• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.229-233
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• 2003

The soundproof barrier used to reduce the traffic and rail noise is usually designed to the point of view of the acoustic performance such as absorption ratio and transmission loss. But, because the surface of soundproof barrier is polluted by the air pollutant or discharge gas of automobiles, so it's surface cleary maintained by the periodic washing with detergent. But in this case the environmental pollution and the working expenses are worried. So, the objective of this study is to develope the soundproof panel with the self-cleaning properties only by raining.

• Clean Technology
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• v.7 no.1
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• pp.13-25
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• 2001

With fast advancement of fine machineries and semiconductor industries in recent decades, the ultra-cleaning of organic chemicals, submicron particles from contaminated unit equipments and products such as silicon wafers becomes one of the most important steps for further advancement of such industries. To date, two kinds of ultra cleaning techniques are used; one is the wet-cleaning and the other is the dry cleaning. In case of wet cleaning, removal of organic contaminants and submicron particles is made by DIW with additives such as $H_2O_2$, $H_2SO_4$, HCl, $NH_4OH$ and HF, etc. While the wet cleaning method is most widely adopted for various occasions, it is inevitable to discharge significant amount of toxic waste waters in environment. Dry cleaning is an alternative method to mitigate environmental pollution of the wet cleaning with maintaining comparable degree of cleaning to the wet cleaning. Although there are various concept of dry cleaning have been devised, the dry cleaning with environmentally-benign solvent such as carbon dioxide proven to show high degree of cleaning from the contaminated porous surface as well as from the bare surface. Thus, special global attention has been placing on this technique since it has important advantages of simple process schemes and no environmentally concern, etc. Thus, this article critically reviews the state-of-the-art of the supercritical fluid drying with emphasis on the thermo-physical characteristics of the supercritical solvent, environmental gains compared to other dry cleaning methods, and the generic aspects of the basic design and processing engineering.

• The Journal of Engineering Geology
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• v.30 no.4
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• pp.557-575
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• 2020

Plasma blasting which is generated by high voltage arc discharge of electricity is applied to soil mass to improve permeability of soil and cleaning efficiency of oil contamination. A new high voltage generator was manufactured and three types of soil including silty sand, silty sand mixed with lime and silty sand mixed with cement were prepared. Small and large soil columns were produced using these types of soil and plasma blasting was performed within soil columns to investigate the variation of soil volume penetrated by fluid and permeability. Soil volume penetrated by fluid increased by 11~71% when plasma blasting was applied in soil. Although plasma blasting with low electricity voltage induced horizontal fracture and fluid penetrated along this weak plane, plasma blasting with high voltage induced spherical penetration of fluid. Plasma blasting increased the permeability of soil. Permeabilty of soils mixed with lime and cement increased by 450~1,052% with plasma blasting. Permeability of soil increased as discharge voltage increased when plasma blasing was applied once. However, several blastings with the same discharge voltage increase or decrease permeability of soil. Oil contaminated soil was prepared by adding diesel into soil artificially and plasma blasting was performed in these oil contaminated soil. Cleaning efficiency increased by average of 393% for soil located nearby the blasting and by average of 239% for soil located far from the blasting. Cleaning efficiency did not show any correlation with discharge voltage. All these results indicated that plasma blasting might be used for in-situ cleaning of oil contaminated soil because plasma blasting increased permeability of soil and cleaning efficiency.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.02a
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• pp.195.2-195.2
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• 2009

• Proceedings of the Korean Nuclear Society Conference
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• 2005.10a
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• pp.175-176
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• 2005

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.12
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• pp.791-797
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• 1999

Recently the ozone generation system is well used for cleaning the contaminated water by using the strong oxidization effects of ozone. In this paper the concentration, yield and generation quantity of the ozone by the Surface-Silent Discharge According to the Length of Coaxial Electrode is described. The electrodes composed of 3 electrodes-2 gaps are coaxial type and the ozone generation tube were designed and fabricated from the point of view of the energy efficiency, stability and easy control. To investigate the ozone generation dependency on electrode length, a few discharge tubes with different lengths were fabricated. The experimental equipments were provided with cooling system and dehumidifier for the many testing conditions. The main results show that the concentration, yield and generation quantity of ozone are improved by decreasing gas temperatures and increasing electrode lengths.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1238-1243
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• 2009

As Social Overhead Capital(SOC) has been expanded, the highway road construction has been accelerated and city road system has been more complicated. So, long road tunnels have been increased and traffic flow rate also has been raised. Accordingly, the exhausting gas of vehicle cars seriously deteriorates the tunnel inside air quality and driving view. In order to improve tunnel inside air quality, it is needed to introduce a compulsory ventilation system as well as natural ventilation mechanism. The former, that is, a special compulsory ventilation facility is very useful and helpful to prevent a tunnel of being contaminated by traffic in most case. In the case of obtaining clearer and longer driving view, the ventilation systems have to be considered in order to remove floating contaminants or exhaust gas from engines. In this paper, discharge electrode design technology will be discussed.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.3
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• pp.209-214
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• 1999

This paper deals with the effects of activation process of MgO thin film on the dielectric characteristics of surface discharge type AC PDP. The discharge voltage decreased with increase in the MgO activation time and temperature until $400^{\circ}C$ under the condition of clean high vacuum. However, for the sample activated above $430^{\circ}C$ the discharge voltage increased. These results may be explained by the MgO morphology change and surface cleaning in the process of activation.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.12
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• pp.596-600
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• 2004

In this study, the surface properties of PET film were analyzed after plasma surface treatment. After plasma treatment of surface roughness and XPS were evaluated to analyze the chemical property, while the surface potential decay and surface resistance rate was measured to analyze the electric관 characteristic. When plasma discharge treatment was conducted for less than 10 minutes, the electrical insulating property was improved by evaporation of low molecular weight materials and cleaning of surface. However, when the treatment was conducted for more than 10 minutes, the insulating property was decreased due to excessive discharge energy. Analyses of chemical characteristics showed that 10-minute treatment resulted in increase of C-O and O=C-O bonds. However, when treated for more than 10 minutes. they were relatively decreased.