• 제목/요약/키워드: direct bonding

검색결과 366건 처리시간 0.032초

Integration of an Optical Waveguide Isolator by Wafer Direct Bonding

  • Roh J. W.;Yang J. S.;Ok S. H.;Choi U. K.;Lee S.;Lee W. Y.
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2004년도 동계학술연구발표회 논문개요집
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    • pp.175-176
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    • 2004
  • An integrated waveguide optical isolator by wafer direct bonding has been studied. The isolation ratio was found to be 2.9dB in our device. We found that wafer direct bonding between the InP and GGG is effective for the integration of a waveguide optical isolator.

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Diastema closure using direct bonding restorations combined with orthodontic treatment: a case report

  • Hwang, Soon-Kong;Ha, Jung-Hong;Jin, Myoung-Uk;Kim, Sung-Kyo;Kim, Young-Kyung
    • Restorative Dentistry and Endodontics
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    • 제37권3호
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    • pp.165-169
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    • 2012
  • Closure of interdental spaces using proximal build-ups with resin composite is considered to be practical and conservative. However, a comprehensive approach combining two or more treatment modalities may be needed to improve esthetics. This case report describes the management of a patient with multiple diastemas, a peg-shaped lateral incisor and midline deviation in the maxillary anterior area. Direct resin bonding along with orthodontic movement of teeth allows space closure and midline correction, consequently, creating a better esthetic result.

Characterization of SOI Wafers Fabricated by a Modified Direct Bonding Technology

  • Kim, E.D.;Kim, S.C.;Park, J.M.;Kim, N.K.;Kostina, L.S.
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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    • pp.47-51
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    • 2000
  • A modified direct bonding technique employing a wet chemical deposition of $SiO_2$ film on a wafer surface to be bonded is proposed for the fabrication of Si-$SiO_2$-Si structures. Structural and electrical quality of the bonded wafers is studied. Satisfied insulating properties of interfacial $SiO_2$ layers are demonstrated. Elastic strain caused by surface morphology is investigated. The diminution of strain in the grooved structures is semi-quantitatively interpreted by a model considering the virtual defects distributed over the interfacial region.

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Direct Bonding System에 의한 매복치의 교정치험례 (An Orthodontic Case of Impacted Tooth Treated by Direct Bonding System)

  • 양원식
    • 대한치과의사협회지
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    • 제11권3호
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    • pp.171-175
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    • 1973
  • A 9-year-old girl, in good health, presented a horizontal impaction of the upper left central incisor. History revealed that the patient had been involved in a trauma of the maxillary anterior portion during her childhood. This impacted tooth crown, which was exposed surgically, was bonded by plastic attachments of direct bonding system, and was carefully tried to induce on the dental arch. On the process of the orthodontic treatment the tooth was completely induced and in normal alignment on the arch. The treatment result was very satisfactory; color, vitality, and mobility were normal, periodontal support was good and the cosmetic result was excellent.

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SiO$_2$ 박막을 이용한 SOI 직접접합공정 및 특성 (Processing and Characterization of a Direct Bonded SOI using SiO$_2$ Thin Film)

  • 신동운;최두진;김긍호
    • 한국세라믹학회지
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    • 제35권6호
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    • pp.535-542
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    • 1998
  • SOI(silicon oninsulator) was fabricated through the direct bonding of a hydrophilized single crystal Si wafer and a thermally oxidized SiO2 thin film to investigate the stacking faults in silicon at the Si/SiO2 in-terface. At first the oxidation kinetics of SiO2 thin film and the stacking fault distribution at the oxidation interface were investigated. The stacking faults could be divided into two groups by their size and the small-er ones were incorporated into the larger ones as the oxidation time and temperature increased. The den-sity of the smaller ones based critically lower eventually. The SOI wafers directly bonded at the room temperature were annealed at 120$0^{\circ}C$ for 1 hour. The stacking faults at the bonding and oxidation interface were examined and there were anomalies in the distributions of the stacking faults of the bonded region to arrange in ordered ring-like fashion.

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건물의 직격뢰시 본딩 방식에 따른 서지 진압 분포 (Surge Voltage Distribution at the Different Bonding Practice During a Direct Lightning Stroke to Building)

  • 이재복;장석훈;명성호;조연규
    • 전기학회논문지P
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    • 제57권4호
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    • pp.444-450
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    • 2008
  • There are several ways to bond to building grounding systems for reducing GPR(ground potential rise) and EMI resulting from power system faults or lightning stroke to building. In order to verify effective bonding practice, the GPR and voltage of equipment due to the direct stroke to building are calculated with ATP-EMTP model for transformer, transmission line and MOV(Metal oxide varistor). The simulated model shows a satisfactory accuracy compared with experimental result for the $8/20{\mu}s$ simulated current pulse. It is observed that separate grounding can cause dangerous voltage to the building equipment and the performance of surge protective device can improve when it is installed to the protected equipment in distance as short as possible.

