• Journal of the Korean Vacuum Society
• /
• v.16 no.5
• /
• pp.383-387
• /
• 2007

In this paper the design of the discharge cleaning system for KSTAR vacuum vessel is described. We first discuss about the parameters which are related the efficiency of discharge cleaning. The RG(RF-assisted Glow) discharge which has the ignition and sustain pressure lower than those in the case of DC discharge, thus has the higher efficiency of discharge cleaning. So we adopt the RG discharge, in practical design, for KSTAR discharge cleaning system. For uniformity of the cleaning effect, we plan to install two discharge cleaning systems in A- and I-port of the KSTAR vacuum vessel. The designed system will be adapted for the study of the fuel recycling and of the boronization as well as the discharge cleaning of the KSTAR vacuum vessel.

• Journal of the Korean Vacuum Society
• /
• v.10 no.3
• /
• pp.298-302
• /
• 2001

Cleaning effect of RF/DC discharge to clean the surface of vacuum chamber was studied for various discharge conditions. Glow discharge cleaning without baking reduced the outgassing rate to 1/2, which was similar to that after the only baking treatment alone. Glow discharge cleaning treatment with baking improved the cleaning efficiency and then the outgassing rate was remarkably reduced to 1/20. It was found that the ion energy and the ion density were important factors in cleaning the surface. RF discharge cleaning was more effective than BC discharge cleaning.

• Journal of the Institute of Electronics and Information Engineers
• /
• v.51 no.8
• /
• pp.195-201
• /
• 2014

In this paper, we developed a LGP(Light Guide Panel) dry cleaning system for particle cleaning using corona discharge and dry adhesive roll. Therefore, we design a cleaning mechanism that can be applied dry adhesive dust removal roll and ESD(electrostatic discharge) by using corona discharge. Also, we design and implementation of equipment, which can loading, unloading and transfer LGP automatically. The developed equipment is dust and particle cleaning experimental results to demonstrate its stability.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.10
• /
• pp.1217-1223
• /
• 2011

In this paper, the dielectric barrier discharge plasma generator has been studied for producing of the high concentration ozone gas. Proposed plasma generator has the structure of extremely narrow discharge air gap(0.15mm) in order to realize the high electric field discharge. We investigate the performance of the dielectric barrier discharge plasma generator experimentally and the results show that the generator has very high ozone concentration characteristics of 13.7[wt%/$O_2$] at the oxygen flow rate of 1[${\ell}$/min] of each discharge cell. So, we confirmed that the proposed plasma generator is suitable for the high concentration ozone production facility of the eco-friendly ozone functional water cleaning system in the electronic components cleaning process.

• Proceedings of the Korean Vacuum Society Conference
• /
• 1999.07a
• /
• pp.40-40
• /
• 1999

가속기나 토카막과 같은 거대한 진공 장치의 용기 내벽을 청정화 하기 위해서는 용기 전체의 열처리(굽기, Baking)와 글로우 방전(Glow discharge) 법을 병행하여 사용한다. Baking은 일반 기체(N2, O2, 그리고 CO2)와 물(H2O)의 탈착에 효과적이고, Glow discharge cleaning은 탄소(Carbon-based)와 산소(Oxygen-based) 화합물의 탈착에 효과적이다. 특히 Glow discharge cleaning의 경우에는 전극의 모양, 진공 용기의 재질과 모양, 전극간의 거리, 사용되는 반응 기체의 압력 등에 따라 그 효과에 큰 차이가 있으므로 다각적인 연구가 필요하다. 본 연구에서는 그림 1과 같이 시험용 스테인레스(AISI 304와 AISI 316LN) 진공 용기를 설치하고, 시험 용기의 한쪽은 배기 용기와 oriffice로, 다른 편은 불순물의 정성.정량 분석을 위해 RGA(Residual gas analyser) 용기와 oriffice로 연결하였다. 전체 시스템 중에서 배기 부분과 분석 부분은 15$0^{\circ}C$에서 24시간 가열하여 전체의 기저 진공도를 1$\times$10-8Torr로 하였다. 기저 진공도의 용기에 고순도의 반응기체 (He, Ar, Ar+He, Ar+H2, Ar+N2 등)를 주입한후, DC 전압(0.8~1.5kV)을 변화하며 글로우 방전의 최적조건을 찾았다. 방전 동안 시험용 용기에서 방출되는 반응 기체 이외의 기체를 RGA로 측정하였고 외부에 Thermocouple을 여러곳에 장착하여 온도 변화를 측정하였다. 이상의 결과로부터 진공 용기 표면적으로부터의 불순물 탈착(desorption)과 불순물 분석, 플라즈마와 내벽의 상호작용등에 대한 결론을 얻을 수 있었다. 또한 Baking과 Glow discharge cleaning을 동시에 수행하여 Baking 온도의 낮춤에 따른 영향 평가도 수행하였다.

