patient's clinical symptoms do not improve, surgeons should consider implant removal.

콘크리트 거친면 마무리처리에 따른 공용성 평가 (Performance Evaluation of Surface Textures on Concrete Pavement)

  • 박권제;문준범;조윤호
    • 한국도로학회논문집
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    • 제6권1호
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    • pp.1-11
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    • 2004
  • 본 연구는 포장 거친면 마무리 방법에 따른 공용성 평가를 실시하여 국내에 최적의 거친면 마무리 공법을 제안하는 데 목적이 있다. 소음 측정 결과 일정간격 18mm 종방향 타이닝이 다른 비교구간보다 약 2$\sim$3dB(A) 소음 감소효과가 있다. 일정간격 18mm 종방향 타이닝과 26mm 종방향 타이닝을 비교한 결과 26mm 종방향 타이닝에서 약 2$\sim$3dB(A)증가 하였다. 미끄럼 저항성 측정결과는 SN40을 기준으로 했을 경우 전 구간에 대해 양호한 결과를 얻을 수 있었고, 평탄성 측정결과 AASHTO 기준인 PrI 16cm/km 범위 내에 전 구간이 포함되는 것을 알 수 있었다. 그리고, 실제 운전자를 대상으로한 설문조사에서는 종방향타이닝의 주행감이 가장 좋은 것으로 분석되었다. 육안관측으로 배수성 측정결과 일정간격 26mm 종방향 타이닝과 일반구간(일정간격 25mm 횡방향 타이닝)에서 가장 우수한 배수성을 보였다. 반면에 18mm 종방향 타이닝과 임의간격 횡방향에서는 배수능력이 저하되었다. Ranking method를 적용하여 분석한 결과 18mm 종방향 타이닝이 가장 좋은 공법으로 선정되었고, 다음으로 26mm 종방향 타이닝, 임의간격 횡방향, 횡방향 쓸기순으로 선정되었다.

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개별진공압공법이 적용된 지반의 최적 단계진공압 산정 및 침하예측 (Determination of Optimum Stepped Vacuum Pressure and Settlement for IVPM-applied Ground)

  • 윤명석;안동욱;박재만;김수삼
    • 토지주택연구
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    • 제2권2호
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    • pp.163-170
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    • 2011
  • 개별진공압공법은 지반에 타설된 연직배수재에 진공압을 직접 가하여 간극수를 배출하여 일정한 전응력 상태에서 유효응력이 증가함에 따라 압밀을 촉진 시키는 공법이다. 연약지반 개량에 일반적으로 사용되는 공법인 성토재하공법(preloading)과는 다르게 성토하중이 필요로 하지 않기 때문에 성토재료의 확보 문제와 지반의 국부적인 전단파괴에 대해 이점을 가지고 있다. 또한 기존의 진공압밀 공법에서의 문제점인 펌프효율의 감소, 고가의 기밀시트에 소요되는 비용, 그리고 기밀시트의 잦은 파손의 문제 등을 직접적으로 배수재에 진공압을 가함으로서 개선시킨 공법이다. 그러나 개별진 공압공법은 직접 고압의 진공압을 직접 배수재에 가함으로써 배수재 주변의 투수계수가 감소하며 경화되는 영역(hardening zone)과 필터재료의 막힘현상(clogging)에 의해서 간극수의 배출이 줄어들게 되어 지반개량의 효율이 크게 감소하게 된다. 따라서 본 연구에서는 높은 지반개량 효과를 얻을 수 있는 진공압의 적용기간을 찾기 위해서 단계진공압(-20, -40, -60, -80KPa) 적용기간을 각각 다르게 적용하였다. 실험을 진행하는 동안 각 조건에 따라 개량 시간에 따른 침하량을 측정하였으며, 실험 종료 후 최종침하량, 함수비, 콘저항치를 측정하였다. 파악된 데이터를 비교/분석하여 개별진공압공법에 적합한 단계진공압 적용기간을 도출한 후 수치해석을 실시하여 제안된 단계진공압 적용에 따른 침하량을 예측하였다.

