• Title/Summary/Keyword: distance measuring equipment

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Development of Hard Mask Strip Inspection System for Semiconductor Wafer Manufacturing Process (반도체 전공정의 하드마스크 스트립 검사시스템 개발)

  • Lee, Jonghwan;Jung, Seong Wook;Kim, Min Je
    • Journal of the Semiconductor & Display Technology
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    • v.19 no.3
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    • pp.55-60
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    • 2020
  • The hard mask photo-resist strip inspection system for the semiconductor wafer manufacturing process inspects the position of the circuit pattern formed on the wafer by measuring the distance from the edge of the wafer to the strip processing area. After that, it is an inspection system that enables you to check the process status in real time. Process defects can be significantly reduced by applying a tester that has not been applied to the existing wafer strip process, edge etching process, and wafer ashing process. In addition, it is a technology for localizing semiconductor process inspection equipment that can analyze the outer diameter of the wafer and the state of pattern formation, which can secure process stability and improve wafer edge yield.

Impact of solar storm on Navaids system (태양폭풍이 항행안전시설에 미치는 영향분석)

  • Jo, Jin-Ho;Park, Jae-Woo;Jeong, Cheol-Oh;Kim, Jae-Hoon;Kim, Gye-Hyeun;Park, Hyeung-Tak
    • Journal of the Korean Society for Aviation and Aeronautics
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    • v.20 no.2
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    • pp.13-17
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    • 2012
  • The solar storm generated by solar activity can be impact on earth in various area. If solar storm impact on Navaids system, it will be a serious problem for aviation and human safety. The impact analysis of solar strom on Navaids system are performed in three area, ILS, GPS navigation and radio communication for aviation. Analysis result show that Instrument Landing System(LLZ, GP, MB) and Navaids system(VOR, DME, Radar) are not impacted by the solar storm, but GPS system is impacted by solar storm. Also analysis result show that VHF/UHF radio system are not impacted by solar storm, but HF radio system is impacted by solar storm.

Personalized Cooling Management System with Thermal Imaging Camera (열화상 카메라를 적용한 개인 맞춤형 냉각관리 시스템)

  • Lee, Young-Ji;Lee, Joo-Hyun;Lee, Seung-Ho
    • Journal of IKEEE
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    • v.25 no.4
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    • pp.782-785
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    • 2021
  • In this paper, we propose a personalized cooling management system with thermal imaging camera. The proposed equipment uses a thermal imaging camera to control the amount of cold air and the system according to the difference between the user's skin temperature before and after the procedure. When the skin temperature is abnormally low, the cold air supply is cut off to prevent the possibility of a safety accident. It is economical by replacing the skin temperature sensor with a thermal imaging camera temperature measurement, and it can be visualized because the temperature can be checked with the thermal image. In addition, the proposed equipment improves the sensitivity of the sensor that measures the distance to the skin by calculating the focal length by using a dual laser pointer for the safety of a personalized cooling management system to which a thermal imaging camera is applied. In order to evaluate the performance of the proposed equipment, it was tested in an externally accredited testing institute. The first measured temperature range was -100℃~-160℃, indicating a wider temperature range than -150~-160℃(cryo generation/USA), which is the highest level currently used in the field. In addition, the error was measured to be ±3.2%~±3.5%, which showed better results than ±5%(CRYOTOP/China), which is the highest level currently used in the field. The second measured distance accuracy was measured as below ±4.0%, which was superior to ±5%(CRYOTOP/China), which is the highest level currently used in the field. Third, the nitrogen consumption was confirmed to be less than 0.15 L/min at the maximum, which was superior to the highest level of 6 L/min(POLAR BEAR/USA) currently used in the field. Therefore, it was determined that the performance of the personalized cooling management system applied with the thermal imaging camera proposed in this paper was excellent.

