• Title/Summary/Keyword: dilute gas

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Removal of Photoresist Mask after the Cl2/HBr/CF4 Reactive Ion Silicon Etching (Cl2/HBr/CF4 반응성 이온 실리콘 식각 후 감광막 마스크 제거)

  • Ha, Tae-Kyung;Woo, Jong-Chang;Kim, Gwan-Ha;Kim, Chang-Il
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.5
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    • pp.353-357
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    • 2010
  • Recently, silicon etching have received much attention for display industry, nano imprint technology, silicon photonics, and MEMS application. After the etching process, removing of etch mask and residue of sidewall is very important. The investigation of the etched mask removing was carried out by using the ashing, HF dipping and acid cleaning process. Experiment shows that oxygen component of reactive gas and photoresist react with silicon and converting them into the mask fence. It is very difficult to remove by using ashing or acid cleaning process because mask fence consisted of Si and O compounds. However, dilute HF dipping is very effective process for SiOx layer removing. Finally, we found optimized condition for etched mask removing.

The Effect of Emission Control Using Electrolytic Seawater Scrubber

  • An, Suk-Heon
    • Journal of Advanced Marine Engineering and Technology
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    • v.33 no.3
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    • pp.373-377
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    • 2009
  • It is well known that SOx and NOx concentration has a considerable influence on the $N_2O$ emission of the greenhouse gas properties. The quantity of SOx generated during combustion, on fuel specific basis, is directly related to the sulfur content of the fuel oil. However, restricting the fuel oil sulfur content is only a partial response to limiting the overall quantity of SOx emissions, as there remains no over control on the fuel oil consumption other than the commercial pressure which have always directed the attention. This study was carried out as a new basic experiment method of emission control, manly targeted to the vessel. In the experiment, where the scrubbing was achieved through spray tower with high alkaline water made from the electrolysis of seawater, the combined action was to neutralize the exhaust gases (SOx, PM, CO etc.), dilute it, and wash it out. The results showed that SOx reduction of around 95 percent or over could be achieved when using in the high alkaline water, and also leaded to a reduction in the stability of the each pollutant components including the PM (Particulate Matter). The results suggest that the seawater electrolysis method has a very effective reduction of emissions without heavy cost, or catalysts particularly on board.

Development of Postharvest Technologies to Preserve High Quality of Greenhouse Horticultural Commodities and their Processed Products -Development of Natural Antimicrobial Agents for preserving Greenhouse Fresh Produce(II) (남부지역 시설원예산물의 저장성 향상 및 가공품 개발에 관한 연구-시설원예산물의 선도유지를 위한 항균소재의 개발을 중심으로(II)-)

  • 조성환;정순경;김영록
    • Food Science and Preservation
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    • v.7 no.1
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    • pp.1-7
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    • 2000
  • To develop natural antimicrobial agents for keeping qualities of postharvested greenhouse produce the antimiocrobial actions of Polygonum cuspidatum Sieb. et Zucc. extract , which showed remarkable antimicrobial effects against microorganism causing the postharvest decay of greenhouse produce, were investigate. In the inhibitory experiment of enzymes related to energy production metabolism hexokinase activities decreased to 73% and 68% by treating with Polygonum cuspidatum Sieb. et.Zucc. extract and Eugenia caryophyllata Thumnberg extract in comparison with control, respectively. Direct visualization of microbial cells by using both transmission electron microscope and scanning electron microscope showed that microbial cell membrane was destroyed by treating with the dilute extract solution. this change of celluloar membrane permeability could be identified in the experiment that 0-nitrophenyl-${\beta}$-D-galactopyrano-side(ONPG), the artificial substrate of ${\beta}$-galactosidase, was hydrolyzed in the presence of the extract, indicating that the membrane was perturbed. The separation and identification of the most antimicrobialo substances isolated from Polygonum cuspidatum Sieb et. Zucc. extract and Eugenia caryophyllata Thunberg extract were carried out by using gas chromatography and mass spectrometry 9GC/MSD), which were identified as eugenol. As a result, the functionality of Polygonum cuspidatum Sieb. et Zucc. extract and Eugenia caryophyllata Thunberg extract as antimicrobial agents for keeping qualities of postharvested greenhouse produce may be recommended.