평행식 진동탄환 암거 천공기의 연구 (IV)(V)-실기 설계 제작 및 보장실험-Development of Balanced-Type Oscillating Mole Drainer(IV)(V)

  • 김용환;이승규;서상용
    • Journal of Biosystems Engineering
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    • 제2권1호
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    • pp.7-24
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    • 1977
  • This paper is the forth and fifth one of the study on balanced type oscillating mole drainer. In the light of the results from previous reports about the model tests, some design criteria were established and a prototype machine was set up for experimental purpose. Motion characteristics and functionof the each parts of the machine were checked and analyzed. After that, performance tests of the prototype machine were carried out in thefield. Obtained results are summarized as follows ; 1. Ten centimeter of the bullet diameter was determined so as to be able to attach it to the tractors with capacity of 30 PS to 40 PS. 2. To maintain the balance between the moments of the front shank and rear shank, the oscillating amplitude of the rear bullet was determined to be larger than that of the front bullet. At the same time , the oscillating direction of the rear bullet was designed with the inclines of ten to thirty degrees. 3. An octagonal dynamo transduced was developed for measuring the compressive force of the upper link is measuring the draft force of the machine. Acceptable linear relationship between forces and strain responses from O.D.T. was obtained. 4. Analysing the balancing mechanism of the acting part of the machine , it was found that the total draft force of the machine was equal to the difference between the sum of the draft force produced from the right and left side bending moments of the lower drawber and the compressive force on the upper link. 5. There are acceptable linear relationship between the strain and twisting moment by driving shaft, and between strain and shank moment. Above results enable us to carry out the field experiment with prototype machine. 6. When the test machine was used in the field, it was possible to reduce the oscillating acceleration by forty percent in average as compared it with the single bullet mole drainer. 7. When the test machine was used under the oscillating condition, the dratt torce was reduced by 27 percent to 59 percent as compared it with the test machine under non-oscillating condition, while the draft force was increased by 7 percent to 20 percent as compared it with the mole drainer having oscillating single bullet. The reasoning behind this fact was considered as the resistance force due to the rear shank and bullet. 8. As the amplitude and frequency of the bullet were increased, the torque was increased accordingly. This tendency could be varied with the various characteristics of the given soils. And the larger frequency and amplitute, the more increasing oscil\ulcornerlating power but decreasing draft brce were needed, and draft force was increased as the velocity was increased.9. When the amplitude of the rear bullet was designed to be larger than that of the front bullet, the minimum value of the moment was lowered and oscillating acceleration was reduced. And when the oscillating direction of the rear bullet was declined back\ulcornerwards, oscillating acceleration was increased along with the increasing angle of decli\ulcornernation. When the test machine was operated in high speed, the difference between maximum moments and minimum ones became narrow. This varying magnitude of moments appeared on the moment oscillogram seems to be correlated to the oscillating acceleration and draft force. 10. From the analysis of variance, it was found that those factors such as frequency, amplitude, and operating velocity significantly affected in the oscillating acceleration, the draft resistance, the torque, the moment, and the total power required. And interaction between frequency and amplitude affected in the oscillating acceleration. 11. Within the given situation of this study, the most preferable operating conditions of the test machine were 7 Hz in oscillating frequency, 0.54 m/sec in operating velocity, and 39.1 mm in oscillating amplitude of front and rear bullets. However, it is necessary to select the proper frequency and magnitude of oscillation depending on the soil properties of the field in which the mole drainer is practiced by use of a bal1nced type oscillating mole drainer. 12. It is recommended that a comparative study of the mole drainers would be performed in the near future using two separate balanced oscillating bullet with the one which is operated by oscillating the movable bullet in a single cylinder or other balanced type which may be single oscillating bullet with spring, damper or balancing weight, and that of thing. To expand the applicability of the balanced type oscillating mole drainer in practical use, it is suggested to develop a new mechanism which perform mole drain with vinyl pipe or filling material such as rice hull.

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