• The Transactions of the Korean Institute of Electrical Engineers C
• /
• v.48 no.10
• /
• pp.710-715
• /
• 1999

The purpose of this work is to develop a high-efficiency air cleaning system for air pollutants such as particulate and gaseous state in indoor environments. In order to enhance a removal efficiency of gaseous state pollutants, we suggested that pulsed discharge plasma be combined with $TiO_2$ photocatalyst (photocatalytic plasma air cleaning unit). We investigated experimentally the basic characteristics of photocatalytic plasma air cleaning unit and measured air pollutants removal efficiency. The wavelength of light radiated from pulsed discharge plasma under the atmospheric condition was 310~380nm. Its energy is enough to excite the $TiO_2$ photocatalyst and it makes a photochemical reaction in the surface of $TiO_2$ photocatalyst. The removal quantity of trimethylamine$((CH_3)_3N)\; was\; 130mg/m^34 which is twice quantity of pulsed discharge plasma without $TiO_2$ phtocatalyst unit. From the result of gas analysis using FT-IR, nitric oxide was not detected and trimethylamine was decomposed to $H_2O\; and \;CO_2$. And trimethylamine removal efficiency was 95%. These experimental results indicate that photocatalytic plasma air cleaning unit is a potential method in removing the pollutants.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.25 no.6
• /
• pp.474-480
• /
• 2012

Diagnostic tests were performed on two high voltage(HV) motor stator windings. These tests included the measurement of insulation resistance, polarization index, AC current, dissipation factor($tan{\delta}$) and partial discharge(PD) magnitude. Surface contamination of HV motor stator windings has an effect on the AC current and $tan{\delta}$. When the stator windings were finished cleaning and insulation reinforcement, the increase rate of AC current(${\Delta}I$) and dissipation factor(${\Delta}tan{\delta}$) were very small compared to those before cleaning. However, the PD magnitude remained the same. These tests show that cleaning and insulation reinforcement of HV motor stator windings can reduce the insulation failure.

• Journal of The Korean Society of Agricultural Engineers
• /
• v.56 no.5
• /
• pp.67-75
• /
• 2014

In this study, the large-scale hydraulic model test was performed to investigate the hydraulic characteristics for development of the non-power soil cleaning and keeping system at the dike gate. The outlet height, outflow number, outflow discharge, and outflow cycle were compared and analyzed. The non-power soil cleaning and keeping system was most effective at 11.2 mm in the outlet height. And then the mean outflow cycle was 1.09 sec, and the mean outflow discharge was $0.00164m^3/s$. The total outflow number increased gradually as the water level of a water tank increased, and the outlet height decreased. As a level of water tank decreased, the mean outflow cycle was lengthened, and the unit outflow discharge increased. This result showed this system was most effective. To remove the silty clay deposited in facilities, the methods of excavation, dredging, high pressure washing, etc have been applied to the tidal facilities such as land reclamation, a small size fishing port, and a harbor for maintenance. However, this is extremely cost-ineffective, whereas the non-power soil cleaning and keeping system will bring about an enormously positive economic effect. In addition, when the non-power soil cleaning and keeping system is applied to the dike gate of land reclamation, a thorough examination of the local tidal data and the careful system planning are required to prevent the disaster damage caused by flooding.

• Applied Chemistry for Engineering
• /
• v.33 no.2
• /
• pp.229-233
• /
• 2022

In this study, a gas-liquid hybrid atmospheric pressure plasma reactor of the dielectric barrier discharge method was fabricated and characterized. The solubility of copper oxide in the organic acid solution was increased when argon having a larger atomic weight than helium was used during plasma discharge. There was no significant effect of mixing organic acid solutions under plasma discharge treatment on the variation of copper oxide's solubility. As the applied voltage for plasma discharge and the concentration of the organic acid solution increased, the dissolution and removal power of the copper oxide layer increased. Solubility of copper oxide was more affected by the concentration in organic acid solution rather than the variation of plasma applied voltage. The usefulness of hybrid plasma reactor for the surface cleaning process was confirmed.

• Korean Chemical Engineering Research
• /
• v.60 no.3
• /
• pp.452-458
• /
• 2022

Three types of gas-liquid hybrid horizontal, vertical and needle-to-cylinder plasma reactors were fabricated. Through these reactors, a high-efficiency, eco-friendly cleaning concept that generates reactive active species generated in atmospheric plasma discharge and gas-liquid activation reaction of cleaning components through the potential difference within the electrode was presented. As a result of comparing the efficiency for cleaning performance, the needle-to-cylinder type reactor had the best characteristics. Through this study, it was confirmed that the gas-liquid hybrid atmospheric pressure plasma reactor has the potential to be applied to ultra-precision cleaning processes such as semiconductor processes.