• Title/Summary/Keyword: dispersant

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Study on dispersion stability according to AMP content of CMP ceria slurry for semiconductor (반도체 CMP 용 세리아 슬러리의 AMP 함량에 따른 분산안정성에 관한 연구)

  • Sohee Hwang;JinA Lim;Woonjung Kim
    • Transactions on Semiconductor Engineering
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    • v.2 no.2
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    • pp.1-9
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    • 2024
  • CMP (Chemical Mechanical Polishing) processes have become essential for creating multilayered component structures in semiconductor manufacturing. Typically, the slurry composition in CMP processes involves a balance of three components such as ceria, dispersant, and deionized water. In this study, we conducted research on the stability of ceria slurries using an amphoteric surfactant with controlled concentrations of AMP (2-Amino-2-methyl-1-propanol). The results indicated pH stabilization influenced by carboxylic (-COOH) groups depending on the AMP concentration. Additionally, there was no occurrence of aggregation in the ceria slurry, confirming the absence of dispersion stability issues.

Acrylamide Polymerization on Ceramic Powders (III) -Effect on Molecular Structure of Polymer Dispersant on SiN4 Gelcasting Process- (세라믹분체 표면에서 아크릴아마이드 중합(제3보)-고분자 분산제의 분자구조가 질화규소 겔캐스팅공정에 미치는 영향-)

  • 류병환;김은영;이재도
    • Journal of the Korean Ceramic Society
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    • v.36 no.3
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    • pp.266-273
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    • 1999
  • 본 연구에서는 겔캐스팅법의 제조공정 확립을 위하여 분산제의 분자구조가 질화규소 슬립의 점성특성 및 성형체의 상대밀도와 기계적 특성에 미치는 영향을 조사하였다. 슬립과 겔캐스팅 성형체의 제조방법은 기보고된 방법과 동일하게 하였다. 그 결과, 겔캐스팅 슬립의 점성은 분산제의 분자구조와 모노머와 분산제의 구성비율에 크게 의존하였다. PMAA 분산제를 사용한 슬립의 점성은 PAA 및 PAAm 분산제 보다 높은 점도를 나타내었다. 성형체의 상대밀도는 슬립의 농도에 크게 의존하였으며, 분산제양과 모노머의 양변화에는 그다지 변화가 없었다. 그리고, 겔캐스팅 성형체의 기계적 특성은 크게 모노머의 농도에 의존하였으며, 분산제양과 슬립의 농도에는 큰 변화가 없었다.

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ANTIWEAR FILM FORMATION BY COMPONENTS OF PASSENGER CAR MOTOR OILS

  • Yamaguchi, E.S.;Roby, S.H.;Francisco, M.M.;Ruelas, S.G.
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.267-268
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    • 2002
  • Engine testing of new low-sulfur, low-phosphorus anti wear components is expensive and time consuming so bench testing of potential candidates is highly desirable as a first step evaluation. Electrical contact resistance (ECR) has been shown to be a convenient method to assess antiwear film formation in a ball-on-flat bench wear test. Correlation of the bench test to fired engines was demonstrated for lubricants varying only in the type of detergent. Previous papers have examined film formation by one and two component formulations of zinc dialkyldithiophosphate (ZnDTP) and detergents. In this study, the ECR technique is systematically extended to formulations including ZnDTP, detergent, and dispersant. Both type and level of components are considered and the implications for engine performance are discussed.

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Evaluation and Optimization of Dispersion in Commercial LTCC Powder (상용 LTCC 원료의 분산 평가 및 최적화)

  • Kwon, Hyeok-Jung;Shin, Hyo-Soon;Yeo, Dong-Hoon;Kim, Jong-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.41-42
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    • 2006
  • LTCC 공정의 안정화를 위한 기본적인 공정인 분산의 최적화를 위하여 상용 LTCC 분말인 MLS-22(NEG, Japan)를 이용하여 다양한 평가 방법으로 분산성을 평가하였다. 분산제의 종류와 함량을 조절하여 슬러리의 점도, 표면 거칠기, 코팅된 슬러리의 표면 미세구조를 측정하였다. SN-dispersant 9228 분산제를 사용한 경우 0.4wt%첨가되었을 때 최적의 분산 특성을 얻을 수 있었으며 각 평가 방법은 잘 일치하는 분산의 평가 경향을 나타내었다.

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Preparation and Sintering Behavior of Monodispersed Alumina-Zirconia Fine Powders (단분산 $Al_2O_3-ZrO_2$ 복합분말의 합성과 소결특성)

  • 부재필;송용원;최상홀
    • Journal of the Korean Ceramic Society
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    • v.31 no.10
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    • pp.1209-1217
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    • 1994
  • Monodispersed alumina-zirconia fine powders were prepared by controlled hydrolysis of alkoxides. These powders and the sintered bodies were characterized. Aluminium alkoxide and zirconium alkoxide were dissolved into complex solvent with butanol and n-propanol, and by acetonitrile added hydrolytic solution, hydrolysis rate was controlled. The oil, as a dispersant, was added in hydrolytic solution, and then prepared powders were nano-sized and well-monodispersed. In the case of hydroxypropyl celluose (HPC) as a dispersant, it was added in complex solution with butanol and iso-propanol, sub-micrometer sized and well-monodispersed powders could be prepared. The value of relative density (R.D.) and tetragonal phase fraction of zirconia in the sintered body made by nano-meter sized powders were respectively higher than those in the case of sub-micrometer sized one.

