• 한국산업융합학회 논문집
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• 제6권4호
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• pp.269-275
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• 2003

A non-thermal plasma process combined with $Cr_2O_3/TiO_2$ catalyst was applied to the decomposition of trichloroethylene (TCE). A dielectric barrier discharge reactor operated with AC high voltage was used as the non-thermal plasma reactor. The effects of reaction temperature and input power on the decomposition of TCE and the formation of byproducts including HCl, $Cl_2$, CO, NO, $NO_2$ and $O_3$ were examined. At an identical input power, the increase in the reaction temperature from 373 K to 473 K decreased the decomposition of TCE in the plasma reactor. The presence of the catalyst downstream the plasma reactor not only enhanced the decomposition of TCE but also affected the distribution of byproducts, significantly. However, synergistic effect as a result of the combination of non-thermal plasma with catalyst was not observed, i.e., the TCE decomposition efficiency in this plasma-catalyst combination system was almost similar to the sum of those obtained with each process.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1352-1353
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• 2008

In this study, aluminium - doped zinc oxide (ZnO:Al) transparent conducting film was deposited on PET(polyethylen terephthalate) substrate by r.f. magnetron sputtering method. PET substrate was surface-treated in an atmospheric pressure DBD(dielectric barrier discharge) plasma to increase deposition rate and to improve electrical propesties. Morphological changes by DBD plasma were obsered using contact angle measurement. The contact angle of water on PET was reduced from 62$^{\circ}$ to 42$^{\circ}$ by DBD plasma surface treatment. The plasma treatment also increased deposition rate and electrical propesties. The electrical resistivity as low as $4.97{\times}10^{-3}[{\Omega}-cm]$ and the deposition rate of 234[${\AA}$-m/min] were obtained in ZnO:Al film with surface treatment time of 5min, and 20min., respectively.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.96-96
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• 2010

To improve surface wettability, each sample was treated by atmospheric pressure plasma (APP) using dielectric barrier discharge (DBD) system. Argon and oxygen gases were used for treatment gas to modify the $TiO_2$ surface by APP with RF power range from 50 to 200 W. Water contact angle was decreased from $20^{\circ}$ to $10^{\circ}$ with argon only. However, water contact angle was decreased from $20^{\circ}$ to < $1^{\circ}$ with mixture of argon and oxygen. Water contact angle with $O_2$ plasma was lower than water contact angle with Ar plasma at the same RF power. It seems to be increasing the polar force of $TiO_2$ surface. Also, analysis result of X-ray photoelectron spectra (XPS) shows the increase of intensity of O1s shoulder peak, resulting in increasing of surface wettability by APP. Moreover, each water contact angle increased according to increase past time. However, contact angle increase with plasma treatment was lower than without plasma treatment. Additionally, the efficiency of $TiO_2$ photocatalyst was improved by plasma surface-treatment through the degradation experiment of phenol

• 한국전기전자재료학회논문지
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• 제18권2호
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• pp.148-152
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• 2005

Atmospheric low-temperature plasma was produced using dielectric barrier discharge (DBD) plate-type plasma reactor and high frequency of 13.56 Hz. The surfaces of polyimide films for insulating and packaging materials were treated by the atmospheric low-temperature plasma. The contact angle of 67$^{\circ}$ was observed before the plasma treatment. The contact angle was decreased with deceasing the velocity of plasma treatment. In case of oxygen content of 0.2 %, electrode gap of 2 mm, the velocity of plasma treatment of 20 mm/sec, and input power of 400 W, the minimum contact angle of 13$^{\circ}$ was observed. The chemical characteristics of polyimide film after the plama treatment were investigated using X-ray photoelectron spectroscopy (XPS), and new carboxyl group bond was observed. The surfaces of polyimide films were changed into hydrophilic by the atmospheric low-temperature plasma. The polyimide films having hydrophilic surface will be very useful as a packaging and insulating materials in electronic devices.

• 한국대기환경학회지
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• 제23권6호
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• pp.727-733
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• 2007

In this study, a newly developed biotrickling system, combined with a non-thermal plasma reactor, was investigated to effectively treat gaseous contaminants such as VOCs (Volatile Organic Compounds). Three kinds of non-thermal plasmas (NTPs) such as a rod type dielectric barrier discharge (DBD) plasma, a packed bead type DBD plasma and a gliding arc (GA) plasma, were tested and compared in terms of power consumption. The rod type DBD plasma was selected as one for integration with biotrickling system due to its relatively high VOC removal efficiency, low power consumption and low pressure drop. Toluene and xylene as representatives of VOCs were used as test gases. The experiment results showed that the efficiency of biotrickling system was especially very low at the high gas concentration and high flow rate and the removal efficiencies of VOCs were considerably enhanced in the biotrickling system, when the DBD plasma was worked in front of that even at the high gas concentration and high flow rate.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.172-172
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• 2012