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Unsteady Flow Effects on Extinguishing Concentrations in Jet Diffusion Flames (제트확산화염 소화농도의 비정상 유동효과)

  • Ji, Jung-Hoon;Oh, Chang-Bo;Lee, Eui-Ju
    • Journal of the Korean Society of Safety
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    • v.24 no.6
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    • pp.27-31
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    • 2009
  • An experimental study on the unsteady effect of the extinction limit was performed in ethene jet diffusion flames. To impose the unsteadiness on jet flames, the amplitude and frequency of a co-flow velocity was varied, and the two inert gases, $N_2$ and $CO_2$, were used to dilute the oxidizer for extinguishing concentration. The experimental results shows that large amplitude of velocity induces a low extinguishing concentration, which implies that flow variation affects the blow out mechanism. Also, the flow oscillation effects under high frequency attenuates the flame extinction. These results means that flow unsteadiness extends the extinction limit and finally minimum extinction concentration by inert gases. When the Stoke's 2nd Problem is introduced to explain the flow unsteadiness on extinction concentration, the solution predicts the effect of amplitude and frequency of velocity well, and hence it is concluded the effect of low frequency velocity excitation was attributed only to flow effect.

Application of Lumley's Drag Reduction Model to Two-Phase Gas-Particl Flow in a Pipe(II) - Mechanism of Heat Transfer- (고체 분말이 부상하는 2상 난류 수직관 유동에 대한 Lumley의 저항감소 모델의 적용 (II) - 열전달 기구 -)

  • 한기수;정명균;성형진
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.14 no.1
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    • pp.214-224
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    • 1990
  • A "two-fluid" model using thermal eddy diffusivity concept and Lumley's drag reduction theory, is proposed to analyze heat transfer of the turbulent dilute gas-particle flow in a vertical pipe with constant wall heat flux. The thermal eddy diffusivity is derived to be a function of the ratio of the heat capacity-density products .rho. over bar $C_{p}$ of the gaseous phase and the particulate phase and also of the ratio of thermal relaxation time scale to that of turbulence. The Lumley's theory dictates the variation of the viscous sublayer thickness depending on the particle loading ratio Z and the relative particle size $d_{p}$/D. At low loading ratio, the size of viscous sublayer thickness is important for suspension heat transfer, while at higher loading, the effect of the ratio .rho. $_{p}$ over bar $C_{p}$$_{p}$/ .rho. $_{f}$ over bar $C_{p}$$_{f}$ is dominant. The major cause of decrease in the suspension Nusselt number at lower loading ratio is found to be due to the increase of the viscous sublayer thickness caused by the suppression of turbulence near the wall by the presence of solid particles. Predicted Nusselt numbers using the present model are in satisfactory agreements with available experimental data both in pipe entrance and the fully developed regions.

Microstructure and Mechanical Properties of Gas Metal Arc Brazed Joint of DP Steel with Cu-Si Filler Metal (Cu-Si 삽입금속을 이용한 DP강의 MIG 아크 브레이징 접합부의 미세조직과 기계적 성질)