횡 초음파를 이용한 차세대 플렉시블 디스플레이 모듈 저온 접합 공정 연구 (Study of a Low-Temperature Bonding Process for a Next-Generation Flexible Display Module Using Transverse Ultrasound)

  • 지명구;송춘삼;김주현;김종형
    • 대한기계학회논문집A
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    • 제36권4호
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    • pp.395-403
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    • 2012
  • 오늘날 접합시 열에 의한 재료 손상과 접착제(ACA, NCA) 이용으로 부품간의 정렬이 문제가 되고있다. 따라서, 본 논문은 FPCB 와 HPCB 금속(Au) PAD를 직접 접합하였다. 이때 박막인 재료에 손상을 입히는 열, 부품간의 정렬에 문제가 되는 접착제(ACA, NCA)를 사용하지 않고 상온에서 접합을 하였다. 접합시 초음파 혼을 이용하여 접합을 하였으며, 초음파혼은 40kHz이다. 공정 조건은 접합압력 0.60MPa, 접합시간 0.5, 1.0, 1.5, 2.0sec이다. 또한, 산업에서 요구하는 접합강도는 필강도 테스트 결과값으로 0.60Kgf 이상이며, 본 실험에서는 접합강도가 0.80MPa 이상이 나왔다. 이로서, 열에 의한 재료 손상과, 접 착제(ACA, NCA)에 의한 정렬 문제를 해결하였다. 그리고 산업산업에서 바로 적용하고 생산할 수 있는 FPCB, HPCB 시료 제작을 하였다.

Die to Wafer Hybrid Bonding을 위한 Flexure 적용 Bond head 개발 (Development of Flexure Applied Bond head for Die to Wafer Hybrid Bonding)

  • 장우제;정용진;이학준
    • 반도체디스플레이기술학회지
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    • 제20권4호
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    • pp.171-176
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    • 2021
  • Die-to-wafer (D2W) hybrid bonding in the multilayer semiconductor manufacturing process is one of wafer direct bonding, and various studies are being conducted around the world. A noteworthy point in the current die-to-wafer process is that a lot of voids occur on the bonding surface of the die during bonding. In this study, as a suggested method for removing voids generated during the D2W hybrid bonding process, a flexible mechanism for implementing convex for die bonding to be applied to the bond head is proposed. In addition, modeling of flexible mechanisms, analysis/design/control/evaluation of static/dynamics properties are performed. The proposed system was controlled by capacitive sensor (lion precision, CPL 290), piezo actuator (P-888,91), and dSpace. This flexure mechanism implemented a working range of 200 ㎛, resolution(3σ) of 7.276nm, Inposition(3σ) of 3.503nm, settling time(2%) of 500.133ms by applying a reverse bridge type mechanism and leaf spring guide, and at the same time realized a maximum step difference of 6 ㎛ between die edge and center. The results of this study are applied to the D2W hybrid bonding process and are expected to bring about an effect of increasing semiconductor yield through void removal. In addition, it is expected that it can be utilized as a system that meets the convex variable amount required for each device by adjusting the elongation amount of the piezo actuator coupled to the flexible mechanism in a precise unit.

결정의존성 식각/기판접합을 이용한 MEMS용 구조물의 제작 (Si Micromachining for MEMS-lR Sensor Application)

  • 박흥우;주병권;박윤권;박정호;김철주;염상섭;서상의;오명환
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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    • pp.411-414
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    • 1998
  • In this paper, the silicon-nitride membrane structure for IR sensor was fabricated through the etching and the direct bonding. The PT layer as a IR detection layer was deposited on the membrane and its characteristics were measured. The attack of PT layer during the etching of silicon wafer as well as the thermal isolation of the IR detection layer can be solved through the method of bonding/etching of silicon wafer. Because the PT layer of c-axial orientation rained thermal polarization without polling, the more integration capability can be achieved. The surface roughness of the membrane was measured by AFM, the micro voids and the non-contacted area were inspected by IR detector, and the bonding interface was observed by SEM. The polarization characteristics and the dielectric characteristics of the PT layer were measured, too.

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구리-타이타늄 복합선재의 번들압출 성형특성 (Forming Characteristics for the Bundle Extrusion of Cu-Ti Bimetal Wires)

  • 이용신;김중식;윤상헌;이호용
    • 소성∙가공
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    • 제18권4호
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    • pp.342-346
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    • 2009
  • Forming characteristics for the bundle extrusion of Cu-Ti bimetal wires are investigated, which can identify the process conditions for weak mechanical bonding at the contact surface during the direct extrusion of a Cu-Ti bimetal wire bundle. Bonding mechanism between Cu and Ti is assumed as a cold pressure welding. Then, the plastic deformation at the contact zone causes mechanical bonding and a new bonding criterion for pressure welding is developed as a function of the principal stretch ratio and normal pressure at the contact surface by analyzing micro local extrusion at the contact zone. The averaged deformation behavior of Cu-Ti bimetal wire is adopted as a constitutive behavior at a material point in the finite element analysis of Cu-Ti wire bundle extrusion. Various process conditions for bundle extrusions are examined. The deformation histories at the three points, near the surface, in the middle and near the center, in the cross section of a bundle are traced and the proposed new bonding criterion is applied to predict whether the mechanical bonding at the Cu-Ti contact surface happens. Finally, a process map for the direct extrusion of Cu-Ti bimetal wire bundle is proposed.