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Slip Casting of Mn-Zn Ferrite Powders Prepared by Alcoholic Dehydration Method (알콜탈수법에 의해 제조된 Mn-Zn Ferrite 분체의 주입성형)

  • 이경직;이대희;신효순;이석기;김창현;이병교
    • Journal of the Korean Ceramic Society
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    • v.34 no.4
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    • pp.394-398
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    • 1997
  • Mn-Zn ferrite powders were prepared by alcoholic dehydration, using coprecipitation method. Then the effects of organic dispersant and polymeric binder concentration on stability and casting of slurry were discussed. Citric acid, the organic dispersant and polyvinylacohol(PVA), the non-ionic binder, were selected as additives of slurry. With variation of concentration of water, citric acid and polyvinylalcohol(PVA), optimum forming conditions were determined from viscosity and density. To compare with dry process, density and microstructure of sintered body formed by uniaxial die pressing were observed.

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Effect of Solvent Mixture Ratio on Rheology Property of Slurry and Thickness Control of Ceramic Green Sheets (유기 용매 혼합비에 따른 슬러리의 유동 특성과 세라믹 그린 쉬트의 두께 제어)

  • Kim, Jun-Young;Kim, Seung-Taek;Park, Jong-Chul;Yoo, Myong-Jae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.3
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    • pp.236-241
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    • 2008
  • The effect of organic solvent mixture ratio on the rheology property of slurry and thickness control of ceramic green sheet was investigated. For selecting a suitable dispersant multiple light scattering method was used to evaluate the particle migration velocity and variation of clarification layer thickness. Using the selected dispersant the dispersion property of solution according to solvent mixture ratio was investigated. Binder and plasticizers were added to formulate slurries and their viscosity was evaluated according to solvent mixture ratio. Ceramic green sheets with average thickness of 30, 50 urn were fabricated via tape casting and their thickness tolerances measured. As a result according to solvent mixture ratio the solution and slurry properties varied and for the mixture ratio of ethanol/toluene of 80/20 the ceramic green sheet with the lowest thickness tolerance was obtained.

Experimental Investigation on the Flow Characteristics of ER Fluids II (2nd Report, Viscosity-Temperature Characteristics of Dispersive ER Fluids) (ER 유체의 유동특성에 관한 실험적 연구 II (분산계 ER 유체의 점도-온도 특성))

  • 김도태
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1999.10a
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    • pp.393-398
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    • 1999
  • The temperature dependence of the viscosity was determined for an electrorheological(ER) fluid consisting of 35 weight% zeolite particles in hydraulic oil 46cSt. Thermal activation analysis were performed by changing the ER fluid's temperature from -1$0^{\circ}C$ to 5$0^{\circ}C$ at fixed electric field. According to the analysis, the activation energy for flow was about 79.64kJ/mole at E=0kV/mm. Generally, the hydraulic oil 46cSt will be operated at the temperature of about 4$0^{\circ}C$, the ER fluid's electric field dependence of viscosities were investigated at this temperature. also, the influence of adding the dispersant(Carbopl 940) on electrorheological effect of the ER fluid was discussed.

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Frictional Characteristics of the Lubricants Formulated with Non-Conventional Base Stocks

  • Moon, Woo-Sik;Lee, Jong-Hun
    • Tribology and Lubricants
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    • v.11 no.5
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    • pp.144-149
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    • 1995
  • Use of high-quality basestocks is increasing to produce high-performance lubricants. However, their tribological characteristics have not been understood clearly yet. In this study, a newly developed basestock from a fuel hydrocracker and a poly-alpha-olefin are selected and investigated on the properties of lubricants formulated with them. The Lubricants are prepared by blending the basestocks with typical additives such as a zinc dialkyldithiophosphate, a dispersant, a detergent and a dispersant-inhibitor package. Frictional and wear-preventing properties are investigated using an oscillating-type wear-testing machine. The contact is a ball-on-disk mode and the testing temperature is varied from room temperature to 200$^{\circ}$C. The results show that their frictional property is varied significantly and that the non-conventional oils result in lower friction and lower wear compared with conventional lubricants, especially at the higher temperatures.

Biocompatible Individual Dispersion of Single-walled Carbon Nanotubes

  • Najeeb, C.K.;Kim, Duck-Jong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.529-529
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    • 2012
  • Dispersion of carbon nanotubes in biocompatible media are of particular interest for diverse biomedical and nanomedicine applications. Various biomolecules and biopolymers such as DNA, proteins, poly L-lysine, starch, gelatin, steroid biosurfactants, and chitosan have shown capability for the effective dispersion of carbon nanotubes in water. Chitosan has demonstrated capacity for effective dispersion of single-walled carbon nanotubes (SWCNTs) in acidic medium and it also showed tendency to preferentially disperse smaller diameter nanotubes. Chemical functionalizations of chitosan enable its solubility in neutral pH water by reducing the intra and inter molecular hydrogen bonding. Herein, we present a neutral pH water soluble chitosan derivative, chitosan-hydroxyphenyl acetamide (CHPA), obtained by functionalizing the amino groups of chitosan with 4-hydroxyphenyl acetic acid, as an efficient biocompatible dispersant for debundling and solubilization of SWNTs in neutral aqueous solutions. Various process conditions for individual dispersion of SWCNTs are analyzed based on optical absorption and Raman spectroscopy.

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