  • Cho, Wook-Je;Yoon, Tae-Jin;Kwak, Sung-Yun;Lee, Jae-Hyeong;Kang, Chung-Yun
    • Journal of Welding and Joining
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    • v.34 no.5
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    • pp.70-76
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    • 2016
  • In this study, Microstructure and tensile properties in arc brazed joints of 1000MPa grade DP steel using Cu-Si insert metal were investigated. The fusion zone was composed of Cu phase which solidified a little Fe and Si. The former phase formed due to dilute the edge of base material by arc, although Fe was not solid solution in Cu at the room temperature. Cu3Si particles formed by crystallization at $1100^{\circ}C$ during faster cooling. After the tensile shear test, there are no differences between the brazed joint efficiencies. The maximum joint efficient was about 37% compared to strength of base metal. It is better than that of arc brazed joint of DP steel using Cu-Sn filler metal. Fracture position of all brazing conditions was in the fusion zone. Crack initiation occurred at three junction point which was a stress singularity point of upper sheet, lower sheet and the fusion zone. And then crack propagated across the fusion zone. The reason why the fracture occurred at fusion zone was that the hardness of fusion zone was lower than that of base material and heat affected zone. The correlation among maximum load and hardness of fusion zone and EST at fractured position was $R^2=0.9338$. Therefore, this means that hardness and EST can have great impact on maximum load.

The Study on Natural Ventilation in Working Places with the Noxious Gas and Dust (유해가스 및 분진이 발생하는 작업장내의 자연환기에 대한 연구)

  • Chu, Byung-Gil;Kim, Chul;Choi, Jong-ook;Yoo, Soo-Yul
    • Journal of the Korean Society of Safety
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    • v.15 no.1
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    • pp.72-79
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    • 2000
  • In recent, occupational diseases in harmful working places become a social issue. It is the well-known fact that a respiration in polluted working places exert a serious effect on health of workers. Accordingly, the cutting off contaminants air originally is the best way to improve working environments. In these cases, ventilation systems should be essentially installed to dilute or exhaust the contaminated indoor air. In this study, we investigated the characteristics of ventilation system of the noxious gas in working indoor places with natural ventilation by using COMET. The numerical simulations were carried out the natural ventilation with two phase(air, dust). For turbulent flow, Reynolds stresses were closed by the standard $\kappa$-$\varepsilon$ model. The results are as follows ; 1) In the natural exhaust in the working place, the flows of the central region have a more rapid velocity vector than the right and left one. 2) Numerical results show that the distribution of contaminants concentration have greater influence on convection than the case of diffusion by government of velocity vectors. 3) To observe the velocity variation with distance, three location of distance are considered. As results, it shows that the velocity are 0.075(m/s) at y=5(m), 10(m) and mean concentration are raised 10.6% at y=5(m), 10(m). 4) We have presented the useful data for the adequate counterplan in the harmful working places by carrying out the various investigation of the natural ventilation.

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The Pressure Drop and Heat Transfer Characteristics of a Direct Contact 4-Stage Fluidized Bed Heat Exchanger (직접 접촉식 4단 유동층 열교환기의 압력손실 및 열전달 특성)

  • 임동렬;박상일;전광민
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.16 no.2
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    • pp.325-335
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    • 1992
  • In this work, direct contact 4-stage fluidized bed heat exchanger is experimentally studied to develop a new type of heat exchanger which recovers the energy contained in the high temperature waste gas exhausted from the industrial furnaces. A sand is used as a heat transfer medium in this experiment. To determine the optimum operating condition, 11 different perforated plates which have a different free area ratio with different hole diameter are used in the experiment. From the room temperature experiment, the pressure drop which is caused by fluidized bed formation is observed. The high temperature experiment is carried out to seek the optimum operating condition of high heat efficiency at low heat exchanger operation cost. The results of experiment are as following. The pressure drop in the high temperature condition can be predicted from the results of the room temperature experiment. And Nusselt number becomes smaller due to the increased interference between sand particles as Reynolds number increases when the dilute phase fluidized beds are formed in nigh temperature condition. But heat transfer amount through the total sand surface area become larger due to the large resident amount of sand. Considering the heat transfer amount and the heat exchanger operation cost, perforated plates which have either a 30% or 35% of free area ratio with 15mm of hole diameter are best fitted for our goal of this work. The values of .phi. which is a dimensionless number representing the absorption heat amount per unit sand rate are in the range from 0.4 to 0.5, when Reynolds number of waste gas ranges from 25-30 with these perforated plates.