A Study on the Improvement of Performance Testing System of Domestic Surveying Equipment (국내 측량장비 성능검사제도 개선방안 연구)

  • MIN, Kwan-Sik
    • Journal of the Korean Association of Geographic Information Studies
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    • v.19 no.1
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    • pp.53-63
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    • 2016
  • In this paper, we proposed the improvements for performance test and surveying equipment regulations, standards, methods and procedures, depending on the need of improving the legal system for surveying equipment in a diverse and sophisticated surveying industry. This research was performed first investigating the existing legal systems(Act on the establishment and management of spatial data, Framework act on national standards, ISO 17123, JIS B 7912) with respect to the surveying equipment performance testing and the research for IOS and KOLAS suggested the improvements on the application for the surveying equipment performance testing standard. More exactly, first, two years were presented for the surveying equipment performance testing cycle considering the precise accuracy of the instrument stability, purpose and frequency of use, etc. Second, the abolition of the measurement distance by grade and the upward or cross-grade adjustment of the single prism standards about the light wave rangefinder and total station were suggested for the improvement on survey equipment performance criteria. Third, since the main function of total station is focused on a three-dimensional coordinate measurement due to the improvement of surveying equipment performance testing, it was proposed to use the precision(repeatability) of the coordinate measuring method as an evaluation method.

Improvement of Vehicle Classification Method using Vehicle Height Measurement (차량높이 계측을 통한 차종분류 향상 방안 연구)

  • Oh, Ju-Sam;Jang, Kyung-Chan;Kim, Min-Sung
    • International Journal of Highway Engineering
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    • v.12 no.4
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    • pp.47-51
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    • 2010
  • A vehicle classification data is essential for traffic road planning and pavement. In this study, the vehicle height, vehicle criteria for classification applied to measure the height of the car driving has devised a way to install equipment. It is capable of measuring the vehicle height was confirmed to field experiments, the measurement system is obtained to the vehicle length and height data. In this experiment, results showed the accuracy of 88.6% compared to classification data using the discriminant function obtained from video replaying. The height of vehicle applying the classification criteria can be utilized to determine the vehicle class.

Optimization of Measuring Cardiac Output by Both Hands Electrode Impedance Method (양손 전극의 임피던스법을 이용한 심박출량 측정의 최적화)

  • Jung, Sang-O;Sim, Myeong-Heon;Jung, Woon-Mo;Kim, Min-Yong;Yoon, Chan-Sol;Yoon, Hyung-Ro
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.60 no.9
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    • pp.1770-1776
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    • 2011
  • In this study, a new method that can estimate ICG data from a subject's both hands to measure Cardiac Output under convenient sensor environment. With this aim, a grip-type electrode was implemented to measure ICG. To improve the accuracy of measurement, the regression equation was extracted using multiple bio-parameters and our result was compared with the thoracic ICG equipment(Physio Flow$^{(R)}$, PF104D, Manatec Biomedical, France), which is being used in clinics. The subjects consist of 26 men and 4 women(age in $22.0{\pm}3.32$). They are no cardiac disease. Parameters available for regression model were used gender, BMI, MBP, LVET, dZ/dt(max), distance between the measured electrodes, body impedance, and PTT. As a result of analyzing the ICG measurement value on thorax and both hands, the correlation with stroke volume, heart rate, and cardiac output was $R^2$=0.853, $R^2$=0.958 and $R^2$=0.899, respectively.

A Study of Electrical and Optical Method of Safety Standards for diagnosis of Power Facility using UV-IR Camera (UV-IR 카메라를 이용한 전력설비 진단을 위한 전기 및 광학적 안전 기준 설정 연구)

  • Kim, Young-Seok;Kim, Chong-Min;Choi, Myeong-Il;Bang, Sun-Bae;Shong, Kil-Mok;Kwag, Dong-Soon
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.27 no.4
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    • pp.54-61
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    • 2013
  • UV-IR camera is being used for predictive maintenance of high voltage equipment together with measurement of temperature on localized heat and corona discharge. This paper was suggested the judgement method that is the discharge count, UV image pattern and discharge matching rate to apply the UV-IR camera on power facility. The discharge count method is counted by UV image pixel value. the UV image pattern method is determined by the UV image shape using neural network algorithm method, separated by Sunflower, Jellyfish, Ameba. The UV discharge matching is compare the breakdown the UV image size and measuring UV image size according to distance.