Non-thermal plasma has attracted medical researchers, since they showed higher apoptosis rate in cancer cells than normal cells. However, it is hard to conclude general cancer cell specific effect because comparison between normal and cancer cell activities after plasma treatment have not been reported yet. This research proposes a comparison of Dielectric Barrier Discharge (DBD) plasma effect on three normal cells lines and three cancer cells lines. We measured cell number, mitochondria activity (MTS assay) and amount of hydrogen peroxide (H2O2) for three days. The results show that the number of cancer cells decreased more than normal cells following of exposure time. On the other hand, mitochondria activities and amounts of H2O2 increased following of exposure time. In addition, we found that DBD plasma exposure on cell suspension in media and media only illustrated no difference in mitochondria activity, H2O2 quantity, and cell number. Thus, we can confirm higher apoptosis rate in cancer cells which is related to the reactive oxygen species (ROS) generated by DBD plasma. The related molecular mechanisms were investigated further.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.142-142
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• 2013

DBD (Dielectric Barrier Discharge) 대기압 플라즈마를 이용한 a-Si 식각기술에 대한 연구결과를 논하고자 한다. 기술개발의 목적은 대면적 TFT-LCD 혹은 Flexible Display 공정에 적용가능한 대기압 플라즈마 식각장치의 개발 및 검증이다. 실험에서 식각 가스로는 SF6, NF3 등을 사용하였으며, 질소를 기본 가스로 사용하였다. 검증용으로 개발된 대기압 플라즈마 식각 장치는 대기압 플라즈마 장치를 연속적으로 통과하는 in-line system 형식으로 개발되었다. 검증에 사용된 대기압 플라즈마 장치는 300 mm의 방전 폭으로 1세대 LCD기판의 처리가 가능하다. 대기압 플라즈마 식각 기술 개발에서 식각율에 영향을 미치는 변수들은 기판의 온도, 식각가스의 농도, 기판의 이송속도, 기판과 플라즈마 발생장치 사이의 간격 그리고 플라즈마의 인가 전력 등으로 크게 구분지어 생각할 수 있다. 개발된 식각 장치는 SF6를 사용하는 경우 최대 환산 식각율은 500 nm/min 정도이다. 식각 기술에서 중요한 식각 Uniformity와 그와 연관된 a-Si/SiNx 식각 선택비는 사용하는 가스의 Recipe 개발에 중점을 두고 연구를 진행하였다. 식각 Uniformity는 약 7% 이내의 균일도를 갖고 a-Si/ SiNx의 선택비는 10이상의 결과를 얻었다. 또한 식각 가스는 식각 profile에 영향을 줄 수 있는데 대기압 환경에서 형성되는 collisional sheath에도 불구하고 비 등방성 식각이 가능하였다.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2008년도 추계학술대회 논문집
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• pp.273-276
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• 2008

본 연구에서는 Air 및 Oxygen을 원료가스 사용하여 원통형 오존발생기의 오존생성농도를 측정하여 오존발생량 및 오존생성 수율을 계산하였다. 오존발생기에서 발생된 오존을 오존접촉조내의 원수 30[L]에 기상 오존주입량 3[g/$m^3$]를 투입하여 오존접촉 시간의 변화에 따른 오존접촉 실험 6일 후의 녹조 특성을 조사하였다. 오존생성특성 결과 원료가스가 Air인 경우, 최대오존생성 농도는 유량 1.0[$\ell$/min] 에서 5.5[g/$m^3$], 최대오존발생량은 유량 5.0[$\ell$/min] 에서 1.0[g/h]를 얻을 수 있었고, 원료가스가 Oxygen인 경우, 최대오존생성농도는 유량 1.0[$\ell$/min] 에서 51.5[g/$m^3$], 최대오존발생량은 유량 4.0[$\ell$/min] 에서 4.5[g/h]를 얻을 수 있었다. 오존접촉 실험 6일 후에서 원수와 오존접촉시간 1분에서 녹조 현상을 관찰할 수 있었고 나머지 오존접촉시간에 따른 오존 처리 수에서는 녹조 생성을 관찰할 수 없었다.

• Journal of Advanced Marine Engineering and Technology
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• 제40권10호
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• pp.929-934
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• 2016

Plasma technology has long been regarded as a key essential tool in many industrial and technological sectors. However, the advancement of plasma technology in marine applications has not been fully realized yet. Herein, we present a short overview on the recent trends in utilization of plasma technology for air-pollution treatment in marine diesel exhaust. Four non-thermal plasma system, including electron beam dry scrubber (EBDS), dielectric barrier discharge (DBD), electron beam-microwave (EB-MW) plasma hybrid system, and plasma-catalytic hybrid system, are described with emphasis on their efficiency in removals of $NO_x$ and $SO_x$ gases. Non-thermal plasma has the great potential to be an efficient and environmentally compatible technique in simultaneous removals of $NO_x$ and $SO_x$ gases from the exhaust of marine diesel engine in the future.

• 한국대기환경학회지
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• 제27권4호
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• pp.379-386
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• 2011

Catalyst-assisted plasma system with a DBD (Dielectric Barrier Discharge) reactor was used to remove hydrogen sulfide, which is one of the odorous species in this study. The ${\gamma}-Al_2O_3$ and ${\beta}$-Zeolite catalysts impregnated by Ag, Cu and Mn species were employed as catalysts and their $H_2S$ removal characteristics under plasma irradiation were investigated. From the experimental study, we found that the $H_2S$ removal efficiency increases with decreasing space velocity in the system and increasing specific input energy. Furthermore, ${\beta}$-Zeolite catalysts are efficient to remove $H_2S$ than ${\gamma}-Al_2O_3$ catalysts. Especially, the catalysts impregnated by Ag have higher removal efficiency than other catalysts (Cu, Mn).