Effect of pH, Saturated Oxygen, and Back-flushing Media in Hybrid Water Treatment of Tubular Ceramic MF and Photocatalyst-loaded PES Beads (관형 세라믹 정밀여과와 광촉매 첨가 PES 구의 혼성수처리에서 pH 및 포화산소, 역세척 매체의 영향)

  • Hong, Sung Taek;Park, Jin Yong
    • Membrane Journal
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    • v.24 no.2
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    • pp.123-135
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    • 2014
  • The effects of pH, saturated oxygen, and back-flushing media were investigated in hybrid process of tubular ceramic microfiltration and $TiO_2$ photocatalyst-loaded PES (polyethersulfone) beads for advanced drinking water treatment, and compared results of water, nitrogen, or oxygen back-flushing in the viewpoints of membrane fouling resistance ($R_f$), permeate flux (J) and total treated water ($V_T$). $R_f$ decreased, and J and $V_T$ increased as decreasing pH. Turbidity treatment efficiencies were similar at water or nitrogen back-flushing independent of pH, but DOM (dissolved organic matter) treatment efficiency did not have a trend at water back-flushing. $R_f$ at NBF (no back-flushing) with SO (saturated oxygen) was the lower than that at NBF without SO. Also, the DOM treatment efficiency at NBF with SO was the lower than that at NBF without SO. It happened because OH radicals produced by reaction of SO and photocatalyst could dilute with water inside the module. The DOM treatment efficiency of gas back-flushing showed the larger than that of water back-flushing at back-flushig period 10 min. It proved that the adsorption or photo-oxidation of PES beads could be activated by the more effective bead-cleaning of gas back-flushing than water back-flushing.

Development of Real-time and Simultaneous Quantification of Volatile Organic Compounds in Ambient with SIFT-MS (Selected Ion Flow Tube-Mass Spectrometry) (선택적다중이온질량분석기를 이용한 대기 중 휘발성유기화합물 실시간 동시분석법 개발 및 적용)

  • Son, Hyun Dong;An, Joon Geon;Ha, Sung Yong;Kim, Gi Beum;Yim, Un Hyuk
    • Journal of Korean Society for Atmospheric Environment
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    • v.34 no.3
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    • pp.393-405
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    • 2018
  • Volatile organic compounds (VOCs) are representative air pollutants due to their detrimental effects on human health and their role in formation of secondary organic aerosols. Assessments and monitoring programs of VOCs using periodic grab sampling like Tedlar bags, canisters, and sorbent traps provide limited information, often with delay times of days or weeks. Selected ion flow tube mass spectrometry (SIFT-MS) is an emerging analytical technique for the real-time quantification of VOCs in air. It relies on chemical ionization of the VOCs molecules in air introduced into helium carrier gas using $H_3O^+$, $NO^+$, and $O_2{^+}$ precursor ions. Real-time monitoring method of 60 VOCs in the ambient air was developed using TO-15 standard gas mixture. Calibration curves, method detection limit, and quantitation reproducibility of the target compounds were tested. Dynamic dilution system was used to dilute standard gas from 0.174 ppbv to 100 ppbv, where calibration curves showed good linearity with $r^2$> 0.95 in all target analytes. Limit of detection (LOD) all compounds were sub ppbv, and some halogenated compounds showed pptv levels. Seven consecutive analyses of target compounds showed good repeatability with relative standard deviation of less than 10%. One day monitoring of VOCs in ambient air was conducted in Geoje. Average concentration of target VOCs in Geoje were relatively lower than other regions, among which formaldehyde showed the highest concentration ($15.4{\pm}5.78ppbv$). SIFT-MS provided good temporal resolution data (1 data per 3.2 minute), which can be used for identifying ephemeral short-term event. It is expected that SIFT-MS will be a versatile monitoring platform for VOCs in ambient air.