Failure Path of the Brown-oxide-coated Copper-based Leadframe/EMC Interface under Mixed-Mode Loading (혼합하중 조건하에서 갈색산화물이 입혀진 구리계 리드프레임/EMC 계면의 파손경로)

  • 이호영
    • Journal of the Korean institute of surface engineering
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    • v.36 no.6
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    • pp.491-499
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    • 2003
  • Copper-based leadframe sheets were oxidized in a hot alkaline solution to form brown-oxide layer on the surface and molded with epoxy molding compound (EMC). The brown-oxide-coated leadframe/EMC joints were machined to form sandwiched double-cantilever beam (SDCB) specimens and sandwiched Brazil-nut (SBN) specimens for the purpose of measuring the fracture toughness of leadframe/EMC interfaces. The SDCB and the SBN specimens were designed to measure the fracture toughness of the leadframe/EMC interfaces under nearly mode-I loading and mixed-mode (mode I + mode II) loading conditions, respectively. Fracture surfaces were analyzed by various equipment such as glancing-angle XRD, SEM, AES, EDS and AFM to elucidate failure path. Results showed that failure occurred irregularly in the SDCB specimens, and oxidation time of 2 minutes divided the types of irregular failures into two classes. The failure in the SBN specimens was quite different from that in the SDCB specimens. The failure path in the SBN specimens was not dependent on the phase angle as well as the distance from tips of pre-cracks.

Monitoring of the Jamming Environment in the GNSS L5 Band in Korea Region

  • Lee, Hak-beom;Song, Young-Jin;Park, Dong-Hyuk;Lee, Sanguk;Won, Jong-Hoon
    • Journal of Positioning, Navigation, and Timing
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    • v.10 no.4
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    • pp.353-361
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    • 2021
  • This paper presents the jamming effect on the L5 band of Global Navigation Satellite System (GNSS) by analyzing real data collected via measurement campaigns in Korea region. In fact, the L5 band is one of the dedicated bands for various satellite navigation systems such as Global Positioning System (GPS), Galileo, BeiDou (BDS), and Quasi Zenith Satellite System (QZSS). And this band is also allocated along with various systems used for aeronautical radio navigation systems (ARNS). Among ARNS, the Distance Measuring Equipment (DME) and the Tactical Air Navigation System (TACAN) are systems that transmit and receive strong power pulse signals, which may cause unintentional jamming in the reception of GNSS signals. In this paper, signals in the main lobe of GPS L5, Galileo E5a, BDS B2a, and QZSS L5 are collected in Korean region to confirm whether the jamming effect exists in the band. And then, the pulse blanking technique, which is a simple signal processing technique capable of responding to pulsed jamming, is applied to analyze the jamming effect of DME/TACAN on the L5 band.

A Study on the Pattern Matching Algorithm of 3D Coordinates for Quality Control in Ship Blocks (선박블록의 정도관리를 위한 3차원 좌표의 패턴매칭 알고리즘에 대한 연구)

  • Lee, Ho Cheol;Lee, Dong Myung
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.37C no.10
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    • pp.933-939
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    • 2012
  • In general, the three-dimensional(3D) coordinates of the manufactured ship blocks are measured using the laser measuring equipment by ship engineers. But, many deflections between the measured coordinates in manufactured step and the designed coordinates in the design step are occurred because of the measuring process of ship blocks manually. Thus, the ship engineer should conform the consistency between the measured coordinates and the designed coordinates step by step, and it largely causes the loss of manpower and time. In this paper, the automated pattern matching algorithm of 3D coordinates for quality control in ship blocks is suggested in order to solve this problem, and the performance of the algorithm is analyzed using the 3D coordinates simulation software developed by our research laboratory. The coordinates matching rate of the measured coordinates in the single/multi ship block(s) is about 90.2% under the tolerated distance error range is 20~25cm.